27-Jun-13

Specifications <1000
Remarks Wafers X Y W-Lb1 P-Ka S-Ka
mm mm cps E10 E10
Sample
1 0 0 145.92 1502.12 3153.59
Test 1 - After WD4 A 2 26 26 143.37 1702.96 2437.87
3 -26 -26 1231.24 1302.18 2736.79

Sample
1 0 0 268.48 1432 2836.6
Test 1 - After WD4 B 2 26 26 148.4 1577.64 2639.75
3 -26 -26 436.7 1509.96 2284.73

Sample
1 0 0 141.3 1283.14 3064.94
Test 1 - After Ontrack
(Normal Flow) A 2 26 26 126.89 1348.57 2573.89
3 -26 -26 776.72 1396 2349.4

Sample
1 0 0 149.88 1331.57 2963.64
Test 1 - After Ontrack
(Normal Flow) B 2 26 26 137.43 1654.83 2089.32
3 -26 -26 794.82 1278.19 2435.63

Sample
1 0 0 199.18 1433.59 3462.89
Test 1 - After Ontrack
(Reverse Flow) A 2 26 26 158.58 1627.21 3197.25
3 -26 -26 1377.72 1574.25 3072.51

Sample
1 0 0 215.2 1299.64 3083.04
Test 1 - After Ontrack
(Reverse Flow) B 2 26 26 152.29 1380.86 2772.52
3 -26 -26 1085.66 1366.39 2704.21

Sample
1 0 0 2958.8 10996.96
Test 2 - After WD4 A 2 26 26 2721.74 10312.19
3 -26 -26 3607.34 9900.58

Sample
1 0 0 2594.87 6835.88
Test 2 - After WD4 B 2 26 26 1289.38 4903.1
3 -26 -26 3019.29 7634.17
 Sample
1 0 0 142.85 1182.18 2385.99
Test 2 - After Ontrack
(Normal Flow) A 2 26 26 133.63 889.18 2216.31
3 -26 -26 1080.42 1298.97 1906.11

Sample
1 0 0 121.43 665.74 1882.58
Test 2 - After Ontrack
(Normal Flow) B 2 26 26 156.14 1008.81 1977.81
3 -26 -26 963.44 770.46 1835.58

Sample
1 0 0 566.72 288.43 2649.24
Test 2 - After Ontrack
(Reverse Flow) A 2 26 26 125.14 990.72 2375.98
3 -26 -26 611.04 973.89 2257.58

Sample
1 0 0 167.91 451.14 2483.76
Test 2 - After Ontrack
(Reverse Flow) B 2 26 26 135.35 1018.1 2129.62
3 -26 -26 852.4 842.19 2449.31

Sample
1 0 0 280.82 ND 3870.44
Test 3 - After WD4 A 2 26 26 364.02 178.29 3771.92
3 -26 -26 252.86 175.21 3450.99

Sample
1 0 0 130.84 ND 3794.04
Test 3 - After WD4 B 2 26 26 147.07 171.55 3390.96
3 -26 -26 1206.34 ND 3257.72

Sample
1 0 0 171.23 < 4117.89
Test 3 - After Ontrack
(Normal Flow) A 2 26 26 142.15 < 3578.7
3 -26 -26 863.08 < 3746.2

Sample
1 0 0 157.88 < 4075.71
Test 3 - After Ontrack
(Normal Flow) B 2 26 26 149.58 < 3892.24
3 -26 -26 896.38 < 3784.9

Sample
1 0 0 152.02 < 3478.33
Test 3 - After Ontrack
(Reverse Flow) A 2 26 26 146.75 < 3801.74
3 -26 -26 1229.33 < 4095.72
 Sample
1 0 0 488.2 < 3611.48
Test 3 - After Ontrack
(Reverse Flow) B 2 26 26 141.69 < 3876.37
3 -26 -26 498.78 < 3821.96

Sample
1 0 0 932.72 191.86 3611.57
Standard Flow - After
WD4 A 2 26 26 163.13 225.47 3741.97
3 -26 -26 895.23 199.05 3478.61

Sample
1 0 0
Standard Flow - After
WD4 B 2 26 26
3 -26 -26

Sample
Standard Flow - After 1 0 0 139.77 ND 3596.33
Ontrack (Normal Flow) 2 26 26 160.67 158.7 3041.92
A 880.5 156.42 3026.03
3 -26 -26

Sample
Standard Flow - After 1 0 0 172.79 ND 3317.41
Ontrack (Normal Flow) 2 26 26 139.86 193.22 3162.01
B 912.12 ND 3120.63
3 -26 -26

Sample
Standard Flow - After 1 0 0 211.8 ND 3216.73
Ontrack (Reverse Flow) 2 26 26 151.07 182.72 2972.63
A 984.45 ND 3171.99
3 -26 -26

Sample
Standard Flow - After 1 0 0 1338.11 ND 3134.77
Ontrack (Reverse Flow) 2 26 26 155.09 194.45 3234.52
B 1210.8 ND 3277.22
3 -26 -26
 <5 <500 <5 <5 <5 <5 <5 <5
Cl-Ka K-Ka Ca-Ka Ti-Ka Cr-Ka Mn-Ka Fe-Ka Ni-Ka Cu-Ka Zn-Ka
E10 E10 E10 E10 E10 E10 E10 E10 E10 E10

ND 7.55 44.46 7.53 < < 7.66 0.31 < 1.77

80.51 ND 26.79 17.39 < < 8.94 ND < 0.93
65.7 5.32 48.23 3.56 < < 6.99 ND < 2.33
39.826667

95.59 ND 57.79 5.72 < < 8.26 0.26 < 1.94

95.34 3.63 55.74 6.17 < < 9.02 0.4 < 2.33
75.8 ND 43.22 4.88 < < 7.97 0.34 < 1.77
52.25

248.01 < 344.4 < < < 4.7 1.63 ND 2.22

259.44 < 160.4 < < < 6 0.63 0.36 2.1
239.87 < 166.04 < < < 5.79 0.77 ND 1.8
223.61333

351.09 < 391.75 < < < 4.8 2.65 0.61 3.37
302.34 < 176.78 < < < 8.79 1.19 0.46 3.4
275.47 < 170.92 < < < 6.58 0.98 ND 2.31
246.48333

334.43 < 250.95 < < 1.89 12.7 2.03 0.83 5.23
299.59 < 161.68 < < 0.84 8.06 0.91 0.34 2.65
263.15 < 171.51 < < 0.94 8.61 2.05 ND 4
194.71333

304.34 < 230.1 < < 3.21 10.28 1.92 5.06 3.1
239.52 < 144.24 < < 0.53 12.66 0.81 0.44 2.61
268.16 < 158.75 < < 1.23 7.29 1.14 ND 2.7
177.69667

197.52 < ND 82.22 < < 41.18 1.28 < 2.15

188.88 < 23.8 77.56 < < 41.34 1.23 < 4.71
158.29 < 31.68 75.3 < < 40.31 1.27 < 10.74
27.74

193.57 < 38.66 52.78 1.87 < 35.68 1.46 < 16.28
132.45 < 39.82 33.29 ND < 28 0.88 < 13.13
125.1 < 56 64.44 ND < 35.56 1.91 < 23.05
44.826667
156.02 < 117.05 < < 0.65 10.95 1.96 0.49 7.52
220.01 < 43.9 < < ND 12.04 0.3 0.48 4.36
245.93 < 123.02 < < ND 17.75 1.01 ND 17.45
94.656667

449.55 < 16.34 < < ND 11.58 1.45 0.36 5.33

479.91 < 54.73 < < 0.44 15.88 1.02 0.76 7.72
473.89 < 46.18 < < ND 12.87 1.02 ND 19.65
39.083333

152.63 < ND < < < 10.89 0.91 ND 0.83

238.46 < 3.75 < < < 10.25 ND 0.55 2.21
231.22 < 4.9 < < < 13.3 ND ND 2.33
4.325

374.4 < ND < < ND 34.33 0.9 0.69 0.64

445.7 < 23.02 < < 1.7 16.89 0.46 1.06 6.81
604.96 < ND < < ND 15.5 ND ND 3
23.02

< < 101.77 1.16 < < 2.76 < < 1.23
< < 113.98 2.26 < < 3.17 < < 1.84
< < 82.65 ND < < 3.05 < < 0.94
99.466667

< < 74.87 1.76 < ND 2.2 ND < 1.71

< < 119.53 1.28 < 0.89 35.01 ND < 0.87
< < 49.72 ND < ND 2.9 0.51 < 2.44
81.373333

237.69 < 202.58 < < < 4.88 2.04 0.42 1.04
347.25 < 170.85 < < < 10.16 0.66 0.43 ND
317.53 < 181.79 < < < 4.67 0.75 ND ND
185.07333

216.29 < 166.13 < < < 3.33 0.47 0.41 1.14
385.94 < 200.31 < < < 3.39 0.78 ND 1.2
420.71 < 190.38 < < < 2.84 0.47 ND 1.15
185.60667

162.61 < 22.87 < < 0.53 4.13 4.04 0.77 1.03
239.48 < 92.66 < < ND 6.36 ND 0.71 1.44
256.43 < 159.54 < < ND 6.05 0.62 ND 1.66
91.69
160.48 < 82.31 < < < 2.84 1.98 ND ND
288.11 < 130.51 < < < 2.27 0.38 0.33 0.88
264.16 < 129.02 < < < 2.16 0.28 ND 1.09
113.94667

104.31 < 98.25 ND < < 4.5 0.33 < 2.11

97.8 < 61.25 10.8 < < 4.28 0.57 < 1.55
ND < 84.02 7.06 < < 4.7 0.39 < 1.75
81.173333

278.53 < 206.61 < < < 4.39 1.78 < 0.66
404.14 < 155.18 < < < 4.03 ND < ND
437.24 < 187.28 < < < 2.67 ND < 0.89
183.02333

513.97 < 179.05 1.1 < < 4.78 0.29 < ND

533.65 < 176.49 ND < < 2.9 ND < 0.79
497.52 < 135.72 ND < < 2.92 0.34 < ND
163.75333

266.41 < 73.29 < < < 3.21 0.53 < 0.87
573.04 < 63.26 < < < 4.62 0.35 < ND
466.84 < 143.35 < < < 5.63 ND < 0.61
93.3

605.79 < 51.37 < < < 3.15 0.78 < ND

622.61 < 64.28 < < < 3.89 ND < ND
584.48 < 138.42 < < < 5.81 ND < 1.05
84.69
 Iron Results (Average)
Steps
Test 1 Test 2 Test 3 Standard Flow
1st Wafer 39.826667 27.74 99.46667 81.1733333333
After WD4
2nd Wafer 52.25 44.82667 81.37333
After Ontrack (Normal 1st Wafer 223.6133 94.65667 185.0733 183.0233333333
Flow) 2nd Wafer 246.4833 39.08333 185.6067 163.7533333333
After Ontrack 1st Wafer 194.7133 4.325 91.69 93.3
(Reverse Flow) 2nd Wafer 177.6967 23.02 113.9467 84.69
 WD4
Normal Flow

Wafer A

Wafer B
 Ontrack
Normal Flow Reverse Flow
 WD4
Normal Flow

Wafer A

Wafer B
 Ontrack
Normal Flow Reverse Flow
 WD4
Normal Flow

Wafer A

Wafer B
 Ontrack
Normal Flow Reverse Flow
 WD4
Normal Flow

Wafer A

Wafer B
 Ontrack
Normal Flow Reverse Flow