Beruflich Dokumente
Kultur Dokumente
EHS-00017-F1 R17
Checklist
Date of
Applicant:
Commissioning:
Name of Organization:
Tool Owner:
/ /
Code
Responsible Parties Full Name Initials Phone #
(R)
Installation Coordinator
IC
Tool Owner
TO
Tool Engineer/
TE/EE
Equipment Engineer
CNSE
Environmental, EHS
Health & Safety
CNSE Facilities Tool
-
Hook-up Manager
This checklist is for use in approving the completed installation of tools using Hazardous
Production Materials (HPM) and equipment for commissioning to be used in the CNSE
Facilities. The checklist is divided into two (2) parts. Part 1 covers the electrical, mechanical,
non-HPM chemicals and facilities release. Part 2 covers the release of all Hazardous
Production Materials and Physical Hazards for tool/equipment operation. This checklist
must be completed prior to releasing the tool/equipment to the tool owner for process
transition and operational use.
When the Part 1 Checklist is fully and successfully completed, all electrical power, vacuum, non-HPM
chemical and water facilities may be activated. All other systems associated with the tool/equipment (i.e.
physical, HPM chemical, radiation, or other hazards) must remain completely locked out until installation
is complete and the Part 2 Checklist is approved.
A. Electrical Matrix
NA
List all sources of electricity to the tool/equipment (IC)
Name of Panel / Feeder Voltage (V) Breaker
Current Lockable
List Tested & Phase Size
(A) Disconnect?
Voltage Verified? (A)
5. Is a
X X
Ground Fault Circuit Interrupt (GFCI) system installed & operating per design,
where applicable? N/A
6. If installed in hazardous classified locations or exposed to flammable
vapors, are all electrical components rated for hazardous locations in accordance X X
with ICC Electrical Code class, group & division per design?
7. Is the tool connected to an Uninterruptible Power Supply (UPS unit & tool
X X
labeled accordingly)?
N/A
8. Are all support systems (i.e. vacuum pumps, chillers, etc.) fed from the tool X X X
or sub-panel properly connected and labeled?
9. Are the following items labeled correctly and clearly? (labeling requirements
in parentheses)
a. Main power disconnect (On/Off, tool ID(s) that it supplies, voltage, X X X
phase, current, supply circuit #, location / ID of supply sub-panel)
b. Supply electrical sub-panel (tool identification that it supplies) X X X
c.All tool disconnects (On/Off, tool ID(s) that it supplies, voltage, phase, X X X
current, supply circuit #, location / ID of supply sub-panel, type of power (e.g.
10. Are all unused openings in electrical panels or enclosures properly closed? X X X
5. Are all removable service access panels either interlocked or require a tool X X
for removal?
6. Do all viewing portals attenuate to class 1 or less? X X X
G. List All Utilities (Non-HPM Gas &/or Liquid, Chiller, Process Vacuum, CDA, Water, Facility Lines,
NA
or Natural Gas Lines, etc.) Needed For Part 1 Sign-off
Utility Needed Labeled? Leak Checked? Comments:
Yes No Yes No
Yes No Yes No
Yes No Yes No
Yes No Yes No
Yes No Yes No
Yes No Yes No
Yes No Yes No
Yes No Yes No
Yes No Yes No
Yes No Yes No
IC TE/EE EHS
1. Are all non-HPM gas &/or liquid, chiller, PVAC, CDA, water, facility lines or natural X X X
gas lines, etc. clearly labeled (contents & direction of flow) at every change of
direction, before & after every structural penetration, and at regular intervals
Printed copies are considered uncontrolled. Verify revision prior to use.
3. If the tool installation alters the layout of the cleanroom space, has a new X X
evacuation map been submitted to CNSE Facilities EHS? N/A
3. Have Tool Installation applied process control locks to each of the output lines/sticks? X X
(write in number of locks applied)
4. Have EHS applied process control locks to each of the output lines/sticks? (write in X
number of locks applied)
NA N. TGMS Controls & Matrix IC TE/EE EHS
1. Have TGMS/AAC interlock signals been provided by the tool engineer to the TGMS X X X
contractor?
2. Has the approved TGMS matrix been submitted and been signed by all of the appropriate X X X
parties?
X X X
3. Is a copy of the approved signed TGMS matrix included in this greenbook?
3. Are there any additional hazards, equipment or conditions that the ERT need X X X
to be trained on?
a. If applicable has a SOP been developed to cover this training?
b. If yes has such training taken place for each shift?
D1 Yes No N1 Yes No D2 Yes No N2 Yes No
4. Are there confined space hazards associated with the tool's operation or X X X
maintenance? Has a process been developed for entering such a confined space?
5. Has the S2 noise survey verified that the equipment operates at <80 dBA? If X X
not, has a field survey been completed to determine impact to the area?
6. Is the work area adequately illuminated? X
7. Are there any specially negotiated working conditions? If so, please describe.
X X
2. Are all exhaust ducts labeled with contents and direction of flow at every
change of direction, before & after every structural penetration and at regular X X X
intervals according to CNSE Facilities labeling guidelines?
3. Has a ventilation test and balance been completed and submitted to EHS and X X X
are all dampers marked and locked?
4. Do all ventilation systems that handle HPMs have continuous monitoring
X X
devices (i.e. photohelic, magnehelic, etc.) installed?
N/A
a. Are all monitoring devices in the plenum functional, secured, properly X X X
set & labeled with set points?
b. Are all monitoring devices at the tool functional, secured, properly set & X X
labeled with set points?
5. Are blast gates on all ventilation systems locked? X X X
6. Has a loss of exhaust test been performed to verify that the tool is placed in a
X
safe condition upon loss of exhaust ventilation flow?
N/A
7. Have Industrial Hygiene Ventilation Assessments (capture velocity) been X
completed for all areas where hazardous chemicals may be exposed to the open
environment (i.e. wet stations, lab hoods, wet chemical dispense cabinets, etc.)?
N/A
8. Are local exhaust systems provided for maintenance activities? If so, please X X
describe. N/A
Notes and Comments:
3. Are all vacuum Pump EMOs and interlocks functional (e.g. nitrogen purge, X
back-pressure, temperature, cooling water flow) and documented?
4. Are all vacuum pumps that convey toxic gases contained within an exhausted X
enclosure? N/A
5. Are all Nitrogen and water flow indication devices functional? X X
e.Bonding / grounding & provided with an inert pressurizing agent (for flammable X X
chemical containers)?
7. Are all access areas to pressurized lines shielded / interlocked to prevent X X X
potential exposure to chemistries?
8. Are safety showers / eye wash stations located within 10 seconds travel or 50
feet of chemical use or closer depending on the degree of hazard associated with X X
the chemical(s) used? (ANSI Z358.1-1990)
N/A
6. Are all enclosures (e.g. gas cabinets, VMBs, GIBs, tool chambers, tool gas X X X
boxes) properly labeled with approved HAZCOM labels?
7. Are all leak points for HPMs exhausted and / or fitted with gas detection per
X X
the design?
N/A
8. Have all gas delivery systems internal to the tool been leak checked and X X
documented?
9. Have all gas delivery systems external to the tool been leak checked and X X
documented?
10. Has leak detection checklist(s) been completed and submitted to EHS? X X X
11. Are all valves and fittings on HPM gas systems contained within a ventilated X X X
enclosure per design? N/A
12. Are all gas cabinets vent lines located after the blast gate, on a lateral or at X X
least five duct diameters downstream from a TGMS sensor?
13. Have PLC communications systems been properly:
a.wired and connected to the tool. X X
b.programmed & verified to send correct signals to the correct valves per
design?
14. For new gas cabinet installation, has the following information been submitted
to the EHS department to calculate HPM allowances for each control area? X X X
Gas cylinder type: # of cylinders:
Size: pounds/cylinder OR cubic feet/cylinder
6. Has the gas cabinet vent line been placed at least 5 duct diameters upstream X X X
from the gas detectors?
7. Have newly added detection points been added to TGMS site summary and X X X
posted at the TGMS touch screens?
8. Is a map of the new detector locations available and posted at the AAC? X X X
11. Is the completed and signed final TGMS matrix attached and has a copy been X X X
submitted to EHS?
N J. Drain Matrix
A
Material of Leak Checked Piping Labeled Properly
Drain System (TE)
Construction (TE) (if required) (IC) (IC)
N J. Drain Matrix
A
Material of Leak Checked Piping Labeled Properly
Drain System (TE)
Construction (TE) (if required) (IC) (IC)
3. Are HPM drain lines double contained where required? X X X
5. Has all drain waste and vent piping been tested for proper performance via X X
operation of the process equipment?
6. Are appropriate waste receptacles/containers/units available in the work area X X
and properly labeled?
7. Are segregated satellite collection locations present and labeled as needed? X X
(e.g. arsenic or lead waste)
8. Is the workstation provided with an approved means of containing or directing
spills to a drainage system per design (i.e. slope or other approved means of spill X X X
containment)? (NYSFC 1805.2.2.2)
3. Are lab hoods that use flammable / combustible liquids serviced internally by a X X X
fire sprinkler head and added to the CNSE laboratory hood inventory?
4. For Wet Stations (all wet chemical processes), are sprinklers installed on the X X X
bay ceiling in front and behind the tool, providing coverage to all areas of the tool?
5. Do all workstations of combustible construction have a sprinkler head installed
in the exhaust duct / plenum within 2 feet of the point of the duct connection or the X X X
connection to the plenum? (NYSFC 1803.10.1.1)
6. Are heat detectors/sprinklers installed in all combustible ducts & non-
X X X
combustible ducts conveying vapors or gases in the flammable range (>10% LEL)
that are ≥ 10" in diameter. (NYSFC 1803.10.1.1)
7. Has all fire suppression agent (i.e. sprinkler, CO2, etc.) delivery piping leading X X X
into enclosed equipment been pressure tested?
8. Has it been verified that fire sprinkler flow patterns within enclosed equipment X
are unobstructed?
9. Are fire suppression/detection systems installed within enclosed equipment
X
where necessary and have they been tested and verified functional, providing the
required discharge density?
10. Are all sprinklers that service the area occupied by this equipment accessible X X X
for periodic inspections?
N Q. Interlocks
N/A TE/EE EHS
A Note: This section applies to all interlocks internal to the equipment.
1. Has an interlock matrix (indicating what is activated or shutdown when each
interlock is activated) been provided for each of the following interlocks?
a.Exhaust flow (e.g. photohelic)? X X X
e.Pneumatic / Hydraulic? X X X
X X X
g. Other?
2. Have all interlocks been tested and verified to be operational as indicated on X X X
the interlock matrix and has such documentation been submitted to EHS?
3. Have any changes been made to the tool or operating system that may have X X X
affected the functioning of any interlocks?
a.If so, have all interlocks been re-tested after every such change & verified to X X X
be operational?
4. In case of alarm, does the local gas detection system have interlocks to stop X X X
the gas flow into a gas cabinet?
5. Are other interlocks connections from the tool or process chamber/modules
X X X
available for connection to an area alarm control panel? If yes, are these interlocks
connected to the area alarm control panel?
Part 2 Punchlist
List all deficiencies that do not affect the safety of the installation. A Punchlist item may not compromise safety.
Punchlist items as well as Deficient items must be completed prior to Part 2 approval.
Issue Responsibility Completion Date
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