Beruflich Dokumente
Kultur Dokumente
Register / Log In
UPCOMING
EVENTS
Combine ANSYS
Simulation IC Knowledge
Capabilities...
March 31 @ 11:00 AM - IEDM 2017 – Controlling Threshold
12:00 PM Voltage with Work Function Metals
by Scotten Jones on 01-26-2018 at 7:00 am
Prevent and Categories: FinFET, Foundries, IC Knowledge
6 Comments
Eliminate IR drop
and Power...
As I have said many times, IEDM is one of
March 31 @ 11:00 AM -
12:00 PM the premier conferences for semiconductor
technology. On Sunday before the formal
The Surface
Preparation and conference started I took the “Boosting
Cleaning... Performance, Ensuring Reliability, Managing
April 1 - April 2 Variation in sub-5nm CMOS” short course.
SEARCH
metals to control threshold voltages. In this
SEMIWIKI article I will discuss this emerging process
technology.
R EC E N T I C
Introduction
K N OW L E D G E
ARTICLES Simply put, the threshold voltage (Vt) of a
MOSFET is the voltage that is required to
SPIE 2020 – Applied
Materials Material- turn the transistor on. As optimization of
Enabled Patterning power and performance have become
by Scotten Jones March
increasingly important for mobile devices,
13, 2020
the number of different threshold voltages
LithoVision – available on a process have proliferated.
Economics in the 3D
Era
Where one or two threshold voltages were
by Scotten Jones March once typical, today we are seeing four or
4, 2020 even ve threshold voltages. Multiple
threshold voltages allow designers to select
https://semiwiki.com/semiconductor-services/ic-knowledge/7259-iedm-2017-controlling-threshold-voltage-with-work-function-metals/ 1/8
3/31/2020 IEDM 2017 – Controlling Threshold Voltage with Work Function Metals – SemiWiki
IEDM 2019 – Imec the best option for each section of a design
Interviews trading-off power and performance.
by Scotten Jones January
21, 2020
Setting Threshold Voltage (Vt)
IEDM 2019 – IBM and The Vt of a MOSFET is determined by:
Leti
by Scotten Jones January
Interface charges – because interface
8, 2020
charges can vary over time due to traps
IEDM 2019 – Applied charging and discharging, it is generally
Materials panel EUV
Recap desirable to minimize interface charges
by Scotten Jones and they are not used to “tune” the
December 23, 2019 threshold voltage.
SPIE Advanced
Lithography
Conference – Imec
and Veeco on EUV
by Scotten Jones April Figure 1. Threshold voltage versus oxide
19, 2019 thickness at a xed channel doping level.
SPIE Advanced
Lithography Channel doping – for many years the
Conference – ASML main method of producing multiple Vts
EUV Update
on the same process has been to use
by Scotten Jones March
23, 2019
masked implants to dope selected
channel regions. Figure 2 illustrates Vt
SPIE Advanced
versus channel doping. There are two
Lithography
Conference 2019 main issues with channel doping to set
Overall Impressions Vts. The rst is that doping the channel
by Scotten Jones March
reduces mobility and performance.
5, 2019
Secondly, at very small dimensions there
LithoVision 2019 – are only a few dopant atoms in the
Semiconductor
Technology Trends channels and small changes in the
number of dopants referred to as random
https://semiwiki.com/semiconductor-services/ic-knowledge/7259-iedm-2017-controlling-threshold-voltage-with-work-function-metals/ 2/8
3/31/2020 IEDM 2017 – Controlling Threshold Voltage with Work Function Metals – SemiWiki
2018 Semiconductor
Year in Review
by Scotten Jones January
4, 2019
https://semiwiki.com/semiconductor-services/ic-knowledge/7259-iedm-2017-controlling-threshold-voltage-with-work-function-metals/ 3/8
3/31/2020 IEDM 2017 – Controlling Threshold Voltage with Work Function Metals – SemiWiki
https://semiwiki.com/semiconductor-services/ic-knowledge/7259-iedm-2017-controlling-threshold-voltage-with-work-function-metals/ 4/8
3/31/2020 IEDM 2017 – Controlling Threshold Voltage with Work Function Metals – SemiWiki
https://semiwiki.com/semiconductor-services/ic-knowledge/7259-iedm-2017-controlling-threshold-voltage-with-work-function-metals/ 5/8
3/31/2020 IEDM 2017 – Controlling Threshold Voltage with Work Function Metals – SemiWiki
https://semiwiki.com/semiconductor-services/ic-knowledge/7259-iedm-2017-controlling-threshold-voltage-with-work-function-metals/ 7/8
3/31/2020 IEDM 2017 – Controlling Threshold Voltage with Work Function Metals – SemiWiki
F I N F E T , FO U N D R I E S , I C
K N OW L E D G E
1 0 N M , 7 N M , G LO B A L FO U N D R I E S ,
IBM, IEDM, SAMSUNG, TSMC
Comments
https://semiwiki.com/semiconductor-services/ic-knowledge/7259-iedm-2017-controlling-threshold-voltage-with-work-function-metals/ 8/8