0.

1 Turbo backing pump calculations - proper backing

pump selection is critical to turbo pump operation.

0.1.1 Two values must be known, calculated or closely estimated be-

fore backing pump calculations can be performed. 1) The gas
load from the system/process, OR the maximum throughput
of the pump is needed. (these values are di¤erent from pump-
ing speed of the turbo) 2) the maximum continuous foreline
pressure is needed

The gas load or maximum throughput is often given in sccm, a mass ‡ow rate,
and this number must be converted into something more conducive to vacuum
units

torr liters
convert sccm to seconds

cc3
sccm = at STP
minute
STP = 760 torr and 68 F

now using the following ratios

1 liters 1 minute
and
1000 milliliters 60 seconds

we can start our general method of conversion using the variable x to repre-
sent the gas load or maximum throughput of the pump - which, with any luck,
the manufacturer will publish or the customer will provide.

(x sccm) (760 torr)

(1000 milliliters) (60 second)

this results in a mass ‡ow rate in units of torr liters

seconds . Once again, x can be
the gas load from the system or the maximum throughput of the pump. This
result is then used in the following equation

mass ‡ow rate in torr liters

seconds
L
= foreline pressure in torr
speed of backing pump in sec

1
 The maximum throughput may also be given in mbar liters
seconds , if this is the case,
then no conversions are necessary and we arrive at the following equation

mass ‡ow rate in mbar liters

seconds
L
= foreline pressure in mbar
speed of backing pump in sec

let’s try a real world example using a Pfei¤er HiPace 300. Pfei¤er
publishes specs for both maximum foreline pressure and maximum
gas throughput

maximum foreline pressure = 20 mbar

mbar liters
maximum gas throughput = 14
seconds
plugging these values into previous equation

mass ‡ow rate in mbar liters

seconds
L
= foreline pressure in mbar
speed of backing pump in sec

14 mbar liters
seconds
L
= 20 mbar
speed of backing pump in sec
mbar liters
14 seconds L
= speed of backing pump in
20 mbar sec
L L
speed of backing pump in = 0:7
sec sec
L
0:7 = 1:5 cf m
sec

So can a 260 l=s turbo pump really be backed by a 0:7 l=s diaphagm pump?
The answer is yes, if running the pump at it’s maximum foreline pressure is
desirable (hint - the only time it’s desirable to run a pump at or near it’s
maximum foreline pressure is if there’s money in the budget for a new pump).
Also, such a small backing pump would more than likely not be adequate to
evacuating the chamber to a pressure at which the pump could be started. Let’s
run the same conversion, but instead of using the maximum foreline pressure
let’s use a more conservative value, say 1 mbar. Maximum ‡ow rate remains
the same per the published manufacturers specs

mbar liters
maximum gas throughput = 14
seconds

2
 but the foreline pressure is now 1 mbar

mass ‡ow rate in mbar liters

seconds
L
= foreline pressure in mbar
speed of backing pump in sec

14 mbar liters
seconds
L
= 0:1 mbar
speed of backing pump in sec
mbar liters
14 seconds L
= speed of backing pump in
1 mbar sec
mbar liters
14 seconds L
= 14
1 mbar sec
L
14 = 30 cf m
sec

This, 30 cf m; seems like a much more reasonable number for a 260 l=s pump.
a 30 cf m will also be far more e¢ cient at roughing out the chamber.