Piezoelectric Motor Driver: Design and Evaluation
Edin Golubovic Zhenishbek Zhakypov
Sabanci University Sabanci University
Istanbul, Turkey Istanbul, Turkey
edin@sabanciuniv.edu zhakypov@sabanciuniv.edu
Abstract—This work focuses on the design of driver for
PiezoLegs actuator used for high precision positioning purposes.
Motor is driven with the set of periodical voltages with known
frequency, amplitude and phase shift between the phases. Motor’s
operation has been investigated in detail and clear relationships
between the amplitude and phase shifts between the phases and
motor step size have been established. According to the motor
analysis, set of design requirements for the design of driver
is given. Particular solution meeting these requirements and
satisfying the given design constraints is presented. Driver is
experimentally evaluated for power consumption and analyzed
in frequency domain, it’s performance is compared to the
performance of a commercially available driver for the same
motor. Designed driver shows improved performance.
I. I NTRODUCTION
In the past few decades the usage of miniaturized parts and
devices increased in many industrial and research applications.
Among many common characteristics of equipment used to
manufacture miniaturized devices, high precision positioning
is one of the most crucial. Conventionally electromagnetic
actuators have been used to satisfy the needs of precise posi-
tioning. However, electromagnetic actuators usage has reached
saturation in certain types of high precision applications. On
the other hand, piezoelectric actuators proved to be good
alternative, mostly due to their advantageous properties for
low energy, low cost, high precision positioning systems.
Piezoelectric materials can be manufactured to produce dis-
placement, in the desired direction, as a result of inverse
piezoelectric effect. They can produce fast and smooth position
changes down to sub-nanometer range, have relatively high
stiffness and can produce large forces, however their motion
is characterized with short strokes. Nevertheless, the design
of piezoelectric motor can be made such that macroscopic
strokes are achieved by repeating motion of piezoelectric
elements with short strokes. According to the most common
classification of piezoelectric motors, there are two types;
quasi-static and ultrasonic motors. In quasi-static motors the
main drive element is usually moved by actuator in cycles such
as grip, move, release and return For applications including
controlled positioning at low and medium speeds, quasi-static
piezoelectric motors are of greater interest. PiezoLegs [1]
motor is one of quasi-static motors that had gained much
attention recently.
Patents regarding PiezoLegs actuator principle of operation,
construction method and method of driving can be found
[2,3]. In [4-8] authors present details on the construction and
978-1-4799-0224-8/13/$31.00 ©2013 IEEE 3964
Tarik Uzunovic Asif Sabanovic
Sabanci University Sabanci University
Istanbul, Turkey Istanbul, Turkey
tuzunovic@sabanciuniv.edu asif@sabanciuniv.edu
operation of miniature piezoelectric bimorph actuator. Rela-
tions between driving voltage amplitude, driving frequency
and phase shift between signals are discussed and operation of
actuator has been experimentally verified. The development of
a linear hybrid type piezoelectric motor model is discussed in
[9]. Significant design considerations regarding piezoelectric
actuator (including material choices, shear loads on piezoelec-
tric materials, and contact surface interaction) are discussed. In
general, models of piezoelectric actuators/motor are based on
the equations describing mechanical and electrical behavior
of piezoelectric material [10] and specific geometry of the
actuator/motor under consideration. Models describing static
and dynamic behavior of the motor under consideration [11-
14] are used for the analysis of the behavior of motor and
optimization of its design. PiezoLegs motor is used in high
precision positioning application [15-19]. Positioning in the
nanometer region is achieved and this motor is proven to be
reliable option for precise positioning applications.
There are few commercially available drivers for PiezoLegs
Motor [20,21]. Essentially all of the existing drivers have
two main problems; power consumption - due to the drivers’
linear amplifier structures, more power is consumed by am-
plification elements than it is needed for motor operation;
random voltage waveform generation - existing drivers offer
preprogrammed driving voltage waveform shapes, however,
custom waveforms can’t be implemented. Both of these prob-
lems can be resolved by driver design involving switching
converter. Different switching converter topologies have been
employed to drive piezoelectric elements, including flyback
[22], buck-boost [23], push-pull [24] and converters based on
piezoelectric transformers [25].
In this paper the design of driver for PiezoLegs, quasi-
static piezoelectric type motor, is described. Performances of
both designed driver and commercially available drivers are
experimentally compared in open loop run. Average power
consumption of the drivers is analyzed and some insight into
frequency domain response is given.
The rest of the paper is organized as follows, in the
next section driving principle of the motor is described and
kinematic analysis of the motion of the motors elements is
given. Section III contains the details about the driver design.
Experimental results are shown in Section IV and the last
section contains the conclusion and future work.
 II. L INEAR P IEZOELECTRIC M OTOR

A. Operation Principle of Motor

Piezoelectric motors are constructed according to different
driving mechanisms. One alternative for construction of such
mechanisms is the use of phase shifted operation of different
groups of actuators. In other words, one group of actuators is
brought into mechanical contact with moving piece (grip), then
moved in desired direction (move), afterwards this group of
actuators releases the moving piece (release) and returns to the
initial position (return). As soon as the release operation of the
first group of actuators occurs, the other group of actuators is
brought into grip position. If the grip - move - release - return
action is denoted as a ”step”, then moving piece is brought into
desired location by repetition of step at the desired frequency.
Piezoelectric motor under consideration in this work consists
of four bimorph piezoelectric stacks (actuators), which are in
further text referenced to as legs. Single leg consists of two Fig. 1. PiezoLegs Motor
mechanically coupled but electrically isolated piezoelectric
stacks. Each of the stacks of single leg is supplied with
separate voltage signal. Sum of the two instantaneous voltages given by
applied to the leg causes the elongation/contraction of the 3d33 L2
∆x = (V1 − V2 ) (1)
leg and non zero difference of the voltages causes the leg | 4tD
{z }
to deflect in a single axis. If periodic voltage is applied to the K1
leg, it performs a periodic movement in the plane. During the
d33 L
operation of the motor, legs establish contact with a freely ∆y = (V1 + V2 ) (2)
movable rod and drives the rod due to the friction force t }
| {z
formed at the contact. The rod is pressed against the legs K2

with the preload springs, and a pair of roller bearings allows In equations above ∆x and ∆y are the static deflection and
the movement of the rod. In the current design of PiezoLegs elongation of the leg respectively, d33 is piezoelectric charge
motor, the legs are driven in the pair of two. Motor can be constant, L is the length of leg, D is the half width of the leg,
simply seen as stepper motor. During a walking step only one t is the thickness of piezoelectric layer, V1 , V2 are the driving
set of legs is in friction contact with the movable rod. Most voltages applied to the stacks.
basic way of driving the actuator is with periodical voltage Equations 1- 2 describe the tip trajectory of the leg, i.e.
waveforms. Due to the ease of implementation sinusoidal they relate driving voltages to the position of the tip of the
voltages are used in this work. Sine signal is applied to one leg. However it must be noted that the driving principle of the
side of the pair of legs and phase shifted sine to the other side. actuator is more complex since it is based on the interaction
The other pair of legs is driven with inverse sine and inverse between the legs and rod. Normal and frictional forces have
shifted sine signals (180o phase shift from the first pair driving to be calculated and piezoelectric material hysteresis has to be
voltages). Motor and all of its main components are shown in included in the model.
Fig. 1. Static relationships between voltages and the tip of the leg
movements are now used to derive the step size dependence on
B. Leg Kinematics, Step Size and Velocity Dependence on the amplitude of the driving voltages and the phase difference
Driving Voltage between voltages applied to different stacks of the leg. Since
actuator legs should be moving in a form of closed periodic
Mathematical model describing deflection and elongation trajectory to achieve motion, voltages applied to the legs can
of piezoelectric bimorph can be derived using basic mechan- be defined as:
ics principles of static equilibrium and strain compatibility
A
between layers of bimorph. The model is developed on the V1 (t) = (1 + sin(ωt) (3)
basis of inverse piezoelectric effect and Euler-Bernoulli theory 2
of elastic deformation. The leg is considered as cantilever A
V2 (t) = (1 + sin(ωt + φ) (4)
and only forces generated by inverse piezoelectric effect are 2
included. This approach to modeling of bimorph actuator is A
similar to the ones described in [26, 27]. Intermediate steps of V3 (t) = (1 + sin(ωt + π) (5)
2
model development are skipped in this paper and final results A
showing the static deflection and elongation of the leg are V4 (t) = (1 + sin(ωt + π + φ) (6)
2

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Voltages V1 and V2 are applied to one pair of the legs and 1500
voltages V3 and V4 to the other pair. There is a phase shift of
π radians between the pair phase voltages which guaranties

Step Size (nm)

that at least one pair of the legs is always in contact with the 1000

rod. In other words, if we consider the trajectory of the tip Measured

of the leg as an ellipse in x-y plane then while one pair is 500 Approximated
moving on the path of the upper half (above center line) of
ellipse, other pair is completing the lower path of the ellipse.
0
In order to define the step size it is enough to use only one pair 4 6 8 10 12 14 16 18 20 22
Amplitude (V)
voltages V1 and V2 . Step size depends on difference between x-
dimension minimum and maximum values (xmin and xmax ). Fig. 2. Dependence between step size and voltage amplitude
These min/max values can be found as extreme values of the
function x(t). Extreme values and difference (step size - σ)
are given as:
φ 1500
xmax = K1 Asin( ) (7)
2

Step Size (nm)

φ 1000
xmin = −K1 Asin( ) (8)
2 Measured
Approximated
φ 500
σ = 2K1 Asin( ) (9)
2
The difference in Eq. 9 is amplitude and phase dependent, 0
10 20 30 40 50 60 70 80 90
and frequency independent. Frequency of the driven voltages Phase ( °)
defines velocity of the rod, because it defines number of elliptic
trajectories (i.e. number of steps) that leg tip makes in period Fig. 3. Dependence between step size and voltages phase shift
of time.
6
Even though Eq. 9 describe the deflection of the legs, the 5
x 10
rod movement will be possible only if there is enough force
generated in the vertical direction. The force generated in the 4
Velocity (nm/s)

vertical direction has to be sufficient to counteract preload

3
force applied to the rod by preload springs. It is important that
this condition for the motion is true only when the actuator is 2 Measured
Approximated
not loaded by an external force. The normal force at the tip
1
of the leg depends on the maximum elongation of the leg’s
tip in vertical direction. If normal force is too small, then the 0
0 500 1000 1500
actuator rod will not be moving as desired, even if the legs are Frequency (Hz)
moving. Measurement results show that driving voltages with
low amplitude cannot produce moving of the rod, because the Fig. 4. Dependence between velocity and frequency
forces that legs are producing to a rod are too small. Maximum
elongation can be found as a maximum value of the function
y(t). If we look at y(t) as a function of one variable, it can Next, dependence between phase shift and step size is
be easily found that its extreme values are: established experimentally. In these experiments frequency and
φ amplitude were constant (200 Hz and 20.88 V). Results are
ymax = K2 A(1 + cos( )) (10) shown in Fig. 3.
2
φ In the last part of this section measurement results that
ymin = K2 A(1 − cos( )) (11) give relationship between driving voltages frequency and rod
2
velocity are provided. In these experiments amplitude and
Series of experiments were performed to measure step size
phase shift were constant (20.88 V 90o ). Measurement results
change with varying amplitude and phase difference of driving
are shown in Fig. 3. It must be noted that step size showed
voltages. Basic curve fit was performed to obtain analytical re-
negligible variations due to frequency change. Average step
lationships. The results are given below. Dependence between
size was 1546nm.
frequency and rod velocity was also analyzed.
First dependence between amplitude and step size was III. D RIVER D ESIGN AND I MPLEMENTATION
established. In these experiments frequency and phase shift
were constant (200 Hz and 90o ) while the amplitude is varied. A. Design
Results are shown in Fig. 2. Results confirm that low voltage In the previous section basic principles of operation of linear
amplitude (consequently low normal force) will not produce piezoelectric motor were outlined together with relationship
rod moving. between voltage supplied to the terminals of motor and step

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 Fig. 5. Driver Design
size - velocity change of the motor. As a conclusion of that
analysis the main design requirements and design constraints
for the design of piezoelectric motor driver are drawn. In this
section design requirements and constraints are given and one
particular design solution is described in detail.
Commercially available driver for PiezoLegs motor has
some inherit disadvantages; the power dissipation of the driver
circuit is relatively large comparing to the total power con-
sumption of motor; although the motor is used in miniature
applications the size of the driver circuit is relatively large
comparing to motor itself; the cost of the driver is higher than
the cost of motor; driver operates in two modes, stepping
and bending, operation of the driver in bending mode is
characterized with slow dynamic response due to the driver
implementation and ”glitches” in the movement. The design
requirements of the piezoelectric motor driver are based on
the improvement of the above mentioned disadvantages of the
commercial driver. Design requirements of the driver can be
summarized as following:
• Low power consumption
• Small size
• Large bandwidth of operation
• Low cost
Next to the design requirements it’s important to note the
design constraints:
• Ability to supply voltage to 4 independent phases
• Ability to supply arbitrary waveform voltages
• Power supply voltage Vs ≤ 48V
• Operating phase voltage 0V ≤ Vph ≤ Vs
• Total power supply current ≤ 0.1A
• Operating Frequency Range ≥ 3000Hz
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Taking into consideration stated design requirements and
constraints one particular design of the driver is depicted in the
Fig. 5. In the heart of the design lay four identical voltage step-
down switching converters with dual stage low pass filters.
This type of driver is able to build up the field energy in
the actuators of motor with minimal power losses. In general
the power efficiency of these kind of devices, namely buck
converters, is known to be ≥ 95%.
Voltage supply supplies the circuit with the constant voltage
Vs (≤ 48V ). The complimentary combination of two transistor
switches Q1n and Q2n is responsible for the output voltage
regulation. To charge the actuator, Q1n is closed, Q2n is open,
and current ipn flows via inductors to the actuator and as a
result output voltage rises. Discharging operation is done when
switch Q2n is closed, Q1n is open, and actuator stores part of
its field energy in the inductors and desired output voltage is
reached. PWM technique is used to accomplish switching.
Following the steady state operation theory of the step-down
converter, writing the volt-second balance equations for the
inductors and assuming that the switching period Ts is short
in comparison with frequency of sources and sinks, voltage
transfer function of the converter can be derived. Since this is
well known derivation, only the final result is given here:
Vn (t)
= Dn (t) (12)
Vs
where subscript n denotes the phase in consideration and
Dn (t) denotes duty cycle for the given phase. As seen in the
previous section the legs of the piezoelectric motor are driven
in such a way to accomplish walking like actuation. Each leg is
supplied with two phases shifted periodic waveforms. In this
work the sinusoidally shaped waveforms are used, however 6
the driver is capable of supplying any waveform shape. If 5

Average Input Power (W)

we assume that waveform is given by Vnref (t) then the duty
4
modulation function takes the form of P1 avg
3
P2 avg
Vnref (t)
Dn = . (13) 2
Vs
1
There is an implicit assumption that the function Vwref (t)
0
has minimum value zero and maximum value of Vs . Desired 0 1 2 3 4 5 6
Time (s)
waveform time dependent function can be generated by an
embedded controller that should be part od the driver. Fig. 6. Average power consumption of the commercial driver P 1avg and
Switching converter designed in this manner assures the low designed driver P 2avg
power losses, small size due to the high frequency operation,
low cost and fast response inside the operation bandwidth. 50

B. Implementation 40
Commercial

From the implementation point of view the circuit from Fig.
5 can be realized by 4 half bridges using discrete or integrated
power electronic components. Despite the fact that modern
power semiconductors can make electrical power conversion
very efficiently, there are certain advantages of easy integration
and circuit board layout optimization when using integrated
power electronic components. The cost of the two options is
comparable in the case of this particular driver.
In the heart of piezoelectric motor driver lays STMicroelec-
tronics L6206, that integrates two independent power MOS
full bridges designed for motor control applications. Each leg
of the full bridge can be controlled separately, supply voltage
and output current reach the values as high as 52V and 2.8A,
which makes this components ideal for the design of driver.
The component is available in PowerDIP24 package that has
small outline and easy cooling access through ground pins (on-
board copper area cooling). L6206 features thermal shutdown
and a non-dissipative over-current detection on the high side
Power MOSFETs plus a diagnostic output that can be easily
used to implement the over-current protection through voltage
reference. This particular component is advantageous from
power consumption point of view, with each Power MOS
having typical Rdson = 0.3Ω and intrinsic fast freewheeling
diode. Gate drivers are integrated and accept single PWM
signal which is integrally used to generate two complimentary
PWM signals with cross conduction protection (typical dead-
time of 1ms). L6206 requires only supply voltage to be
powered and few external components to implement charge
pump circuit necessary for the bootstrap voltage need by
the gate drivers. The driver withstands switching frequencies
up to 100KHz, however in the current design of the driver
switching frequency of ≤ 65KHz is implemented.
Output filter is built using passive discrete components
and consists of two cascaded low pass filters. Filters cut-off
frequency is around 4KHz. PWM signals can be supplied
from any embedded controller having up to 4 PWM channels.
In the current driver design PWM signals are supplied from
DSpace DS1103. The performance of implemented driver is
experimentally evaluated in the next section.
Power (W)
30 Designed
20
10
0
0 1 2 3 4 5 6 7 8
Frequency (Hz) 4
x 10
Fig. 7. PSD analysis of input current for both drivers
IV. E XPERIMENTAL R ESULTS
Single axis motion stage has been constructed using Minia-
ture PiezoLegs motor and experiments have been performed in
order to qualitatively compare the performance of the designed
driver and commercially available driver for PiezoLegs motor.
Motion stage incorporates optical encoder with resolution of
5nm as a position measurement. The whole system is run from
DSpace, DS1103 a real-time prototyping controller. Controller
supplies the PWM signals to the driver, and in the case of
commercial driver, analog voltage corresponding to velocity
reference. Current sensor has been placed in the path of
positive terminal of the voltage supply in the case of both
drivers.
Motor was run in an open loop at the speed of 1.1 mms for 1
second and input current measurement was taken during oper-
ation of both drivers. Current measurement is averaged using
low pass filter and average power consumption is calculated
by multiplying this value with input voltage. Results of the
average input power are shown in Fig. 6. When no motion of
the motor is initiated, during stand-by, both drivers consume
the same amount of power, 0.25W . Motion is initiated at 2.5s
and lasts until 3.5s. Average input power of the commercial
driver during this period is constant at 4.7W , comparing to
the designed driver which is at 0.35W . It is important to note
here that the driver presented in this paper contains supply
enable/disable feature which can be used to further reduce
stand-by power consumption.
Input current signal was further evaluated and power spec-

3968
 12
10
8 Commercial
Power (W)
Designed
6 [5] Urban Simu and Stefan Johansson, Fabrication of monolithic piezoelectric
4 [6] Urban Simu and Stefan Johansson, Evaluation of a monolithic piezoelec-
2 Volume 101, Issues 1-2, 30 September 2002, Pages 175-184
0
0 1 2 3 4 5 6 7
Frequency (Hz)
x 10
Fig. 8. PSD analysis of input current for both drivers, f ≥ 50Hz
tral density analyzed. Power spectral density (PSD) analysis
is shown in Fig. 7 and Fig. 8. In the Fig. 7 whole frequency
spectrum is shown, both drivers behave as expected having
most of the signal power in the DC component of the PSD.
Figure 8 shows the PSD plot for frequencies higher than
50Hz, disregarding the DC frequency component. For the
commercial driver dozen of decreasing peaks can be seen up
to 40KHz. The designed driver has nearly flat PSD response
up to 65KHz, where a single peak can be found. This peak
is associated with the PWM switching frequency of the driver.
This situation obviously leaves room for improvement by
placing filter at the input of the driver.
V. C ONCLUSION AND F UTURE W ORK
In this work, driver for miniature piezoelectric motor has
been designed and evaluated. Designed driver is build from
integrated power electronic components with low cost and
small board footprint. Bandwidth of operation of the driver is
around 4KHz which is larger than the bandwidth of operation
of motor which is 3KHz. Motor driver design requirements
and constraints are derived from comprehensive motor charac-
teristics analysis given in Section II. Power consumption of the
driver is low which can be observed from experimental results.
In conclusion, all the stated design requirements from Section
III are met and all the constraints satisfied. Two weak points of
this driver also can be observed, being the power consumption
during stand-by and lack of input filter. Power consumption
during stand-by can be further reduced by implementation of
already existing supply enable/disable feature. In the same
time this feature would add complexity to the driver controller
to some extent. Input filter should be designed in order to
improve the EMI characteristics of the driver. These two points
are subject of future work.
ACKNOWLEDGMENT
Authors acknowledge TUBITAK Project number 111-M-
359, Yousef Jameel Scholarship Fund and TUBITAK BIDEB
2215 for partial financial support.
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