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ArticleTitle Determination of tangential momentum accommodation coefficient and slip coefficients for rarefied gas
flow in a microchannel
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Article CopyRight Indian Academy of Sciences
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Journal Name Sādhanā
Corresponding Author Family Name Agrawal
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Given Name Amit
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Division Department of Mechanical Engineering
Organization Indian Institute of Technology Bombay
Address Powai, Mumbai, 400076, India
Phone
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Email amit.agrawal@iitb.ac.in
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Author Family Name Hemadri


Particle
Given Name Vadiraj
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Division Department of Mechanical Engineering
Organization Indian Institute of Technology Bombay
Address Powai, Mumbai, 400076, India
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Author Family Name Bhandarkar
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Given Name UV
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Organization Indian Institute of Technology Bombay
Address Powai, Mumbai, 400076, India
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Received 28 July 2017


Schedule Revised 10 February 2018
Accepted 18 April 2018
Abstract This paper presents an experimental study of rarefied gas flow in a trapezoidal microchannel with a
constant depth of 103 µm, top width of 1143 µm, bottom width of 998 µm and length of 2 cm. The aim of
the study is to verify the upper limit of the validity of the second-order slip boundary condition to model
rarefied gas flows. The slip coefficients and the tangential momentum accommodation coefficient (TMAC)
are determined for three different gases, viz. argon, nitrogen and oxygen, and it is observed that they
compare well to the literature values. The range of mean Knudsen number (Kn m ) investigated is 0.007–
1.2. The non-dimensional mass flow rate exhibits the well-known Knudsen minimum in the transition
regime (Kn m ~ 1). It is seen that the Navier–Stokes equation with a second-order boundary condition fits
the data satisfactorily with a high value of correlation coefficient (r 2 > 99.95%) in the entire range of Kn m
investigated. This work contributes by extending the range of Knudsen number studied in the context of
validity of the second-order slip boundary condition.
Keywords (separated by '-') Slip flow - transition flow - Knudsen minima - tangential momentum accommodation coefficient - second-
order slip model
Footnote Information
Sådhanå _#####################_ Ó Indian Academy of Sciences
https://doi.org/10.1007/s12046-018-0929-4 ](0123456789().,-volV)
Sadhana(0123456789().,-volV)FT3

3 Determination of tangential momentum accommodation coefficient


2
1
4 and slip coefficients for rarefied gas flow in a microchannel
5 VADIRAJ HEMADRI, AMIT AGRAWAL* and U V BHANDARKAR

6 Department of Mechanical Engineering, Indian Institute of Technology Bombay, Powai, Mumbai 400076, India
7 e-mail: amit.agrawal@iitb.ac.in

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8
9 MS received 28 July 2017; revised 10 February 2018; accepted 18 April 2018

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10 Abstract. This paper presents an experimental study of rarefied gas flow in a trapezoidal microchannel with a
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11 constant depth of 103 lm, top width of 1143 lm, bottom width of 998 lm and length of 2 cm. The aim of the AQ1
12 study is to verify the upper limit of the validity of the second-order slip boundary condition to model rarefied gas
13 flows. The slip coefficients and the tangential momentum accommodation coefficient (TMAC) are determined
14 for three different gases, viz. argon, nitrogen and oxygen, and it is observed that they compare well to the

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15 literature values. The range of mean Knudsen number (Knm) investigated is 0.007–1.2. The non-dimensional
16 mass flow rate exhibits the well-known Knudsen minimum in the transition regime (Knm * 1). It is seen that the
17 Navier–Stokes equation with a second-order boundary condition fits the data satisfactorily with a high value of
18 correlation coefficient (r2 [ 99.95%) in the entire range of Knm investigated. This work contributes by extending
19 the range of Knudsen number studied in the context of validity of the second-order slip boundary condition.
20
21 Keywords. Slip flow; transition flow; Knudsen minima; tangential momentum accommodation coefficient;
22 second-order slip model.
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23 1. Introduction such as pressure drop, shear stress, heat flux and mass flow 48
rate, cannot be predicted by conventional models based on 49
24 Fluid flow in microchannels has emerged as an important the continuum hypothesis. Therefore, appropriate correc- 50
25 area of research with the advent of Micro-Electro-Me- tions (such as the use of velocity slip and temperature jump 51
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26 chanical-Systems (MEMS). Research in the field of boundary conditions) are to be made in the Navier–Stokes 52
27 micromechanics, in the context of MEMS, started in the equations or different approximations may be obtained that 53
28 late 1980s [1]. Since early 2000, there has been a rapid simplify the collision integral of the Boltzmann equation 54
29 development in the application of microflow devices in (e.g., S-model, BGK model, Liu model) in order to predict 55
30 several scientific fields. The design of such devices requires the behaviour of flows with high Kn [2]. The modelling of 56
31 a good understanding of fluid dynamics and heat transfer flow can be done by assuming the fluid to be either con- 57
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32 interactions at the microscale. Rarefaction is a commonly tinuous (continuum model) or a collection of discrete 58
33 encountered phenomenon in microscale systems involving molecules (molecular model). The choice of model to be 59
34 gases, and plays a vital role in dictating the heat transfer used depends upon the nature of flow being studied, as 60
35 and fluid-flow characteristics of the gas. The rarefaction is additional parameters like velocity/temperature slip 61
36 quantified by a non-dimensional parameter known as the become significant under rarefied conditions. In the present 62
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37 Knudsen number (Kn) defined as the ratio of the mean free study, the Navier–Stokes equations with second-order slip 63
38 path of the gas (k) to the characteristic length of the system coefficients are employed to analyse rarefied gas flow in a 64
39 (L) (Kn = k/L). trapezoidal microchannel. A general methodology adopted 65
40 In general, for conventional systems, the length scales of to obtain the velocity slip coefficients (appearing in the 66
41 the flow are normally much higher than the mean free path velocity slip boundary conditions employed with the 67
42 of the gas under atmospheric conditions. However, in Navier–Stokes equations) is to curve-fit the experimental 68
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43 microfluidic or nanofluidic systems, the characteristic mass flow rate as a function of Knudsen number. The 69
44 length scale is small and Kn can be of order unity even at coefficients of the curve-fit can then be utilized to obtain 70
45 atmospheric conditions. As the value of Knudsen number the velocity slip coefficient and the tangential momentum 71
46 increases (Kn [ 0.1), rarefaction effects become more accommodation coefficient (TMAC) [3]. 72
47 important and the flow properties associated with the fluid, Rarefied gas flow has been studied analytically, numer- 73
A1 ically and experimentally by many authors. The analytical 74
A2 *For correspondence method involves obtaining a solution either starting from 75

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76 the Boltzmann equation, or using the Navier–Stokes with coefficients obtained by Maurer et al [3] under similar 131
77 slip boundary conditions to accommodate the rarefaction conditions. 132
78 effects. In [4], the authors used a first-order-accurate slip Although experimental data comparing the slip coeffi- 133
79 boundary condition along with 2D Navier–Stokes equation cients in circular and rectangular geometry are available in 134
80 to demonstrate that both compressibility and rarefaction the literature, such data do not exist for trapezoidal cross 135
81 effects are present in long microchannels. Harley et al [5] section. This cross section is rather typical and obtained by 136
82 also applied a first-order boundary condition to predict the wet etching the microchannel on a silicon wafer of h 110i 137
83 friction factor of isothermal, locally fully developed slip orientation. Trapezoidal cross sections are important 138
84 flow. The first-order slip boundary condition is commonly because it is observed that the thermal performance of a 139
85 employed for slightly rarefied flows (Knm * 0.1). For micro-heat sink with trapezoidal cross section is better than 140

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86 higher values (Knm [ 0.1), the differences between pre- its rectangular counterpart [18, 19]. Furthermore, the data 141
87 dicted mass flow rates using first-order model and experi- available in the literature largely fall in the slip flow regime 142

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88 mental data are significant. In this framework, several (0.001 \ Knm \ 0.1) and the data in the transition regime 143
89 authors have proposed the use of second-order slip (0.1 \ Knm \ 10) is rather sparse. The aim of the present 144
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90 boundary conditions [6, 7]. Sreekanth [8] used the second- work is to experimentally determine the slip coefficients 145
91 order boundary condition in the slip flow regime to predict and TMAC in the slip and transition regimes, to add to the 146
92 the mass flow rate and pressure drop for rarefied flow of experimental information available on the subject. The 147
93 nitrogen gas through long circular tubes. Beskok and Kar- other objectives are to verify the applicability of the 148

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94 niadakis [9] used a second-order slip model and neglected Navier–Stokes equations with second-order slip boundary 149
95 the inertial terms in their analysis. Zohar et al [10] conditions into the early transition regime, to confirm the 150
96 employed perturbation method on the Navier–Stokes existence of Knudsen minimum and to determine the 151
97 equations. They applied a first-order slip boundary condi- influence of cross sectional geometry on the position and 152
98 tion with full accommodation and Knm of order 0.1. Don- magnitude of Knudsen minimum. 153
99 gari et al [11] used an integral approach with a second- D
100 order boundary condition to study gaseous slip flow in long
101 microchannels. 2. Experimental set-up 154
102 In experimental studies, mass flow rate is generally the
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103 parameter of interest along with the pressure drop across A schematic of the experimental set-up designed for 155
104 the test section. The most direct method of measuring the obtaining pressure-driven flow is shown in figure 1. The 156
105 mass flow rate is by employing mass flow meters [14]. constant-volume method is employed to determine the mass 157
106 However, the mass flow meters presently available are flow rate through the microchannel. This technique uses the 158
107 limited by their resolution (* 10-9 kg/s) and other indirect pressure variation in the inlet/outlet tank, under quasi- 159
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108 methods are needed to estimate lower flow rates. They steady-state conditions, to determine the number of moles 160
109 include droplet tracking method [3, 10, 15], constant vol- of gas leaving/entering the constant volume tanks. The set- 161
110 ume method [4, 7, 16] and constant pressure method. In the up consists of two large reservoirs of volumes 1.3 9 10-3 162
111 droplet tracking method, the motion of an oil drop induced and 4.7 9 10-3 m3, across which a microchannel is con- 163
112 by the flow is tracked to obtain the volumetric flow rate. nected. The large tank volumes relative to the microchannel 164
113 This method is however cumbersome to implement and has ensure that, for low mass flow rates, the pressure variation 165
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114 other disadvantages [7]. These disadvantages can be over- in the tank is negligible and the quasi-steady-state condi- 166
115 come using the constant volume method or the constant tions are valid. The inlet and outlet tanks are connected to 167
116 pressure method. The former is usually preferred because the atmosphere and the vacuum pumping system, through a 168
117 of the fabrication difficulties and thermal instability prob- set of valves A–E. Therefore, desired pressures can be 169
118 lems associated with the constant pressure method [4]. imposed on the tanks by venting them either to the atmo- 170
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119 Maurer et al [3] performed experiments in a shallow sphere or the vacuum system. 171
120 microchannel of rectangular cross section from the con- High-accuracy capacitance manometers (MKS Baratron) 172
121 tinuum regime to Knm of 0.6 and 0.8 for nitrogen and (ranges: 0.1, 1, 10 and 100 mbar; accuracy ± 0.25%) are 173
122 helium, respectively. Ewart et al [7] experimentally deter- used for pressure measurements at four different locations 174
123 mined the slip and accommodation coefficients appearing as shown in figure 1. The constant-volume approach is well 175
124 in the solution of the Navier–Stokes equation with second- established to measure mass flow rates as low as 10-14 kg/s 176
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125 order slip boundary condition for nitrogen flowing in a [17], well below the lower range offered by commercial 177
126 microtube. In a further work, Ewart et al [17] performed mass flow meters (10-9 kg/s). A detailed description of the 178
127 experiments in a rectangular microchannel with helium as constant-volume method can be found in many other lit- 179
128 the working fluid and with the experimental range spanning eratures [7, 16, 20] and is not included here for brevity. 180
129 from the continuum regime to the free molecular regime. The microchannel employed in the present measure- 181
130 Their data in the slip regime confirm the value of slip ments was fabricated on a single-side-polished, 2’’ silicon 182

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Figure 1. Schematic of the experimental set-up.

183 wafer. The trapezoidal microchannel has a depth of


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184 103 lm, top width of 1143 lm, bottom width of 998 lm
185 and length of 2 cm (H/w = 0.09). The h100i orientation of
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186 the p-type wafer gives the microchannel a trapezoidal cross
187 section after the wet etching process. The top side of the
188 microchannel is covered with an optically smooth quartz
189 plate. Standard lithographic techniques were used for pat-
190 terning the microchannel. More details of the fabrication
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191 process can be found in [21]. The inlet and outlet temper-
192 ature across the microchannel was measured to verify the
193 isothermal flow assumption. It is observed that for any
194 particular run the temperature variation was within 0.2°C.
195 The uncertainty in the measured mass flow rate is the total
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196 of the uncertainties due to non-isothermal effects (± 2%),


197 volume of tank (± 1%) and the standard deviation of the
Figure 2. Schematic of the microchannel.
198 coefficient of linear fit of pressure measurements
199 (\ ± 1%). The leakage is estimated as detailed in [22].
200 Thus, the overall uncertainty in the mass flow rate is
201 evaluated as ± 4%.
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the microchannel. Assuming Stokes’ approximation and not- 211


ing that L  w  H, we have 212
202 3. Theoretical background oP
 2 
ou
þl ¼0 ð1Þ
ox oz2
203 We consider the isothermal rarefied flow of a gas in a
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204 microchannel of trapezoidal cross section (figure 2). The Since the applicability of the first-order slip boundary 214
205 channel has a height H, length L and width w. The theoretical condition is limited [3, 7], Eq. (1) is solved by employing a 215
206 analysis provided in [3] for a rectangular channel is used here second-order slip boundary condition at the upper and 216
207 with the ‘width’ of the microchannel replaced by the average lower walls (z = 0 and z = H): 217
208 of the top and bottom widths, owing to the trapezoidal cross
209 section employed in the present work. A fluid of dynamic ou o2 u
uw ¼ C1 k C2 k2 : ð2Þ
210 viscosity ‘l’, pressure ‘P’ and axial velocity ‘u’ flows through oz oz2

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219 Here, C1 and C2 are the slip coefficients. The Navier– S ¼ 1 þ AKnm þ BKn2m ð5Þ
220 Stokes equation has been used with a second-order slip 234
221 boundary condition to successfully predict the mass flow where, A = 6C1 and B = 12C2 ðPþ1 ÞlnðPÞ
ðP 1Þ . 235
222 rate for Knm up to 0.8 [14]. Solving Eq. (1) with the From the determination of C1, we can obtain the TMAC 236
223 boundary conditions as prescribed by Eq. (2), we obtain the using the following relation [3]: 237
224 non-dimensionalized mass flow rate in terms of Knm.
2
C1 ¼ 1: ð6Þ
12lRTLm_ ðP þ 1ÞlnðPÞ r
S¼ ¼ 1 þ 6C1 Knm þ 12C2 Kn2m :
DPPm wH 3 ð P 1Þ Loyalka [23] obtained the ‘exact’ numerical solution of 239

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ð3Þ the BGK model and proposed the following expression for 240
the calculation of the accommodation coefficient: 241
226 In this expression, R is the specific gas constant, T is the

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pffiffiffi
227 absolute temperature, m_ is the mass flow rate, Pm is the p2 r
C1 ¼ ð1 þ 0:1621rÞ: ð7Þ
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228 mean of the inlet and outlet pressures and P is the pressure 2 r
229 ratio. The mean Knudsen number is obtained as
As seen from Eq. (3), the non-dimensionalized mass flow 243
rate can be expressed in terms of the mean Knudsen number 244
pffiffiffiffiffiffiffiffiffiffiffiffiffiffi
l pRT=2
Knm ¼ : ð4Þ and the pressure ratio. Therefore, it is possible to experi- 245
Pm H

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mentally obtain the slip coefficients by curve fitting the 246
231 The non-dimensionalized mass flow rate is fitted with a non-dimensional mass flow rate with the expression pro- 247
232 second-order polynomial by the method of least squares: vided in Eq. (3). The determination of the slip coefficients 248
is necessary to obtain the slip velocity in the case of rarefied 249
gas flows. This also allows for a comparison of the 250
Table 1. Range of experimental parameters investigated. dependence of the slip coefficients (and hence slip velocity) 251
on different gas–solid interfaces and different cross 252
Gas Quantity Min Max
D
sections. 253
Nitrogen Pm (Pa) 63 10098
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Knm 0.0072 1.1
m_ (kg/s) 2 9 10-10 3.9 9 10-7 4. Determination of slip coefficients 254
P 7 10
Argon Pm (Pa) 56 12517 The range of experimental parameters is tabulated in 255
Knm 0.007 1.2 table 1. Figure 3a, b and c shows the variation of the non- 256
m_ (kg/s) 2.1 9 10-10 5.4 9 10-7 dimensional mass flow rate S with the mean Knudsen 257
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P 6 10
number for three different gases (argon, nitrogen and 258
Oxygen Pm (Pa) 52 10912
oxygen, respectively). In all the three cases, the non-di- 259
Knm 0.0072 1.13
m_ (kg/s) 1.8 9 10-10 4.3 9 10-7 mensional experimental mass flow rate is fitted with a 260
P 7 10 second-order polynomial using a least squares method. This 261
is done to ascertain the applicability of the Navier–Stokes 262
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Figure 3. Experimental non-dimensional mass flow rate fitted with a second-order polynomial for (a) argon, (b) nitrogen and
(c) oxygen.

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263 equation with second-order slip boundary condition in higher range of Knudsen numbers covered in these exper- 279
264 predicting the mass flow rate for Knm [ 0.3. It is seen that iments. In contrast, the second-order coefficients of Yam- 280
265 the second-order fit matches the experimental data with a aguchi et al [24] are negligible and the data are mostly 281
266 high value of correlation coefficient (r2 [ 99.95%) over the linear due to the low range of Knudsen numbers in their 282
267 entire range of Knm encountered in the experiments. experiments. However, the TMAC obtained in the present 283
268 The slip coefficients are determined by Eq. (5) and experiments is seen to be higher than those obtained by 284
269 subsequently, the TMAC is determined in two ways: Maurer et al [3] and Yamaguchi et al [24]. 285
270 through the application of Eqs. (6) and (7) for different
271 gases and tabulated in table 2 along with those reported in
272 the literature for other cross sections. Since the pressure 5. Effect of cross section 286

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273 ratio varies during the experiments, in the determination of
274 C2 from Eq. (5), the average pressure ratio is used. The Figure 4 shows a comparison of non-dimensional mass flow 287

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275 uncertainties on the regression coefficients are obtained rate for different cross sections and gases. It is seen that for 288
276 using the standard error analysis. It is seen from table 2 that
Editor Proof

rectangular and trapezoidal cross sections considered, 289


277 the second-order coefficients of the present work and respectively, in [3] and the present work (in both cases 290
278 Maurer et al [3] are close to each other. This is due to the H \\ w), the effect of lateral walls is negligible and the data 291

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Table 2. Slip coefficients and TMAC for different gases.

TMAC TMAC
Gas Knm range C1 C2 (Eq. (6)) (Eq. (7))
Argon 0.07–1.2 1.089 ± 0.08 0.140 ± 0.007 0.957 ± 0.04 0.970 ± 0.03 Present work (trapezoidal)
Nitrogen 0.072–0.11 1.093 ± 0.07 0.151 ± 0.003 0.955 ± 0.03 0.968 ± 0.03
Oxygen 0.072–1.13 1.301 ± 0.09 0.155 ± 0.004 0.866 ± 0.04 0.874 ± 0.03
Argon
Nitrogen
0.05–0.3
0.05–0.3
1.30
1.35
±
±
0.09
0.06
0.063
0.031
±
±
0.018
0.005
D
0.869
0.851
±
±
0.03
0.02
0.872
0.851
±
±
0.03
0.02
Yamaguchi et al [24] (circular)

Oxygen 0.05–0.3 1.35 ± 0.06 0.028 ± 0.004 0.851 ± 0.02 0.851 ± 0.02
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Helium 0.006–0.8 1.2 ± 0.05 0.23 ± 0.1 0.91 ± 0.03 0.915 ± 0.03 Maurer et al [3] (rectangular)
Nitrogen 0.006–0.7 1.3 ± 0.05 0.26 ± 0.1 0.87 ± 0.03 0.872 ± 0.03
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Figure 4. Comparison of non-dimensional mass flow rates across different studies involving different gases and cross sectional
geometries.

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292 agree well over the entire Knudsen number range studied.
293 Although the present study considered a trapezoidal cross
294 section that has not been studied earlier, it is seen that the effect
295 of cross section is not very evident due to the low aspect ratio
296 considered here. Nevertheless, this study is useful as it con-
297 siders a realistic cross section that is typically encountered due
298 to microfabrication of microchannels.
299 The data plotted for circular tube [24] show a higher value of
300 S and is also a stronger function of Knudsen number as com-
301 pared with both rectangular and trapezoidal microchannels.

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302 For the range of Knudsen number studied here, the effect of
303 molecular weight of the gas is seen to be absent, as the data

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304 points for different gases converge to a single curve. Com-
305 paring the present results directly to theory is difficult for a
Editor Proof

306 variety of reasons. Firstly, many authors have obtained


307 expressions for non-dimensional mass flow rates by treating
308 the rarefaction parameter to be constant along the channel. In
309 our case, the pressure ratio is considerably large (* 7–10) and

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310 the local pressure variations have not been determined.

Figure 5. Comparison of non-dimensional mass flow rate


311 6. Knudsen minimum obtained in different studies.

312 As seen from table 2, the pressure ratios encountered in the and Prabhu [26] suggested a TMAC value of 0.93 for 342
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313 present set of experiments are very high (ranging from 7 to 10). monatomic gases for the whole Knudsen number range 343
314 In such cases, the non-dimensionalization of mass flow rate based on a survey of data in the literature. The experimental 344
315 based on the mean pressure is inappropriate, as the gas rar- value obtained in the present work for argon 345
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316 efaction varies considerably along the length of the (0.957 ± 0.04) is in agreement to the value suggested from 346
317AQ2 microchannel. Following the approach adopted by Sharipov literature. The experimental results of Ewart et al [17] for a 347
318 [25] and Ewart et al [17] for rarefied flow in long rectangular cross section are also in good agreement to the 348
319 microchannels with high pressure ratio, the mass flow rate is present set of results, which are carried out for a trapezoidal 349
320 non-dimensionalized as cross section. A quantitative agreement among rectangular 350
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pffiffiffiffiffiffiffiffiffi and trapezoidal cross section indicates negligible effect of 351


L 2RT
G¼ 2 m:
_ ð8Þ the lateral walls for the low aspect ratio considered in these 352
H wðPi Po Þ
studies (H/w \ 0.1). AQ3353

322 The reduced mass flow rate expressed as shown here is Till recently, there was no clarity on the position and 354
323 independent of the local pressure and becomes a function of magnitude of Knudsen minimum (or even its existence) for 355
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324 the inlet and outlet pressures only. This non-dimensional- microchannels of non-uniform cross section. Recent mea- 356
325 ized mass flow rate is expected to exhibit the Knudsen surements by Hemadri et al [27, 28] have experimentally 357
326 minimum phenomenon, which is an important characteris- established the existence of Knudsen minimum in diverging 358
327 tic of rarefied gas flows. The variation of the reduced mass and converging microchannels. They also noted the posi- 359
328 flow rate G with Knm for the three different gases is plotted tion and magnitude of the minimum to be weakly depen- 360
329 in figure 5. dent on the geometrical cross section of the microchannel 361
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330 It is seen that the Knudsen minimum is observed around and the molecular weight of the gas species. The effect of 362
331 a mean Knudsen number of slightly less than unity in all the side walls was seen to be negligible as gas flow in con- 363
332 studies. For comparison, we use the expression for the verging/diverging microchannels approached the parallel 364
333 reduced mass flow (G) rate provided by [25] for a rectan- plate solution for low Knm. 365
334 gular cross section with H/w = 0.1 and fully diffuse
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335 reflection at the boundary (TMAC = 1). The present data


336 agree well to that of [25] at lower Knm. As Knm increases, 7. Conclusions 366
337 the predicted results of [25] deviate from the experimental
338 results (figure 5, maximum deviation is 16%). This indi- This paper presented an experimental study to verify the 367
339 cates that the molecular reflection at the wall is not entirely validity of the Navier–Stokes equations with second-order 368
340 diffusive in nature for Knm [ 0.4, since the theoretical boundary conditions in a microchannel of trapezoidal cross 369
341 model is based on fully diffuse accommodation. Agrawal section. The slip coefficients and TMAC were obtained for 370

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371 three different gases and it was shown that a second-order [11] Dongari N, Agrawal A and Agrawal A 2007 Analytical 421
372 boundary condition can successfully predict the mass flow solution of gaseous slip flow in long microchannels. Int. 422
373 rate up to Knm * 1. These experimentally obtained slip J. Heat Mass Transf. 50: 3411–3421 423
374 coefficients are significant because they form a part of the [12] Chakraborty S and Durst F 2007 Derivations of extended 424
375 database that will help identify the effect of various Navier–Stokes equations from upscaled molecular transport 425
considerations for compressible ideal gas flows: towards 426
376 parameters such as gas–solid interaction, surface roughness
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377 and microchannel geometry on rarefied gas flows. The [13] Dongari N, Sharma A and Durst F 2008 Pressure-driven 428
378 extension of the use of Navier–Stokes equation with slip diffusive gas flows in micro-channels: from the Knudsen to 429
379 boundary condition is desirable, due to the high cost the continuum regimes. Microfluid. Nanofluid. 6: 679–692 430
380 involved in simulating flows at high Knudsen numbers (slip 431

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[14] Sreekanth A K 1965 Transition flow through short circular
381 and transition regimes) using alternate techniques such as tubes. Phys. Fluids 8: 1951–1956 432
382 direct simulation Monte Carlo. [15] Harley J, Huang Y, Bau H and Zemel J N 1995 Gas flow in 433

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383 The Knudsen minimum is observed in the present microchannels. J. Fluid Mech. 284: 257–274 434
384 experiments at Knm * 1. The position and magnitude of [16] Pitakarnnop J, Varoutis S, Valougeorgis D, Geoffroy S, 435
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385 the Knudsen minimum is seen to be unaffected by the Baldas L and Colin S 2010 A novel experimental setup for 436
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[17] Ewart T, Perrier P, Graur I A and Meolans J G 2007 Mass 438
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