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Abstract- In this paper, the transition discontinuities of flip and possibly distortion of the signal. All these issues need
chip circuits are modeled and investigated using finite-difference to be considered in the design of the flip chip package. In
time-domain (FDTD) method to predict the S-parameters of order to minimize the effect of the transition discontinuity
different packages. This includes transition between two coplanar
lines on the chip and mother board and transition between two on the overall package performance, the bump dimensions as
striplines in a package. The computed S-parameter of the flip well as the characteristic impedance of both chip and mother
chip package using the FDTD model are used to develop an board should be analyzed and investigated. In general, the
equivalent circuit for the transition discontinuity over a wide characteristic impedance of the mother board, the chip, and
frequency band. A general and accurate equivalent circuit model the interconnect should be matched together to minimize the
of the interconnect has been developed and presented. In this
circuit model, a statistical analysis is used to compute the value reflection due to the transition discontinuity.
of the circuit elements. Also, losses in the flip chip package are This work is mainly concerned with the analysis and char-
represented by a simple function versus frequency. These losses acterization of the flip chip package discontinuities using
include substrate loss of the chip and the mother board due to FDTD method with the objective of developing an equiva-
excitation of surface wave and radiation loss due to the bump.
Conductor and material substrate losses are not included in this lent circuit model of the bump (or via) discontinuities over
circuit model. Good agreement has been obtained between the S- a broad frequency band. An equivalent circuit model of
parameters of the FDTD model and the equivalent circuit model the flip chip discontinuity will be a helpful tool in using
over a wide frequency hand of up to 50 GHz. Furthermore, commercial monolithic microwave/millimeterwave integrated
the effects of the bump dimensions on the equivalent circuit circuit (MMIC) simulators to predict the overall performance
model has been also evaluated and presented. The results show
important issues in the design of the flip chip interconnect. The including the package. In the literature, few papers have been
bump dimensions can he used as impedance matching paramelers published on the equivalent of bump discontinuities [ 191-[20].
to achieve minimum losses over a wide frequency band. The However, the effects of the flip chip technique are not clear.
presented equivalent circuit model can he used in commercial To date, no effort has been reported on the optimization
circuit simulators to predict monolithic microwave/millimeter of bump dimensions to reduce reflection and losses of flip
wave integrated circuit (MMIC) performance including the pack-
age. chip package. As mentioned above, bump dimensions are
very important parameters, and they have major effects on
the package performance. We investigated the effects of the
bump dimensions on the circuit model. In our analysis, two
I. INTRODUCTION flip chip package configurations are considered. The first
F LIP CHIP is emerging as the lead technology in multichip configuration is the transition between two striplines (SL-
module packages. Several chips can be mounted together SL) on a single substrate package as shown in Fig. l(a).
to the mother board using flip chip technology to increase In the second configuration, transition between two copla-
density, improve system performance, and reduce cost [ 11-46]. nar waveguides (CPW’s) is assumed, and is referred to as
This packaging technique also allows combinations of active CPW-CPW transition shown in Fig. l(b). CPW’s are popular
and passive devices, silicon and gallium arsenide, and prob- at the chip level, whereas, the SL’s are very popular at the
ably analog and digital circuits in the same application. In package and mother board levels. Section I1 of this paper
microwave circuits applications, low cost, high density, and presents a brief discussion of FDTD method used for analysis
short transition interconnects are considered to be the main and modeling. This includes excitation source requirements
advantages of the flip chip technique. Transitions in a flip and boundary condition treatment. The S-parameters are also
chip package involve the use of metallic bumps (or via holes) discussed in this section. In Section 111, a statistical analysis
to transmit the signal between the mother board and the chip. is used to develop an equivalent circuit model of flip chip
These bumps represent the main discontinuity to the signal interconnects. Numerical verification to our code is presented
propagating on the line which results in partial loss, reflection in Section IV-A. A detailed study of the effects of via (or
bump) dimensions on the equivalent circuit for the stripline-
to-stripline transition (SL-SL) is presented in Section IV-B.
Manuscript received March 29, 1996. Effects of staggering the bumps (signal and ground bumps)
The authors are with the Electrical Engineering Department, Arizona State
University, Tempe, AZ 85287 USA. as well as underfill material on the equivalent circuit model
Publisher Item Identifier S 0018-9480(96)08527-4. for coplanar-to-coplanar transition (CPW-CPW) have been
0018-9480/96$05.00 0 1996 IEEE
2544 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, V
x Frontview
Side view
(c)
Fig. 1. Geometry of SL-SL, CPW-CPW (in-line) and staggered CPW-CPW transitions: (a) stnpline package
HB = 0.12 mm, Wl = 0 24 mm, W2 = 0 72 mm,C1 = Cz = 3 0 mm, L , = 5 76 mm, = =
termination (in-line basic configuraaon)Hi = Hz = 0 36 mm, H3 = 0 12 mm,Wi = S = 0 12 mm, Wz =
mm, = cr2 = 12 9,~ , g= 1 0; (c) flip chip CPW-CPW with staggered bumps (plan view of CPW-chlp and CPW-mother board)
11. FINITE-DIFFERENCE
TIME-DOMAINMETHOD
Finite-difference time-domain (FDTD) method is well
known in principle since 1966 [7]. In microwave circuit
applications, FDTD technique has been widely used in the
analysis of microwave devices [8]-[ 101. Recently, FDTD
method has been effectively used to model the transition
effects of high frequency interconnect in a flip chip package
[11]-[13]. FDTD method is attractive due to its flexibility in
handling a variety of circuits configurations. An additional
benefit o f the time-domain analysis is that a broad band
pulse can be used as the excitation, and the frequency-domain
response can be evaluated over a broad-band of frequencies by
means of discrete Fourier transform of the transient response. F ~2,~ Equivalent
, model of the
In our analysis, we assume that media under consideration
are uniform, isotropic, homogeneous and has no magnetic and center con
properties, i.e., p,? S 1. Furthermore, we assume that ground zero thickness. A gaussian pulse is used to modulate the
GHOUZ AND EL-SHARAWY AN ACCURATE EQUIVALENT CIRCUIT MODEL OF FLIP CHIP AND VIA INmRCONNECTS 2545
' I
CPW Line
f
Erl=l.O
Ground I If"
H3
H3
1fl Er3
IF
I
Er2 =1.0
I IH2
I $
H 2
Side View
Front view of reference CPW
(a)
9.0
W - FDTD
MOM
3 8.5
V t I
Top View
.....
......
.........
.......
..
..._..
....... Dielectric Vias
..............
6.0
ep -10 . A a -
0 10 20 30 40 50 60 70 80
w e A P Frequency in GHz
.*
0
e
b
A "
(b)
2 -20
8 s11
& Fig. 4. (a) Geometry of the cross section of the reference CPW strncture
B A
A
(front view). HI = Hz = 0.36 mm, H3 = 0.12 mm, Wi = S = 0.12
mm, W2 = 0.6 mm, E,I = ~~2 = 12.9,ep3 = 1.0. (b) Effective dielectric
E
%-,O . A
A
constant of the reference CPW structure using FDTD and MOM.
cn
-40 - The spatial distribution functions, +,(z, y) and $y(x,y),
n Ref. [12] are not initially known. However, a quasistatic TEM mode
This Work assumption can be used as an initial guess. In our analysis,
a finite length section of a CPW line (or stripline) with
the same cross section and dielectric layers as the flip chip
package is used as reference structure. The objective of using
this reference structure is to determine an accurate and well
developed spatial distribution of the transverse electric field
components ( E , and ICy) at the output. Then, this output,
+,(x, y) and +y(x,y), is used at the source plane along with
the gaussain pulse to excite the flip chip structures under
investigation. In addition, the above CPW (or SL) structure
is used as a reference in our calculations of the S-parameters
of the flip chip package.
To simulate infinite structures, absorbing boundary condi-
tions (ABC's) have to be added at the six outer walls of
the computational domain. There are different techniques for
the spatial distribution function for z-component simulating an ABC [14]-[17]. In our simulation, we used the
of the electric field; super-absorption first-order Mur boundary conditions due to
the spatial distribution function for y-component its simplicity and stability [14]-[15]. At the source plane, we
of the electric field; apply the excitation field components ( E , and ICy) until the
time center of the pulse; pulse is completely lunched, and then, switch to the ABC
pulse width. to avoid reflection from the source plane. Another boundary
2546 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL 44, NO
0.01
0.008
50
40
0.006 30
@2
PI
s
h
2o
*, 0.004 10
-3
x 0
ia
-10
0.002
-20
0.0
-0.002
0 300 600 900 1200 1500
Time Step
(a)
0.01 -
- IZL
IZM
0.00s . _. IZU
r
-s 0.006 .
h
*,0.004 .
J
2
0.002 -
0.0 __
Z-axis
-0.002
9
8
7
6
6 : 3
q 21 13
0
-1
(C) (d)
Fig. 6. (a) Total transverse current (normal) to the via direction I z ( z ,t ) at three different cross sections versus time, IZL at z = H i , E M at z = (H*+H3/2)
+
and IZU at z = (Hi H 3 ) . (b) Transverse current distnbution at the bottom cross sechon of the via (JSZL). (c) Transverse current dlstribution at the mddle
cross sechon of the via (JSZM). (d) Transverse current distribution at the top cross section of the via (JSZU).
where .........._..
,_. ___ __
____-_,_____,.,,_,
_ _ _ _ _ _ _ _ _ _ ,,
0 ---__ -\-s21
Lb denotes the inductance of the bump; ----\-
0.25 . I 1 0.2
H3 = 0.12 m
H3 = 0.24 mm
0.2 H3 = 0.36 mm 0.16
*a
9E 0
.I
e 0.15
A
e,
g; 0.1
‘D
0
H
0.05
0.0 I 0.0
10 20 30 40 50 10 20 30 40 50
Frequency in GHz Frequency in GHz
0.01
: - H3 = 0.12 mm
i Gb-wob
I?
i
i
H3 = 0.36 mm
.g 0.07
Q
Q5
13 0.06
:* 0.006
. o
v)
. v 0)
4 0.004
- Y
a
k
m
- c v)
i
$
-----\.-
1 m
0.002
n
-W.Ul
-. w.u
0 10 20 30 40 so
Frequency in GHz
(c) (4
Fig. 8 Effects of via height on the elements of the equivalent circuit model (Lb, CI, Gb, and G I ) (a) equivalent inductance Lb for dlfferent vla
heights; (b) equivalent capacitance C1 for different via heights, (c) radiatlon conductance
(d) substrate conductance loss GI versus via height and G-wob for H3 = 0.12 mm.
IV. RESULTS
A. Numerical VeriJication
To verify our code, the transition inveshgated by 1121,
between a coplanar waveguide and a microstrip through a via
GHOUZ AND EL-SHARAWY AN ACCURATE EQUIVALENT CIRCUIT MODEL OF FLIP CHIP AND VIA INTERCONNECTS 2549
5
j 0.08 ................... - .......................................... - ..................... -
-$0.06
3 0.04 - -
0.02
0.0
1' ............................
I
0.02
0.0
j
'
............................................................
I
0 10 20 30 40 50 0 10 20 30 40 50
Frequency in GHz Frequency in GHz
/I :
10
\
OJ4
/I ;
/I :
j/ ; BCSl = 0.36~0.36
......... BCSZ = 0.24~0.24
BCS3 = 0.18~0.16
BCSZ = 0.24~0.24
0.2 ...... BCS4 = 0.08~0.12
j/ j c BCS4 = 0.08x0.12
.-
E /I :
:I '
P jI :
0.16 il:I ::
c
(C) (d)
Fig. 10. Effects of the via cross section on the elements of the equivalent circuit model (Lb,C1, Gb, and G I ) :(a) equivalent inductance Lb for different via
cross sections. (b) Equivalent capacitance C1 for different via cross sections. (c) Radiation conductance loss Gb versus via cross section. (d) Substrate
conductance loss G1 versus via cross sections.
as ( / 3 2 / w 2 p o ~ ~Excellent
). agreement has been obtained E
a,
bj -15
between the effective dielectric constants computed using
the two methods as shown in Fig. 4(b). The computed
characteristic impedance using either the moment method
lp!
a
-20
ul
or the FDTD was approximately 50 ohms and varied
very slightly over the entire band. Again, the difference -25
L
evaluate the equivalent circuit of the transition. Therefore,
an electrical reference of the via has to be determined. The
reference can, in general, be at any point at the via, e.g., -30 0
-25
the center or the edge of the via. This reference can only be 0
verified by studying the current distribution on the via surface.
The total current in the direction of the via Irc(z,t) is Fig 12 S-parameters of the in-line CPW-CPW transition for different
shown in Fig. 5(a) at three different cross sections of the via dielectnc constants of the chip, mother board and underfill material
versus time. This includes the current IXL at the lower cross
section (x = H I ) , the current IXM at middle cross section
(x = H1+ H 3 / 2 ) ,and the current IXU at upper cross section increase as shown in Fig. 7. Fig. 8(a) sh
(z = H I + H 3 ) . This figure also shows the time delay and
dispersion of the pulse as it propagates in the via direction. the height increases especially at low freq
The current distribution JSX(y, z) at same cross sections are relation between the height and the inducta
also shown in the Fig. 5(b)-(d) (only half section of the via For small heights, the inductance i
is shown). Here, the units of y-axis and z-axis are defined in As the height increases, the induc
terms of the number of FDTD cells assumed on half section
of the via, where as the units of the vertical axis’s are A/m. on the equivalent inductance. The d
At the bottom (z= H I ) of the via, the surface current JSXL decreases as the height decreases as
is mainly concentrated at the edge near the bottom stripline
+
(Fig. 5(b)). At the middle cross section (x = H I H3/2, see
Fig. 5(c)), the current JSXM on the opposite surface starts to
increase and becomes dominant at the top surface (JSXU at heights. The conductance decreases as l / f 2 similar to the
rc = H I fH3) as shown in Fig. 5(d). This illustrates the current radiation conductance of a short dipole. As the height of the
transition through the via between the bottom and the top via increases, the radiation conductance increases. This figure
striplines. We have also studied the transition of the transverse also includes the radiation ce of the above
current between the striplines. The total current I z ( z ,t ) in the (for E3 = 0.12 mm) with
transverse direction to the via (z-axis) is shown in Fig. 6(a) conductance in this case is
at the same cross sections mentioned above versus time. This where the via is present. This indicates that Gb is contributed
figure also shows the time delay and the dispersion of the by radiation from the via. The effects of t
pulse as it propagates in the transverse direction to the via.
Also, Fig. 6(b)-(d) shows the transverse current JSZ(y, 2 ) general, as the via height
at the three cross sections (JSZL, JSZM, and JSZU) of the increases. Again the condu
via. Again, an edge inversion has been also observed in the
transverse currents. The transverse currents become expectedly
small at the middle of the via as shown in Fig. 6(a) and (c) (the
transverse currents vanish at the edges and the via dimensions
are very small). As in the longitudinal currents, the current
flows from one edge at the bottom surface of the via to the
opposite edge at the top surface of the via. Therefore, based on are introduced in Section I
the current distributions of Figs. 5 and 6, we can conclude that
the electrical reference of the via can be assumed at the edge.
Consequently, the S-parameters of the via ean be obtained by
shifting the S-parameters of the flip chip structure to the via effect of line discontinuity on the
edges. more noticeable as the cross
The effects of bump geometry on the equivalent circuit c,
of Lb, Rb(l/Gb),G1, an
model are investigated and presented in Figs. 7-10. As the cross section of the via as
height of the via increase both insertion and reflection losses the results of the S
GHOUZ AND EL-SHARAWY: AN ACCURATE EQUIVALENT CIRCUIT MODEL OF FLIP CHIP AND VIA INTERCONNECTS 2551
0.1 0.05
Erl=Er2=Er3=1.0
Erl=Er2=12.9,Er3=1.0 ......... Erl=Er2=12.9,Er3=1.0
0.0s 0.04
LI
9 a
."El 0.06
p
.r(
fi
0.03 ................................. ..........................
I4 ...............................................
Q) 8
sf
# 0.04 3 0.02
I
........
------_
.-. _..._.............................
e-
0
uB
--"-=<.LL_
0.02 0.01
0.0
10 20 30 40 50
0.0 ' ' '
10 20 30 40
I
50
Frequency in GHz Frequency in GHz
(a) (b)
0.5 0.001
Erl=Er2=12.9,Er3=1.0
0.4
0.1
0.0
10 20 30 40 50
Frequency in GHz
(d)
Fig. 13. Effects of the dielectric substrates (chip and mother board) and underfill material on the elements of the equivalent circuit model (Lb, ci,Gb, and
GI): (a) equivalent inductance Lb; (b) equivalent capacitance C1; (c) radiation conductance loss Gb: (d) substrate conductance loss GI.
eH -15
GHz). For ,912, the difference is less than 1% (less than 0.15
dB) up to SO GHz. The difference between the equivalent
circuit and the FDTD solutions will remain relatively small %
CA
even whenlosses are neglected ( G I ,G z , and Gb are assumed
-20
to equal zero) as it is clear from Fig. 11.
0 10 20 30 40 50
C. Results of CPW-CPW Circuit Model Frequency in GHz
Equivalent circuit model of the CPW-CPW flip chip in- Fig. 14. S-parameters of open (in-line) and staggered CPW-CPW transitions
terconnect has been investigated in the case of in-line and for both FDTD model and equivalent circuit "lei.
staggered configurations (Fig. l(b) and (c)). The S-parameters
of in-line transition is shown in Fig. 12 versus frequency for dielectric material between the two CPW lines). The lowest
different dielectric substrates and underfill material ( the losses (S1l and Szl) have been obtained for low dielectric
2552
,
0.0005
0.0004
i-(
E O.OOO?
E
Q
E
l
30.0002
0.0001
I\
0.0 0.1
0 10 20 30 40
Frequency in GHz
(c) (d)
Fig. 15 Equivalent circuit elements (Lb,C1, Gb, and G I ) of staggered versus open (in-line) CPW-CPW transi
versus staggered CPW-CPW transition; (b) equivalent capacitance C1 of open versus staggered CPW-CPW trans
open versus staggered CPW-CPW transition, (d) substrate conductance loss GI of open versus staggered CPW-CPW transition
as insertion loss is reduced. The effects of staggering the P. S. H. Melchior, “Coplanar flip-chip mounting technique for picosec-
bumps on the conductance losses are predicted and presented ond devices,” Rev. Sci. Instrum. vol. 55, no. 11, Noy. 1984.
K. G. Heinen et al., “Multichip assembly with flipped integrated
in Fig. 15(c) and (d). Minor changes in Gb,G1, and G2 circuits,” ZEEE Trans. Comp., Hybrids, Manufact. Technol., vol. 12, no.
were observed when bumps are staggersd. The agreement 4, Dec. 1989.
between the equivalent circuit model and FDTD model are R. W. Johnson, R. K. F. Teng, and J. W. Balde, “Multichip modules
systems avantages, major constructions, and material technologies,”
still good for the staggered structure as shown in Fig. 14. IEEE Comp., Hybrids, Manufact. Technol. SOC.,1991.
However the agreement between the two models are not as K. S . Yee, “Numerical solution of initial boundary value problems in-
volving Maxwell’s equations in isotropic media,” IEEE Trans. Antennas
good as in the case of in-line geometry. As in the case of the Propagat., vol. AP-14, pp. 304-307, May 1966.
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conductance losses (GI, GZ and GJ,) on the circuit model. coplanar waveguide using time-domain finite-difference method,” ZEEE
Trans. Microwave Theory Tech. vol. 37, no. 12, Dec. 1989.
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circuit model has been predicted for both CPW-CPW tran- dimensional full-wave electromagnetic field analysis in the time
sitions. domain,” ZEEE Trans. Microwave Theory Tech., vol. 36, no. 6, June
1988.
In addition to staggering the bumps, the interconnect di- X. Zhang and K. Kenneth, “Time-domain finite-difference approach
mensions (height and cross cestion) can be used as impedance to the calculation of frequency-dependent characteristics of microstrip
matching parameters to achieve minimum losses. However, discontinuities,” IEEE Trans. Microwave Theory Tech., vol. 36, Dec.
1988.
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H. H. M. Ghouz and E.-B. El-Sharawy, “Finite difference time domain
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V. CONCLUSION absorbing boundary conditions,” IEEE Trans. Antenna Propagat., vol.
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A three-dimensional (3-D) finite difference time domain V. Betz and R. Mittra, “Comparison and evaluation of boundary
computer code has been developed to model and inves- conditions for the absorption of guided waves in an FDTD simulation,”
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age. The S-parameters based on the FDTD model along absorbing boundary conditions for the analysis of planar circuits,” IEEE
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alent circuit for the interconnect. Using a circuit solver, Domain Method. Boston, London: Artech House, 1995.
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Effects of bump dimensions on the parameters that consti-
tutes this impedance including inductance, capacitance, and
conductances were studied in detail and presented. Staggering
the bumps has been also found to be effective to control
the impedance matching. The work presented in this paper
significantly simplifies the simulation of a complex flip chip
packages using the available circuit solvers. Future work Hussein H. M. Ghouz was born in Alexandria,
will include investigation and modeling of the effects of Egypt, in 1959. He received the B.Sc. and M.Sc.
conductor and material losses on the performance of flip degrees in radar and communication systems en-
gineenng (Distinction, Honors) from the Military
chip package. Preliminary results indicate that, the contribu- Technical College (MTC) in 1983 and 1990 respec-
tions of these losses to the equivalent circuit are relatively tively. He is currently pursuing the Ph.D. degree in
small. electrical engineering at Arizona State University,
Tempe.
He was a Lecturer in the Department of Elec-
REFERENCES tronic Warfare Engineering (EWE), MTC, Cairo,
Egypt, from 1985 to 1992. He is currently a Re-
H I R. A. Pucel, “Design consideration for monolithic microwave circuits,” searchiTeaching Associate in the Department of Electrical Engineering, An-
IEEE Trans. Microwave Theory Tech., vol. MTT-29, pp. 513-534, 1981. zona State University. His research interests include modeling and design of
121 P. Wallace, A. Wohlert, and A. A. Immorlica, “Flip-chip Be0 technology flip chip interconnects in passive MMIC circuits applications, numerical tech-
applied to GaAs active aperture radars,” Microwave J., Nov. 1982. niques, adaptive space-time filtering techniques, and anti-jamng techniques
r31 R. L. Camisa et al., “A flip-chip GaAs power FET with gate and drain in radar systems.
via connections,” ZEEE Electron Device Lett., vol. EDL-5, no. 4, Apr. Mr. Ghouz is a Member of IEEE Microwave Theory and Technique Society
1984. and IEEE Signal Processing Society
2554 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL 44, NO 12, DECEMBER 1996