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Low Profile XYθ Stage
Model : YRA-070
(Table Size □70mm)
Model : YRA-130
(Table Size □130mm)
90
45
Features
【3-axes are integrated in low profile stage】 【Center Hole】
Slim stage design reduces stack height by 1/2 New Slim Stage equipped with center hole
opening through full stroke
【Durability】
(YRA-070:φ10mm YRA-130:φ35mm)
Ball screw guide mechanism for long life
.
【Higher Resolution】
Tangent-bar drning mechanism provides
higher resolution
Applications
・Alignment, check and bond of Mini Substrate, LCD or Organic EL
・Mark alignment of Screen printing, Substrate
・Various types of inspection
Model : X
CW θ ※Cable Length 200mm
CW
YRA-070
Y Φ10 Thru
CW
※ 10 10 ※ 2-Φ3 Depth 4mm
(120)
Ideal Resolution XY 0.001mm/step ( Half )
Ideal Resolution θ 0.00127deg/step ( Half )
60
70
40
Maximum Speed XY 10mm/sec ( 10kpps/Half )
Maximum Speed θ 12.7deg/sec ( 10kpps/Half )
Horizontal Load Capacity 5kg
Material Aluminum Alloy
Finish Clear Matte Anodizing 40
4-M3 Depth 5mm
Weight 1.3kg 60
4-M4 Depth 7mm
Motor Stepping Motor (Phase current 0.35A) 70
Connector RP13A-12JG-20PC ( Hirose ) (130)
45
X
Model :
CW θ
CW ※Cable Length 200mm
YRA-130 Y ※ ※ ※
CW
Φ35 Thru
22 22 2-Φ5 Depth 4mm
150