300mm Operation Flowcharts and Scenarios

300 mm Operational Flowcharts and Scenarios, V.
10
International SEMATECH Manufacturing Initiative

Technology Transfer #04014488A-TR
International SEMATECH and the International SEMATECH logo are registered service marks of International
SEMATECH, Inc. a wholly-owned subsidiary of SEMATECH, Inc.
International SEMATECH Manufacturing Initiative and the International SEMATECH Manufacturing
Initiative logo are registered service marks of International SEMATECH Manufacturing Initiative, Inc., a wholly-
owned subsidiary of SEMATECH, Inc.
Product names and company names used in this publication are for identification purposes only and may be
trademarks or service marks of their respective companies.
© 2004 International SEMATECH Manufacturing Initiative, Inc.

300 mm Operational Flowcharts and Scenarios, V. 10
Technology Transfer #04014488A-TR
April 30, 2004
Abstract: This document contains a limited number of base operational flowcharts and scenarios for moving
material and processing product within an end-user factory based on the communications interface
requirements specified by the I300I and J300 CIM Global Joint Guidance for 300 mm
Semiconductor Factories – Release Five, April 2000. International SEMATECH (ISMT)
developed these flowcharts and scenarios under the direction of its member companies. The
flowcharts include initialization, material movement, queue management, and product processing
under a variety of operational criteria. Version 10 updates the flowcharts and scenarios to include
changes to the SEMI standards up to the 0304 cycle and to be consistent with current member
company implementation guidance.
Disclaimer: The standards, flowcharts and scenarios are subject to change without notice.
International SEMATECH makes no representations or warranties, either express or implied, as to
merchantability, noninfringement or the suitability of the flowcharts set forth herein for any use or particular
use in connection with any particular application. The user accepts the documentation, materials, standards,
flowcharts and scenarios “as-is” and agrees that determination of suitability of the standards, flowcharts and
scenarios is solely the responsibility of the user.
International SEMATECH makes no representations or warranties concerning the operation or performance
of the flowcharts or the accuracy or completeness of the documentation or materials provided herewith, and,
to the extent permitted by law, excludes all implied warranties of merchantability or fitness for a particular
use. The user agrees that in no event shall International SEMATECH be liable for lost profits, lost data, lost
goodwill nor for other damages in the nature of incidental, consequential or exemplary damages, even if it
has been advised of the possibility of such damages, resulting from user’s use or inability to use the software,
technical or editorial errors or omissions contained herein or the furnishing, performance, operation or use of
the software, documentation or materials provided herewith.
Keywords: Automated Materials Handling, Wafer Transport, Wafer Carriers, Standards, Factory Automation
Authors: Steve Fulton, Gino Crispieri, and Lorn Christal
Approvals: Steve Fulton, Project Manager

Jackie Ferrell, Program Manager
Randy Goodall, Associate Director
Laurie Modrey, Technical Information Transfer Team Leader
iii
Table of Contents
1 INTRODUCTION ..............................................................................................................1
1.1 Applicable Documents................................................................................................1
SEMI Documents .......................................................................................................1
Industry Documents....................................................................................................1
2 FLOWCHARTS – INITIALIZATION ................................................................................2
2.1 Initialization – Clean Initialization ..............................................................................2
Purpose.......................................................................................................................2
Criteria .......................................................................................................................2
Applicable Documents................................................................................................2
Assumptions ...............................................................................................................2
Flowchart Organization...............................................................................................2
Legend........................................................................................................................3
3 FLOWCHARTS – MATERIAL MOVEMENT ................................................................. 13
3.1 Material Movement – Support Services .................................................................... 13
Purpose..................................................................................................................... 13
Applicable Documents.............................................................................................. 13
Assumptions ............................................................................................................. 13
Flowchart Organization............................................................................................. 13
Legend...................................................................................................................... 13
3.2 Material Movement – Move In.................................................................................. 19
Purpose..................................................................................................................... 19
Assumptions ............................................................................................................. 19
Legend...................................................................................................................... 20
3.3 Material Movement – Move Out ............................................................................... 49
Purpose..................................................................................................................... 49
Assumptions ............................................................................................................. 49
Legend...................................................................................................................... 49
4 FLOWCHARTS – PROCESSING .................................................................................... 64
4.1 Processing – Queue Management.............................................................................. 64
Purpose..................................................................................................................... 64
Criteria ..................................................................................................................... 64
Assumptions ............................................................................................................. 64
Legend...................................................................................................................... 65
ISMI, Inc. Technology Transfer #04014488A-TR

iv
4.2 Processing – Product................................................................................................. 75

Purpose..................................................................................................................... 75
Criteria ..................................................................................................................... 75
Assumptions ............................................................................................................. 75
Legend...................................................................................................................... 76
5 FLOWCHARTS – ROUND TRIPS................................................................................... 91
5.1 Round Trips and Base Scenarios ............................................................................... 91
Purpose..................................................................................................................... 91
Assumptions ............................................................................................................. 91
Legend...................................................................................................................... 91
Technology Transfer #04014488A-TR ISMI, Inc.

v
Acknowledgments
We would like to acknowledge and thank the technical contributors listed below. Without their
unflagging commitment and contributions, working diligently to achieve consensus on the
common requirements and intended implementation strategies for the IC companies that they
represent while respecting health business competition, this guidance would not exist. Most of
these participants were members of the original International SEMATECH Equipment
Integration and Automation Test User’s Group (EIATUG) that established the first baseline
flowcharts more than 4 years ago.
Their perseverance and ongoing contributions deserve our profound recognition and respect.
Thank You!
Gino Crispieri (ISMI)

Peter Cross (Intel)
Karl Gartland (IBM)
Blaine Crandall (TI)
Les Marshall (AMD)
Ralf Georgi (Infineon)
Keith Peden (CCS Technologies)
Charisse Rosier (ISMI)
Lorn Christal (ISMI)

vi
Revision History
The following is the revision history (changes from R09 to R10) of this document and its
flowcharts.
Section Comments
All pages Changed copyright statement to “(c) Copyright 1999-2003 International SEMATECH, Inc.”
Cover sheet Changed “Version 09” to “Version 10.”
Cover sheet Changed “December 2000” to "December 2003.”
Cover sheet Changed “SEMI Standards Cycle Baseline: 1000” to “SEMI Standards Cycle 0703.”
Cover sheet Removed the entire Modifications line. Only a single cycle is supported.
Cover sheet Changed “Exception Handling” to “Limited Exception Handling.”
Cover sheet Changed the abstract to reflect this as a basic view, rather than something every factory needs. Removed reference
to CCS
Cover sheet Replace with first abstract sentence with the following: "International SEMATECH (ISMT) developed these
flowcharts and scenarios under the direction of its member companies."
Cover sheet Removed CCS trademark data.
Notices Changed copyright statement to “(c)1999-2003 International SEMATECH, Inc.”
Revision History Removed versions before R10 changes.
1 Updated the Adobe version to 5.0.
1 Removed CCS contact data.
1 Replaced with first sentence with the following: “International SEMATECH (ISMT) developed these flowcharts
and scenarios under the direction of its member companies.”
1.1 Reflected the current version for each standard as of cycle 0703.
1.1 Added the collaboration phase 1 document as a reference.
1.3 Remove the whole section.
2.1 Under Applicable Documents, changed “conforms to” to “is based on.”
2.1.1 Added note to reflect context of alarms not necessarily requiring manual intervention.
2.1.3 Removed the “Note: E30 equipment constants include:” box.
2.1.3 Removed the “Note: E30 collection events include:” box.
2.1.4 Reworded the first Note box to state collection events unique to E40.
2.1.4 Removed the first paragraph in the second Note box, but left E40 transition and waiting for material events.
2.1.6 In second Note box, highlighted that in E87 these are captured as alarms, but for IC maker event may be required.
2.1.6 Added the word “E87” to the action boxes.
2.1.6 Removed the “Note: E87 equipment constants include:” box.
3 In second sentence, removed "both" and "or just individual wafers.”
3.1.1 In “CMHandler PORTACTION” box, added the following to the end of the box: "ServiceStatus=1" to indicate IN
SERVICE.
3.1.1 In the left column “Note: Port cannot be place in service because” box, added reasons.
3.1.1 In “Note: A queued CarrierOut”, added item for internal buffer equipment only and changed empty to empty non-
reserved port.
3.1.1 The Yes from "Is CarrierOut Queued?" decision box now goes directly to the top of 3.3.4 (down its middle
column).
3.1.2 In “CMHandler PORTACTION” box, added the following to the end of the box: "ServiceStatus=0"

vii
Section Comments
3.1.2 In the left column “Note: Port cannot be place out of service because” box, added reasons.
3.1.3 Changed S3F23 to S3F27, S3F24 to S3F28, and updated their related parameters.
3.1.3 Added decision block for reservation state.
3.1.3 In last center block, changed “AMHS delivery” to "AHMS action.”
3.1.4 Changed S3F23 to S3F27, S3F24 to S3F28, and updated their related parameters.
3.1.4 Added decision block for reservation state.
3.1.4 In last center block, changed “AMHS delivery” to "AHMS action.”
3.2.1.1 Removed parameters in Bind box.
3.2.1.1 In the “Note: A Bind service fails”, added the last bullet for load port out of service and transfer blocked.
3.2.1.1 Added note for asynchronous events.
3.2.1.2 Removed parameters in CarrierNotification box.
3.2.1.2 Added CAACK=6 to CM Handler box associated with the "Issue error" box.
3.2.1.3 Change Note for Reservation State Model and services to indicate they are required for all equipment.
3.2.1.3 Added load port out of service as a reason for ReserveAtPort.
3.2.1.4 Removed parameters in CancelBind box.
3.2.1.4 Changed third failure reason to "either loadport or carrier ID are not specified.”
3.2.1.5 Removed parameters in CancelCarrierNotification box.
3.2.1.5 Changed first box to "CancelCarrierNotification Issued.”
3.2.1.6 Removed parameters in CancelReservationAtPort box.
3.2.2.1 In initial decision box, removed LP association question.
3.2.2.1 Moved decision for Manual before decision for Reservation.
3.2.2.1 Exception handling now refers to end-user or supplier documentation.
3.2.2.1 Reduced this section from 3 to 2 pages. Updated the labels starting on page 3.2-8.
3.2.2.1 The "Begin/signal placing carrier on load port" box was moved.
3.2.2.1 In a note, changed E81 to E87.
3.2.3.3 Deleted CarrierOut from the title.
3.2.3.3 Added a step that states, "Wait for carrier to arrive at destination.”
3.2.3.2 Changed carrier clamp scenario to Clamp Carrier (initiated the action), Is Carrier Clamped? (did the action
succeed), No-Error (exception handling), Yes-Carrier Clamped-Send event (looks good, notify host).
3.2.3.2 Removed a redundant NOT ASSOCIATED event and CancelBind service related to the load port being associated
with another carrier.
3.2.3.7 1) Removed "C.2.5 is TBD.” 2) Changed “Slot map read fail error.” 3) Made last decision box a question.
3.2.3.7 Deleted the note at the top of the page that read “For slot map read fail, host should only issue a CancelCarrier since
the equipment cannot provide a map which is necessary for either host or equipment based slot map verification.”
There was an identical note at the bottom of the page and it was moved to the right side of the page.
3.2.4.1 Deleted the step at the bottom of the page that stated “Make wafer available for transfer from carrier.”
3.2.4.1 Changed the verbiage to read “UNOCCUPIED” from “NOT OCCUPIED.”

viii
Section Comments
3.2.4.2 Delete entire section and its contents. This is no longer supported in the document.
3.3.1 Exception handling now refers to end-user or supplier documentation.
3.3.1 Removed last note in this section that had discussed host operation.
3.3.2 Modified boundary note to include all five cases.
3.3.2 Added a YES option to the first decision block on the page. It was not present.
3.3.2 Added a note which states: Operator removes the carrier before the equipment being ready as defined in the
boundary conditions above.
3.3.2 Reduced this section from 3 to 2 pages. Updated the labels starting on page 3.3-5.
3.3.2 Deleted two steps, one a decision block for CarrierOut queued, and the other a step for Process Next CarrierOut to
after TRANSFER BLOCKED and the triggering of the Presence/Placement sensors.
3.3.2 Changed the Load port presence/placement sensors triggered step to be a decision block.
3.3.2 Added a step and a note for Wait for operator End/signal.
3.3.3 Modified one step to match the manual unload scenario 3.3.2. Note that the Carrier Placement logic was changed
and that the Carrier Placement Error alarm was removed.
3.3.3 Deleted the RESERVATION state model logic (3 blocks) and moved the “Leave LPTSM= TRANFER BLOCKED,
process next CarrierOut” state into the equipment column after CarrierOut queued decision block.
3.3.4 Moved the TRANFER BLOCKED step before the CarrierOut Ack to ensure the load port's availability. The
TRANFER BLOCKED step was after the CarrierOut Ack step and the concern was that the load port had to be
blocked as soon as possible. Note that state transitions for Reservation and Associateion were also combined with
Transfer Blocked in R10.
3.3.4 Modified the “Begin transfer from internal buffer” step to read “Queue the CarrierOut service.”
3.3.4 Add CarrierOut.rsp note.
3.3.4 Added an alarm error message “Alarm (Carrier Presence Error) S5F1 [E87]” next to the Carrier Presence error step.
4.1 Removed the first bullet in the second paragraph under Criteria is incorrect. E40 PRMtrlOrder and E94
ProcessOrderMgmt are independent of one another.
4.1.1.3 Renamed the PRJOBQueued/Pooled State name to Queued/Pooled.
4.1.1.3 Deleted the off-page reference for Processing Flowchart 4.2 at the bottom of the page.
4.1.1.4 Renamed the PRJOBQueued/Pooled State name to Queued/Pooled.
4.1.1.4 Async PRJobEvent (PJSM SCT-19) was changed to PJSM SCT-18 as 19 did not exist in the standard.
4.1.1.4 Changed the TERMINAL block to refer back to 4.1.1.3, Wait for Host - Create next Process Job state block. Off
page connector (2A/5).
4.1.2.3 Deleted the off-page reference for Processing Flowchart 4.2 at the bottom of the page.
4.1.2.3 Revised the last note on the page to read "Note: Once a Control Job is queued, it may be acted upon by CJAbort,
CJStop or CJCancel or by the CJHOQ command."
4.1.2.5 Async PRJobEvent (PJSM SCT-19) was changed to PJSM SCT-18 as 19 did not exist in the standard.
4.2.2 Changed the last block to a decision block, with a NO return just before itself.
4.2.3 Deleted the event associated with Async Event, ('JobWaitingforStart'), and S6F11 [E94].
4.2.3 Deleted off-page connectors and associate arrows from ControlJobStart error to Selected State.
4.2.3 Added a note, which states, "There is no E94-0703 CJSM transition in place to handle this. It should go to either the
Selected or Paused state."
4.2.4 Changed sync PRJobEvent , (PJSM SCT-3), S6F11[E40] from SCT-3 to SCT-2.
4.2.4 Deleted the arrow from Issue Process Job Setup Error [E40] to PJSM State: SETTING UP [E40].
4.2.4 Deleted the transitionAsync PRJobAlert (Setup) S6F11 [E40] to the PJ HANDLER state. These events are no
longer used.
4.2.4 Deleted the transition from Async PRJobEvent (WaitingForMaterial) If required by Process Job S6F11 [E40] to the
MATERIAL HANDLER state. These events are no longer used.
4.2.5 Deleted the transition Async PRJobAlert (WaitingForStart) S6F11 [E40] to PJ HANDLER. This event is no longer
used.
4.2.5 Changed state transition Async PRJobEvent (PJSM SCT-5) S6F11 [E40] from SCT-5 to SCT-3.
4.2.5 Changed state transition Async PRJobEvent (PJSM SCT-5) S6F11 [E40] from SCT-6 to SCT-5.

ix
Section Comments
4.2.5 Would like to change flow chart to look like 4.2.3., specifically with a decision block for ManualStartSuccessful.
4.2.5 Removed PRJobAlerts.
4.2.7 Added a note to SCT-13 that states, “Note: Not withstanding related E90 SCT-13 requirement, ISMT member
companies require SCT-13 for all equipment.”
4.2.8 Changed from SCT-7 to SCT-6, and SCT-8 to SCT-7.
4.2.8 Changed from PROCESSING COMPLETE to PROCESS COMPLETE.
4.2.8 Removed PRJobAlerts.
4.2.10 Copied the entire page from the appendix A.2-4.2.10 here since it's more representative of the current flow.
4.2.10 Changed from SCT-15 to SCT-16, and SCT-18 to SCT-17.
5 Removed reference to SELETE since section 5.2 has been removed.
5.1 Minor typo changes.
5.2 Deleted Section 5.2.
A Deleted section A.
B Deleted section B.
C Deleted section C.
D Deleted section D.

1
1 INTRODUCTION
International SEMATECH (ISMT) developed the following flowcharts and scenarios under the
direction of its member companies. Flowcharts cover initialization, material move in, material
move out, queue management, and product processing under a variety of operational criteria
within a 300 mm semiconductor factory.
The intent of these flowcharts is to cover the various operational criteria that would be
considered by ISMT’s member companies when developing their 300 mm factories. A factory
may not use the entirety of each flowchart, but rather only those portions applicable to the
factory’s operation.
Conversely, an equipment supplier would consider only those flowcharts, or portions thereof,
that are applicable to the supplier’s equipment, but still within the criteria of multiple end-user
factories.
The flowcharts are presented in a cross-functional format developed in Visio 2000.
1.1 Applicable Documents

The following documents are applicable to the flowcharts and scenarios in this document
SEMI Documents
• E5-0703 SECS-II Message Content (SECS-II)
• E30-0703 Generic Equipment Model (GEM)
• E39-0703 Object Services Standard (OSS)
• E40-0703 Processing Management (PJM)
• E84-0303 Enhanced Carrier Handoff PI/O (EPIO)
• E87-0703 Carrier Management Standard (CMS)
• E90-0703 Substrate Management Standard (STS)
• E94-0702 Control Job Management (CJM)
Industry Documents
• I300I and J300 CIM GJG for 300 mm Semiconductor Factories, Release Five (GJG)
• ISMT Technology Transfer 00053953D-XFR – SELETE/ISMT CIM Base Functionality
Requirements Collaboration Phase 1

2
2 FLOWCHARTS – INITIALIZATION
The flowcharts in this section pertain to initialization situations.
2.1 Initialization – Clean Initialization
Purpose
This is a cross-functional operational flowchart that describes the equipment's communication
interface behavior from the host’s and the automated material handling system’s (AMHS’) point
of view during a clean initialization.
Criteria
• A clean initialization is defined as an initialization following a power-down or software
reboot that occurred when the equipment was idle and contained no material and no jobs.
• Equipment initialization is based on the requirements of each standard and of each specific
equipment.
Applicable Documents
This operational flowchart is based on the following industry standards and specifications:
• SEMI E30 – Generic Equipment Model
• SEMI E40 – Processing Management
• SEMI E84 – Enhanced Carrier Handoff
• SEMI E87 – Carrier Management
• SEMI E90 – Substrate Tracking
• SEMI E94 – Control Job Management
Assumptions
1. <none>
Flowchart Organization
2.1.1 Summary Equipment Initialization
2.1.2 Equipment Specific Initialization
2.1.3 E30 Generic Equipment Model (GEM) Initialization
2.1.4 E40 Processing Management (PM) Initialization
2.1.5 E84 Enhanced Parallel (/O (EPIO) Initialization
2.1.6 E87 Carrier Management System (CMS) Initialization
2.1.7 E90 Substrate Tracking System (STS) Initialization
2.1.8 E94 Control Job Management (CJM) Initialization

3
Legend
AMSM Access Mode State Model [E87] LPTSM Load Port Transfer State Model [E87]
COSM Carrier Object State Model [E87] SCT-# State Change Transition - <transition#>
LP Load Port SLSM Substrate Location State Model [E90]
LPCASM Load Port/Carrier Asso. State Model [E87] SOSM Substrate Object State Model [E90]
LPRSM Load Port Reservation State Model [E87]
Off-page Reference
Outgoing Incoming Control (and Data Message)
Directional Here/To Here/From
Process Decision Terminator Data Message
'Or' Section Section
Explanatory Note

4

Comments Equipment Host
Equipment
Power On
Note: The initialization blocks for the
SECS and PIO interfaces are
sequence independent.
Flowchart 2.1.5
E37.1 Connect
E84
and Select
Initialization
Flowchart 2.1.3
E30
Note: The only required order of Initialization
initialization sequence is for E37.1 and
E30. The remaining initialization
blocks are sequence independent.
Flowchart 2.1.2
Equipment
Specific
Initialization
Flowchart 2.1.6
E87
Initialization
Note: Each of these may or may not

initialize alarms. During equipment Flowchart 2.1.4
operation, alarms do not necessarily E40
reflect a requirement for manual Initialization
intervention.
Flowchart 2.1.8
E94
Initialization
Flowchart 2.1.7
E90
Initialization
Equipment ready for

product processing and
material move in.

5

Note: This flowchart initializes Begin Equipment

equipment constants, collection events Specifc Init
and alarms that are unique to a specfic
equipment and are not part of any
standard. S2,F15
(ECS)
Set Equipment
Constants
S2,F16
(ECA)
S5,F3 (EAS)
(ALED
Bit8=1)
Enable Alarms
Equipment
S5,F4 Supervisor
(EAA)
S2,F33 (DR)
S2,F35 (LER)
S2,F37
(EDER)
Set Collection
Events (CEED=TRUE)
S2,F34 (DRA)
S2,F36 (LERA)
S2,F38
(EDEA)
Terminate
Equipment
Specific Init

6

Begin
E30 Init
Communication
State Model
system default
state set to:
ENABLED
S1,F13
S1,F14
(CR)
(CRA)
Establish AND/OR Equipment
Communications Supervisor
S1,F13
S1,F14
(CR)
(CRA)
Communication
State Model state:
Note: The ON-LINE substate is set to COMMUNICATING
REMOTE by operator once. The
equipment is then responsible for
maintaining this value in non-volatile
Control State
memory. Then the next time the
Model
equipment powers-on, the Control
system default
State should transition to ON-LINE/
state set to:
REMOTE once communications is
ON-LINE
established.
Control State Event:

Model state: Control
Note: Use a default report if not
ON-LINE/REMOTE State
previously set by host.
REMOTE
S2,F31
Note: This must be the 16-byte TIME (DTS) Equipment
format. All TIME or Clock formats Set Current Supervisor
must be 16-byte. Date/Time
S2,F32
(DTA)
S2,F15
(ECS)
Set Equipment
Constants
S2,F16
(ECA)
2.1.3A
(to 2.1.3B)

7
2.1.3 E30 Generic Equipment Model (GEM) Initialization (continued)

2.1.3 E30 Generic Equipment Model (GEM) Initialization (continued)
2.1.3B
(from 2.1.3A)
S2,F37
(EDER)
(CEED=FALSE
with zero
length list)
Disable all
Collection Events
S2,F38
(EDEA)
S2,F33 (DR)
S2,F35 (LER)
S2,F37
(EDER)
(CEED=TRUE)
Set E30
Collection Events
S2,F34 (DRA)
S2,F36 (LERA)
S2,F38
(EDEA)
S5,F3 (EAS)
Equipment
(ALED Bit8=0
Supervisor
with ALID
zero
Note: Specific alarms are enabled per length item)
Disable all
other standards or equipment-specific
Alarms
initialization flowcharts in this section
2.1. S5,F4
(EAA)
Terminate
E30 Init

8

Begin
Note: This flowchart initializes E40 Init
collection events that are unique to
E40. S2,F33 (DR)
S2,F35 (LER)
S2,F37
(EDER)
Set E40 (CEED=TRUE) Equipment
Note:
Collection Events Supervisor
S2,F34 (DRA)
E40 collection events include: S2,F36 (LERA)
Process Job State Model S2,F38
Transition events (EDEA)
Waiting for Material
Terminate
E40 Init

9

Begin
Next E84 PI/O

interface on
equipment.
Set to OFF:
L_REQ
U_REQ
READY
No
Set to ON:
HO_AVBL
ES
All E84 PI/O

interfaces
initialized?
Yes
Terminate

10

Note: This flowchart initializes Begin

collection events and alarms that are E87 Init
unique to E87.
Note: The alarms presented below

are defined in E87. IC makers may
require them to be defined events:
• PIO Failure
• Access Mode Violation S5,F3 (EAS)
• Carrier Verification failure (ALED
• Slot Map Read Failed Bit8=1)
• Slot Map Verification Failed Enable E87
• Attempt To Use Out Of Service Alarms
Load Port S5,F4
• Carrier Presence Error (EAA)
• Carrier Placement Error
• Carrier Dock/Undock Failure
• Carrier Open/Close Failure
• Duplicate CarrierID
• Internal Buffer Carrier Move
Failure (int buffer equipment only)
• Carrier Removal Error S2,F33 (DR)
S2,F35 (LER)
S2,F37
Note: E87 collection events include: (EDER)
• Load Port Transport State Model (CEED=TRUE)
Transition events
• Carrier State Model transition Set E87
events Collection Events Equipment
• Load Port/Carrier Association Supervisor
S2,F34 (DRA)
State Model transition events S2,F36 (LERA)
• Access Mode State Model S2,F38
transition events (EDEA)
• Load Port Reservation State
Model transition events
• Buffer Capacity Changed
• Carrier Closed
• Carrier Location Change
• Carrier Opened
• CarrierID Read Fail
• CarrierAccessingStatus Attribute
Change
• Carrier Approaching Complete
S2,F15
Set E87 (ECS)
Equipment
Note: E87 equipment constants Constants
S2,F16
include:
(ECA)
• BypassReadID
Terminate
E87 Init

11


collection events that are unique to E90 Init
E90. S2,F33 (DR)
S2,F35 (LER)
S2,F37
Note: E90 collection events include: (EDER)
• Substrate State Model transition (CEED=TRUE)
events Set E90 Equipment
• Substrate Location State Model Collection Events Supervisor
transition events S2,F34 (DRA)
S2,F36 (LERA)
S2,F38
(EDEA)
Terminate
E90 Init

12


equipment constants, collection events E94 Init
and alarms that are unique to E94. S2,F33 (DR)
S2,F35 (LER)
S2,F37
(EDER)
Note: E94 collection events include: (CEED=TRUE)
• Control Job State Model transition Equipment
Set E94
events Supervisor
Collection Events
S2,F34 (DRA)
S2,F36 (LERA)
S2,F38
(EDEA)
Terminate
E94 Init

13
3 FLOWCHARTS – MATERIAL MOVEMENT

These flowcharts pertain to the movement of material to and from the equipment. This includes
carriers with wafers.
3.1 Material Movement – Support Services
Purpose
This cross-functional operational flowchart describes the equipment’s communication interface
behavior from the host’s and operator’s point of view for support services such as changing the
load port access mode and placing the load port in and out of service.
This operational scenario is based on the following industry standards and specifications:
• SEMI E39 – Object Services
• SEMI E84 – Enhanced Carrier Handoff PI/O
Assumptions
1. <none>
3.1.1 Place Port In Service
3.1.2 Place Port Out of Service
3.1.3 Access Mode Change – AUTO
3.1.4 Access Mode Change – MANUAL
Legend
Off-page Reference
Outgoing Incoming
Control (and Data Message)
Explanatory Note

14

Operator Equipment Host
CM Handler
Operator Requests Port ChangeServiceStatus ChangeServiceStatus PORTACTION=
IN SERVICE (ServiceStatus= S3F25 [E87] "ChangeServiceStatus",
IN SERVICE) [E87] ServiceStatus=1
LPTSM State is
IN SERVICE?
Yes
ChangeServiceStatus CM Handler
Issue Ack S3F26 [E87] CAACK=0
No
Place port IN
SERVICE
Port Placed
IN SERVICE
Successfully? Note: ChangeServiceStatus.rsp is sent
Note: A port may not be put in service to either host or operator console
because the equipment is unable to depending on where the
operate the port due to hardware or ChangeServiceStatus.req originated.
No
communication problems
Issue Error S3F26 [E87] CAACK=1,2,3,5
Yes
S3F26 [E87] CAACK=0,4
LPTSM State:
IN SERVICE
Event
CM Handler
(LPTSM SCT-2)
S6F11 [E87]
3.1.1A
(to 3.1.1B)

15
3.1.1 Place Port In Service (continued)

3.1.1 Place Port In Service (continued)
3.1.1B
(from 3.1.1A)
Is carrier
present?
No
Note: Is CarrierOut
• This step applies only to internal queued?
buffer equipment
• A queued CarrierOut always
grabs hold of an empty
nonreserved port. Yes
3.1.1C
(to 3.3.4A)
No
Yes
LPTSM State: Event CM Handler

TRANSFER (LPTSM SCT-4)
READY S6F11 [E87]
Event
LPTSM State:
(LPTSM SCT-5)
READY TO LOAD
S6F11 [E87]
Is the FOUP ready

to unload?
No
LPTSM State: Event CM Handler

Yes TRANSFER (LPTSM SCT-4)
BLOCKED S6F11 [E87]
CM Handler
LPTSM State: Event
READY S6F11 [E87]
LPTSM State: Event

READY TO (LPTSM SCT-5)
UNLOAD S6F11 [E87]

16

Operator Requests Port (ServiceStatus= ChangeServiceStatus PORTACTION=
OUT OF SERVICE OUT OF SERVICE) S3F25 [E87] "ChangeServiceStatus",
[E87] ServiceStatus=0
Port Current
State is OUT OF
SERVICE?
Yes
Issue Ack S3F26 [E87]
No CAACK=0
Place port OUT

OF SERVICE.
Port Placed
OUT OF SERVICE Note: ChangeServiceStatus.rsp is sent
Note: A port may not be put out of Successfully? to either host or operator console
service because the equipment is depending on where the
unable to operate the port due to ChangeServiceStatus.req originated.
hardware or communication problems.
No
Issue Error CAACK=1,2,3,5
Yes S3F26 [E87]
S3F26 [E87] CAACK=0,4
LPTSM State:
OUT OF SERVICE
Event CM Handler
(LPTSM SCT-3)
S6F11 [E87]

17

ChangeAccess CM Handler
Operator Requests Access ChangeAccess
(AccessMode=1) ACCESSMODE=1
Mode Change to AUTO S3F27 [E87]
[E87]
AMSM Current
State is AUTO?
Yes
No ChangeAccess CM Handler
Issue ack CAACK=0
S3F28 [E87]
LPRSM
Current State is
RESERVED?
Yes
No Issue Error
S3F28 [E87] CAACK=5
Note: Transfer in progress boundaries

are defined in E87, Table 8, Carrier Carrier Transfer
Note: ChangeAccess.rsp is sent
Transfer Boundaries. Underway?
to either host or operator console
depending on where the
ChangeAccess.req originated.
Yes
No Access Mode ChangeAccess CM Handler

Change Error S3F28 [E87] CAACK=1,2,3,5
S3F28 [E87] CAACK=0,4
AMSM State:
AUTO Event
CM Handler
(AMSM SCT-2)
S6F11 [E87]
AMHS
Assert Make handoff
LP Handler (HO_AVBL) available for
[E84] AMHS action

18

ChangeAccess
Operator Requests Access Service
ACCESSMODE=0
Mode Change to MANUAL (AccessMode=0) S3F27 [E87]
[E87]
AMSM
Current State is
MANUAL?
Yes
Issue Ack CAACK=0
S3F28 [E87]
No
LPRSM
Current State is
RESERVED?
Yes
Issue Error CAACK=5
No S3F28 [E87]
Note: Transfer in progress boundaries

are defined in E87, Table 8, Carrier
Transfer Boundaries.
Note: ChangeAccess.rsp is sent
Carrier Transfer to either host or operator console
Underway? depending on where the
ChangeAccess.req originated.
Yes
Access Mode ChangeAccess CM Handler

Change Error S3F28 [E87] CAACK=1,2,3,5
No
S3F28 [E87] CAACK=0,4
AMSM State:
MANUAL
Event CM Handler
(AMSM SCT-3)
S6F11 [E87]
AMHS
Drop Make handoff

LP Handler (HO_AVBL) unavailable for
[E84] AMHS action

19
3.2 Material Movement – Move In
Purpose
behavior from the host’s and AMHS’ point of view and within the following criteria during
carrier move in:
• Delivery method (automatic/manual)
• Verification method (host/equipment/none)
• Buffer type (fixed/internal)
• SEMI E90 – Substrate Management
Assumptions
1. <none>
3.2.1 Material Movement – Move In – Assignment
3.2.1.1 Bind
3.2.1.2 Carrier Notification
3.2.1.3 Reserve At Port
3.2.1.4 Cancel Bind
3.2.1.5 Cancel Carrier Notification
3.2.1.6 Cancel Reservation At Port
3.2.2 Material Movement – Move In – Carrier Placement
3.2.2.1 Manual Load – Single Handoff
3.2.2.2 Automated Load – Single Handoff
3.2.2.3 Internal Buffer – CarrierIn Load After CarrierOut
3.2.3 Material Movement – Move In – Verification
3.2.3.1 Carrier ID Verification – Summary
3.2.3.2 Carrier ID Verification – Detailed
3.2.3.3 Equipment Based ID Verification
3.2.3.4 Host-Based ID Verification
3.2.3.5 Carrier ID Read Failed
3.2.3.6 Carrier ID Reader Unavailable
3.2.3.7 Slot Map Verification

20
3.2.4 Material Movement – Move In – Substrates

3.2.4.1 Carrier Delivered Substrates
Legend
Off-page Reference
Outgoing Incoming
Explanatory Note

21

3.2.1.1 Bind
3.2.1.1 Bind
Operator requests Bind Bind Service Instantiate Bind Service CM Handler

service [E87] Carrier Object S3F17 [E87] CARRIERACTION="Bind"
Note: A Bind service fails for at least

the following reasons:
CarrierID or PortID not specified Carrier Object
specified load port (PortID) does Instantiated
not exist Note: Bind.rsp is sent to either
Successfully?
carrier (CarrierID) previously host or operator console
instantiated via: depending on where the Bind.req
Bind service originated.
CarrierNotification service No
carrier ID read
LPTSM State is not READY TO
Bind Ack CM Handler
LOAD Yes Issue error
LPRSM is RESERVED S3F18 [E87] CAACK=1,2,3,5
LPCASM State is ASSOCIATED
load port out of service or transfer
blocked
Bind Ack CM Handler

Issue success CAACK=0,4
S3F18 [E87]
COSM State: Note: State model transitions are

NOT ACCESSED asynchronus and the order in which
the equipment reports the events may
be alternated.
COSM State:
Note: Only one event is sent to the SLOT MAP NOT
host when entering the Carrier State READ
Model. This event contains the entry
state for each of the three substates. Async Event CM Handler
Thus, this one event covers the three COSM State:
(COSM SCT-2)
COSM transitions: 2, 12, 17. ID NOT READ
S6F11 [E87]
Async Event CM Handler

LPCASM State:
(LPCASM SCT-2)
ASSOCIATED
S6F11 [E87]

LPRSM State:
(LPRSM SCT-2)
RESERVED
Note: The Reservation Visible Signal S6F11 [E87]
is an E87 optional capability. If it is
installed, then the visible signal shall
remain present as long as the load port
state is RESERVED. The actual type If installed, display the
of signal is equipment specific. Reservation Visible Signal
to indicate Reserved

22

CM Handler
Operator requests Carrier CarrierNotification Instantiate CarrierNotification CARRIERACTION=
Notification service [E87] Carrier Object S3F17 [E87] "CarrierNotification"
Carrier Object
Note: CarrierNotification.rsp is sent to
Instantiated
either host or operator console
Note: A CarrierNotification service Successfully?
fails for at least the following reasons:
CarrierNotification.req originated.
CarrierID not specified
carrier (CarrierID) previously
instantiated via: No
Bind service
CarrierNotification service
carrier ID read CarrierNotification CM Handler
Issue error Ack CAACK=1,2,3,5
Yes S3F18 [E87]
CarrierNotification CM Handler
Issue success Ack CAACK=0,4
S3F18 [E87]
COSM State:
NOT ACCESSED
COSM State:
SLOT MAP NOT
READ
Note: Only one event is sent to the Async Event CM Handler
host when entering the Carrier State COSM State:
(COSM SCT-2)
Model. This event contains the entry ID NOT READ
S6F11 [E87]
state for each of the three substates.
Thus, this one event covers the three
COSM transitions: 2, 12, 17.

23

Operator requests CM Handler

ReserveAtPort Reserve At Port ReserveAtPort
Reserve At Port CARRIERACTION=
[E87] issued S3F25 [E87] "ReserveAtPort"
service
Note: Not withstanding related E87

LPRSM requirements for fixed and
internal equipment, ISMT member
companies require the Load Port
Reservation State Model and Port Reserved
associated services for all equipment. Successfully?
Note: ReserveAtPort.rsp is sent to
ReserveAtPort.req originated.
No
Note: A ReserveAtPort service fails ReserveAtPort CM Handler

for at least the following reasons: Issue error Ack CAACK=1,2,3,5
specified load port (PortID) does S3F26 [E87]
not exist Yes
PortID not specified
LPTSM State is not READY TO
LOAD
LPRSM is RESERVED
LPCASM State is ASSOCIATED
Load Port is OUT OF SERVICE ReserveAtPort CM Handler
Ack CAACK=0,4
S3F26 [E87]
LPRSM State:
RESERVED
Event CM Handler
(LPRSM SCT-2)
Note: The Reservation Visible Signal S6F11 [E87]
state is RESERVED. The actual type
of signal is equipment specific. If installed,
display the
Reservation
Visible Signal to
indicate
Reserved

24

3.2.1.4 Cancel Bind
3.2.1.4 Cancel Bind
Operator requests CancelBind CM Handler

CancelBind Cancel Bind CARRIERACTION=
Bind service S3F17
[E87] issued "CancelBind"
cancellation [E87]
Note: A CancelBind service fails for at

least the following reasons: Bind Cancelled
specified load port (PortID) does Successfully?
not exist Note: CancelBind.rsp is sent to either
specified carrier (CarrierID) does host or operator console depending on
not exist where the CancelBind.req originated.
both load port or carrier ID are not No
specified
LPTSM is not READY TO LOAD
COSM is not ID NOT READ and Yes CancelBind CM Handler
not SLOT MAP NOT READ Issue error Ack CAACK=1,2,3,5
LPCASM is NOT ASSOCIATED S3F18 [E87]
After the carrier has been
delivered to the correct load port,
and service is received CM Handler
CancelBind
Issue success Ack CAACK=0,4
S3F18 [E87]

LPRSM State: (LPRSM SCT-
NOT RESERVED 3)
S6F11 [E87]

LPCASM State:
(LPCASM SCT-
NOT
3)
ASSOCIATED
S6F11 [E87]

Note: The Reservation Visible Signal Delete carrier (COSM SCT-
is an E87 optional capability. If it is object 21)
installed, then the visible signal shall S6F11 [E87]
of signal is equipment specific.
If installed,
display the
Reservation
Visible Signal to
indicate Not
Reserved

25

Operator requests Cancel Carrier CM Handler

CancelCarrierNotification CancelCarrierNotification
Carrier Notification Notification CARRIERACTION=
[E87] S3F17 [E87]
service cancellation issued "CancelCarrierNotification"
Note:
Carrier CancelCarrierNotification.rsp is
Notification Cancelled sent to either host or operator
Note: A CancelCarrierNotification Successfully? console depending on where the
service fails for at least the following CancelCarrierNotification.req
reasons: originated.
specified carrier (CarrierID) does
not exist No
CarrierID not specified
COSM is not ID NOT READ and
not [ID] WAITING FOR HOST CancelCarrier-
After the carrier has been Notification CM Handler
Yes Issue error
delivered to the correct load port, Ack CAACK=1,2,3,5
and service is received S3F18 [E87]
CancelCarrier- CM Handler
Notification CAACK=0,4
Issue success
Ack
S3F18 [E87]

Delete carrier
(COSM SCT-2)
object
S6F11 [E87]

26

Operator requests Cancel CM Handler

CancelReservationAtPort CancelReservationAtPort CARRIERACTION=
ReserveAtPort Reservation At
[E87] S3F25 [E87] "CancelReservationAtPort"
service cancellation Port issued
ReserveAtPort
Cancelled Note: CancelReservationAtPort.rsp is
Note: A CancelReservationAtPort
Successfully? sent to either host or operator console
service fails for at least the following
reasons:
CancelReservationAtPort.req
specified load port (PortID) does
originated.
not exist No
PortID not specified
LPTSM is not READY TO LOAD CancelReservation- CM Handler
LPRSM is NOT RESERVED Yes CAACK=1,2,3,5
Issue error AtPort Ack
If a carrier has already been
S3F26 [E87]
delivered to the load port
CancelReservation- CM Handler
Issue success AtPort Ack CAACK=0,4
S3F26 [E87]

LPRSM State:
(LPRSM SCT-3)
Note: The Reservation Visible Signal NOT RESERVED
S6F11 [E87]
of signal is equipment specific. If installed,
display the
Reservation
Visible Signal to
indicate Not
Reserved

27

Begin
Note: The operator portion of this

flowchart lists only one
On equipment representative possible set of
or bay console, is instructions for the operator. Each
load port access IC maker factory will detemine its
mode = MANUAL? own set of operator instructions. In
any case, the operator eventually
places the carrier on the load port
No successfully.
Do not place carrier onto

load port. (place load port
Yes
in manual mode.
Load port Carrier Presence
sensor triggered
Begin/signal
placing carrier on
load port
LPTSM =
READY TO
LOAD?
Note: This begin manual load No

boundary is user defined. Examples Alarm
per E87 Table 8 are: (Carrier
Invalid state
• Presence Sensor triggered Presense CM Handler
error
• Bind service being received Error)
• load port door opening or closing S5F1 [E87]
• an input form host or operator Yes
console Exception
Handling
Note: Exception handling for these
Note: The timing of the begin and end
exceptions is not handled within this
boundaries may be minimal or non-
document. Refer to either end-user or
existent, especially in the case where
equipment supplier document.
the operator simply places the carrier
AMSM =
on the load port with no other input
AUTO?
from the operator, equipment or host.
Yes
Note: If a carrier is placed on a load Alarm
port while in Auto, an access mode (Access
Access mode
violation is issued. Mode CM Handler
error
Violation)
S5F1 [E87]
No
Exception
Handling
3.2.2.1A
(to 3.2.2.1B)

28

3.2.2.1 Manual Load – Single Handoff (continued)
3.2.2.1 Manual Load – Single Handoff (continued)
3.2.2.1B
(from 3.2.2.1A)
Async Event
LPTSM State: CM Handler
(LPTSM SCT-6)
TRANSFER BLOCKED
S6F11 [E87]
Is the load port

Carrier Placement
sensor triggered?
No
Alarm (Carrier CM Handler

Carrier
Placement Error)
Placement error
S5F1 [E87]
Yes Exception Note: Exception handling for this

Handling exception is not handled within this
End/signal Carrier has been Async Event

placing carrier on detected in correct (Material Received) CM Handler
load port position S6F11 [E30]
Note: According to E87 11.6.1, the

end signal requires a software or
hardware mechanism for the LPRSM =
operator. RESERVED?
Yes
Note: This should have only been in
Reserve state from a previous Bind,
Async Event
ReserveAtPort or CarrierOut. LPRSM State:
No (LPRSM SCT-3) CM Handler
NOT RESERVED
S6F11 [E87]
3.2.2.1C
(to 3.2.3.2A)

29

AMHS (Active) Equipment (Passive) Host
As commanded Note: Any TPx (x=1-6) Interlock

by host Timers that timeout (expire) force a
E87 PIO Failure alarm to be sent to the
host. TP6 does not apply to single
Arrival at load handoff.
port handoff
location with
carrier
Both
Note: HO_AVBL=ON also implies that
No HO_AVBL and
the load port AMSM state must be
ES are ON?
AUTO. In theory, an access mode
violation should not happen on the
Notify Host equipment if the equipment has
Yes
Assert HO_AVBL=ON and if the AMHS
(CS_[0,1]) LP Handler respects the signal when it is OFF.
Specify load port [E84]
Assert
(VALID)
Communications is valid. [E84]
Set TA1 Timer.
LPTSM =
READY TO
LOAD?
No
Alarm (PIO
Not ready error Failure CM Handler
S5F1 [E87]
Yes
Exception
Handling
Note: Exception handling for these

exceptions is not handled within this
AMSM =
MANUAL?
Yes
Async Alarm (Access
Mode Violation)
CM Handler
S5F1 [E87]
Access mode
error
No Async Alarm (PIO CM Handler
Failure) S5F1 [E87]
Exception
Handling
3.2.2.A
(to 3.2.2.2B)

30

3.2.2.2 Automated Load – Single Handoff (continued)

3.2.2.2B
(from 3.2.2.2A)
Assert
Load port is assigned for Load.
(L_REQ)
Set TP1 Timer.
[E84]
Request transfer. Assert

Clear TA1 Timer. (TR_REQ)
Set TA2 Timer. [E84]
Load port ready for
Assert
transfer.
(READY)
Clear TP1 Timer.
[E84]
Set TP2 TImer.
Async Event
LPTSM State:
(LPTSM SCT-6) CM Handler
TRANSFER BLOCKED
S6F11 [E87]
Start transfer. Assert

Clear TP2 Timer.
Clear TA2 Timer. (BUSY)
Set TP3 Timer.
Load port Carrier Presence

Place carrier on load port sensor triggered
Is the load port

TA4 TImed
Carrier Placement
Out?
sensor triggered?
Yes No No
Exception TP3 Timed

Handling Out?
No
Yes Note: Exception handling for this
exception is not handled within this
Yes document. Refer to either end-user or
Exception
Handling
3.2.2.2C 3.2.2.2D
(to 3.2.2.2E) (to 3.2.2.2F)

31


3.2.2.2E 3.2.2.2F
(from 3.2.2.2C) (from 3.2.2.2D)
Carrier has been

Drop detected in
(L_REQ) correct position.
[E84] Clear TP3 Timer.
Set TP4 Timer.
Handoff no
Drop
longer in
(BUSY) Clear TP4 Timer.
progress.
[E84]
Clear TA4 Timer
Drop
Handoff no (TR_REQ) LP Handler
longer requested
[E84]
Handoff Assert
complete. (COMPT)
Drop Handoff Async Event

(READY) complete. (Material Received) CM Handler
[E84] Set TP5 Timer. S6F11 [E30]
Drop (COMPT,
Handshake is
CS_[0,1],
closed
VALID)
Clear TA3 Timer
[E84]
Clear TP5 Timer.
Note: This should have only been in LPRSM =

Reserve state from a previous Bind or RESERVED?
ReserveAtPort.
This port is considered no longer

reserved once the carrier is Yes
successfully placed.
Async Event
LPRSM State:
No (LPRSM SCT-3) CM Handler
NOT RESERVED
[E87]
3.2.2.2G
(to 3.2.3.2B)

32

CarrierIn CM Handler
Request carrier move from CarrierIn CarrierIn CARRIERACTION=
S3F17
LP to internal buffer [E87] issued "CarrierIn"
[E87]
LPTSM =
Is READY TO Note: CarrierIn.rsp is sent to either
UNLOAD? host or operator console depending on
where the CarrierIn.req originated.
No
Issue error Ack CAACK=1,2,3,5
Yes S3F18 [E87]
LPTSM State: Async Event

CM Handler
BLOCKED S6F11 [E87]
Begin transfer to
Ack CAACK=0,4
internal buffer
S3F18 [E87]
Loadport no longer No
sensing a carrier?
No
CarrierIn timeout
expired?
Yes
Note: Exception handling for this
Yes exception is not handled within this
Exception equipment supplier document.
Handling
3.2.2.3A
(to 3.2.2.3B)

33

3.2.2.3 Internal Buffer – CarrierIn Load After CarrierOut (continued)
3.2.2.3 Internal Buffer – CarrierIn Load After CarrierOut (continued)
3.2.2.3B
(from 3.2.23A)
Not
Arrived
Wait for
carrier to arrive at
destination
Arrived
Async Event
(BufferCapacity
Change) CM Handler
S6F11 [E87]
Transfer to
internal buffer
complete
Async Event
(CarrierLocationn
Change) CM Handler
S6F11 [E87]
Another
CarrierOut
request
queued?
No
Async Event
LPTSM State:
READY TO LOAD
S6F11 [E87]
Yes
LPCASM State: Async Event

NOT (LPCASM SCT-3) CM Handler
ASSOCIATED S6F11 [E87]
Keep loadport
TRANSFER
BLOCKED and
initiate carrier out
procedure
See Section 3.3

34

Reader Unavailable ID Read Failed Host Verification Equipment Verification
3.2.3.6 3.2.3.5 3.2.3.4 3.2.3.3

Successful Placement
3.2.3.2 Carrier ID Verification - Detailed
OK
ID reader Carrier ID Carrier A
Yes (carrier Yes
available? Read? instantiated?
A)
Not No Carrier A
Available
Failed associated
with this load
Is load port Instantiate port?
associated carrier Yes
(Bind)
with a
carrier? ID read failed
ID VERIFICATION
event
OK
(Bind) Carrier B No
Yes associated
with this load
Is load port port?
associated
Carrier A state
Bypass- with a Yes
Yes is ID NOT
ReadID? carrier?
READ?
Cancel assoc. of
False No No
Carrier B
True (cancelbind) Duplicate carrier
No ID alarm
Yes
No ID VERIFICATION
OK Associate Carrier
A with this load
(ID) WAITING
port Carrier A
FOR HOST
associated
with another
load port?
(ID) WAITING
Purpose: This flowchart is Host request? FOR HOST Yes
a summary overview of
the various methods for Cancel
carrier ID verification. association
CancelCarrierAtPort (cancel reserve)
Service messages and No
descriptive notes may be
found in flowchart 3.2.3.2 Wait for Host request?
Cancel
Carrier ID Verification - carrier Carrier
Detailed. removal Load port
Proceed associated
Note: There are three Proceed with another
With
paths that are considered With carrier B?
Carrier Cancel
normal: a) 3.2.3.3 Instantiate Carrier
carrier Carrier (Carrier No
Equipment Verification, b)
3.2.3.4 Host Verification, Notification)
Associate with ID VERIFICATION
and c) 3.2.3.6 No ID this load port Associate with
OK
Verification (with BInd). this load port
All other paths are ID VERIFICATION
FAILED Yes ID VERIFICATION
considered abnormal (i.e. ID VERIFICATION
require exception handling FAILED OK
as shown.) Instantiate
carrier
Route Legend: Associate with Cancel
this load port association
Normal
ID VERIFICATION Delete carrier B
Abnormal OK object

35

Note: Refer to flowchart 3.2.3.1 Carrier 3.2.3.2A 3.2.3.2B

(from 3.2.2.1C) (from 3.2.2.2G)
ID Verification - Summary to
determine where this flowchart fits in
the ID verification process.
Can
Clamp occur
at placement
position?
Yes
Clamp carrier

Clamp equipment supplier document.
No successful? No
Exception
Handling
Yes
Event
(Carrier
Carrier clamped CM Handler
Clamped)
S6F11 [E87]
Note: A read-only ID
reader.
Can ID be
read at placement
location?
No
Note: Either a read or
read/write ID reader. Advance/dock carrier
to FIMS port
Yes
Docking
successful? No
Exception
Handling
Yes
Event
(CarrierLocation
Carrier docked CM Handler
Change)
S6F11 [E87]
3.2.3.2C 3.2.3.2D
(to 3.2.3.2E) (to 3.2.3.2F)

36

3.2.3.2 Carrier ID Verification – Detailed (continued)
3.2.3.2 Carrier ID Verification – Detailed (continued)

3.2.3.2E 3.2.3.2F Definition: No Carrier ID Verification.
(from 3.2.3.2C) (from 3.2.3.2D)
The carrier ID reader is not present,
not used or not in proper operation.
Definition: Equipment Based Carrier

Clamping ID Verification. E87 14.1.1: " If the
available at this host provides the expected value
location? before the actual value is obtained by
the production equipment, then the
production equipment shall perform the
Yes verification." In other words, previous
notification of the carrier has been
Clamp carrier made by the host. The equipment is
responsible for verifying that the
correct carrier has been delivered to
the correct load port.

Clamp
No successful? No
Exception
Handling
Flowchart: 3.2.3.6 No Carrier ID Yes
Verification. An assumption is made Event
that the correct carrier has been Carrier clamped (CarrierClamped) CM Handler
delivered to the correct load port. S6F11 [E87]
ID reader
No
available?
3.2.3.2G
(to 3.2.3.6A)
Definition: Host Based Carrier ID
Yes Verification. E87 14.1.2: "If the host
does not provide the expected value,
Perform Carrier using the Bind service, before the
Flowchart: 3.2.3.5 Carrier ID Read ID read actual value is read, then the
Failed. Either during equipment or production equipment shall provide to
host based verification. the host, the information necessary for
host based verification ." In other
words, no previous notification of the
No Carrier ID read carrier has been made by the host.
Successful? The host is responsible for verifying
that the correct carrier has been
Flowchart: 3.2.3.3 Equipment 3.2.3.2H
(to 3.2.3.5B) delivered to the correct load port.
Based Carrier ID Verification. The
host provided the expected carrier ID Yes
(via Bind or CarrierNotification) and the
carrier ID read was valid. The
equipment may now compare the two Carrier object
values. Yes previously
instantiated?
3.2.3.2I
(to 3.2.3.3A)
Flowchart: 3.2.3.4 Host Based No

Carrier ID Verification. Carrier ID
read was valid, but the host did not 3.2.3.2J
previously provide the expected carrier (to 3.2.3.4C)
ID.

37


3.2.3.3A
Note: Refer to flowcharts 3.2.3.1 (from 3.2.3.2E)
Carrier ID Verification - Summary and
3.2.3.2 Detailed to determine where
this flowchart fits in the ID verification
process.
Is the previously
instantiated object
associated with this load
port?
Note: A Bind service had been

previously received. Yes
COSM State: Event CM Handler

ID VERIFICATION (COSM SCT-6)
OK S6F11 [E87]
No 3.2.3.3B
(to 3.2.3.7D)
COSM State is
ID NOT READ?
Note: This is the case where the

carrier was previously instantiated but
is not in the state that a Bind or No
CarrierNotification would have left it in. Alarm
So it must have been previously read (Duplicate CM Handler
to not be in this state. Duplicate carrier
Yes CarrierID)
error
S5F1 [E87]
Is the
previously
instantiated object
associated with
another
Note: This is the case where the
load port?
carrier is instantiated and in the correct
state, but on the incorrect load port.
The equipment self-corrects the
situation by un-associating the carrier Yes
No
from the incorrect load port.
LPCASM State: Event CM Handler
NOT (LPCASM SCT-3)
3.2.3.3C
(to 3.2.3.3E)

38

3.2.3.3 Equipment Based ID Verification (continued)
3.2.3.3 Equipment Based ID Verification (continued)

3.2.3.3E
Note: So far, the carrier is instantiated, (from 3.2.3.3D)
in the correct state, and not assciated
with another load port. But, is this load
port associated with another carrier?
Is load
Note: Definitely a problem here. port associated
However, the equipment should be with another
able to clean it up and inform the host. carrier?
Note: A CarrierNotification service

had been previously received. No
Yes Async Event

LPCASM State: (LPCASM SCT-2) CM Handler
ASSOCIATED
S6F11 [E87]
Note: The equipment has self-
corrected the situation, now it needs to COSM State: Async Event
wait for further instructions from the ID VERIFICATION (COSM SCT-6) CM Handler
host. OK S6F11 [E87]
3.2.3.3F 3.2.3.3G
(to 3.2.3.4D) (to 3.2.3.7A)

39

3.2.3.4A 3.2.3.4B 3.2.3.4C 3.2.3.4D

Note: Refer to flowcharts Carrier ID (from 3.2.3.6C) (from 3.2.3.5C) (from 3.2.3.2J) (from 3.2.3.3F)
Verification - Summary and Detailed to
Instantiate carrier
object
Is load port
associated with
another carrier?
Note: This is the case where a carrier

is place on a load port but has not Yes
been previously instantiated, however
the load port has been previously
associated with another carrier. LPCASM State: Async Event CM Handler
NOT (LPCASM SCT-3)
No
Self-initiated Async Event CM Handler

CancelBind for (COSM SCT-21)
the other carrier S6F11 [E87]
Note: The equipment has self-

corrected the situation, now it may
associate the new carrier. Async Event
LPCASM State: CM Handler
(LPCASM SCT-2)
COSM State:
NOT ACCESSED Event
(COSM SCT-3 CM Handler
COSM State: or SCT-10)
SLOT MAP NOT S6F11 [E87]
READ
COSM State:
Note: Only one event is sent to the (ID) WAITING
host when entering the Carrier State FOR HOST
Model. This event contains the entry
state for each of the three substates.
Thus, this one event covers the three CM Handler
ProceedWithCarrier
COSM transitions: 3(10), 12, 17. CARRIERACTION=
or CancelCarrier 'ProceedWithCarrier' or
S3F17 [E87] 'CancelCarrier'
3.2.3.4E
(to 3.2.3.4F)

40

3.2.3.4 Host-Based ID Verification (continued)
3.2.3.4 Host-Based ID Verification (continued)

3.2.3.4F
(from 3.2.3.4E)
Note: The host is canceling the host-

based verification.
Host service
request?
ProceedWithCarrier
ProceedWithCarrier
Ack CM Handler
S3F18 [E87] CAACK=0,4
COSM State:
ID VERIFICATION
OK
Async Event
Cancel- (COSM SCT-8) CM Handler
Carrier S6F11 [E87]
3.2.3.4F
(to 3.2.3.7B)
CancelCarrier
CM Handler
Ack
CAACK=0,4
S3F18 [E87]
COSM State: Async Event

ID VERIFICATION (COSM SCT-9) CM Handler
FAILED S6F11 [E87]
Async Alarm
(Carrier
Verification CM Handler
Failed)
S5F1 [E87]

41

Note: Refer to flowcharts Carrier ID 3.2.3.5A 3.2.3.5B

Verification - Summary and Detailed to (from 3.2.3.6B) (from 3.2.3.2H)

Event
Carrier ID read (CarrierID Read
CM Handler
failed Fail)
S6F11 [E87]
Note: A Bind had been previously

received for this load port. Since the
ID read failed, the equipment Is LPCASM
transitions to the Waiting For Host State= Yes
state waiting for instructions. ASSOCIATED?
3.2.3.5C
(to 3.2.3.4B)
Note: On a reader unavailable or ID No

read failed, the carrier has not been Event
instantiated, so there is no known (COSM SCT-3) CM Handler
object or state at this point. The COSM State: S6F11 [E87]
equipment still must wait for (ID) WAITING
instructions from the host based on FOR HOST ProceedWithCarrier,
having sent the read failed alarm. CancelCarrierAtPort CM Handler
or CancelCarrier CARRIERACTION=
S3F17 [E87] 'ProceedWithCarrier' or
Note: The host is entering an 'CancelCarrierAtPort' or
Host service
exception handling situation here. A Cancel- 'CancelCarrier'
request
CancelCarrier is valid at this point if the Carrier
received?
host wants the equipment to know
about the carrier and report it 3.2.3.5D
(to 3.2.3.5F)
subsequent exception handling data or
events.
CancelCarrierAtPort
CancelCarrier-
CM Handler
AtPort Ack
Note: At this point the host will just CAACK=0,4
S3F18 [E87]
want to move the carrier off of the Proceed- 3.2.3.5G
equipment and does not know or is not WithCarrier
Move Out
CarrierOut
concerned with the carrier ID until (to 3.3.1A)
exception handling takes place away
from the equipment.
ProceedWithCarrier
Ack CM Handler
Instantiate carrier
S3F18 [E87] CAACK=0,4
Async Event
LPCASM State:
(LPCASM SCT-2) CM Handler
COSM State: Async Event

OK S6F11 [E87]
3.2.3.5E
(to 3.2.3.7C)

42

3.2.3.5 Carrier ID Read Failed (continued)
3.2.3.5 Carrier ID Read Failed (continued)
3.2.3.5F
(from 3.2.3.5D)
CancelCarrier
CM Handler
Instantiate carrier Ack
CAACK=0,4
S3F18 [E87]
Async Event
LPCASM State:
Async Event
(COSM SCT-5) CM Handler
S6F11 [E87]
COSM State:
ID VERIFICATION
FAILED
Async Alarm
(Carrier
Verification CM Handler
Failed)
S5F1 [E87]

43

Note: Refer to flowcharts Carrier ID 3.2.3.6A

(from 3.2.3.2G)
Verification - Summary and Detailed to
Note: Since no association is in place,

the situation is the same as if a carier
IsLPCASM
ID read failed. The equipment must State=
wait for instruction without any known No
ASSOCIATED?
carrier object.
3.2.3.6B
(to 3.2.3.5A)
Note: A Bind service had been

previously received. There is no
verification done since no ID was read. Yes
Note: The host has indicated that it

wants the equipment to ask for
instructions each time if a reader is
unavailable. BypassReadID
FALSE value?
3.2.3.6C
(to 3.2.3.4A)
Note: The host has indicated that it TRUE

wants the equipment to assume that
the ID in the Bind is the ID to use.
COSM State: Event
OK S6F11 [E87]
3.2.3.6D
(to 3.2.3.7E)

44

3.2.3.7A 3.2.3.7B 3.2.3.7C

(from 3.2.3.3G) (from 3.2.3.4F) (from 3.2.3.5E)
3.2.3.7D 3.2.3.7E
(from 3.2.3.3B) (from 3.2.3.6D)
COSM State:
SLOT MAP NOT
READ
Is carrier
docked at
Note: The carrier only needs to be FIMS port?
advanced if the ID reader is read-only.
If the reader is read/write, the carrier
was already advanced to read the ID.
No
Advance/dock
carrier to FIMS
port

Docking exception is not handled within this
successful? No document. Refer to either end-user or
Exception
Yes Handling
Event
CM Handler
(CarrierLocation
Carrier docked
Note: If the load port allow for Change)
Yes
clamping in the docked position, then S6F11 [E87]
clamping of the carrier may be
performed here. This assumes Clamp carrier
however that clamping has not been
performed. A CarrierClamped event is
sent.
Clamp
No
successful?
Exception
Handling
Yes
Event
(Carrier CM Handler
Carrier clamped
Clamped)
S6F11 [E87]
Open carrier door
3.2.3.7F
(to 3.2.3.7G)

45

3.2.3.7 Slot Map Verification (continued)

3.2.3.7G
(from 3.2.3.7F)
Door opened
successfully?
No
Alarm
(CarrierOpen
Issue error CM Handler
Failure)
S5F1 [E87]
Yes
Exception
Handling
Event
Door opened (CarrierOpened) CM Handler
S6F11 [E87]
Read slot map
Slot map read

successfully?
Note: Assume that a reasonable No

number of retries has occurred.
Alarm
Slot map read fail (SlotMapReadFailed) CM Handler
error S6F11 [E87]
Yes
3.2.3.7H
(to 3.2.3.7K)
Note: Slot map Host based

verification. Slot map
provided with Bind,
CarrierNotification or
Proceed With
Carrier?
No
Note: Slot map Equipment based
verification. Yes
3.2.3.7I 3.2.3.7J
(to 3.2.3.7L) (to 3.2.3.7M)

46


3.2.3.7K 3.2.3.7L 3.2.3.7M
(from 3.2.3.7H) (from 3.2.3.7I) (from 3.2.3.7J)
Are the two slot

Note: Slot map Host-based
maps equal?
verification.
Note: Slot map Equipment-based

verification. No
Alarm
(SlotMap-
Issue error CM Handler
VerificationFailed)
S5F1 [E87]
Yes
COSM State: Event

SLOT MAP (COSM SCT-13) CM Handler
VERIFICATION
S6F11 [E87]
OK
3.2.3.7N
(to 3.2.4.1B)
Event CM Handler
(COSM SCT-14) Contains Slot Map
COSM State: S6F11 [E87]
(SLOT) WAITING
CM Handler
FOR HOST
ProceedWithCarrier CARRIERACTION=
or CancelCarrier 'ProceedWithCarrier'
S3F18 [E87] or 'CancelCarrier'
Host service
request?
Proceed
With CancelCarrier Note: For slot map read fail, host
Carrier should only issue a CancelCarrier
since the equipment cannot provide a
map which is necessary for either host
or equipment based slot map
3.2.3.7O 3.2.3.7P verification.
(to 3.2.3.7Q) (to 3.2.3.7R)

47

3.2.3.7Q 3.2.3.7R
(from 3.2.3.7O) (from 3.2.3.7P)
CancelCarrier
CM Handler
Ack
CAACK=0,4
COSM State: S3F18 [E87]
SLOT MAP
VERIFICATION
FAILED Async Event
S6F11 [E87]
3.3
Move Out
(Cancel
Carrier)
ProceedWithCarrier CM Handler
COSM State: Ack S3F18 [E87] CAACK=0,4
SLOT MAP
VERIFICATION
OK Event
S6F11 [E87]
3.2.3.7S
(to 3.2.4.1A

48
3.2.4 Material Movement – Move In – Substrates

3.2.4.1A 3.2.4.1B
Note: As implied by the off page (from 3.2.3.7S) (from 3.2.3.7N)
reference coming from Slot Map
Verification OK, the Carrier Substrate
Location object and the Substrate
object are instantiated after the Slot
Map Verification OK event. They are
Instantiate Carrier Subtrate
instantiated between this event and
Location (slot) object
when first removed from the carrier.
Is carrier
substrate location
(slot) occupied?
No
Note: There currently is no transition,
and thus no event, for:
(no state) -> UNOCCUPIED. SLSM State:
Yes UNOCCUPIED
Instantiate
Yes
substrate object
Note: The following are methods by

which substrates are identified:
• via the E87 ContentMap attribute Determine and
• ID read by a substrate ID reader assign substrate
• via the E90 Register service ID
Note: There currently is no transition,

and thus no event, for: SLSM State:
(no state) -> OCCUPIED. OCCUPIED
Async Event
SOSM State: (SOSM SCT-10) ST Handler
Note: These two transitions are S6F11 [E90]
NEEDS
combined into one transition collection
PROCESSING
event which contians variables for both
concurrent substates.
SOSM State: Async Event
AT SOURCE (SOSM SCT-1) ST Handler
S6F11 [E90]
More
substrates in
carrier?
No
Terminate

49
3.3 Material Movement – Move Out
Purpose
behavior from the host’s and AMHS’ point of view and within the following criteria during
carrier move out:
• Delivery method (AUTOMATIC/MANUAL)
• Buffer type (FIXED/INTERNAL)
This operational flowchart conforms to the following industry standards and specifications:
Assumptions
1. <none>
3.3.1 Carrier Complete and Undock
3.3.2 Manual Unload – Single Handoff
3.3.3 Automated Unload – Single Handoff
3.3.4 Internal Buffer – CarrierOut Unload
3.3.5 Cancel Carrier
3.3.6 Cancel Carrier At Port
3.3.7 Cancel Carrier Out
3.3.8 Cancel All Carrier Out
Legend
Off-page Reference
Outgoing Incoming
Explanatory Note

50
3.3.1
3.3.1 Carrier Complete and Undock Carrier Complete and Undock
3.3.1A 3.3.1B
(from 3.3.5A) (from 4.2.8B)
Note: Last wafer in cassette to be

processed (across all PJs and CJs)
and carrier door closed constitutes
COSM CARRIER COMPLETE.
Is door
open?
Yes
Close carrier
door

Door closed
No successfully?
No equipment supplier document.
Exception
Yes Handling
Event
(Door CM Handler
Door closed
Closed)
S6F11 [E87]
Note: A carrier is canceled due to, at Was Carrier

least, the following: Canceled?
• CancelCarrier service
• CancelCarrierAtPort service
These can be issued by either the host Yes

or the operator (equipment console)
CARRIER (COSM SCT-20)
No STOPPED S6F11 [E87]

CARRIER (COSM SCT-19)
COMPLETE S6F11 [E87]
3.3.1C
(to 3.3.1D)

51
3.3.1
3.3.1 Carrier Complete and Undock (continued) Carrier Complete and Undock (continued)

3.3.1D
(from 3.3.1C)
Is this an
Internal Buffer
tool?
Note: This invokes the E87 CarrierOut Yes

service for this carrier.
3.3.1E
(to 3.3.4B)
No
Undock carrier
Carrier undocked
successfully?
No
Exception
Handling
Yes
Unclamp carrier
Carrier
unclamped
successfully? No
Note: Once CarrierOut completes, it

3.3.1F Exception
returns here for undocking.
(from 3.3.4E) Handling
Yes
Async Event
S6F11 [E87]
LPTSM State:
READY TO
UNLOAD Async Event
(CarrierLocation
CM Handler
Change)
S6F11 [E87]
3.3.1F
(to 3.3.1H)

52
3.3.1
3.3.1 Carrier Complete and Undock (continued) Carrier Complete and Undock (continued)
3.3.1G 3.3.1H
(from 3.3.6A) (from 3.3.1F)
Manual or
Auto Unload?
Manual Automated
Unload Unload
3.3.1I 3.3.1J
(to 3.3.2A) (to 3.3.3A)

53
3.3.2
3.3.2 Manual Unload – Single Handoff Manual Unload – Single Handoff
3.3.2A
(from 3.3.1I) Note: The operator portion of this
flowchart lists only one
representative possible set of
instructions for the operator. Each
IC maker factory will detemine its
own set of operator instructions. In
On equipment
any case, the operator eventually
or bay console, is load
removes the carrier from the load
port access mode =
port successfully.
MANUAL?
No
Note: This begin manual unload boundary is user defined. Examples per E87 Table 8 are:
• Presence and placement sensor no longer detecting a carrier
Do not remove • load port door opening
Yes
carrier from load • an input to the equipment through a switch at the load port
port. Correct • an input to the equipment through the equipment console
situation if desired. • an input to the equipment through a service message from the host
Wait for begin/

Begin/signal
signal boundary
remove carrier
for carrier
from load port
removal
LPTSM = READY
TO UNLOAD?
Note: The timing of the begin and end
boundaries may be minimal or non- No
existent, especially in the case where
the operator simply picks up the carrier Note: Operator removed the carrier prior
Yes Exception
with no other input from the operator, to the equipment being ready as defined
handling
equipment or host. in the boundary conditions above.
AMSM =
AUTO?
Yes
No Alarm
(Access CM Handler
Access mode
Mode
error
Violation)
S5F1 [E87]
Exception
Handling
3.3.2B
(to 3.3.2C)

54
3.3.2
3.3.2 Manual Unload – Single Handoff (continued) Manual Unload – Single Handoff (continued)
3.3.2C
(from 3.3.2B)
LPTSM State: Event

TRANSFER (LPTSM SCT-7) CM Handler
BLOCKED S6F11 [E87]
Yes
Load port sensing a

carrier?
Async Event
(Material
CM Handler
Removed)
No
S6F11 [E30]
Is a
CarrierOut
queued for this
load port? Note: This ends the manual unload
boundary. Examples per E87 Table 8
are:
• Presence and placement sensor
Yes
no longer detecting a carrier
• load port door closing
Leave LPTSM=TRANFER • an input to the equipment through
BLOCKED, process next a switch at the load port
No • an input to the equipment through
CarrierOut.
the equipment console
• an input to the equipment through
a service message from the host
End/signal
Wait for End/
remove carrier
signal boundary
from load port
Async Event
S6F11 [E87]
LPTSM State:
READY TO LOAD Async Event
S6F11 [E87]
Async Event
S6F11 [E87]

55
3.3.3
3.3.3 Automated Unload – Single Handoff Automated Unload – Single Handoff
As commanded Note: Any TPx (x=1-6) Interlock

by host Timers that timeout (expire) force a
E87 PIO Failure alarm to be sent to the
host. TP6 does not apply to single
handoff.
Arrival at load
port handoff
location
Note: HO_AVBL=ON also implies that the load port
AMSM state must be AUTO. In theory, an access
mode violation should not happen on the equipment
if the equipment has HO_AVBL=ON and if the
Both
AMHS respects the signal when it is OFF.
No HO_AVBL and
ES are ON? 3.3.3A
(from 3.3.1J)
Notify Host
Yes
Assert
(CS_[0,1]) LP Handler
Specify load port [E84]
Assert
Communications
(VALID)
is valid. [E84]
Set TA1 Timer.
LPTSM=READY
TO UNLOAD?
No
Alarm
(PIO
Not ready error CM Handler
Failure)
S5F1 [E87]
Yes Exception
Handling
AMSM =
MANUAL?
Yes Async Alarm (Access

Mode Violation) CM Handler
Access mode S5F1 [E87]
error Async Alarm
(PIO Failure) CM Handler
No
S5F1 [E87]
Exception
Handling
3.3.3B
(to 3.3.3C)

56
3.3.3
3.3.3 Automated Unload – Single Handoff (continued) Automated Unload – Single Handoff (continued)
3.3.3C
(from 3.3.3B)
Load port is
Assert
assigned for
(U_REQ)
Unload.
[E84]
Set TP1 Timer.
Request transfer. Assert
Clear TA1 Timer. (TR_REQ)
Load port ready
Assert
for transfer.
(READY)
Clear TP1 Timer.
[E84]
Set TP2 Timer.
LPTSM State: Async Event

TRANSFER (LPTSM SCT-6) CM Handler
BLOCKED S6F11 [E87]
Start transfer. Assert

Clear TP2 Timer.
Clear TA2 Timer. (BUSY)
Set TP3 Timer.
Load port Carrier

Placement sensor
triggered
Load port
sensing a
carrier?
Yes
No
3.3.3D
(to 3.3.3E)

57
3.3.3
3.3.3 Automated Unload – Single Handoff (continued) Automated Unload – Single Handoff (continued)

3.3.3E
(from 3.3.3D
Async Event
Drop Carrier removed.
(Material
(U_REQ) Clear TP3 Timer. CM Handler
Removed)
[E84] Set TP4 Timer.
S6F11 [E30]
Handoff no
longer in Drop
(BUSY) Clear TP4 Timer.
progress
Clear TA4 Timer. [E84]
Handoff no Drop
longer requested (TR_REQ) LP Handler
[E84]
Assert
Handoff complete
(COMPT)
Set TA3 Timer.
[E84]
Drop Handoff
(READY) complete.
[E84] Set TP5 Timer.
Drop (COMPT,
Handshake is
CS_[0,1],
closed. Clear TP5 Timer.
VALID)
Clear TA3 Timer.
[E84]
Is a
CarrierOut queued
for this load
port?
Yes
Leave LPTSM=
TRANSFER BLOCKED,
process next
No CarrierOut.
Async Event
S6F11 [E87]
Async Event
LPTSM State: (LPCASM SCT-3) CM Handler
READY TO LOAD S6F11 [E87]
Async Event
S6F11 [E87]

58
3.3.4
3.3.4 Internal Buffer – CarrierOut Unload Internal Buffer – CarrierOut Unload
3.3.4A 3.3.4B
(from 3.1.1C) (from 3.3.1E)
Request carrier CarrierOut Request carrier

CarrierOut
move from internal S3F17 move from internal
[E87]
buffer to LP [E87] buffer to LP
LPTSM =
READY TO
LOAD?
No Note: CarrierOut.rsp is sent to

LPTSM = CarrierOut.req originated.
TRANSFER
BLOCKED?
Yes
No
CarrierOut
Ack
CM Handler
Issue error S3F18 [E87]
CAACK=1,2,3,5
Event (LPASM SCT-2)

LPTSM State: S6F11 [E87]
TRANSFER
BLOCKED Event (LPTSM SCT-6)
LPASM State: S6F11 [E87] CM Handler
Yes ASSOCIATED
LPRSM State:
RESERVED Event (LPRSM SCT-2)
S6F11 [E87]
CarrierOut
Begin transfer from CM Handler
Ack
internal buffer CAACK=0,4
S3F18 [E87]
Queue the CarrierOut

CM Handler
CarrierOut Ack
CAACK=4
service S3F18 [E87]
Wait until current carrier is

removed from load port
and proceed with transfer.
Keep LPTSM=
TRANSFER BLOCKED.
3.3.4C
(to 3.3.4D)
3.3.4 cont.
3.3.5

59
3.3.4
3.3.4 Internal Buffer – CarrierOut Unload (continued) Internal Buffer – CarrierOut Unload (continued)

3.3.4D
(from 3.3.4C)
Load port sensing a No

carrier?
No
CarrierOut
timeout
expired?
Yes
Alarm
Yes
(Carrier
Carrier Presence
Presence CM Handler
error
Error)
S5F1 [E87]
Exception
Handling
Async Event
(BufferCapacity
Change) CM Handler
S6F11 [E87]
Transfer from
internal buffer
complete
Async Event
(LPRSM - 3) CM Handler
S6F11
[E87]
3.3.4E
(to 3.3.1F)

60
3.3.5
3.3.5 Cancel Carrier Cancel Carrier
Operator CancelCarrier CancelCarrier CM Handler

Cancel Carrier CARRIERACTION=
requests Cancel Service Service
issued "CancelCarrier"
Carrier service [E87] S3F17 [E87]
Note: CarrierOut.rsp is sent to

Cancel Carrier depending on where the
Note: A CancelCarrier service fails for successful? CarrierOut.req originated.
at least the following reasons:
• CarrierID and PortID not specified
• if CarrierID is specified, the carrier
object does not exist No
• if CarrierID is null, specified load
port (PortID) does not exist CancelCarrier
Yes CM Handler
• LPTSM State is not TRANSFER Issue error Ack
BLOCKED S3F18 [E87] CAACK=1,2,3,5
CancelCarrier
CM Handler
Issue success Ack
CAACK=0,4
S3F18 [E87]
3.3.5A
(to 3.3.1A) Note: CancelCarrier.rsp is sent to
CancelCarrier.req originated.

61
3.3.6
3.3.6 Cancel Carrier At Port Cancel Carrier At Port
Operator
CancelCarrierAt Port CM Handler
requests Cancel CancelCarrierAtPort Cancel Carrier At
Service S3F17 CARRIERACTION=
CarrierAtPort Service [E87] Port issued
[E87] "CancelCarrierAtPort"
service
Cancel Carrier
At Port
successful?
Note: A CancelCarrierAtPort service

• PortID not specified No
• Specified load port (PortID) does
not exist CancelCarrier-
CM Handler
• LPTSM State is not TRANSFER Yes Issue error AtPort Ack
CAACK=1,2,3,5
BLOCKED S3F18 [E87]
CancelCarrier-
CM Handler
Issue success AtPort Ack CAACK=0,4
S3F18 [E87]
3.3.6A
(to 3.3.1G) Note: CancelCarrierAtPort.rsp is
sent to either host or operator
console depending on where the
CancelCarrier.req originated.

62
3.3.7
3.3.7 Cancel Carrier Out Cancel Carrier Out
Operator CM Handler
CancelCarrier CancelCarrierOut
requests Cancel Cancel Carrier CARRIERACTION=
Service Service S3F17
CarrierOut Out issued "CancelCarrierOut"
[E87] [E87]
service
Cancel Carrier
Out successful?
Note: A CancelCarrierOut service fails

for at least the following reasons:
No
CarrierIDnot specified
Specified carrier object does not
exist CancelCarrierOut CM Handler
LPTSM State is not TRANSFER Yes Issue error Ack
BLOCKED or READY TO S3F18 [E87] CAACK=1,2,3,5
UNLOAD
CancelCarrierOut CM Handler
Issue success Ack
S3F18 [E87] CAACK=0,4
Note: CancelCarrierOut.rsp is sent

to either host or operator console
CancelCarrierOut.req originated.

63
3.3.8
3.3.8 Cancel All Carrier Out Cancel All Carrier Out
Operator CM Handler
requests Cancel CancelAllCarrierOut Cancel All Carrier CancelAllCarrierOut
Service S3F19 CARRIERACTION=
AllCarrierOut Service [E87] Out issued
[E87] "CancelAllCarrierOut"
service
Cancel All
Carrier Out
Successful?
Note: A CancelAllCarrierOut service

LPTSM State is not TRANSFER No
BLOCKED or READY TO
UNLOAD CancelAll- CM Handler
Yes CarrierOut
Issue error
Ack CAACK=1,2,3,5
S3F20 [E87]
CancelAll- CM Handler
CarrierOut
Issue success
Ack CAACK=0,4
S3F20 [E87]
Note: CancelAllCarrierOut.rsp is
sent to either host or operator
console depending on where the
CancelAllCarrierOut.req originated.

64
4 FLOWCHARTS – PROCESSING
The flowcharts in this section pertain to job queue management and product processing on
production equipment.
4.1 Processing – Queue Management
Purpose
behavior from the host’s point of view for process job (E40) and control job (E94) queue
management.
Criteria
In general, the queue management flowcharts in this section should apply to all equipment within
an end-user factory.
• Process job queue management has the following dependencies on control job queue
management:
– Aborting, Stopping or Canceling a Control Job will abort, stop or cancel its respective
Process Jobs and possibly remove those Process Jobs from the Process Job Queue.
• Control job queue management has the following dependencies on process job queue
management:
– If only one process job is defined within a control job (a one-to-one relationship exists),
then if the process job is aborted or stopped, the equipment may also abort or stop the
respective control job automatically. The equipment must document this behavior since
it is an additional requirement.
This operational flowchart conforms to the following industry standards and specifications:
Assumptions
1. All Control and Process Job events use E30 style events. Process Job event messages related
to S16F7 and F9 are not used.
This flowchart is divided into the following sub-processes:
4.1.1 Processing – Queue Management – Process Job
4.1.1.1 Process Job Queue Initialization
4.1.1.2 Process Job Queue Size Request
4.1.1.3 Process Job Create and Queue
4.1.1.4 Process Job De-queued

65
4.1.2 Processing – Queue Management – Control Job

4.1.2.1 Control Job Queue Initialization
4.1.2.2 Control Job
4.1.2.3 Control Job Create and Queue
4.1.2.4 Control Job HOQ
4.1.2.5 Control Job De-queued
Legend
Off-page Reference
Outgoing Incoming
Explanatory Note

66
4.1.1 Processing – Queue Management – Process Job

Equipment
Initialization
Perform Process
Job Queue
Initialization
Set Process Job

PRJobSpace =
number of
available Process
Job Queued/
pooled slots
[E40]
4.1.1.1A
(to 4.1.1.3A)

67
4.1.1 Processing – Queue Management – Process Job (continued)

Determine
Process Job PRGetSpace
PJ Handler
Queued/Pooled S16F21 [E40]
Space
Report PRGetSpace
PJ Handler
PRJobSpace S16F22 [E40]

68

4.1.1.3A
(from 4.1.1.1A)
Note: How process jobs are defined

by the host should not affect the PRGetSpace
Determine S16F21 [E40]
creation, setup or start of process jobs.
Process Job
PJ Handler
Queued/Pooled
Note: PRJobCreate is NOT used PRGetSpace
Space
when E94 is being used. S16F22 [E40]
No
4.1.1.3B
Note: The Process Job and Control (from 4.1.1.4B) Is there
Job "Wait for Host" blocks operate in enough space
parallel and are always in existence on in Process job
the equipment. Either the equipment pool?
is waiting in parallel for another
process job creation, or all process
jobs have been created and pooled Yes
and the equipment is waiting for the PRJobCreate-
control job creation. The equipment Wait for Host - Enh - S16F11/12
does not know in advance the number Create next Dup - S16F13/14 PJ Handler
of process jobs that will be in the next Process Job Multi - S16F15/16 No
control job create. [E40]
A restriction as to when process jobs

and control jobs may be created is Process Job
Create All Process Yes
when another (respective) queue
Successful? Jobs Created?
operation is in progress.
4.1.1.3C
(to 4.1.2.3B)
Note: Process Job Create errors: No
• parameters improperly specified
• insufficient parameters specified
Issue: Process Reformat message
• unsupported option requested PRJobCreate-
Job Create Error
• busy (no queueing or queue full - Yes
(Enh;Duplicate;
PRJobSpace=0) Multi) Ack [E40] PJ Handler
• object identifier in use PRAck=F
Decrement (-n)
PRJobSpace
PRJobCreate-
(Enh;Duplicate;
PJSM State: Multi) [E40]
Notes: QUEUED/ PJ Handler
POOLED PRAck=T
1) When using Control Jobs in [E40] PRJobEvent
conjunction with Process Jobs, (PJSM SCT-1)
Process Jobs are not Queued, rather S6F11 [E40]
they are Pooled, waiting to be
scheduled by the Control Job.
4.1.1.3D
2) Once a Process Job is pooled, it (to 4.1.1.4A)
may be acted upon by Abort, Stop or
Cancel, or by a Control Job being
created that controls the Process Job.

69

4.1.1.4A
(from 4.1.1.3D)
Note: This is not a transition into
QUEUED/POOLED state. This is here
only to show that this is the current
state. The transition to this state is PJSM State: PRJobCommand
made in 4.1.1.3. QUEUED/ (Cancel, Abort,
PJ Handler
POOLED or Stop)
[E40] S16F5 [E40]
Note: Abort, Stop and Cancel are all

legal commands when in the QUEUED
state and have the same effect - delete
the job from the queue. Valid JobID?
No
Issue Improper
Parameter Error PRJobCommand
PJ Handler
(no jobs Ack
PRAck=F
cancelled) S16F6 [E40]
Yes
PRJobCommand PJ Handler
S16F6 [E40] PRAck=T
Delete Process PJ Handler

Job from queue. ErrorCode=
Async PRJobEvent
PJcancelled,
(PJSM SCT-18)
PJstopped,
S6F11 [E40]
PJaborted
Increment (+1)
PRJobSpace
4.1.1.4B
(to 4.1.1.3B)

70
4.1.2 Processing – Queue Management – Control Job

Equipment
Initialization
Perform Control
Job Queue
Initialization
Set Control Job

QueueAvailable-
Space = number
of available
Control Job
Queue slots
[E94]
4.1.2.1A
(to 4.1.2.3A)

71
4.1.2 Processing – Queue Management – Control Job (continued)

4.1.2.2 Control Job Size Request
Determine QueueAvailable- CJ Handler

Control Job Space Req
Queue Space S1F3 [E94]
Report QueueAvailable- CJ Handler

QueueAvailable- Space Ack
Space S1F4 [E94]

72

4.1.2.3A 4.1.2.3B
(from 4.1.2.1A) (from 4.1.1.3C)
QueueAvailable-
Space Req
S1F3 [E94]
Determine
Control Job CJ Handler
Note: The E94 Control Job object is Queue Space QueueAvailable-
created using the E39 Create service. Space Ack
S1F4 [E94]
No
Note: The Process Job and Control
Job "Wait for Host" blocks operate in 4.1.2.3C Is there
parallel and are always in existence on (from 4.1.2.5B) enough space
the equipment. Either the equipment in Control job
is waiting in parallel for another queue?
process job creation, or all process
jobs have been created and the
equipment is waiting for the control job Yes
creation. The equipment does not
know in advance the number of Wait for Host - Create Reformat
process jobs that will be in the next Create Control ControlJob [E94] CJ Handler message
control job create. Job S14F9 [E39] ObjType="ControlJob"
A restriction as to when process jobs
and control jobs may be created is
when another (respective) queue Control Job
operation is in progress. Create
Successful?
Note: Control Job Create errors:

• another queue operation is being No
performed (e.g. CJHOQ)
• any (at least one) requested Create Control Job
Issue: Control CJ Handler
process jobs do not exist Ack [E94]
Job Create Error ObjAck=1
• control job queue is full - Yes S14F10 [E39]
QueueAvailableSpace=0
• object identifier in use
Decrement (-1)
QueueAvailable-
Space
Note: Once a Control Job is queued, it
may be acted upon by CJAbort,
Create Control Job
CJStop or CJCancel or by the CJHOQ CJ Handler
Ack [E94]
command. ObjAck=0
S14F10 [E39]
CJSM State:
CJQUEUED [E94]
Event
(CJSM SCT-1) CJ Handler
S6F11 [E94]
4.1.2.3D 4.1.2.3E
(to 4.1.2.5A) (to 4.1.2.4N)

73

4.1.2.4A
(from 4.1.2.3E)
CJ Handler
Control Job CJHOQ
Queue Manager S16F27 [E94] CTRLJOBCMD=
'CJHOQ'
'Lock' the queue.

Reject any other
Control Job
Queue service
commands
Valid JobID?
No
CJ Handler
Issue Unknown
CJHOQ Ack
Job error. ACKcode=F
Yes S16F28 [E94]
Unlock queue.
Is job
in CJQUEUED
state?
No
Issue HOQ not CJ Handler

valid command CJHOQ Ack
Yes at this time error. S16F28 [E94] ACKcode=F
Unlock queue.
Move selected
Control Job to
head of Control
Job Queue.
Unlock queue.
'Unlock' the
queue. CJ Handler
Accept any other CJHOQ Ack
Control Job S16F28 [E94] ACKcode=T
Queue service
commands

74

4.1.2.5A
(from 4.1.2.3D)
CJQUEUED state. This is here only to
show that this is the current state. The
transition to this state is made in CJCancel, CJStop, CJ Handler
CJSM State:
4.1.2.3. CJAbort
CJQUEUED [E94]
S16F27 [E94]
Note: Abort, Stop and Cancel are all

legal commands when in the
CJQUEUED state and have the same
effect - delete the job from the queue.
Valid JobID?
No
CJ Handler
Issue TBD Error CJCancel, CJStop,
(no jobs CJAbort Ack ACKcode=F
cancelled) S16F28 [E94]
Note: Control Job parameter Action Yes

(SAVEJOBS / REMOVEJOBS) is used
as follows. The effect on process jobs
is of concern since the control job is
deleted and the process job is
therefore left without an owner.
• SAVEJOBS - PJSM state
(QUEUED/POOLED): The Is
process job remains in the PR Action =
JOB QUEUED/POOLED state. It REMOVEJOBS
cannot be run until another control ?
job is created that controls that No Yes
process job. (SAVEJOBS)
• REMOVEJOBS - PJSM state
(QUEUED/POOLED): The
process job is deleted from the Remove all
process job queue when the respective
Process job
material is removed. Queued/Pooled
remains in PRJobEvent
Process Jobs
Process Job PJSM SCT-18 PJ Handler
from Process Job
queue (it is S6F11 [E40]
queue/pool
considered
Increment (+n)
pooled)
PRJobSpace.
Event
CJ Handler
Remove Control Job (CJSM SCT-2)
S6F11 [E94]
Increment (+1)
QueueAvailable- CJ Handler
Space CJCancel, CJStop,
CJAbort Ack ACKcode=T
S16F28 [E94]
4.1.2.5B
(to 4.1.2.3C)

75
4.2 Processing – Product
Purpose
behavior from the host’s point of view during processing under the following criteria.
Criteria
• Wafer process method (batch/single wafer): This flowchart addresses both single-wafer and
batch tools.
• Buffer method (fixed/internal): This flowchart addresses fixed buffer and internal buffer
equipment.
• Start method (auto/manual): Both automatic and manual start methods for both control and
process jobs are addressed.
• Control job: This flowchart describes the behavior of a single control job. This flowchart
does not preclude equipment from executing more than one control job at a time, since
control job objects are independent from each other from the host’s point of view.
• Process job: This describes one or more process jobs created using any of the E40 Job
Create services. How process jobs are created by the host is not pertinent to how they are
scheduled or executed on the equipment. This flowchart does not preclude equipment from
executing more than one process job at a time, since process job objects are independent
from each other from the host’s point of view.
• SEMI E30 – GEM
• SEMI E90 – Substrate Tracking
This flowchart also depends on flowchart 4.1 Processing – Queue Management.
Assumptions
1. Carrier MoveIn flowchart is complete before Begin.
2. All carrier and substrate objects are instantiated before starting this flowchart.
3. For non Process Job events, E30 events are used. Process Job events are defined in E40.

76
4.2.1 Process/Control Job Queueing
4.2.2 Control Job Select
4.2.3 Control Job Start
4.2.4 Process Job Setup
4.2.5 Process Job Start
4.2.6 Substrate Tracking – Transport
4.2.7 Substrate Tracking – Processing
4.2.8 Process Job Complete
4.2.9 Control Job Complete
4.2.10 Process Job Abnormal Termination
4.2.11 Control Job Abnormal Termination
Legend
Off-page Reference
Outgoing Incoming
Explanatory Note

77
4.2.1
4.2.1 Process/Control Job Queueing Process/Control Job Queueing
Begin
Process and
Control Jobs
previously
created?
Note:
See flowchart 4.1 Processing -
Queue Management for a more
detailed flowchart regarding the No Pool Process
relationship between process Job(s) related to
and control jobs creation, a Control Job.
existence and respective queue
PJSM State: Refer to
management.
PRJOBQUEUED flowchart 4.1.1.3
[E40] Process Job
Create and
Queue
for respective
details.
Queue the
Control Job
CJSM State: Refer to

CONTROLJOB flowchart 4.1.2.3
Yes
QUEUED Control Job
[E94] Create and
Queue
for respective
details.
4.2.1A
(to 4.2.2A)

78
4.2.2
4.2.2 Control Job Select Control Job Select
4.2.2A
(from 4.2.1A)
Note: Processing resources are

available and reserved for the Control Control Job,
Job and its Process Job(s). Process Job(s)
Capacity?
No
Wait for
processing
Yes resources to
become available
CJ Handler
CJSM State: Async Event

SELECTED (CJSM CST-3)
[E94] S6F11 [E94]
Note: Control Job queue schedules

and Process Jobs according to No
CJProcessOrderMgmt. See flowchart
4.2.4.
Have the required

materials arrived?
Note: All required materials have

arrived for at least the first Process Job
of the Control Job. Or the first Process
Job does not require materials.
Yes
4.2.2B
(to 4.2.3A)

79
4.2.3
4.2.3 Control Job Start Control Job Start
4.2.3A
(from 4.2.2B
ControlJob
StartMethod =
Auto?
No
CJSM State: CJ Handler

Async Event
WAITINGFOR
(CJSM CST-6)
START
S6F11 [E94]
[E94]
Start Control Job CJStart CJ Handler

[E94] S16F27
[E94]
Control Job
Manual Start
Successful?
Yes
No
CJStart Ack CJ Handler
Yes S16F28
Issue Control Job
[E94] ACKcode=
Start Error
FAILURE
CJStart Ack CJ Handler

Control Job S16F28
Started Manually ACKcode=
Note: There is no E94-0703 CJSM [E94]
SUCCESS
transition in place to handle this. It
should go to either the Selected or
Paused state.
Issue Control Job Equipment CJ Handler
Start Error specific error
(alarm or
event)
No
Control Job
Automatic
Start
Successful?
Yes
Async Event CJ Handler

CJSM State: (CJSM CST-5
EXECUTING or
[E94] CJSM CST-7)
S6F11 [E94]
4.2.3B
(jto 4.2.4B)

80
4.2.4
4.2.4 Process Job Setup Process Job Setup
4.2.4A 4.2.4B
(from 4.2.9A) (from 4.2.3B)
Next Process Job

PJSM State:
PRJOBQUEUED
[E40]
Processing
resources made
available.
Control Job Queue

Note: Valid CJProcessOrderMgmt schedules next
values are LIST, OPTIMIZE and Process Job
ARRIVAL. according to
CJProcessOrder-
Mgmt
Note: See flowchart 4.2.4.

PJ Handler
Async
PJSM State:
PRJobEvent
SETTING UP
(PJSM SCT-2)
[E40]
S6F11 [E40]
Note: Successful Setup is indicated
by the following:
1) processing resource performs

necessary pre-conditioning as
required by recipe
2) required materials have arrived

Process Job
3) equipment otherwise prepares for Setup
material processing as required by Successful?
the recipe
No
Equipment
Issue Process PJ Handler
specfic
Job Setup Error
Yes error
[E40]
(alarm or event)
4.2.4C
(to 4.2.5A)

81
4.2.5
4.2.5 Process Job Start Process Job Start
4.2.5A
(from 4.2.4C)
PRProcess-
Start = Auto?
No
Async
PJSM State: PRJobEvent PJ Handler
WAITINGFOR- (PJSM SCT-3)
START S6F11 [E40]
[E40]
PRJobCommand PR Handler
Start Process
(StartProcess) PRJobCommand=
Job [E40]
S16F5 [E40] "STARTPROCESS"
Process Job
Manual Start
Successful?
Yes
No
Yes PJStart Ack
Issue Process PJ Handler
S16F6
Job Start Error [E40] PRAck=
FALSE
PJStart Ack PJ Handler

Process Job
S16F6 PRAck=
Started Manually
Note: There is no E40-0703 PJSM [E40] TRUE
transition in place to handle this. It
should go to either the Selected or
Paused state. Equipment PJ Handler
Issue Process
specific error
Job Start Error
(alarm or
event)
No
Process Job
Automatic
Note: Definition of Processing Start: Start
1) For internal buffer equipment, the Successful?
transition to PROCESSING is when
the processing carrier, loaded with all
Yes
substrates to be processed, is moved
Async
successfully into the processing PJ Handler
PJSM State: PRJobEvent
chamber.
PROCESSING (PJSM SCT-4 or
2) For fixed buffer equipment, the
[E40] PJSM SCT-5)
transition to PROCESSING is when
S6F11 [E40]
the substrate is moved successfully
into the processing chamber.
4.2.5B
(to 4.2.6A)

82
4.2.6
4.2.6 Substrate Tracking – Transport Substrate Tracking – Transport
4.2.6A 4.2.6B
(from 4.2.5B) (from 4.2.6F)
Note: Perform substrate tracking for
each and every substrate processed.
Substrate Objects are created when

the carrier is registered/accessed or
when the equipment receives the E90
Register Substrate service. See Source Carrier
Material Movement flowchart, 3.2 for Substrate Event
Location
further information. (SLSM SCT-2)
SLSM State:
S6F11 [E90]
UNOCCUPIED
Substrates may be processed in serial
or parallel. [E90]
Equipment
Substrate
Event
Location X
(SLSM SCT-1)
SLSM State: S6F11 [E90]
OCCUPIED
[E90]
Substrate
Tracking
Handler
SOSM State:
IN PROCESS
[E90]
SOSM State: Event
Note: These two transitions are (SOSM SCT-2)
AT WORK
combined into one transition collection S6F11 [E90]
[E90]
event which contains variables for both
concurrent substates.
Equipment
Substrate Event
Location X
(SLSM SCT-2)
UNOCCUPIED
[E90]
4.2.6C
(to 4.2.6D)

83
4.2.6
4.2.6 Substrate Tracking – Transport (continued) Substrate Tracking – Transport (continued)

4.2.6D
(from 4.2.5C)
Note: "All Equipment Substrate

Locations" is defined as only those All
locations specified per the recipe, not Equipment
necessarily 'all' locations within the Substrate
equipment. Locations
visited?
No
Equipment
Substrate Event
Location X+1
(SLSM SCT-1)
OCCUPIED
[E90]
SOSM State: Event

AT WORK (SOSM SCT-4)
Yes [E90] S6F11 [E90]
Equipment
Substrate
Event
Location X+1
(SLSM SCT-2)
SLSM State:
S6F11 [E90]
UNOCCUPIED
Substrate
[E90]
Tracking
Handler
Destination
Carrier Substrate
Event
Location
(SLSM SCT-1)
OCCUPIED
[E90]
SOSM State:
PROCESSING
COMPLETE
Substate [E90]
SOSM State: Event
AT DESTINATION (SOSM SCT-5)
Note: Substrate Objects are deleted [E90] S6F11 [E90]
when the carrier they are in are
removed from the equipment or when
the equipment receives the E90
Remove Substrate service. See
Material Movement flowchart, 3.3 for All Substrates
in Process Job
further information.
Yes started? No
4.2.6E 4.2.6F
(to 4.2.8A) (to 4.2.6B)

84
4.2.7
4.2.7 Substrate Tracking – Processing Substrate Tracking – Processing
Notes:
Note: Not withstanding related E90
1) Perform substrate tracking for each SCT-13 requirement, ISMT member
and every substrate processed. companies require SCT-13 for all
equipment.
2) Substrate Objects are instantiated
as shown in Material Movement - Event Substrate
Move In flowchart, 3.2 for further SOSM State:
NEEDS (SOSM SCT-10 Tracking
information. or Handler
PROCESSING
[E90] SOSM SCT-13)
3) Substrates may be processed in S6F11 [E90]
serial or parallel.
4) SOSM concurrent substate

(Transport and Processing) transitions
should be sent in the SOSM Transport SOSM State: Event
transition collection event. There are Yes IN PROCESS (SOSM SCT-
variables for both concurrent [E90] 11)
substates. S6F11 [E90]
Is more
processing
requested on
substrate?
Note: The SubstProcState attribute is
not assigned a value of PROCESSING
COMPLETE. For this state, it must No
assigned a value per the applicable
substate: PROCESSED, ABORTED, SOSM State: Event
STOPPED or REJECTED. PROCESSING (SOSM SCT-
COMPLETE 12)
[E90] S6F11 [E90]
Note: Substrate Objects are deleted
when the carrier they are in are
removed from the equipment or when
the equipment receives the E90
Remove Substrate service. See
Material Movement flowchart, 3.3 for
further information.

85
4.2.8
4.2.8 Process Job Complete Process Job Complete
4.2.8A
(from 4.2.6E)
Wait for all processed

Note: This implies that the last location substrates to transition to
as specfied by the recipe has been SOSM States:
visited by each requested substrate. AT DESTINATION
and
PROCESSING
COMPLETE [E90]
PJ Handler
PJSM State: Async
PROCESS PRJobEvent
Fixed Buffer Tool: Tools having a COMPLETE (PJSM SCT-6)
fixed buffer always takes this path. [E40] S6F11 [E40]
Internal Buffer Tool Only: An internal

buffer tool must wait for an E87
CarrierOut in parallel and
independently from the E40
Processing Complete activity.
4.2.8B
This path is unlikely for a Single Move Out
Wafer Tool. Single Wafer Tools with CarrierOut
(to 3.3.1B)
an Internal Buffer that will handle
more than one carrier per Control
Job may not exist.
Job complete per

at least one of
the following:
1) Material
removed from
equipment
2) Resource
post-processing
complete
3) Superceded by
another process
job on same
material
PRJobEvent
(PJSM SCT-7) PJ Handler
S6F11 [E40]
Delete Process
Job
PRJobAlert
(PRJobComplete)
S6F11 [E40]
Terminate

86
4.2.9
4.2.9 Control Job Complete Control Job Complete
Note: This is not a transition into CJSM State:

EXECUTING state. This is here only EXECUTING
to show that this is the current state.
The transition to this state is made
elsewhere in processing flowchart 4.2.
More Process
Jobs in Control
Yes Job?
4.2.9A No
(to 4.2.4A)
CJ Handler
Async Event
CJSM State:
(CJSM SCT-10)
COMPLETED
S6F11 [E94]
Event CJ Handler
Delete Control
(CJSM SCT-13)
Job
[E94]
Terminate

87
4.2.10
4.2.10 Process Job Abnormal Termination Process Job Abnormal Termination

ACTIVE state. This is here only to PRJobCommand PJ Handler
show that this is the current state. The PJSM State: (Cancel, Abort, PRJobCommand=
transition to this state is made in this ACTIVE or Stop) "CANCEL",
Processing Flowcharts 4.2. [E40] S16F5 [E40] "ABORT", or
"STOP"
Note: Cancel is illegal in any state
other than QUEUED/POOLED.
Cancel
command?
Yes
PRJobCommand
Issue in wrong PJ Handler
No Ack
state error. PRAck=F
S16F6 [E40]
Note: Any command is illegal in
ABORTING state. The previously
issued Abort always takes precedence. Yes
Is job
in PJSM
ABORTING
state?
No
Stop
command?
Yes PRJobCommand
Ack PJ Handler
S16F6 [E40] PRAck=T
PJSM State:
STOPPING PRJobEvent
No [E40] (PJSM SCT-11 PJ Handler
(Abort) or
SCT-12)
Process product S6F11 [E40]
to next safe
location.
PRJobCommand
Ack PJ Handler
S16F6 [E40] PRAck=T
PJSM State:
ABORTING
[E40] PRJobEvent
(PJSM SCT-13, PJ Handler
SCT-14, or SCT-15)
S6F11 [E40]
All terminated
process job
execution activity
ceased.
4.2.10A
(to 4.2.10B)

88
4.2.10
4.2.10 Process Job Abnormal Termination (continued) Process Job Abnormal Termination (continued)
4.2.10B
(from 4.2.10A)
Async
PRJobAlert PJ Handler
(PRJobComplete) ErrorCode=
S6F11 [E40] PJaborted/
Delete Process PJstopped
Job
Async
PRJobEvent PJ Handler
(PJSM SCT-16 or
PJSM SCT-17)
S6F11 [E40]
Increment (+1)
PRJobSpace
Terminate

89
4.2.11
4.2.11 Control Job Abnormal Termination Control Job Abnormal Termination

ACTIVE state. This is here only to
show that this is the current state. The CJCancel,
transition to this state is made in this CJSM State: CJ Handler
CJStop,
Processing Flowchart 4.2. ACTIVE
CJAbort
[E94]
S16F27 [E94]
Cancel
command?
Yes
Issue wrong CJ Handler

CJCancel
state Error
Ack ACKcode=
No (no jobs
S16F28 [E94] FAILURE
cancelled)
CJStop, CJ Handler
Note: Control Job parameter Action Issue command CJAbort Ack
(SAVEJOBS / REMOVEJOBS) is used response S16F28 ACKcode=
as follows. The effect on process jobs [E94] SUCCESS
deleted and the process job is
therefore left without an owner. Do not start any
• SAVEJOBS - PJSM state other process
(QUEUED): The process job jobs for the
remains in the PR JOB QUEUED/ Stopped/Aborted
POOLED state. It cannot be run control job .
until another control job is created
that controls that process job.
(QUEUED): The process job is
deleted from the process job
Stop
queue when the material is
command?
removed.
No
(Abort)
Yes
4.2.11A 4.2.11B
(to 4.2.11C) (to 4.2.11D)

90
4.2.11
4.2.11 Control Job Abnormal Termination (continued) Control Job Abnormal Termination (continued)

4.2.11C 4.2.11D
(from 4.2.11A) (from 4.2.11B)
CJ Handler
Async Event
CJSM State:
(CJSM SCT-11)
COMPLETED
S6F11 [E94]
Process all
PRJOBACTIVE
process jobs to
completion per
flowchart 4.2.8,
Process Job
Complete.
CJ Handler
Async Event
CJSM State:
(CJSM SCT-12)
COMPLETED
S6F11 [E94]
Note: Control Job parameter Action
(SAVEJOBS / REMOVEJOBS) is used
as follows. The effect on process jobs
deleted and the process job is Immediately
therefore left without an owner. terminate all
• SAVEJOBS - PJSM state PRJOBACTIVE
(ACTIVE): The process job is process jobs.
terminated. It is then deleted
from the equipment when the
material is removed.
(ACTIVE): The process job is CJ Handler
terminated. It is then deleted Event
Delete Control
from the equipment when the (CJSM SCT-13)
Job
material is removed. S6F11 [E94]
Terminate

91
5 FLOWCHARTS – ROUND TRIPS

The flowcharts and scenarios in this section pertain to reference material such as one-page round
trip reference flowcharts and ISMT base scenarios.
5.1 Round Trips and Base Scenarios
Purpose
This cross-functional operational flowchart presents one-page summary references of different
round trip scenarios.
Refer to the individual flowcharts.
Assumptions
1. <none>
5.1.1 Round Trip Summary – Equipment Verification
5.1.2 Round Trip Summary – Host Verification
5.1.3 Round Trip Summary – No ID Verification
Legend
Off-page Reference
Outgoing Incoming
Explanatory Note

92
5.1.1 Round Trip – Equipment Verification

5.1.1 Round Trip – Equipment Verification
Instantiate
Carrier, Reserve
Load Port, Bind Request
Associate [3.2.1.1]
Carrier/Load Port
[3.2.2.1]
Place Carrier on
Load Port
Request Carrier
[3.2.2.1]
Delivery
[3.2.2.1]
Equipment Based
Carrier ID Verify
[3.2.3.2 3.2.3.3]
Process Jobs Create Process

Created and Queued Jobs
[4.1.1.3] [4.1.1.3]
Verify Slot Map

[3.2.3.7]
Control Jobs Create Control

[4.1.2.3] [4.1.2.3]
Start Substrate
[3.2.4.1]
Control Job
Selected/Started
[4.2.2, 4.2.3]
Process Job
Setup/Started
[4.2.4, 4.2.5]]
Wafer Tracking
[4.2.6, 4.2.7]
Process Job Complete

[4.2.8]
Control Job Complete

Remove Carrier [4.2.9]
from Load Port
[3.3.1]

93
5.1.2 Round Trip – Host Verification

5.1.2 Round Trip – Host Verification
Instantiate
Carrier, Reserve
Load Port, Bind Request
Associate [3.2.1.1]
Carrier/Load Port
[3.2.2.1]
Place Carrier on
Load Port
Request Carrier
[3.2.2.1]
Delivery
[3.2.2.1]
Host Based
Carrier ID Verify
[3.2.3.2 3.2.3.4]
Process Jobs Create Process

[4.1.1.3] [4.1.1.3]
Verify Slot Map

[3.2.3.7]
Control Jobs Create Control

[4.1.2.3] [4.1.2.3]
Start Substrate
[3.2.4.1]
Control Job
Selected/Started
[4.2.2, 4.2.3]
Process Job
Setup/Started
[4.2.4, 4.2.5]]
Wafer Tracking
[4.2.6, 4.2.7]
Process Job Complete

[4.2.8]
Control Job Complete

Remove Carrier [4.2.9]
from Load Port
[3.3.1]

94
5.1.3 Round Trip – No ID Verification

5.1.3 Round Trip – No ID Verification
Carrier Notification
Instantiate Request
Carrier [3.2.1.1]
[3.2.2.1]
Place Carrier on
Load Port
Request Carrier
[3.2.2.1]
Delivery
[3.2.2.1]
Detect Carrier
Placement
[3.2.3.2 3.2.3.6]
Control and Process

Jobs Created and Create Control and
Queued Process Jobs
[4.1.1.3, 4.1.2.3] [4.1.1.3, 4.1.2.3]
Verify Slot Map

[3.2.3.7]
Start Substrate
[3.2.4.1]
Control Job Selected [4.2.2]
Request Control
Control Job Started [4.2.3]
Job Start
[4.2.3]
Process Job Setup/Started

[4.2.4, 4.2.5]
Wafer Tracking [4.2.6, 4.2.7]
Process Job Complete [4.2.8]
Control Job Complete [4.2.9]
Remove Carrier
from Load Port EPIO Handshake Detect Carrier
[3.3.1] Removal [3.3.1]

Technology Transfer
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Austin, TX 78741
http://www.ismi.sematech.org
e-mail: info@sematech.org

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300 mm Operational Flowcharts and Scenarios, V.

International SEMATECH Manufacturing Initiative

© 2004 International SEMATECH Manufacturing Initiative, Inc.

Authors: Steve Fulton, Gino Crispieri, and Lorn Christal

Approvals: Steve Fulton, Project Manager

ISMI, Inc. Technology Transfer #04014488A-TR

4.2 Processing – Product................................................................................................. 75

Technology Transfer #04014488A-TR ISMI, Inc.

Gino Crispieri (ISMI)

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ISMI, Inc. Technology Transfer #04014488A-TR

Technology Transfer #04014488A-TR ISMI, Inc.

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1.1 Applicable Documents

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2.1 Initialization – Clean Initialization

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2.1.1 Summary Equipment Initialization

Note: Each of these may or may not

Equipment ready for

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2.1.2 Equipment Specific Initialization

Note: This flowchart initializes Begin Equipment

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2.1.3 E30 Generic Equipment Model (GEM) Initialization

Control State Event:

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2.1.3 E30 Generic Equipment Model (GEM) Initialization (continued)

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2.1.4 E40 Processing Management (PM) Initialization

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2.1.5 E84 Enhanced Parallel (/O (EPIO) Initialization

Next E84 PI/O

All E84 PI/O

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2.1.6 E87 Carrier Management System (CMS) Initialization

Note: This flowchart initializes Begin

Note: The alarms presented below

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2.1.7 E90 Substrate Tracking System (STS) Initialization

Note: This flowchart initializes Begin

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2.1.8 E94 Control Job Management (CJM) Initialization

Note: This flowchart initializes Begin

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3 FLOWCHARTS – MATERIAL MOVEMENT

3.1 Material Movement – Support Services

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3.1.1 Place Port In Service

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3.1.1 Place Port In Service (continued)

LPTSM State: Event CM Handler

Is the FOUP ready

LPTSM State: Event CM Handler

LPTSM State: Event

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3.1.2 Place Port Out of Service

Place port OUT

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3.1.3 Access Mode Change – AUTO