CONTENTS

Chapter 1 GENERAL DESCRIPTION

１．１ IMPORTANCE OF THE LEAK TEST ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・3
１．２ THE INFLUENCE OF LEAKAGE VOLUME AND THE LEVELS OF ALLOWABLE LEAKAGE RATES ・・・3
１．３ A VARIETY OF LEAK TEST METHODSLEAKAGE OF GAS OR FLUID ･･･････ 4
１．４ LEAKAGE OF GAS OR FLUID ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・4
1.4.1 States Of Leak Flow Through A Hole
1.4.2 Factors Influencing Flow State
1.4.3 Leakage of Gas or Fluid (Turbulent Flow)
1.4.4 Leakage of Gas or Fluid (Viscous Flow)
1.4.5 Molecular Flow

Chapter 2 LEAK TEST

２．１ DIFFERENTIAL PRESSURE TYPE LEAK TEST ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 13
2.1.1 Operating P rinciple
2.1.2 Basic Operation
2.1.3 Calculation Equation of Leak Volume
2.1.4 Applied Measuring Method
2.1.5 For Performance Enhancement
２．２ DIRECT PRESSURE DETECTION AIR LEAK TEST ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 22
2.2.1 Operating Principle
2.2.2 Basic Operation
2.2.3 Calculation Equation OF Leak Volume
２．３ HYDROGEN GAS DETECTION LEAK TEST ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 23
2.3.1 Operating Principle
2.3.2 Basic Operation
2.3.3 Calculation Equation OF Leak Volume
2.3.4 Applied Measurement Method
２．４ HELIUM GAS DETECTION LEAK TEST ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 27
2.4.1 Operating Principle
2.4.2 Basic Operation
2.4.3 Calculation Equation OF Leak Volume
2.4.4 Applied Measurement Method
２．５ FLOW RATE LEAK TEST ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 31
2.5.1 Operating Principle
2.5.2 Basic Operation
2.5.3 Calculation Equation of Leak Volume
2.5.4 APPLIED MEASUREMENT METHOD

Chapter 3 PERIPHERAL EQUIPMENT

３．１ EXHAUST BYPASS UNIT ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 35
３．２ PRESSURIZATION & EXHAUST BYPASS UNIT ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 35
３．３ FLOW MASTER ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 36
３．４ CALIBRATOR ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 36
３．５ SUPER ELECTROPNEUMATIC REGULATOR (APU) ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 37

Chapter 4 INFORMATION ABOUT EQUIPMENT

４．１ MANAGEMET OF WATER, OIL AND FOREIGN MATERIALS ・・・・・・・・・・・・・・・・・・・・・・・・・・ 39
４．２ MANAGEMENT OF SOURCE PRESSURE AND FLOW RATE ・・・・・・・・・・・・・・・・・・・・・・・・・・ 40
４．３ CLAMPING AND SEALING JIG ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 41
4.3.1 CLAMPING
4.3.2 SEALING JIG
４．４ CHANGE IN TEMPERATURE ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 43
 A VARIETY OF UNITS FOR PRESSURE AND THEIR CONVERSIONS
Pa atm Torr kg/c ㎡ bar mmH 2O lb/in2 inchHg Note
9.869 23 7.500 62 1.019 72 1 1.019 72 1.450 38 2.953 00
1Pa = 1N/m2 = 1 SI unit
×10?? ×10?3 ×10?5 ×10?5 ×10?1 ×10?4 ×10?4
1.013 25 7.6 1.033 23 1.013 25 1.033 23 1.469 60 2.992 13 To be differentiated from
1atm = 1ata = 1
×10? ×102 ? *2 ? ×104 ×101 *2 ×101 gauge pressure (atg)
1.333 22 1.315 79 1.359 51 1.333 22 1.359 51 1.933 68 3.937 01
1Torr =1mmHg *6 = 1 ×10?3
×102 ×10?3 ×10?3 ×101 ×10?2 ×10?2
9.806 65 9.678 41 7.355 59 9.806 65 1 1.422 34 2.895 90 The unit "at" is seldom
1kg/cm2 = 1at *7 1
×104 ×10-1 ×102 ×10?1 ×104 ×101 ×101 used.
1 9.869 23 7.500 62 1.019 72 1.019 72 1.450 38 2.953 00 May be used as an SI
1bar *3 ×105 ×10?1 ×102 ? 1 ×104 ×101 ×101 unit.
9.806 65 9.678 41 7.355 59 1 9.806 65 1.422 34 2.895 90
1mmH 2O = 1mmAq *4 1 ×10?3
? ×10?5 ×10?2 ×10?4 ×10?5 ×10?3
6.894 76 8.804 60 5.171 50 7.030 69 6.894 76 7.030 72 2.036 02 To be differentiated from
1lb/in2 = 1psia *5 1
×103 ×10?2 ×101 ×10?2 ×10?2 ×102 ? psig.
3.386 39 3.342 10 2.54 3.453 15 3.386 39 3.453 15 4.911 55 Often used to indicate
1inchHg = 1 negative pressure.
×103 ×10?2 ×101 ×10?2 ×10?2 ×10２ ×10?1
*1: Density of water is assumed as 1000 kg/m 3 at 4 ℃. For water of 15℃ (Density: 0.9991), 1 atm = 1.03416 × 104mmH2O.
*2: To avoid misprinting, ×1 is shown by ? , and ×10 by 101 .
*3: 1 bar = 106 dyne/cm2 = 0.1 MPa ≒1 atm
*4: Often used are 1 mH2 O = 1 mAq = 103 mmH2 O
*5: Stands for pound per square inch, absolute.
*6: 1μHg = 10-3 mmHg = 10-3 Torr , 1 Torr = 1 mmHg = 1000 μHg
*7: This kg means kg forces (kgf) or kg weight (kgw).
* 8: This is pronounced as “ pi’: e’i” until the Measurement Law is enacted.

Relationship between Measurement Hardware and Detectable Leak Rate

Detectable Range ml/sec
3 2 1 0 -1 -2 -3 -4 -5 -6 -7 -8 -9 -10
10 10 10 10 10 10 10 10 10 10 10 10 10 10

Hydraulic Submerge Method

Measurement Hardware

Flow Rate Measurement Method

Direct Pressure Type

Air Leak Detection
Differential Pressure Type
Air Leak Detection
Special Type
Air Leak Detection

Hydrogen Gas Leak Detection

Helium Gas Leak Detection

1
 Chapter 1

GENERAL
DESCRIPTION

2
1.1 IMPORTANCE OF THE LEAK TEST
In this leaflet, the term “leakage” defines the leakage of gas or fluid from a product, which will
affect the overall quality of the product.
The problem of leakage includes a variety of meanings, depending upon the industrial fields
where the term is used. For example, with fuel handling products, leakage can introduce a danger
of a fire, explosion, runaway, etc., while with other products it refers to low performance and
economic loss. In the food and drug industries it can cause a change in properties and/or shade, or
even rot in case of food. A small leak can grow into an unexpected size then creates product
liability problems, which at times, can become a crucial damage to a company.

1.2 THE INFLUENCE OF LEAKAGE VOLUME AND THE LEVELS OF

ALLOWABLE LEAKAGE RATES
For example, in the automotive components and parts, a comparison is made between the
air-conditioner, gasoline filter and silencing muffler.
The air-conditioner contains a fixed volume of a coolant medium that circulates to cool the air
passed into the car. Leakage of the coolant gas directly means a lower cooling effect, and the
allowable leakage rate during the life of the air-conditioner (several years) must be maintained
within a range that can keep the cooling effect satisfactory.
The gasoline filter is positioned close to the hot engine, and gasoline is a dangerous fuel with a
high- ignition point. Leakage of gasoline is obviously dangerous, for it can cause a fire or an
explosion. However a gasoline leak will evaporate by its self, therefore a leak which does not
evoke a danger must be set at the allowable leakage rate.
The primary role of an automotive silencing muffler is to reduce exhaust noise. After ignition,
the exhaust gas is expelled from the engine and diffused into the atmosphere through the muffler.
The muffler is a tube which is placed in the path to expel the exhaust gas in to the atmosphere. A
leakage from the wall of the muffler cylinder which does not affect the performance must be set at
the allowable leakage rate.
As you can see from the above examples, the allowable leakage rates differ from the character
to the character of the products and they must be set at leakage rates which don’t cause any
performance and safety problems.

3
1.3 A VARIETY OF LEAK TEST METHODS
Table 1.3 Leak Testing Methods

1.4 LEAKAGE OF GAS OR FLUID

1.4.1 States of Leak Flow Through a Hole
When considering a situation where gas flows through a leak hole, the state of the flow depends
on various conditions such as the diameter of the hole, the length of the hole (or the wall thickness
of the work) and the pressure within the work. These states can be roughly classified as below and
suitable leak measuring methods exist for each state.

Turbulent Flow Measured by Flow Rate or with Direct

Large Flow Pressure Method
・
・
・
Viscous Flow Measured with Differential Pressure Method
・
・ Measured with Hydrogen Gas Method
Small Flow
・
Molecular Flow Measured with Helium Gas Method

Fig. 1.1 Leak Test Methods for Various Flow Statuses

4
1.4.2 Factors Influencing Flow State
When considering the flow in a large pipe, the flow velocity of fluid at the wall of the pipe is 0
because the flow stays with the wall due to the viscosity of the fluid.
The velocity increases as the position of the flow is measured away from the wall because the
influence of viscosity reduces and the flow becomes dominated by inertia.
The layer which is influenced by both viscosity and inertia is called a boundary layer and the
layer becomes thin when the flow velocity of fluid is high or the viscosity of fluid is low. The
flow state which is dominated by inertia is turbulent flow.
By contrast, when considering the flow in a small pipe, a boundary flow develops near the wall of
the pipe due to viscosity and it merges at the center area of the pipe. The flow has a velocity
distribution with a parabolic shape and this flow state which is dominated by viscosity is viscous
flow (or laminar flow).
The Reynolds number (Re) indicates the boundary of the 2 types of flows.
Re = U・D/ν
U: Mean Flow Velocity within Pipe
D: Inner Diameter of Pipe
ν: Kinematic Viscosity Coefficient

When the Reynolds number is larger then 2200 (Re＞2200), the flow is turbulent flow, when the
number is smaller than 1200 (Re＜1200), the flow is viscous flow, and when the number lies
between the 2 values, the flow is intermediate flow in which viscosity and inertia influence each
other. If the diameter of the pipe decreases further, the flow can be described as follows. Viscosity
represents a state in which the molecules of fluid collide with each other and influence each other,
but the flow within a pipe becomes independent of its viscosity when the diameter of the pipe is
smaller than the distances of the collision of molecules (mean free path).
This state is molecular flow and the Knudsen number (Kn), a dimensionless number, determines
the state of flow.
Kn = λ/D
λ: Mean Free Path of Gas
D: Inner Diameter of Pipe

Flow state can be classified as follows according to the Knudsen number:

Kn＞１ Molecular Flow
Kn＜0.01 (Re＜1200) Viscous Flow
0.01＜Kn＜1 Intermediate Flow

In this leaflet, differences in the state of a pipe are considered because leak flow is being
considered. However, laminar flow or molecular flow will occur even in a large pipe when the
pressure in a pipe is reduced, because it causes a smaller kinematic viscosity coefficient or a
longer mean free path.

5
1.4.3 Leakage of Gas or Fluid (Turbulent Flow)
Calculation Equation of Leak Volume
P2+0.1
P1+0.1 ≦0.5 then the flow is chocked flow.

293
Q＝120×S（P1＋0.1）
273+t

P2+0.1
＞0.5 then the flow is subsonic flow.
P1+0.1

293
Q＝240×S （P2+0.1）
（P1−P2）
273+t
Q: Air Flow Volume (L)
S: Effective Sectional Area (mm2)
P1: Upstream Pressure (MPa)
P2: Downstream Pressure (MPa)
t: Temperature (℃)

1.4.4 Leakage of Gas or Fluid (Viscous Flow)

Leakage is a phenomenon which occurs when a fluid such as air, water, or oil passes through an
unintended opening such as a small hole. A resultant leak volume differs according to the
difference of pressure across the opening; and relates with the ease of fluid flow through the
opening; conductance.
This can be expressed by the following equation.
Q = C (P1 – P2 ) ---------------------------------------------------(1.1)
Where Q is leak volume, P1 – P2 represents the difference between two pressures, and C is
conductance.
When leakage is the subjective problem, the ease of fluid flow (C) depends on a variety of factors,
including the configuration of the opening, length, etc. It is therefore difficult to apply one type of
equation to all cases. In this section, an explanation is given using general application equations.

Theoretical Equation of Leak Volume

As a representative theoretical equation to explain the behavior of fluids passing through a very
narrow opening, the Hagan-Poiseuille Law is often used. According to this law if the opening is
so small that the flow of fluid is within a range of viscous flow (laminar flow), and the ratio of the
hole length vs. the hole diameter is large enough, the following equation can be applied;
pR 4 (P1 − P2 )
2 2
Qa = -----------------------------------------(1.2)
16?6lP2

Where Qa is the volumetric flow of outlet side pressure (atmospheric pressure) converted from
compressible fluid such as air.
However, if P1 is negative, the leak volume is expressed in terms of the state of atmospheric
pressure. The P2 in the denominator in equation 1.2 is replaced with P1 .
With a volumetric flow rate QW representing non-compressive fluid such as water, oil, etc. the
following equation is applied;

pR 4 (P1 − P2 )
QW = -----------------------------------------(1.3)
8? W l
6
Qa : Volumetric flow rate of compressive fluid (air) under pressure P2
Q W : Volumetric flow rate of non-compressive fluid
P1: Primary (test) pressure
Pin-hole of Radius
(when negative pressure, atmospheric pressure) R
P2: Secondary (test) pressure
(when negative pressure, test pressure) P1
R: Radius of the opening
l : Length of the opening
? P2
? a : Viscosity of compressive fluid
? w : Viscosity of non-compressive fluid
Fig. 1.2 Theoretic Model of Leakage

The relationship of volumetric flow rate influenced by the difference between gaseous fluid
and liquid, and between two pressures with the same test piece is shown in Table 1.2. Refer to
equations 1.1 and 1.2.

Table 1.2 Relationship between Leak Volume vs. Test Pressure and Viscosity
Condition Relative Equation

The ratio of leak volume to the different Qax P12 x − P2 2 x

=
test pressures towards the same gas . Qay P12 y − P2 2 y

Q ?
=
The ratio of leak volume to the fixed test ax ay
Gas
pressures towards different gases. Q ?
ay ax

The ratio of leak volume to the different Qax ? ay P12 x − P2 2 x

= ×
test pressure s towards different gases. Qay ? ax P12 y − P2 2 y

Qwx P1x − P2x

The ratio of leak volume to the different =
test pressure s towards the same liquid. Qwy P1y − P2y

Q wx ? wy
Fluid
The ratio of leak volume to the fixed test
=
pressure towards different liquids. Q wy ? wx

Q wx ? wy P1x − P2x
The ratio of leak volume to the different = ×
test pressure s towards different liquids. Qwy ? wx P1y − P2 y

(P x − P2 x )
The ratio of leak volume to the different 2 2
Qax ?
test pressures towards different gas es and = wy × 1
liquids. Qwy 2? a x P2x (P1y − P2y )
Gas/ Liquid
The ratio of leak volume to the fixed test Qax ? (P + P2 )
pressure towards different gases and = wy × 1
liquids. Qwy 2? a x P2

7
Viscosity (Viscosity Coefficient) η
Viscosity is one of the important factors when handling fluid. Different units are used in
different fields. Here are some examples;
Table 1.3 Viscosity Coefficient of
1P = 1 dyne・sec・cm-2 = 1gr・sec-1 ・cm-1
Gases and Liquids
= 10-1 N・sec・m-2 Fluid Temperatur
Temperature Viscosity
= 10-1 Pa・sec = 1.02×10-6 kgf・sec・cm-2 0℃ 1.71 × 10 P
-4

P = Poise 20℃ 1.81×10 -4 P

Air
N = Newton 50 ℃ 1.95×10 -4 P
kgf・sec・cm-2 : Engineering Unit 70℃ 2.04 × 10 P
-4

(kgf second per square centimeter) 0℃ 1.79×10 -2 P

-1 -1
Absolute Unit 1gr・sec ・cm 20 ℃ 1.00×10 -2 P
Water
= Engineering Unit 1.02×10-6 kgf・sec・cm-2 ×980.4cm・ 50℃ 0.55 × 10 P
-2

-2
sec 70℃ 0.40×10 -2 P
Pa: Pascal 20 ℃ 26×10 -2P
Brake -2
Also, to represent kinematical viscosity of the fluid, use the Oil
50℃ 10× 10 P
-2
equation; 70℃ 7×10 P
Gasoline 20 ℃ 6×10 -3 P
?= ?/?
But ?is the density of the fluid.

Some examples of the viscosity coefficients for air, water, brake oil and gasoline are shown in
Table 1.3.

Leak Rate Calculation Using a Variety of Units of the Viscosity Coefficient

(Pressure: Absolute Pressure)

(1) Calculation of Leak Rate in Compressive Fluid

Using equation 1.2, volumetric flow rates of compressive fluid based on a variety of
calculations units are summarized in Table 1.4.

Table 1.4 Leak Rate of Compressive Fluid

R: (m); l : (m); ? a: (Pa, sec); P1 , P2 : (Pa)
a R 4 P1 + P2 P1 − P2
Q (m 3 / sec) = 3.925 × 10−1 × ×
l? a 2 P2
R: (cm); l : (cm); ? a: (Pa, sec); P1 , P2 : (Pa)
b R 4 P1 + P2 P1 − P2
Q (cc/ sec) = 3.925 ×10 −1 × ×
l? a 2 P2
R: (cm); l : (cm); ? a: kg・sec/ cm2 ; P1 , P2 : (kg/ cm2 )
c R 4 P1 + P2 P1 − P2
Q (cc/ sec) = 3.925 ×10 −1 × ×
l? a 2 P2
1
R: (cm); l : (cm); ? a: ( kg sec/cm 2 ); P1 , P2 : (kg/ cm2 )
9.80665 ×10
5

d
R 4 P1 + P2 P1 − P2
Q (cc/ sec) = 3.879 × 105 × ×
l?a 2 P2
Note: R: Radius of Pipe, l : Length of Pipe ,? a: Viscosity of Fluid ,
P 1 : Primary Absolute Pressure, P2 : Secondary Absolute Pressure

8
(2) Calculation of Leak Rate in Non-Compressive Fluid
Using equation 1.3, volumetric flow rates of non-compressive fluid based on a variety of
calculation units are summarized in Table 1.5

Table 1.5 Leak Rate of Non-compressive Fluid

R: (m); l : (m); ? w: (Pa, sec); P1 , P2 : (Pa)

a R4 −1
Q(m /sec) = 3.925 ×10
3
× (P1 − P2 )
l?w

R: (cm); l : (cm); ? w: (Pa, sec); P1 , P2 : (Pa)

b R4
Q(ml/sec) = 3.925 ×10 −1 × (P1 − P2 )
l?w

R: (m); l : (cm); ? w: kg・sec/cm2 ; P1 , P2 : (kg/cm2 )

c R4
Q(ml/sec) = 3.925 ×10 −1 × (P1 − P2 )
l?w

1
R: (cm); l : (cm); ? a: (P = kg sec/cm 2 ) ; P1 , P2 : (kg/cm2 )
9.80665 × 10
5

d
R4
Q(ml/sec) = 3.849 × 105 × (P1 − P2 )
l?w

R: Radius of Pipe, l : Length of Pipe, ? w: Viscosity of Fluid,

P 1 : Primary Absolute Pressure, P2 : Secondary Absolute Pressure

Leak Rate Conversion from Air to Liquid

Using Table 1.2 and Table 1.3 the leak rates of Measuring Temperature
water, gasoline, and brake oil in reference to air are : Constant at 20℃
calculated, provided that the same test piece is used.
Volume - Flow Ratio

The temperature of fluid is kept fixed at 20℃, and

the test pressure is kept at the same level. The results Gasoline
are as shown Fig. 1.3.
Water

Primary Pressure kg/ cm2

Fig. 1.3 Volumetric Flow Rate of
Fluid Referred to Air

9
1.4.5 Molecular Flow
When the mean free path ? of gas is larger than the inner diameter D of a pipe, the molecules of
gas only collide with the wall of the pipe and rarely collide with each other.

○ ○ ○
○
○ ○ λ
λ
○
○ ○ D ○
○ D
○ ○
○ ○
○ ○

Fig. 1.4 State in the Pipe Fig. 1.5 State in the Pipe
(with Large Diameter) (with Small Diameter)
Molecules often collide with each other in the flow. Molecules rarely collide with each other in the flow.

In this state, the interaction among molecules (viscosity) is weak and the flow becomes molecule
flow in which collisions of the molecules and the wall are dominant. By defining the Knudsen
number (Kn), a dimensionless number, as Kn = λ/D, the state of flow can be classified as
follows.
・Kn＜0.01 Re＜1200 Viscous Flow
・Kn＞1 Molecular Flow

When gas at normal temperature flows in a straight circular pipe it is called molecular flow, it
can be expressed by the following equation.
0.523a3
Q = ×(P 1−P2)
M1/2・L
Q: Flow Rate, Pa・m 3/sec
a: Radius of Pipe, cm
L：Length of Pipe, cm
M：Molecular Weight of Gas
P1: Inlet Pressure, Pa
P2: Outlet Pressure, Pa

10
MEMO

11
 Chapter 2

LEAK TEST

12
2.1 DIFFERENTIAL PRESSURE TYPE LEAK TEST
2.1.1 Operating Principle

In the field of medicine the use of a balancing scale is often used as a precise method for
calculating arbitrarily small amounts of substance. The instrument is used to precisely measure a
weight close to the balancing weight (a reference value) by increasing the weight value on the
opposite side (Fig.2.1）.
The FUKUDA Air Leak Testers use the same principle as the balancing scale. The same air
pressure is charged to both the work to be tested and the master work and the change in pressure
balance within a fixed time is checked for the presence of a leak. If there is no leakage, the
charged air pressure shows no change and the balanced status is sustained for a long time （Fig.
2.2). However, if leakage occurs, the pressure in the tested work decreases with time and this
leads to an unbalanced status (Fig. 2.3). The leak rate (ml/sec) determines how fast the
unbalanced status occurs.

Fig. 2.1 Precise Weight Measurement Fig. 2.2 Charge Same Pressure and Fig. 2.3 If Leakage Occurs, the
of Medicine with Balancing Scale Check for Pressure Balance Balance will be lost

The basic circuit of the FUKUDA Air

Leak Testers is shown in Fig. 2.4 and air With Leak
pressure from the source is charged into No Leak (Needle Moves)
both the tested work and the master work
through the valves (A) and (B). After
closing the valves (A) and (B), the Master Work
pressure in the tested work is measured
in reference with that in the master work
using the differential pressure sensor.
Valve (A) Valve (B)

Pressure Source
* The master work should be the same as the tested
work without leakage

Fig.2.4 Basic Circuit of Differential Pressure Type Leak Test

Fig. 2.5 shows the basic pneumatic circuit actually installed in the FUKUDA Air Leak Testers.
The solenoid valves SV1 , SV2 , and SV3 are opened to charge air into both the tested work and the
master work at a certain pressure. Then SV2 and SV3 are closed. If the tested work has a leakage,
the inside pressure of it gradually decreases according to its leak rate and a pressure difference
against that in the master work occurs. This differential pressure is detected by the differential
pressure sensor. The sensor converts the pressure into an electrical signal and it is displayed on
the tester. The FUKUDA Air Leak Testers utilize the differential pressure value measured after a
preset elapsed time to make an OK/NG judgment automatically.

13
 Solenoid Valve, SV2
3 Way Valve, SV1
Calibrator
Pressure Gauge Valve, V1

Air Pressure
Source Differential Pressure
Sensor
Valve, V2
Filter

Solenoid Valve, SV3 Filter

Start
OK
NG
Controller Amplifier

Fig. 2.5 Basic Pneumatic Circuit of Differential Pressure Type Air Leak Tester

2.1.2 Basic Operation

The FUKUDA Air Leak Testers perform the following 4 processes sequentially and makes an
existence/nonexistence judgment of the leakage.

1) Pressurizing Process (Fig. 2.6)

The compressed air is adjusted to the test pressure and is charged into both the tested work and
the master work through the solenoid valves SV1 , SV2 and SV3 .

2) Balancing Process (Fig. 2.7)

The solenoid valves SV2 and SV3 are closed to seal the charged air in the tested work and the
master work, and allow the pressure to stabilize. If a large leak is detected, the tester makes an
“NG” judgment, and the test proceeds to the exhaust process.

SV2 Work SV2

ワーク Work
ワーク

圧力計 圧力計
電磁弁 電磁弁
SV1 SV2 Meter SV1
SV2 Meter
◎ ＊ ＊ ＊ Pa ◎ ＊＊＊Pa
Pressure Pressure
減圧弁
Reducing 電磁弁
Valve Differential
差圧センサー Pressure Sensor
メーター 減圧弁 電磁弁 Differential
差圧 センサー Pressure
メーター Sensor
Reducing Valve
SV1 SV1

電磁弁
SV3 Master
マスター SV3
電磁弁 Master
マスター
SV3
SV3

Fig. 2.6 Pressurizing Process Fig. 2.7 Balancing Process

3) Detection Process (Fig. 2.8)

The presence or absence of a trace leak is detected in this process. If a leak is detected, the
tester makes an “NG” judgment, and the test proceeds to the exhaust process.

4) Exhaust Process (Fig. 2.9)

After an OK or NG judgment is made, the pressures in the master and the tested work is
exhausted into the atmosphere.

14
 Leak
リーク

ワーク
ワーク 圧力計
圧力計
SV2 Work SV1 電磁弁
SV2 Work
SV1 電磁弁
SV2 SV2
◎ ＊＊＊ Pa
◎ 500Pa
Pressure Pressure
減圧弁 差圧 センサー メ ーSensor
ター
減圧弁 電磁弁 Differential
差 圧セ ンPressure Sensor
サ ー メーター 電磁弁 Differential Pressure
Reducing Valve Reducing Valve
SV1 SV1

電磁弁
SV3 電磁弁
SV3 Master
マスター
マスター
SV3 SV3
Fig. 2.8 Detection Process Fig. 2.9 Exhaust Process

The differential pressure sensor which converts a pressure value into an electrical signal is the
heart of the FUKUDA Air Leak Testers. Therefore, FUKUDA doesn’t rely on other manufacturers
for this sensor, and has originally developed and manufactures it by ourselves.

2.1.3 Calculation Equation of Leak Volume

(1) Calculation Equation of Leak Test

⊿P
{Ｖ
Ｖｗ
ＶL ＝
T・Po
Ｗ+ ⊿Ｖ
⊿Ｐ
(1+
Ｖｓ
) (Ｐ+Po)
}
VＬ : Leak Volume (ml/min)
T : Detection Time (sec)
⊿P : Resulting Differential Pressure (Pa)
Po : Atmospheric Pressure (101325Pa)
Vw : Inside Volume of Tested Work (ml)
[including the inside volume of the leak tester and its piping]
Vs : Inside Volume of Master Work (ml)
[including the inside volume of the leak tester and its piping]
P : Test Pressure (Pa)
⊿V
: Sensor Coefficient (0.4×10-5 ml/Pa)
⊿Ｐ

This calculation equation is available for download at website of FUKUDA.

(2) Calculation Equation of Internal Volume of the Work

⊿VL×Po
Ｖｗ ＝ − Constant
⊿Ｐ
Vw : Volume to be Calculated (ml)
⊿VＬ : Volume Change in Calibrator (ml)
Po : Atmospheric Pressure (101325Pa)
⊿P : Resulting Differential Pressure (Pa)
Constant : 0.4 (The value calculated from the sensor coefficient)

15
2.1.4 Applied Measuring Method
(1)Leak Side Measurement
This method is applied when the measurement becomes unstable due to the substance within
the tested work.

Work
Chamber

Examples: Activated Carbon, Diaphragm, Oil Seal, and Hollow Fiber

Fig. 2.10 Basic Circuit of Leak Side Measurement

(2) Sealed Work Measurement with Pressurized Tank

This method is applied when the tested work cannot be pressurized.

Work
Tank

Examples: Semiconductor, Camera, Crystal, SAW Filter, Chemical Bag, Food Package, and Molded Parts.

Fig. 2.11 Basic Circuit of Sealed Work Measurement with Pressurized Tank

(3) Measurement with Differential Pressure Sensor of 10 kPa Scale

This method is applied for slightly rough leak tests.

16
2.1.5 For Performance Enhancement
(1) Mastering Measurement and Fitting Measurement
In a leak test the gas in the work generates heat due to adiabatic compression during
pressurization of the work and this causes a momentary temperature rise in the gas within the
work. Therefore, a temperature difference between the gas inside the work and the outside air
occurs and the heat of the inside gas dissipates through the wall of the work over a long time. The
heat dissipation continues until the temperature inside the work becomes equal to the ambient
temperature. The time required for the heat dissipation depends on the material and shape of the
work, the equipment used for clamp sealing, etc.
For example, in cases of aluminum work and an iron work with a same shape, the aluminum work
dissipates its heat quickly, because the heat conductivity of aluminum is higher than that of iron.
Since the heat conduc tivity of metals is higher than that of air, the work with internal structure
and larger internal surface area dissipates its heat quickly.
However, the heat remains inside and it dissipates slowly when the outside structure of the work
and its internal structure have no contact. For example, a sintered metal filter has small metal
contact area between its case and the sintered metal part. The speed of heat dissipation depends on
works like this. In a leak test, a leak is detected according to the pressure change in the work
which is pressurized at a test pressure. Therefore, it is difficult to perform accurate leak detection
when the state of the gas within the work changes due to its heat dissipation.
The master- less method and the fitting method that are the measuring methods employed in our
leak tester enable measurements with correction for the influence of the heat.

Work with many contact points of the Work with a few contact
Hollow Work internal structure points of the internal structure

17
 (1)-1 Mastering Measurement (PAT. No.: 3461973, 3502687)

When mastering measurement is used:

Stable Zone (Linearity)
Resulting Differential Pressure

Same Angle
Leak (equals to leak volume)
2sec
Pa

θ
Actual Measured Data Mastering Data (Noise)
Subtract the leak area from
the measured data area and
Time sec store the resultant value as the
DET
mastering data.
M.DET
Fig. 2.12 Mastering Measurement
When the normal measurement is used with the work to which the mastering process is performed:
Resulting Differential Pressure

Leak

Pa

θ
Actual Measured Data Mastering Data

Time sec
DET
Fig. 2.13 Normal Measurement

Characteristics
・ Reduced pressurization time and detection time when compared to the existing leak test
methods. (A detection time less than 5 sec can be set)
・ Repeatability of measurements depends on the mastering data

When a leak exists in the mass production work;

Resulting Differential Pressure

Leak

Pa

θ′
Actual Measured Data Mastering Data

Time sec
DET

Fig. 2.14 Measurement with the Work with Leak

18
(1)-2 Fitting Measuring （PAT. PEND.）
The heat dissipation of the work is realized as follows.

Curve with a leak present Leak

Heat Conductivity
of Work ; c

Differential Pressure
Pressurization
Leak Detection Port
(Work Port) Leak from Work ; a
Curve without Leak

Inside Temperature c
of Work b1
Ambient Temperature of Work b2 b
b1, b2, and b: Constants of pressure
converted from temperature
Detection Process Time
Fig. 2.15 Temperature Inside of Work Fig. 2.16 Leak Characteristic Curve

In Fig. 2.15, the temperature within the work increases when the work is pressurized to the test
pressure through the work port. Then the pressurization valve is closed and the pressure change
within the work is detected using the differential pressure sensor. This differential pressure at the
start of the detection process becomes b1 (a pressure at a different temperature from b2). After
that the internal temperature of the work approaches the ambient temperature at the heat
dissipation rate which is determined by the heat conductivity, C, of the work and the inside
temperature of the work becomes equal to the ambient temperature (b2) over a long time.
The pressure b which is the convergent point of the differential pressure due to heat dissipation
is obtained by the equation; b = |b1 – b2|. The heat dissipation curves are as shown in Fig. 2.17
when the value b varies in actual use environments.
The curves are also as shown in Fig. 2.18 when the heat conductivity varies in actual use
environments.
Differential Pressure
Differential Pressure

Detection Process Time Detection Process Time

Fig. 2.17 When Resultant Differential Pressure Varies Fig. 2.18 When Heat Conductivity Varies
Due to Heat Dissipation

In fitting measurement, these 2 kinds of pressure variation can be corrected at the same time.
These corrections are made using a calculation method to determine constants (a, b, c) by fitting
the pressure curve to the equation of heat dissipation characteristic.
y = ax + b( 1-ecx ) ・・・・・・・・・・・・・・(2.2)
The constants a, b and c are calculated from the differential data at 0.1 second intervals in the
detection process, thus they approximate equation 2.2 with the least error.
The calculated value (of a leak) is displayed as the measurement result. (FittingSet4）
In some cases, however, the error due to the approximation calculation may become large when
the measurement condition is unstable and these 2 kinds of pressure variations are small. In such
cases, measure the values of b and c with a long detection time and obtain their accurate values.
The performance will be improved by substituting them into the equation 2.2 as constants and
calculating the value with approximation in the OK/NG measurement of an actual work.
(FittingSet1)
The FittingSet1 is a correction function similar to that in the master-less measurement.
It is also conceivable that the perfo rmance will be improved by only fixing the heat conductivity
C of the work in some environments.
It enhances the following ability to environmental variation. (FittingSet0)

19
FittingSet2 is a measuring mode in which fixed corrections of leak values are added to FittinSet1.
FittingSet3 is similar to the existing leak testers, such as the work- master comparison method, and
corresponds to the measuring method which generates the heat dissipation characteristics on both
sides of the differential pressure sensor, the tested work and the master work, and counterbalances
them with each other.

(2) APU (Super Electropneumatic Regulator) (PAT No.: 2618368）

An APU is an electropneumatic regulator which controls an air pressure and a flow rate by
changing its input voltage.
The APU realizes control reproducibility of ±0.1% by employing the differential type nozzle
flapper system for the precise electropneumatic proportional valve used in it. It can stably provide
pressure with a large flow rate even at very low pressure or negative pressure, this has been
considered difficult to realize, and it can also perform the control of a coupled pressure from
negative to positive pressure.
Its feedback sensor is attached externally, so the pressure control at an arbitrary point can be
performed. The differential pressure between both works can be set to a constant value by using a
differential pressure sensor. It is also capable of performing a constant flow rate control.
・ Stable pressure control is possible at an arbitrary setting.
・ Measurements with stable pressurization can be performed as the pressure switches
automatically by inputting the settings of the lead pressure and the test pressure for
the air leak tester. (Available only for FL-600, FL-601 and FM-1061)
・ Rapid pressurization is possible thanks to the feedback sensor.

(3) (Turbo-Type) Air Leak Tester (PAT No.: 173234）

The rapid stabilizing air leak tester stabilizes the internal pressures of the works after charging
the preset compressed air into the works. This air leak tester is aimed to significantly reduce the
pressurization time by these operations.
In addition to the test pressure source, the tester uses a compressed air source whose pressure is
higher than the test pressure. The works are pressurized with the lead pressure during the
pressurizing process and then the temperature rise which occurs during pressurization of air is
rapidly stabilized by switching the pressure to the test pressure. The pressurization time is reduced
when compared to the case in which the pressurized air is charged at one test pressure. In addition
to this, the influence of air temperature due to adiabatic compression and the change in the inside
volume of the tested work are cancelled by the pressurizing and depressurizing operations. As a
result, the pressurized air rapidly stabilizes and this can reduce the pressurization stabilizing time
to one-half or one-third when compared to the normal time. However, the setting valves for the
lead pressure and the pressurization time must be determined based on preliminary investigations
for the condition of the test work. (For FL-3XXX Series)

Lead Pressure
Pressure Change Due to
Internal Temperature
Pressure/Temperature

Pressure/Temperature

Stable Zone
Stable Zone
Test Pressure
Internal Temperature Change

Test Pressure Internal Temperature Stabilizes

Rapidly

Sealed Pressurization Time Sealed Pressurization Time

Fig. 2.20 Pressure/Temperature Stabilizing Curve of Turbo-type Air Leal Tester

20
(4) Exhaust Bypass
The exhaust bypass unit is used when a foreign material such as water, oil or swarf attaches to
or mixes into the works. The foreign material may contaminate the inside of the air leak tester
because the pressurized air passes through the tester when the air is exhausted. If the foreign
material mixes into the inside of the air leak tester, it may cause the malfunction of the internal
solenoid valve or the failure of the differential pressure sensor. Therefore, these troubles shall be
prevented by letting the pressurized air within the works exhaust through the exhaust bypass,
without passing through the inside of the tester.
・ The use of the exhaust bypass is recommended when foreign materials attach to or mixes
into the works.
・ By the use of the exhaust bypass unit, the causes which may lead to the failure of the air
leak tester will be reduced and stable measurement results can be obtained.

(5) Pressurization & Exhaust Bypass

The pressurization & exhaust bypass unit is the product to which a bypass function for
pressurization is added in addition to the exhaust bypass function.
Since the pressurization flow rate increases due to the additional pressurization bypass, effects
such as the reduction of pressurizing process time and the improvement of measurement stability
can be expected for large works with an internal volume of 1000 ml or more.
・ By the use of the pressurization bypass unit, the reduction of test time and the
improvement of measurement stability for large works can be achieved.
・ With the exhaust bypass function, the causes which may lead to the failure of the air leak
tester such as foreign materials attached to the work can be reduced (see “Exhaust
Bypass”).

(6) LPU-300
This is the air leak tester dedicated for the works with a small internal volume (30 ml or less). It
has high detection sensitivity because its capacity is very small (0.7 ml).

21
2. 2 DIRECT PRESSURE DETECTION AIR LEAK TEST
2.2.1 Operating Principle
In this test method, the test pressure is charged only to the tested work and a leak is detected by
measuring the pressure drop (or increase) in the work after a given time. This method is suitable
for the measurement of a large leak but is not suitable for a trace leak, because the influences of
temperature, deformation, etc. directly result in a pressure change.

2.2.2 Basic Operation

(1) Pressurizing: The test pressure is charged into the test work through the solenoid valves SV1
and SV2
(2) Balancing: The solenoid valve SV2 is closed and allow the test pressure charged into the work
to stabilize.
(3) Detection: Detect the leak from the work. At the start of the detection process, the zero
correction circuit is automatically activated and the detected pressure value starts from zero at
all times.

SV1 SV2

Work

start
OK
NG

Fig. 21 Basic Circuit of Direct Pressure Detection

2.2.3 Calculation Equation of Leak Volume

⊿P
VL＝ Vw
TPo

VL : Volume Leakage to Atmosphere (ml/sec)

T : Detection Time (sec)
⊿P : Pressure Drop during Detection Time (Pa)
Po : Atmospheric Pressure (101325 x 104 Pa)
Vw : Volume of Tested Work (ml)

22
2．3 HYDROGEN GAS DETECTION LEAK TEST
2.3.1 Operating Principle
In this test method, hydrogen molecules which infiltrate through a ceramic filter are detected
using a semiconductor concentration sensor. Hydrogen molecules will diffuse from high to low
concentration. By taking advantage of this nature of hydrogen molecules, the leaked hydrogen
molecules which diffuse within the sensor are measured.
The advantages of using hydrogen gas
・ Cheap gas price
・ Easy to leak due to low viscosity and less persistent
・ The lightest molecule.
・ Easy on the environment (no pollution)
・ Nonflammable and safe because the gas is used as a mixed gas of 5% hydrogen and 95%
nitrogen.
・ Non-corrosive inert gas (harmless to humans)
・ Low background level in the atmosphere (0.5ppm)
As described above, there are many advantages when hydrogen is used.

2.3.2 Basic Operation

① Replace hydrogen gas for air.
② Perform a leak test.

2.3.3 Calculation Equation of Leak Volume

If the leaking hydrogen gas is enclosed within a closed chamber, the concentration of hydrogen
within the chamber increases consistently. This phenomenon is used to increase sensitivity in the
deposition method. The mean concentration of hydrogen within the chamber is describes by the
following equation.
φLeak
C=Ctrancer ・tAce
Vchamber
Ｃ : Hydrogen Concentration within Chamber (ppm)
Ｃｔracer : Hydrogen Concentration of Tracer Gas (ppm)
F Leak : Tracer Gas Leak Volume (atm ml/sec)
tAce : Deposition Time (sec)
Vchamber : Internal Volume of Chamber (ｍｌ
)

The deposition time can be reduced in two ways. That is, to increase the test pressure or to
decrease the chamber internal volume. For example, if the charging pressure is tripled, the
deposition time is reduced to one tenth. This is effective for the leak of a viscous gas and most
gases have some viscosity.
The deposit time when the hydrogen concentration of the sample gas reaches 5ppm is shown in Table 2.1.
The values in the table are reduced by half if the alarm level is set to 2.5ppm.

23
 Table 2.1 Deposit Time
Leak Volume
-2 -3
10 10 10-4 10-5 10-6
atm ml/sec atm ml/sec atm ml/sec atm ml/sec atm ml/sec
Work Volume 1ml 0sec 0.1sec 1sec 10sec 100sec
10ml 0.1sec 1sec 10sec 100sec 16min
100ml 1sec 10sec 100sec 16min 2.8h
1L 10sec 100sec 16min 2.8h 28h
10L 100sec 16min 2.8h 28h 278h

2.3.4 Applied Measurement Method

(1) Diffusion Scanning
In this method, a porous plastic plate or cloth-like material is applied to the leak point and retain the leaked
gas, and then the leak can be detected by scanning along the surface of the plate or material with a sensor.
Hydrogen molecules will diffuse from high to low concentration. By taking advantage of this the leaked
molecules which diffuse can be measured with the sensor.

(2) Sniffer (Suction)

The sensor has a suction function and can ‘suck ‘ in air or gas at a constant flow rate.
The leak volume from the leak point can be calculated from the suction volume, exhaust volume and detected
gas concentration.
In this method, the gas that leaks from a leak point at a narrow range (10 ml or so) is inhaled.

Exhaust Flow for Sensor including

Leaked Tracer Gas

The tracer gas leaks

into the sniffer channel
within the cover.

Air Supply Port Pipe Filled with Tracer Gas

Fig. 2.22 Sniffer Method

φLeak
C=Ctrancer
Vchamber

C : Hydrogen Concentration of Sample (ppm)

CTracer : Hydrogen Concentration of Tracer Gas (ppm)
Fleak : Tracer Gas Leak Volume (atm ml/sec)
Fsample : Suction Sample Volume (atm ml/sec)

24
Example:
If the units of Fleak and Fsample are the same, other units can be used.
When the mixed gas is 5% hydrogen and the sample flow rate is 1 atm ml/sec, the equation
above is expressed as follows.
C = 5000 Fleak
Assume that a normal sample flow rate is １atm ml/sec
The suction probe used is the AP-55.

(3) Deposition Test

In this method, the work is enclosed by a chamber or hood when its volume or surface area is
large and the leaked gas is measured by depositing the gas inside the chamber or hood. With this
method, even a trace leak can be measured by taking plenty of time and increasing the
concentration of the leaked gas.

There are 2 measuring methods for the deposition test.

3-1 Natural Elevation Deposition

The leaked hydrogen gas diffuses and elevates within the chamber or hood and it accumulates
at the upper portion. Though the concentration of hydrogen gas depends on the sampling position
even with a same leak rate, this method is used when the leak should be detected quickly. Since
the shape of the chamber is an important factor, its effect must be checked with experiments.
Leaked Gas

Chamber or Hood

Work with Tracer Gas

Fig. 2.23 Natural Elevation Deposition Method

3-2 Forced Circulation

The air and leaked gas in the chamber are forcibly circulated. This method is used when the
same detection result should be obtained if a same leak exists at any position. Therefore, the
deposition time is longer than that in the natural elevation method. If the circulation is ins ufficient,
the use of a diaphragm pump or piston pump with an AC motor is recommended (these pumps are
also used for fish tanks). Mixture can be improved by attaching a circulation fan. But, in general,
a fan can only generate a very low pressure. If the diameter of its flow path is very small (30 mm
or less), it is necessary to use a pump instead. A circulation system must be designed to circulate
the air within the chamber at least 10 times during the deposition time. The mixing ability of the
system must be fully checked by placing a standard leak device at different points on the tested
work.
Chamber or Hood

Minimize the Dead Volume (Air)

Work with Tracer Gas

Fan or Pump for Air Circulation

Fig. 2.24 Forced Circulation

25
3-3 On Decompression Chamber Method (An Evolved Version of Decomposition Methods)
The sensor of ‘Sensistor Technologies’ leak detector which uses a mixed gas of 5% hydrogen
and 95% nitrogen as a tracer gas is necessary to conduct this measurement at atmospheric
pressure. In automatic leak tests, some works can not be tested in practice because the space
within the chamber has large influences on the detection capability and cycle time. In this method,
the apparent space can be reduced and the pressure at the sampling position of the automatic
probe can be set to atmospheric pressure by reducing the pressure within the camber to 1 kPaabs
and by sucking in a certain amount of air and exhausting the same amount. As a result of this, the
detection capability can be enhanced and the cycle time can also be shortened.

Chamber
Decompression Pump
Exhaust Air

Air Work Sampling Pump

Sampling Hose

Detector
Automatic Probe
Charging and Exhaust
System of Tracer Gas

Exhaust Normal Gas

Compressed Air

26
2.4 Helium Gas Detection Leak Test
2.4.1 Operating Principle
In this method, a trace amount of helium gas
which is leaked from the tested work is Light ion
removed and placed in a detector (mass
spectrometer), to detect the gas. Helium ion
The helium gas is ionized by the electron beam
from the filament within the ion chamber of the Collector
Slit
analyzing tube. The ions are accelerated and Molecule Heavy ion
move out through a slit and then pass through ○
the magnetic field generated by the analyzer. × A
Since the circular trajectories of the ions
depend on their mass, the collector can catch
the helium ions.
Analyzer
There are several types of analyzer. The typical (generates magnetic field)
types include the magnetic field modification
type (magnetic sector), omegatron type, and
quadrupole type. Fig. 2.25 Principle of Helium Gas Detection Leak Test

2.4.2 Basic Operation

(1) Suction Method (Sniffer Method)
1-1 Charge the pressurized helium gas into the work. (Fig. 2.26)
1-2 Collect the helium gas which is leaked from the work with the a helium detector. (Fig. 2.27)
1-3 Exhaust the gas with the vacuum pump. (Fig. 2.28)

H eディテクター H eディテクター

He Detector He Detector

Work Work

He He
ボンベ ボンベ
He Gas Cylinder He Gas Cylinder
V V
P P

Fig. 2.26 Pressurization with Helium Gas Fig. 2.27 Detection with Helium Detector

H eディテクター

He Detector

Work

He
He Gas Cylinder
ボンベ
V
P

Fig. 2.28 Exhaust

27
(2) Vacuum Vessel Method (Bell Jar Method)
2-1 Depressurize the work and chamber. (Fig. 2.29)
Depressurize the work so that the concentration of helium gas is not decreased by atmospheric
pressure.
2-2 Pressurize with helium gas. (Fig. 2.30)
Discharge the pressurized helium gas into the work.
2-3 Conduct a leak test. (Fig. 2.31)
Detect and calculate with the detector.
2-4 Clean the helium gas with nitrogen gas. (Fig. 2.32)
Exhaust the gases with the vacuum pump.
2-5 Open the work and chamber to atmospheric pressure. (Fig. 2.33)

N2 Gas
N
2 N2 NGas
2

Cylinder
ボンベ V Cylinder
ボンベ V
P P

Work H e ディテクター Work H e ディテクター

He Detector He Detector
He He
Gas HeHeGas
ボンベ ボンベ
Cylinder Cylinder

V V
P P

Fig. 2.29 Depressurization of Work Fig. 2.30 Pressurization with Helium Gas

N2 Gas
N
2
N2 NGas
2

Cylinder
ボンベ V Cylinder
ボンベ V
P P

Work H e ディテクター Work H e ディテクター

He Detector He Detector
He He
Gas HeHeGas
ボンベ
Cylinder ボンベ
Cylinder

V V
P P

Fig. 2.31 Leak Test Fig. 2.32 Cleaning of Helium Gas

N2 Gas
N
2

Cylinder
ボンベ V
P

Work H e ディテクター

He HeGas
He Detector
ボンベ
Cylinder

V
P

Fig. 2.33 Exhaust

28
2.4.3 Calculation Equation of Leak Volume
Measurement of Detection Sensitivity
(a) While opening the valve for the calibration leak, record the elapsed time and the meter reading
of the helium leak detector, and take the reading when it is stabilized as X2 . In this step, the
reading can be obtained from either the chart of the recorder or the time history of the reading.

(b) Close the valve of the calibration leak and take the reading when it is stabilized as X1 . If the
background level varies, measure the maximum value (X1max) and minimum value (X1min ) and
take their average as the background X1 .
(X1max＋X1min )
X1 =
2

(c) Calculate the detection sensitivity (S) using the equation below.
(X2−X1)
S= [1/(Pa･m3/sec)]
Qc

Qc : Leak volume from the calibration leak after compensated for the temperature at
(Pa･m3 /sec)
X1 : Reading of the helium leak detector with the background level. (Output)
X2 : Reading of the helium leak detector for the calibration leak. (Output)

(d) Calculate the minimum detectable leak volume (L) using the equation below.
2 2Qc(X1max−X1min )
L= (X1max−X1min ) = (Pa･m3/sec)
S X2−X1
(e) Measurement of time constant

X2-X1
Output

τ
37% of (X2-X1)
X2

X1

Background Background Level Time

Calibration Leak Valve, Open Calibration Leak Valve, Close

Fig. 2.34 How to Obtain Time Constant t

Measurement
(a) Charge helium gas into the tested work. In this step, it is preferable to replace with helium gas by depressurizing
the work with a vacuum pump in advance.
(b) Measure the background level and record it.
(c) Record the reading on the helium gas detector when at least, the time constant (t) has elapsed, after the start of
the helium gas charge.
(d) Calculate the leak volume (QT) using the equation below.

29
 (XP−X1)
QT =
S
Xp : Value of the helium leak detector at the test
X1 : Value of the helium leak detector with the background level (Output)
S : Detection sensitivity

Open
Discharge the helium gas within the work and open the vacuum vessel (bell jar) to the atmosphere.
Post-processing
Perform the necessary post-processing.
Judgment
Judge the result according to the inspection standard or specification. Use 1 x 10-7 Pa･m3 /sec unless other
wise noted.

2.4.4 Applied Measurement Method

Bombing Method (for Measurement of Sealed Work)
If the work can not be pressurized, charge helium gas into it beforehand and then measure its
leak with the detector.

With a defective work, the

helium gas infiltrates into the
不良品 良品
Defective Work Good Work work.
And then the helium gas, which
Heガス
He Gas had infiltrated into the defective
work, is detected when it leaks to
He the chamber.

In this method, the waiting time

between the completion of gas
charge and the measurement
不良品Work
Defective He Detector affects the accuracy of
measurement.
He
He ディテクター Therefore, the waiting time must
be controlled.

Fig. 2.35 Bombing Method

By combining the differential pressure detection leak test and the helium gas detection leak test,
an ideal measurement environment can be configured.

30
2.5 FLOW RATE LEAK TEST
2.5.1 Operating Principle
There are two major flow meter types for air (gas), a volume flow meter and mass flow meter.
The volume flow meter includes a differential pressure flow meter (laminar flow meter), variable
area flow meter, and volumetric flow meter, and the mass flow meter includes a thermal mass
flow meter (mass flow meter) and vortex flow meter.
The volume flow rate is expressed by volumetric displacement per unit time (l/min) and the
mass flow rate is expressed by mass displacement per unit time (g/min). However, they are
generally expressed by a volume flow rate unit at a certain condition where reference pressure and
temperature are specified in pursuant to typical flow rate measurements nowadays.
Among volume flow meters, the laminar flow meter has a characteristic that the pressure loss
⊿P is proportional to the flow rate Q when the flow in the pipe is a laminar flow.
128µL 32µL
⊿P= Q= U
4
pd ｄ2
⊿P : Pressure Difference L
µ : Viscosity Coefficient
L : Length of Pipe
d : Diameter of Pipe
Q : Flow Rate
U : Average Flow Velocity of Fluid Pressure Difference ⊿P
Fig. 2.36 Principle of Differential Pressure Flow meter
A laminar element has a structure such that many capillary tubes are bundled along a flow path,
and fluid passes through each capillary tube. Since the d of it is small, the Reynolds number is
extremely small.
The pressure difference ⊿P (pressure drop) of an actual laminar element is expressed as the sum
of the pressure drops, ⊿P1 and ⊿P2 , when the flow in it is assumed as a Poiseuille flow over the
entire length.
32µL V2
⊿P=⊿P1+⊿P2＝ U+Kr ⊿P1 ⊿P2
ｄ2 2g
Capillary Tube
Kr: Loss Coefficient at the End of Capillary Tube
In order to keep the linearity of the pressure difference
⊿P against the flow rate, the value of the following
⊿P
equation must be small enough.
Fig. 2.37 Principle of Laminar Flow meter
⊿P1 k d
= Re =
⊿P2 64 L
The FUKUDA Laminar Flow meter is designed to keep the linearity up to twice the rated flow.

The typical flow rate sensor used in a mass flow meter is a thermal mass flow rate sensor.
On the capillary tubes that work as a sensor, resistive
elements with a high resistance temperature coefficient
are attached at the upstream (Rus) and downstream
(Rds) of the tube. When electric currents are applied to
the elements, they generate heats. The temperatures of Rus Rds
these elements are same when there is no flow in the
pipe. If the fluid begins to flow in the pipe under this Flow
condition, the upstream element is deprived of heat by
the fluid and the down stream element receives the heat.
A temperature difference ⊿T occurs between the
upstream element and downstream element, and the Fig. 2.38 Principle of Thermal Mass Flow meter
temperature difference ⊿T has a functional relationship
with the mass flow rate of the fluid. Therefore, the mass flow rate is measured by the changes of
the resistances of electric signals, and then by amplifying and correcting them.

31
2.5.2 Basic Operation
(1) Flow meter (at Atmospheric Pressure)
In the atmospheric pressure method, the
work is positioned at the air pressure
source side and the laminar at the
atmospheric pressure side.
Work The test pressure is supplied to the work
and the leaked air passes through the
laminar and it is exhausted into the
atmosphere.
The flow rate can be obtained by
multiplying the pressure difference at the
laminar by the laminar coefficient.The
Fig. 2.39 Mass Flow meter at Atmospheric Pressure same laminar coefficient can be used
when the test pressure is changed.

(2) Flow meter (at Line Pressure)

In the line pressure method, the laminar
is positioned between the air pressure
source side and the work at the
Work
atmospheric pressure side.
The test pressure passes through the
laminar and is supplied to the work and
is exhausted into the atmosphere. The
flow rate is calculated by multiplying the
pressure difference at the laminar by the
laminar coefficient.
The laminar coefficient in this method
Fig. 2.40 Mass Flow meter at Line Pressure depends on the test pressure.

(1) Supply the test pressure.

(2) Wait until the flow rate stabilizes.
(3) Measure the flow rate.
(4) Exhaust the pressure.

2.5.3 Calculation Equation of Leak Volume

Q = ⊿P ×k
Q : Flow Rate (ml/min)
⊿P : Pressure Difference (Pa)
k : Laminar Coefficient

32
2.5.4 Applied Measurement Method
The basic methods of gas flow rate have been described in the BASIC OPERATION section
above, the methods to improve the measurement performance are stated here.

When a flow rate measurement is conducted using a volume flow meter (laminar flow meter, *
hereinafter referred to as laminar) or mass flow meter, the flow velocity in the pipe is extremely
low if the estimated effective sectional area is extremely small. In such a case, it is necessary to
take a substantially long measurement time to perform a proper flow rate measurement, because
the flow velocity in the pipe is extremely low.
There is a method to improve the measurement performance by using a pressurization bypass to
reduce the measurement time as short as possible.

Work

Fig 2.41 Flow Rate Measurement Using Pressurization Bypass

As shown in Fig. 2.41, by using a method to achieve the specified pressure in the work with
holes whose flow rate is very low by the use of a circuit without the work, the area with a slow
flow rate is practically limited to the holes of the work and this leads to the reduction of
measurement time.

When a flow rate is measured with a laminar flow meter or mass flow meter, a regulator is used
to adjust a pressure to the specified pressure. Since the regulator adjusts the pressure while
supplying a flow to compensate the pressure loss of the work in the secondary side, a normal
regulator can not maintain the specified pressure because of its structure.
When the specified pressure can not be maintained, this causes the failure to obtain stable flow
rate measurement results.
In such a case, the above mentioned problem can be solved by the use of an electropneumatic
regulator (we call this an APU) which always supplies the specified pressure even if the pressure
loss of the work varies. (The APU theory will be explained in Chapter 3.)

33
 Chapter 3

Peripheral Equipment

34
3.1 EXHAUST BYPASS UNIT
OUTLINE
The exhaust bypass unit is used when foreign materials such as water, oil, or swarf attaches to
or mixes into the works. Since the pressurized air charged FE-20
within the pass through the air leak tester (here after referred
to as ALT) when it is exhausted, these materials may enter
into the inside of the ALT. If they enter into the inside of the
ALT, it may cause the malfunction of the internal solenoid
valve or the failure of the differential pressure sensor.
Therefore, these troubles shall be prevented by using the
exhaust bypass as it lets the pressurized air within the work
directly exhaust through it, without passing through the
inside of the ALT.

・ The use of the exhaust bypass is recommended when foreign materials attach to or mix
within the works.
・ By using the exhaust bypass unit, the causes which may lead to the failure of the ALT will
be reduced and stable measurement results can be obtained.

There is also the pressurization & exhaust bypass unit which has the pressurizing bypass function
in addition to the exhaust bypass function.

3.2 PRESSURIZATION & EXHAUST BYPASS UNIT

OUTLINE
The pressur ization & exhaust bypass unit is that to CBU-600
which the bypass function for pressurization is added in
addition to the exhaust bypass function.
Since the pressurization flow rate increases due to the
additional pressurization bypass, effects such as the
reduction of pressurizing process time and the
improvement of measurement stability can be expected for
large works with an internal volume of 1000 ml or more.

・ By using the pressurization bypass unit, the

reduction of test time and the improvement of
measurement stability for large works can be
achieved.
・ With the exhaust bypass function, the causes which may lead to the failure of the ALT such
as foreign materials attached to the work can be reduced (see “Exhaust Bypass” section).

35
3.3 FLOW MASTER
OUTLINE
The flow master is a flow rate device which can maintain FFM-100
a constant flow rate by applying a specified pressure. It has a
glass capillary tube in the body. It generates a constant flow
rate at a specified pressure by adjusting the length and
diameter of the glass capillary tube.
By using the flow master, the daily checks of the ALT’s
function and accuracy with actual leaks can be conducted
easily. The OK/NG judgment condition for leak testing can
be set by using the flo w master in combination with a work
as a leak master. It is also capable of measuring the internal volume of a work when used with a
differential pressure type ALT.

・ The traceability certificates can be issued.

3.4 CALIBRATOR
OUTLINE
The calibrator changes its internal volume when the scale
dial is rotated.
By using it in combination with a differential pressure type
ALT, the sensitivity check of ALTs and the internal volume
measurement of works can be conducted by measuring the
resultant pressure difference due to a volume change.

・ By using the calibrator, the sensitivity check of

differential pressure type ALTs and the internal volume
measurement of works can be conducted easily.
・ The traceability certificates can be issued.
・ There are 3 types: 0.1 ml, 1.0 ml and 5 ml.

36
3.5 SUPER ELECTROPNEUMATIC REGULATOR (APU)
OUTLINE

The super electropneumatic regulator (here after referred

to as APU) is an electropneumatic regulator which controls APU-300
an air pressure and a flow rate by changing its input voltage.
The APU realizes control reproducibility of ±0.1% by
employing the differential type nozzle flapper system for the APU-120
precise electropneumatic proportional valve used in it. It can
stably provide pressure with a large flow rate even at very
low or negative pressure, this has been considered difficult
to realize, and it can also perform a control of a coupled
pressure from a negative pressure to a positive pressure.
Its feedback sensor is attached externally, so the pressure
control at an arbitrary point can be performed. The APU is
also capable of performing a constant flow rate control by
using a differential pressure sensor to control the pressure
difference at both sides of the work.

・ Stable pressure control is possible at an arbitrary setting by using the APU.

・ Measurements with stable pressurization can be performed as the pressure switches
automatically by inputting the settings of the lead pressure and test pressure for the ALT.

37
 Chapter 4

Information about
Equipment

38
4.1 MANAGEMET OF WATER, OIL AND FOREIGN MATERIALS
When using the air leak testers, it is most important to correctly manage the water, oil and
foreign materials mixed into the air used for testing. This is because they may have various
harmful effects and cause a failure, if they enter into the inside of air leak testers.

Failure Causes of Repaired Products Breakdown of the Source of Foreign Materials

Repair Causes of Leak Testers Details of the Source

Mix of Foreign Materials Primary Pressure (Oil)

Customer’s Reason Primary Pressure (Others)
Aging Work (Oil)
Others Work (Others)

Fig. 4.1 Failure Causes Fig. 4.2 Details of the Source of Foreign
As shown in Fig. 4.1, 66% of the failures caused are due to foreign materials. According to the
survey on the detail of the main cause, 74% of mix is due to primary pressure and 26% due to
works as shown in Fig. 4.2. Installation of a filter set (air filter and mist separator) just before an
air leak tester is recommended to prevent the mix of foreign materials from the primary pressure.

Air Filter Mist Separator

Mainly removes moisture Removes oil mist.

Compressed Air Source

Air Leak Tester

Fig. 4.3 Filter Set Installed at Primary Pressure Side

Capacity of Filter Set to be Installed (Flow rate shall be selected according to the product)

Table 4.1 Filter Capacity

Secondary Side Oil Mist
Filtration Size Ambient and Gas Temp.
Concentration.
Air Filter 5µm ‐5 – 60℃ −
Mist Separator 0.01µm ‐5 - 60℃ 0.1mg/m3 *1
*1: at compressor discharge concentration of oil mist of 30mg/m3 (ANR).

Request to Customers Regarding Long and Stable Use

With a filter installed, the maintenance of the filter shall not be neglected, otherwise its
performance will be lowered and foreign materials will enter into the air leak tester.
Make sure to conduct “Drainage at daily inspection before operation” and “Exchange of
filter eleme nt at every periodic inspection”
(For the proper exchange interval of the filter element in use, refer to the instruction manual.)

39
 One of the failure causes of the products is the suction of foreign materials from the work
during exhaust. Installing an external exhaust unit (charge external exhaust unit) is recommended
to prevent the suction of foreign materials.

Leak Tester Work

External Exhaust Unit

Fig. 4.4 Basic Circuit with External Exhaust Unit

4.2 MANAGEMENT OF SOURCE PRESSURE AND FLOW RATE

Since test pressures of the leak test depend on each work, the management of the primary
pressure is important. The variation of the source pressure and insufficient flow rate will result in
reduced detection accuracy and longer tact time

Table 4.2 Primary Pressure Management Range for Each Measurement Range
Measurement
Range Control Range Primary Pressure
V -5 - -90kPa Direct supply from vacuum pump
UL 0 - 20kPa 50kPa
L 10 – 99kPa 100 – 200kPa
M 50 – 700kPa 100 – 900kPa
H 300 – 990MPa Set Pressure + 30%
H1 0.5 - 2.0MPa Set Pressure + 30%
H2 1.0 - 4.0MPa Set Pressure + 30%

As shown in Table 4.2, the management of the primary pressure is necessary.

A sufficient discharge flow rate of the regulator must also be secured for the measurement of large
works.
* As the manage ment of the primary pressure and flow rate is the key point for the equipment,
please contact our sales representative.

40
4.3 CLAMPING AND SEALING JIG
Clamping and sealing are the absolute requirements for leak testing. Since shape and test
pressure depend on each work, appropriate clamping pressure and seal method are required for
the work.

4.3.1 Clamping
Clamping pressure is expressed as follows: Cylinder diameter x Air (Oil) pressure = (Seal area x
test pressure + Crush force of rubber seal) x Factor for stabilization.
The factor for the stabilization of clamping depends on the seal conditions such as surface
roughness, rubber hardness, etc (the normal ratio of maximum value to minimum is 2).

4.3.2 Sealing Jig

(1)Reduce the volume change
The measurement becomes unstable if the internal volume changes when a force is applied to the
work by clamping.
The typical seal methods are O-ring sealing and urethane rubber sealing. We strongly recommend
the O-ring searing in consideration of the characteristics of air leak testers. The urethane rubber
sealing shall be used only when it is not applicable due to the shape of the work.
With the use of a core cylinder, the volume change decreases during a test using a urethane rubber
seal and this leads to the improvement of detection sensitivity and accuracy.

O-ring Sealing

There is almost no
Work Work volume change due to a
metal contact condition
between the work and
sealing jig.

O-ring ﾞ
O-ring Sealing Jig Sealing Jig

* The O-ring may come away during unclamping, so take an appropriate preventive measure such as dovetail groove.
Fig. 4.5 Seal Method (O-ring Sealing)

Urethane Rubber Sealing

The rubber deforms

when it contacts all
over the work and the
change of internal
volume occurs easily,
and this leads to a false
measurement.

Sealing Jig
Sealing Jig Urethane Rubber
Urethane Rubber

* By covering the side surface of the rubber, the deformation during sealing can be reduced.

Fig. 4.6 Seal Method (Urethane Rubber Sealing)

41
 Urethane Rubber Seal with Core Cylinder Since the deformation of the
seal is restrained and the
change of internal volume
decreases, the measurement
accuracy is improved.

Core Cylinder
Core Cylinder
Urethane Rubber
Urethane Rubber Sealing Jig Sealing Jig

Fig. 4.7 Seal Method (Urethane Rubber Sealing with Core Cylinder)

1) Select parts with little deformation due to pressurization

・Select hard piping parts such as those of high-pressure type even if their specifications are
sufficient in terms of pressure.
・Do not use soft materials such as polyurethane.
・Do not include devices with a diaphragm or spring in the measurement circuit.

2) In cases of deformable works

When a measurement is done for the work of a soft material such as resin, a structure to prevent
deformation shall be employed.

(2) Improvement of detection sensitivity

With a leak, the change of pressure becomes large when the volume of a work is small. Leak
detection of high sensitivity can be realized by reducing the volume of a work.

1) Utilization of core

Since the volume decreases due to

the volume of the core, the detection
sensitivity increases.

Core

Urethane Rubber Urethane Rubber

2) Selection of piping
In leak testing, the volume of the piping is added to the volume of a work. Therefore, use piping
as short as possible and increase the detection sensitivity.

42
4.4 CHANGE IN TEMPERATURE
When the temperature change of the sealed work occurs, the pressure of it also changes and the
measurement becomes unstable.
Sources of heat
・ Solenoid valves
・ Change of ambient temperature (air conditioning etc.)

Measures
・ Use pneumatic valves instead of solenoid valves.
・ Enclose the test equipment with a acrylic box
・ Wrap the piping with spiral tubes etc.

43