A 3-D FEM based extractor for MEMS Inductor with Monte-Carlo sampling

Rajesh S. Pande, Member IEEE, Anoop Jalgaonkar, and Rajendra M. Patrikar, Senior Member, IEEE
and its impact on the inductance values is calculated in this paper.
II.

Abstract An extraction tool developed with advanced algorithm to compute MEMS (Micro Electro Mechanical System) inductance is presented. The algorithm is based on solution of Laplace equation by Finite Element Method followed by current density computation. The energy of resulting magnetic field is estimated by Monte Carlo sampling. The extractor developed estimates precisely the inductance offered by MEMS inductor. The impact of micro surface roughness on the estimation of components is a concern because of surface to volume ratio increasing with scaling. The tool demonstrates the impact of micro surface roughness on the estimation of inductance. Index Terms Finite element method, Inductance, Microelectromechanical devices, Rough surface.

EXTRACTION OF INDUCTANCE

HE widespread use of microwave integrated circuit (MIC) technology along with miniaturization as a result of MEMS have led to the development of RF (Radio Frequency) and microwave circuit elements whose dimensions are much smaller than their wavelength. The recent efforts in microelectronics and MEMS have shown promising results in realization of high-performance passive components for RF applications. In such a scenario, computing inductances using conventional techniques is no longer being accurate. At the same time, using highly accurate techniques such as a fine-grained Finite Element Method (FEM) may not be feasible due to the large computation time. During the design process it is essential to have a stable, fast and accurate simulation tool which is capable of extracting inductances used in Microsystems. The device specific extraction tool developed computes inductance of MEMS inductor and also demonstrates the effect of surface roughness on the miniaturized micro inductors. Currently available CAD tools need extensions as the inductances are miniaturized. The accurate modeling of some of the physical properties such as surface topology and its impact on the electrical parameters will help to predict the deviation in performance. The accurate modeling of surface topology

I. INTRODUCTION

In this work, a three-dimensional FEM based inductance extractor that is fast and accurate has been implemented. The tool is useful for developing and characterizing RF MEMS inductors. The tool uses three-dimensional geometry and also enables to generate CIF (Caltech Intermediate Form) net list necessary for planar mask lay out. The physical approach is adopted to analyze the inductor as the conventional computing methodologies and working formulae [1] are no longer efficient and accurate for RF MEMS applications. In physical approach, two stationary inductance calculation methods are typically employed. Both the methods are based on numerical solution of Neumanns formula for pre calculated current density distributions [2] [5] Lik =

4 IjIk

Vi

Vk '

Ji(r ) . Jk (r ' ) dV dV ' r r'

The integration is either carried out numerically or with the Monte-Carlo method. For both methods, the stationary current density is calculated with the finite element method. The inductance extraction process is divided into five steps as shown in figure 1. Tetrahedral Meshing [3-D] Extraction of voltages [FEM] Current Density distribution Energy of Magnetic Field

Manuscript received May 29, 2007. Rajesh S. Pande is with the Visvesvaraya National Institute of Technology, Nagpur, INDIA (corresponding author phone: 91-9822224468; fax: 91-712-2583237; e-mail: panderaj@ yahoo.com). Anoop Jalgaonkar, was with Shri Ramdeobaba Kamla Nehru Engineering College, Nagpur, INDIA Rajendra M. Patrikar is with the Visvesvaraya National Institute of Technology, Nagpur, INDIA (e-mail: rajendra@computer.org). 978-1-4244-1728-5/07/$25.00 2007 IEEE

Monte-Carlo Sampling Figure 1 Inductance extraction process

where v denotes the volume of the conductor, r and r denote locations in the volumes. Instead of evaluation of the magnetic vector potential

A(r ) =

r r'
v

J (r )

d 3 r ' and

calculating

1 W = A(r ) . J (r ) d 3 r 2 v
(a) with the Gaussian integration scheme, eq (1) is estimated by means of Monte Carlo sampling [2]. The evaluation of multiple integrals with Monte-Carlo method attributes faster simulation with desired accuracy. In this technique, where by random the point coordinates are chosen, is a high demand on CPU time, because of the time consuming search for the associated element of the random point coordinates. To reduce the error a high number of function evaluations have to be carried out, where for each evaluation the aligned element with the precalculated current density must be found. To improve the convergence during the Monte-Carlo sampling several variance reduction schemes may be used to accelerate the computation procedure.

(b) Figure 2 3D meshed model of inductor The finite element method is adopted because of advantages, as numerical robustness, high-obtained accuracy, the ability to solve nonlinear systems and general applicability. The inductance extraction algorithm presented in this work is limited to idealized Manhattanlike geometries. The mesh generation starts from an initial front to fill up the solids with tetrahedrons. A three dimensional tetrahedral meshed model is generated by the tool. The three-dimensional meshed models developed by the tool, are shown in Figure 2 (a) (b). The tool is also useful for visualization of geometries. The 3D visualization offers RF MEMS designers a platform for immediately visualizing devices for desired fabrication process without having to wait for the actual fabrication. It enables the designer to see the interaction of different layers of the process being used. It is especially useful in viewing 3-D, out-of-plane, multi-degree-of-freedom RF MEMS structures. With the ability to manipulate the structures in a three-dimensional environment, this package may also be useful as design checker. Thus, it becomes an important part of designing movable, out-ofplane structures. The nodal voltages are calculated by solving Laplace equation V = 0 with iteration method using FEM followed by current density computations. The energy of the resulting magnetic field W is estimated by integration of Neumanns formula [1]
2

1 N 8
i

J (r ) . J (ri ' ) 1 2 ri ri ' p (ri , ri ' )

(2)

1 N

W
i

During every sample i two locations ri and ri ' are chosen randomly according to the probability density

p 2 (r , r ' ) >0. The probability density depends on both locations ri and ri ' and has to be normalized [3] [4]

v v

p 2 (r , r ' ) d 3 r ' d 3 r 1

(3)

The inductance L is computed from W and the total current through a conductor with [3]

W =

W=

v v

J ( r ) . J (r ' ) 3 d r ' d 3r r r'

(1)

Initially above method was validated. A typical three turn surface micro machined air core with air gap microsystem Aluminum inductor structure shown in Figure 2 is considered for analysis with 20 m x 85 m cross-section and spacing (geometric mean distance) 85 m. The inductor structure is suspended over substrate at a height of 100 m to avoid parasitic losses. The device is meshed with 696 four node tetrahedral elements. The capacitance offered with regard to substrate assumed negligible as the inductor is suspended in air at sufficient height to avoid parasitic capacitance. The device is meshed with tetrahedral elements. The conductivity of Aluminum is 3.82 * 107 mho/m. The inductance offered by the device is 3.44 nH for smooth topology with Fractal dimension D unity i.e. with zero rms roughness, the value is close to experimentally observed value [6].

1 L I2 2

Figure 3 Current density distributions inside the inductor

molecules are cut and new bonds are formed. In all the deposition methods, self-affine surface gets formed in a growth mode in which average orientation of the surface is maintained but it becomes rough. Thus, most of the surfaces grown are microscopically rough although topology may appear smoother on macroscopic level. Currently available state-of-the art CAD tools usually do not take into account surface roughness, which becomes pronounced when surface to volume ratio increases. To address this issue, inductor values are calculated when inductor surfaces have roughness. The rough surface is meshed with four-node tetrahedron. To obtain better insight into the role of surface topography in MEMS shunt switches, it is important to use the most appropriate model to represent the surface topography. The scale independent concept of self-similar fractals is used here to model the rough surface [7] [8] [9]. The fractal dimension (D) describes surface microscopic roughness. Fractals help to model spatial variation through Mandelbrot-Weierstrass function. The rough surface is modeled using the Mandelbrot-Weierstrass function which is described by the following equation, Eq.(4) Rough surface profile f(x)

... (4) where fractal dimension, D =log (N)/log (1/r) r is the ratio of N parts scaled down from the whole, b is the frequency multiplier value (varies between 1.1 to 3.0), D is non integer (varies between 1 to 2) and is randomly generated phase. The parameter k can be used to alter the profile. Varying D and k can generate any profile. The effect of surface roughness is analyzed on scaled inductors with reduced surface to volume ratio of cross sections 85 m x 20 m, 65 m x 20 m, 50 m x 20 m, 20 m x 20 m and 3 m x 20 m. The inductance is extracted for different values of Fractal dimension D=1.43 (rms roughness 30 nm), D=1.53 (40 nm), D=1.58 (65 nm), D=1.64 (85 nm), D=1.68 (100 nm). The current flowing close to the surface is significantly affected by the rough profile. The extracted inductances for smooth and rough topologies are plotted in figure 5. The surface of all these inductances are then modeled with roughness and analysis is performed again. With increase in surface roughness the extracted inductance increases. The increase in inductance is due to the increased circular current paths inside the volume. This clearly demonstrates that as the inductances are miniaturized, the surface micro roughness will play major role in deciding the electrical properties of the RF MEMS inductor. It can be seen that the value of inductance increases logarithmically. This was confirmed by fitting these characteristics with logarithmic equations. There is more pronounced change in inductor for smaller values of cross section than higher values. This is due to higher surface to volume ratio of the inductance. The crowding of magnetic energy associated with surface current flow causes the addition in inductance offered. Thus, it is observed that roughness could give rise to inductance value. However, as the roughness is

Figure 4 Extracted inductance for scaled inductors The current density distribution inside inductor is shown in figure 3. The current density is maximum at the inside corners. The inductance is extracted for scaled inductors with reduced surface to volume ratio of cross sections 85 m x 20 m, 65 m x 20 m, 50 m x 20 m, 20 m x 20 m and 3 m x 20 m keeping geometric mean distance same. These values are chosen because most of the inductors are now fabricated in this range now days. The extracted inductance increases with reducing cross section for equal length of inductor as shown in figure 4, which is also observed experimentally [6]. The behavior is explained by the inductance calculation formula [1] Inductance , L = 0.002 * A [ loge ((2* A)/B+C)+0.5-logee ] B and C are sides of rectangular cross section and A is the length of inductor. The inductor decreases as cross section increases. This is also expected because the fixed value of voltage is applied for the analysis. The current increases linearly with cross section. However the increase in inductance depends upon the square of current density. This result in logarithmic decrease in the inductance with cross section. III. EFFECT OF SURFACE ROUGHNESS ON INDUCTOR
EXTRACTION

The effect of micro surface roughness is analyzed. In many of the fabrication processes, which are used for electronic devices, molecules from environmental gas or liquid phase come in contact with a material at its surface, and chemical bonds of these approaching

increasing further, there are other factors to be taken into account.

[5]

[6]

Effect of surface roughness on Inductance

7 6.5 6 5.5 5 4.5 4 3.5 3 0 30 40 65 85 100 rms roughness (nM)

[7] [8]

In d u c ta n c e (n H )

3 um x 20 um 20 um x 20 um 50 um x 20 um 65 um x 20 um 85 um x 20 um

[9]

C.Hoer, C.Love.Exact inductance equations for Rectangular Conductors with Applications to More Complicated Geometries, Journal of research of National Bureau of Standards, 69C , 127137.1965. Vijay K. Varadan, K.J. Vinoy and K.A. Jose, RF MEMS and Their Applications, John Wiley & Sons, Ltd. 2003. Rajendra M. Patrikar, Modeling and simulation of surface roughness, Journal of Applied surface science ,Elsevier 228(2004) 213-220. R.M.Patrikar, Chong Yi Dong, W.Zhuang, Modeling interconnects with surface roughness Microelectronics Journal 33(2002)929-934. L.Lai, E.A.Irene, J.Vac. Area evaluation of microscopically rough surface, Technol.B 17(1999)33-39.

Figure 5 Extracted inductance for smooth and rough surface topology As the roughness increases there are many such components with circular path. Some of them counteract each other, resulting less net magnetic field, which contribute to inductance. Another factor, which comes into picture, is increased current flow due to surface roughness. These two counteracting effects; surface roughness (increases the value of inductor) and resultant increased cross section (reduces the value of inductor) giving rise to logarithmic law. The influence of the skin effect is neglected in the present analysis. The assumption is valid as long as the skin depth =1/ is significantly larger compared to cross section dimension. denotes angular frequency of the applied current, is the electrical conductivity and the magnetic permeability. A stable, fast and accurate simulation tool, which is capable of extracting inductance used in Microsystems, is developed. The modeling of surface roughness and its impact on the electrical parameters of inductor will help to predict the deviation in performance due to micro roughness particularly at very high frequency circuits.

REFERENCES
[1] [2] F.Grover, Inductance Calculations, Dover Phoenix edition , 1973. C.Harlander, Sabelka, R., Selberherr, S., Efficient inductance calculation in interconnect structures by applying the Monte Carlo method, Microelectronics Journal, Elsevier 34(2003) 815821. G.Leonhardt, W.Fichtner, Acceleration of Inductance Extraction by means of Monte Carlo Method, Integrated systems laboratory, Swiss Federal Institute of Technology, Gloriastr35, 8092 Zurich, Switzerland. R.Rubinstein, Simulation and the Monte-carlo Method, J.Wiley & sons.1981.

[3]

[4]