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Piezoresistive Accelerometers
1. Bonded Strain Gage type (Gages bonded to metal seismic mass using epoxy) Undamped Fluid (oil) damped 2. Silicon MEMS type (Gages defused into single piece of silicon) Undamped Gas damped circa 1980s circa 1990s circa 1950s circa 1960s
Piezoresistive Accelerometers
3 mm x 3 mm
Piezoresistive gages sense changes in stress and strain in the hinges (springs in the trampoline) under acceleration
Top Cap
Direction of acceleration
MASS
Bottom Cap
Piezoresistive gages are built into the hinges or springs of the trampoline
top view
Extremely small airgaps between the moving seismic mass (in the middle) and the top/bottom caps facilitate squeeze film damping.
Damping is obtained from the integrated pressure profile at the surface of the sensor cell. Airgap thickness controls the effective damping ratio of the device.
Q=0.05 2000g, Q=0.05 Q=0.3 2000g, Q=0.3 Q=0.4 1000g, Q=0.4 Q=0.4 500g, Q=0.4 Q=0.5 50g, Q=0.5
1000.00
10000.00
100000.00
Frequency [Hz]
mS Undamped accelerometer resonated at its natural frequency after exposed to shock impulses
+25C BOTH -40C GAS -40C FLUID +100C GAS +100C FLUID