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Optical coherence tomography (OCT) is an interfero- with highly birefringent samples. Use of a low-
metric technique that produces depth-resolved images coherence light source allows measurement of phase
of backscattering from biological tissues.1 OCT is prof iles of surfaces with low ref lectivity.
generally concerned with measuring the envelope of A schematic of the interferometer is shown in
the interference fringes rather than the phase of the Fig. 1. A low-coherence beam from a superlumi-
backscattered light. Although the sensitivity of OCT nescent diode (EG&G SLD, central wavelength
is limited by the coherence length of the source to l 苷 845 nm, FWHM bandwidth 20 nm) and a He –Ne
at best2 approximately 1 2 mm, subnanometer path- laser beam (l0 苷 633 nm) are combined by a dichroic
length changes can be detected through phase mea- beam splitter and enter an imaging interferometer
surements.3,4 Doppler OCT5 and polarization OCT6 similar to that described in Ref. 15. Achromatic
make use of phase information to measure f low veloc- lenses and aspheric objective lenses are arranged in a
ity and tissue birefringence, respectively. However, telescopic configuration with magnification M 苷 19.
direct phase measurement in OCT is diff icult because The reference mirror is mounted on a piezoelectric
of phase noise in the interferometer from vibrations, modulator (PZT). In the sample arm, objects of inter-
air motion, thermal drifts, and other sources. est are aligned at the objective focus. Low-ref lectivity
In this Letter we describe a method for producing samples are placed on a glass coverslip, the bottom
a referenced phase measurement in which a reference of which is coated to be highly ref lective at 633 nm
laser beam is used to stabilize the interferometer, but transmissive at 845 nm and the top of which is
canceling interferometer noise through a piezoelectric antiref lection coated for light at 845 nm.
feedback element. The present realization is a f irst At the output of the interferometer, the two wave-
step toward applying the principle in an OCT-type lengths are divided by a dichroic beam splitter. The
interferometer. 633-nm laser beam is detected by a photodiode and the
In our experiments, full-f ield images are ob- 845-nm low-coherence beam by a CCD camera that
tained by phase-shifting interferometry, a standard
technique often used for measuring surface topo-
graphy.7 High-resolution phase measurements by
phase-shifting interferometry are typically possible
only in mechanically stable environments, because
of the high sensitivity of interferometers to external
perturbations. A number of techniques for reducing
phase noise8 have been introduced, including methods
using orthogonal polarizations,9,10 high-speed imag-
ing,11 simultaneous imaging of several frames,12 and
active feedback cancellation of vibrations.13 In an
earlier study14 a low-coherence interferometer with a
harmonically related second wavelength as a phase
reference was used to measure the phase of backscat-
tered light from cultured cells and was sensitive to
changes smaller than 10 nm.
This Letter presents a technique for using a
reference laser beam to actively stabilize a Michelson– Fig. 1. Interferometer setup: SLDs, superluminescent
Linnik low-coherence interferometer. Active stabi- diodes; He – Ne, helium – neon lasers; Ls, lenses; BS, beam
lization systems may be simpler and less expensive splitter; OBJs, objective lenses; DBS1, DBS2, dichroic
than high-speed or simultaneous imaging configura- beam splitters. Dotted lines, beam path for the SLDs;
tions and, unlike polarization schemes, can be used dashed lines, beam path for the He – Ne.
for some value of u controlled by the computer. The Figure 2 shows the error signal in the interferometer
signal Ve 共t兲 is then used as an error signal for an over a period of 30 min with a mirror as a test sample.
integrator circuit controlling the PZT voltage, which The rms open-loop phase noise is approximately p兾5,
in turn controls LPZT 共t兲. Closing the loop drives the and a drift of ⬃1 rad over the measurement time is
error signal to zero, giving fPZT 共t兲 苷 f0 1 fN 共t兲 2 present. On closure of the feedback loop, the standard
u. In this way the PZT cancels interferometer noise deviation of the phase noise in the interferometer is
and stabilizes the interferometer phase to an arbitrary reduced to s 苷 17 mrad within the 8.3-Hz bandwidth of
angle u. the system. This phase noise corresponds to an optical
Stabilization to arbitrary phase angles allows path length of 1.7 nm.
phase-shifting interferometry to be performed. Using a mirror as a test object, we measured the
Four CCD images Iu 共x, y兲 are recorded, with noise of the stabilized phase-shifting interferometer for
u 苷 0, p兾2, p, 3p兾2. From the four image frames a single CCD pixel over 1 h. The standard deviation
the sample phase at each pixel is then calculated via was found to correspond to an optical path length of
Ω æ
关Ip 共x, y兲 2 I0 共x, y兲兴sin共pr兾2兲 p
f共x, y兲 苷 tan 21
2 r. (4)
关Ip/2 共x, y兲 2 I3p/2 共x, y兲兴 2 关Ip 共x, y兲 2 I0 共x, y兲兴cos共pr兾2兲 2
The factor r 苷 l0 兾l compensates for the difference approximately 6 nm, which can be reduced by CCD
in wavelengths between locking and measurement binning.
beams. Figure 3 shows the phase prof ile of a portion of a mi-
Recording the four frames requires approximately crofabricated silicon structure measured in ref lection.
2 s, limited only by the CCD shutter speed and readout The height from the optical measurement of 139 6
rate. Experimental control and data collection and 5 nm is consistent with a measurement of 150 6 10 nm
analysis are performed with National Instruments performed by an atomic force microscope. The
LabVIEW software. For the data presented in this relatively large error in the measurement may ref lect
Letter phase unwrapping was not required. nonuniformity of the sample.
October 15, 2004 / Vol. 29, No. 20 / OPTICS LETTERS 2401
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