Beruflich Dokumente
Kultur Dokumente
Optik
Optik ] (]]]]) ]]]–]]]
Optics
www.elsevier.de/ijleo
Abstract
This paper describes a grating projection system (GPS) based on Talbot effect for surface profile measurement. The
self-image of the grating is projected on the object surface and the deformed grating image is captured by a charged
couple device (CCD) camera for subsequent processing. The phase shifting is achieved by the use of a linear translation
stage incorporated to the grating. In this application, two specimens are tested to demonstrate the validity of the
method, one is a spherical cap with a height of 4 mm, and the other is a small coin with an uneven surface of less than
0.2 mm. The experimental results are compared with that of mechanical stylus method and grating projection system
based on Lau phase interferometry.
r 2005 Elsevier GmbH. All rights reserved.
Keywords: Surface profile measurement; Fringe projection; Talbot-effect; Grating; Phase shifting
0030-4026/$ - see front matter r 2005 Elsevier GmbH. All rights reserved.
doi:10.1016/j.ijleo.2005.10.005
ARTICLE IN PRESS
2 C. Quan, M. Thakur / Optik ] (]]]]) ]]]–]]]
a monochromatic plane wave at a distance behind a Fig. 1. Schematic of the optical setup: Lc , collimating lens; p,
grating [23]: pitch of grating; Z, Talbot plane; d, distance between grating
and CCD camera; h, height of the surface.
2np2
Z¼ , (1)
l
where n is an integer, p the pitch of the grating and l the imaging axis with the reference plane. A CCD camera is
wavelength of the light source. When the grating is used to measure the intensity at point C on the reference
illuminated with an incoherent light source the resultant plane and point P on the object. The intensity observed
irradiance displays Lau bands [19,24]. at P modified by the object reflectivity R is the same as
In this paper a GPS based on the Talbot effect is that observed at A on the reference plane:
described. The object having a diffused surface is placed
I P ¼ R½a þ b cosð2pOA=pÞ. (4)
at one of the self-image plane of the grating. A linear
translation stage is used to apply the phase shift of the The phase difference f for points C and P observed
grating. The distorted fringe patterns caused by the by the CCD camera is related to the geometric distance
surface profile are captured by a charged couple device ACð¼ p=2pÞf and AC is related to the object height h
(CCD) camera and subsequently processed by using ( ¼ BP) by
phase shifting algorithm to obtain the surface contour. h ¼ AC=ðtan y1 þ tan y2 Þ, (5)
The experimental results are compared with that of
measured by mechanical stylus method and GPS based where y1 and y2 represent the directions of projection
on Lau effect. and viewing, respectively. When the direction of viewing
is perpendicular to the reference plane, Eq. (5) becomes
h ¼ AC=ðtan y1 Þ ¼ ðp=2pÞf= tan y1 ¼ kf, (6)
2. Theoretical analysis where k ¼ p=ð2p tan y1 Þ is an optical coefficient related
to the configuration of the system and can be obtained
Fig. 1 shows the optical geometry of fringe projection by calibration. One method of calibration is to shift the
and imaging system used in the experiment. It consists test object through known distances and corresponding
of a grating and a collimating lens. A collimated beam phase is measured using phase shifting method. In this
of laser light illuminates the grating. An object is placed study, however the calibration is achieved by shifting a
at the self-image plane and the grating transmittance reference plane. The distance between the shifted planes
TðxÞ can be expressed by is set to be 100 mm that can be used to calculate the
constant k.
TðxÞ ¼ am ½1 þ cosð2px=pÞ, (2)
The object is placed at one of the self-image plane of
where am and ‘p’ are the amplitude and spatial pitch of the grating and the profile of object surface is encoded
the grating, respectively. When the grating is projected on grating lines. A CCD camera is used to capture the
onto the object its intensity distribution at point C is deformed grating. The mathematical representation of
given by [25] the intensity distribution captured by a CCD camera is
I C ¼ a þ b cosð2pOC=pÞ, (3) governed by the following equation:
where a is the background intensity, b the intensity Iðx; yÞ ¼ aðx; yÞ þ bðx; yÞ cos½fðx; yÞ þ D, (7)
modulation, OC is distance from the point O to point C where aðx; yÞ is the average intensity, bðx; yÞ is the
on the reference plane, point O is the intersection of the intensity modulation, and fðx; yÞ is the phase to be
ARTICLE IN PRESS
C. Quan, M. Thakur / Optik ] (]]]]) ]]]–]]] 3
determined. If the pitch of the grating is p and one of image is formed at one of the Talbot plane. The
gratings is moved by a distance jt2 t1 j ¼ p=n (n ¼ 1, illumination angle used for projecting the grating on the
2y), this would represent a phase shift of D ¼ 2p=n for object is 25 . An object is placed at one of the self-image
each fringe. To retrieve the phase fðx; yÞ, additional planes of the projection grating. The image of the
phase shift D in the steps of p=2 are required. In this grating falls on the object surface; the information about
study, three phase shifted sinusoidal fringe patterns are the shape of the object is encoded on the grating lines.
projected onto an object surface with a phase shift of 0, This image is captured by a CCD camera, which is
p=2; p: The following equations represent three corre- placed at a normal view. The distorted fringe images on
sponding intensity distributions [26]: CCD camera are captured at different distances. It is
I 1 ðx; yÞ ¼ aðx; yÞ þ bðx; yÞ cos fðx; yÞ, (8) noted that when the distance between the grating [20]
and the object is approximately equal to Z ¼ np2 =l
I 2 ðx; yÞ ¼ aðx; yÞ þ bðx; yÞ cos f½ðx; yÞ þ p=2, (9) (where n is an integer) the phase map of the object which
is processed by using the phase shifting algorithm is
I 3 ðx; yÞ ¼ aðx; yÞ þ bðx; yÞ cos f½ðx; yÞ þ p. (10) accurate. The self-image plane is optimized by repeating
By solving the above equations simultaneously, the the experiment a number of times with various pitches
phase fðx; yÞ at each point (x, y) on the object can be of the grating depending on the object size. The
obtained by measurement of the object size depends upon the pitch
of the gratings. The self-image plane is optimized in such
I 1 ðx; yÞ 2I 2 ðx; yÞ þ I 3 ðx; yÞ a way that diffraction does not affect the result. It
fðx; yÞ ¼ arctan . (11)
I 1 ðx; yÞ I 3 ðx; yÞ should be noted that if the object is placed at higher self-
The phase fðx; yÞ obtained from Eq. (11) resulted image plane diffraction will affect the result. Hence, the
with the principal value of phase fðx; yÞ in region object is kept at the first image plane to avoid
between p and þp regardless of the actual value of the diffraction.
phase. Phase unwrapping is carried out in order to For specimens under study, three images are recorded
remove phase ambiguities by adding or subtracting successively. Each subsequent image is recorded with a
2p from individual pixel until the phase difference phase difference of p=2. The phase difference is
between the adjacent pixel is less then p. Once the value introduced by a prescribed in-plane displacement of
of fðx; yÞ is known the surface profile can be calculated grating which is mounted on a linear translation stage.
using Eq. (6). A linear displacement of 125 mm on the translation stage
would translate into a phase step of p=2 for a spherical
cap. In the case of coin specimen we use a grating of
pitch 0.25 mm. A linear displacement of 63.5 mm on the
3. Experimental work translation stage would translate into a phase step of
p=2.
Fig. 2 shows the experimental setup. A 50 mW He–Ne
laser beam (of wavelength 632 nm) is expanded using a
40 microscope objective, 5 mm pinhole and collimat-
ing lens ðLc Þ of focal length 100 mm. The collimated
4. Results and discussion
laser beam falls on the grating of pitch 0.5 mm and self-
Fig. 3(a) shows the first test specimen without
projection of a grating on it. The radius rs , height h
and the base radius rb of the spherical cap are,
respectively, 14.5, 4 and 10 mm, as shown in Fig. 3(b).
The pitch of the grating is 0.5 mm. Fig. 4(a) shows the
fringe patterns recorded by the CCD camera for a phase
shift of p/2. Figs. 4(b) and (c) show, respectively, a
wrapped and the corresponding unwrapped phase maps.
The phase value can be converted into a 3-D surface
profile as shown in Fig. 4(d).
To verify the accuracy of surface profile measurement
by the proposed method, a comparison is made with
mechanical stylus and GPS based on the Lau effect. In
the case of GPS based on Lau effect, we use two gratings
which are illuminated by an incoherent light source. A
Fig. 2. Experimental arrangement: f, focal length of the self-image of grating is produced at one of the Lau
collimating lens. planes. The advantage of using incoherent light is that it
ARTICLE IN PRESS
4 C. Quan, M. Thakur / Optik ] (]]]]) ]]]–]]]
5
Mechanical Stylus Data Data with coherent light Data with Incohrent light
(mm)
2
A A
1
0
0 5 10 15 20 25
(mm)
-1
rs
rb
(b)
Fig. 7. (a) Fringe pattern on an area of interest; (b) wrapped phase map; (c) unwrapped phase map; (d) 3-D plot of the surface
profile.
180 Phase shifting method Mechanical stylus method specific distance the setup can be applied only for a
160 small object.
140
It is noteworthy that the grating displacement
120
hight (micron)
proposed technique the optical arrangement is simple [11] Y. Arai, S. Yokozeki, T. Yamada, Fringe – scanning
and utilizes few optical components. The experimental method using a general function of shadow moiré, Appl.
setup is cost effective and easy to handle with a simple Opt. 34 (22) (1995) 4877–4882.
instrument. The system is efficient for the small-size [12] X. Xie, M.J. Lalor, D.R. Burton, M.M. Shaw, Four-map
components in industrial applications. The measure- absolute distance contouring, Opt. Eng. 36 (9) (1997)
2517–2520.
ment accuracy is reasonably good and the experimental
[13] T. Yoshizawa, T. Tomisawa, Shadow moiré topography
results compared well with that of the mechanical stylus
by means of the phase-shift method, Opt. Eng. 32 (7)
method. With this method, the range of measurement (1993) 1668–1674.
has been extended to sub-millimetre and an accuracy of [14] L. Jin, T. Yoshizawa, Y. Otani, Shadow moiré profilo-
10 mm is achieved. A high-resolution contour map of a metry using the phase-shifting method, Opt. Eng. 39 (8)
small coin has been obtained. With further develop- (2000) 2119–2123.
ment, the system could be used for industrial quality [15] J. Degrieck, W. Van Paepegem, P. Boone, Application of
inspection. digital phase-shift shadow Moiré to micro deformation
measurements of curved surfaces, Opt. Laser Eng. 36 (1)
(2001) 29–40.
[16] R. Henao, A. Tagliaferri, R. Torroba, A contouring
Acknowledgments approach using single grating digital shadow Moiré with a
phase stepping technique, Optik 110 (4) (1999) 199–201.
The authors would like to acknowledge the financial [17] X. Peng, Z. Gao, S.M. Zhou, Surface contouring by a
support provided by the National University of new type of digital moiré technique, Optik 100 (2) (1995)
Singapore under research project R-265-000-071-112. 63–67.
[18] Y. Morimoto, I. Yang, C. Gu, Scanning moiré method
for obtaining smooth fringe patterns, Opt. Laser Eng. 24
(1) (1996) 3–17.
References [19] J. Jahns, A.W. Lohmann, The Lau effect (a diffraction
experiment with incoherent illumination), Opt. Commun.
[1] D.M. Meadows, W.O. Jonnson, J.B. Allen, Generation of 28 (3) (1979) 263–267.
the surface contour by moiré pattern, Appl. Opt. 9 (4) [20] H. Hamam, J.L. de Bougrenet de la Tocnaye, Efficient
(1970) 942–947. Fresnel-transform algorithm based on fractional Fresnel
[2] H. Takasaki, Moiré topography, Appl. Opt. 9 (6) (1970) diffraction, J. Opt. Soc. Am. A 12 (9) (1995) 1920–1931.
1467–1472. [21] M. Testorf, J. Ojeda-Castaneda, Fractional Talbot effect:
[3] J.D. Hovanesian, Y.Y. Hung, Moiré contour – sum analysis in phase space, J. Opt. Soc. Am. A 13 (1) (1996)
contour – difference and vibration analysis of arbitrary 119–125.
objects, Appl. Opt. 10 (12) (1971) 2734–2738. [22] M. Testorf, J. Jahns, N.A. Khilo, A.M. Goncharenko,
[4] M. Chamg, K.H. Lin, Non contact probe for profilo- Design of Talbot array illuminators for planar optics,
metric measurement of small-form parts, Opt. Eng. 40 Opt. Commun. 132 (3) (1996) 205–211.
(10) (2001) 2057–2058. [23] J.L. Castagner, A.R. Jones, The grating projection
[5] R. Rodriguez-Vera, D. Kerr, F.M. Santoyo, Three- system: a laser light pattern projection technique for long
dimensional contouring of diffuse objects using Talbot distance illumination based on the Talbot effect, J. Phys.
interferometry, Proc. SPIE 1553 (1991) 55–65. D: Appl. Phys. 36 (2003) 2359–2365.
[6] J. Wasowski, Moiré topography maps, Opt. Commun. 2 [24] E. Tepichin, P. Andrés, J. Ibarra, 2-D Lau patterns: in-
(7) (1970) 321–323. register incoherent joint superposition of Montgomery
[7] J.B. Allen, D.M. Meadows, Removal of unwanted patterns, Opt. Commun. 125 (1) (1996) 27–35.
pattern from moiré contour map by grid translation [25] M. Halioua, H.C. Liu, Optical three-dimensional sensing
techniques, Appl. Opt. 10 (1) (1971) 210–212. by phase measuring profilometry, Opt. Laser Eng. 11
[8] C. Quan, Y. Fu, C.J. Tay, Determination of surface (1989) 185–215.
contour by temporal analysis of shadow moiré fringes, [26] K. Creath, Temporal phase measurement methods, In:
Opt. Commun. 230 (2004) 23–33. D.W. Robinson, G.T. Raid (Eds.), Interferogram Analysis
[9] Y.B. Choi, S.W. Kim, Phase-shifting grating projection Digital Fringe Pattern Measurement Techniques, IOP
moiré topography, Opt. Eng. 37 (3) (1998) 1005–1010. Publishing, Ltd., Bristol and Philadelphia, 1993 (Chapter 4).
[10] G. Mauvoisin, F. Bremand, A. Lagarde, Three dimen- [27] C. Quan, X.Y. He, C.J. Tay, H.M. Shang, 3D surface
sional shape reconstruction by phase shifting shadow profile measurement using LCD fringe projection, Proc.
moiré, Appl. Opt. 33 (11) (1994) 2163–2169. SPIE 4317 (2001) 511–516.