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Optik
Optik ] (]]]]) ]]]–]]]
Optics
www.elsevier.de/ijleo

Surface profile measurement by use of fringe projection method


based on Talbot effect
C. Quan, M. Thakur
Department of Mechanical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260, Singapore

Received 4 July 2005; accepted 11 October 2005

Abstract

This paper describes a grating projection system (GPS) based on Talbot effect for surface profile measurement. The
self-image of the grating is projected on the object surface and the deformed grating image is captured by a charged
couple device (CCD) camera for subsequent processing. The phase shifting is achieved by the use of a linear translation
stage incorporated to the grating. In this application, two specimens are tested to demonstrate the validity of the
method, one is a spherical cap with a height of 4 mm, and the other is a small coin with an uneven surface of less than
0.2 mm. The experimental results are compared with that of mechanical stylus method and grating projection system
based on Lau phase interferometry.
r 2005 Elsevier GmbH. All rights reserved.

Keywords: Surface profile measurement; Fringe projection; Talbot-effect; Grating; Phase shifting

1. Introduction shadow moiré technique uses the single grating placed


close to the object and the oblique light source
A number of optical techniques are available to illumination which casts a shadow of the grating on
obtain topographic information. Among them moiré the object surface. When the shadow is viewed from a
technique, proposed by Meadows et al. [1] and Takasaki different direction through the original grating, the
[2] in early 1970s, has been widely used for three- grating and its distorted shadow interfere, generating
dimensional (3-D) shape measurement and surface fringes. Due to progress in computer capacities and
contour analysis. According to the optical arrangement image processing techniques in 1990s, different types of
of the system it is classified into the following methods phase shifting method [9–18] are applied in moiré and
[1–9]: projection moiré, shadow moiré and fringe projection fringe (or projection grating).
projection. In projection moiré, the fringes, which Hovanesian and Hung [3] proposed a moiré setup
contain the information of the surface profile, are where a grating is projected and tilted with respect to the
generated by projecting a grating onto the object and object under test. A similar approach with coherent
viewing it through the second grating in front of the illumination is described by Chamg and Lin [4] with a
viewer. Comparing with the projection moiré the simple projection system using a shear plate and a five
shadow moiré is relatively cheap and simple. The phase-shifting technique for contour deformation mea-
surement. Rodriguez-Vera et al. [5] used the Talbot
Corresponding author. Tel.: +65 6874 8089; fax: +65 6779 1459. interferometry for the surface contouring of the diffused
E-mail address: mpeqcg@nus.edu.sg (C. Quan). object. In this study, the grating projection system

0030-4026/$ - see front matter r 2005 Elsevier GmbH. All rights reserved.
doi:10.1016/j.ijleo.2005.10.005
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(GPS) based on self-imaging of a grating is used for Light source

surface profile measurement. The method is simple and Lc


produces a set of images along the optical axis. The Pinhole
positions of the images can be adjusted by moving one p
Projection grating
z
optical element and no alignment is needed. At a d
View point
particular arrangement along the optical axis a set of
measurement planes is generated and measurements can
be made at a number of points across the duct.
Self-imaging properties were first observed in 1836
when Talbot noted the reproduction of a wavefront at Z

certain distances behind a periodic object. It has been


used in many applications [5,19–23] such as Fourier 1 2
h
spectrometry, interferometry, image processing, distance 3-D Object
P Reference plane
x
and velocity measurement, etc. The Talbot effect is the
C B A y
reproduction of exact images of a grating illuminated by O

a monochromatic plane wave at a distance behind a Fig. 1. Schematic of the optical setup: Lc , collimating lens; p,
grating [23]: pitch of grating; Z, Talbot plane; d, distance between grating
and CCD camera; h, height of the surface.
2np2
Z¼ , (1)
l
where n is an integer, p the pitch of the grating and l the imaging axis with the reference plane. A CCD camera is
wavelength of the light source. When the grating is used to measure the intensity at point C on the reference
illuminated with an incoherent light source the resultant plane and point P on the object. The intensity observed
irradiance displays Lau bands [19,24]. at P modified by the object reflectivity R is the same as
In this paper a GPS based on the Talbot effect is that observed at A on the reference plane:
described. The object having a diffused surface is placed
I P ¼ R½a þ b cosð2pOA=pÞ. (4)
at one of the self-image plane of the grating. A linear
translation stage is used to apply the phase shift of the The phase difference f for points C and P observed
grating. The distorted fringe patterns caused by the by the CCD camera is related to the geometric distance
surface profile are captured by a charged couple device ACð¼ p=2pÞf and AC is related to the object height h
(CCD) camera and subsequently processed by using ( ¼ BP) by
phase shifting algorithm to obtain the surface contour. h ¼ AC=ðtan y1 þ tan y2 Þ, (5)
The experimental results are compared with that of
measured by mechanical stylus method and GPS based where y1 and y2 represent the directions of projection
on Lau effect. and viewing, respectively. When the direction of viewing
is perpendicular to the reference plane, Eq. (5) becomes
h ¼ AC=ðtan y1 Þ ¼ ðp=2pÞf= tan y1 ¼ kf, (6)
2. Theoretical analysis where k ¼ p=ð2p tan y1 Þ is an optical coefficient related
to the configuration of the system and can be obtained
Fig. 1 shows the optical geometry of fringe projection by calibration. One method of calibration is to shift the
and imaging system used in the experiment. It consists test object through known distances and corresponding
of a grating and a collimating lens. A collimated beam phase is measured using phase shifting method. In this
of laser light illuminates the grating. An object is placed study, however the calibration is achieved by shifting a
at the self-image plane and the grating transmittance reference plane. The distance between the shifted planes
TðxÞ can be expressed by is set to be 100 mm that can be used to calculate the
constant k.
TðxÞ ¼ am ½1 þ cosð2px=pÞ, (2)
The object is placed at one of the self-image plane of
where am and ‘p’ are the amplitude and spatial pitch of the grating and the profile of object surface is encoded
the grating, respectively. When the grating is projected on grating lines. A CCD camera is used to capture the
onto the object its intensity distribution at point C is deformed grating. The mathematical representation of
given by [25] the intensity distribution captured by a CCD camera is
I C ¼ a þ b cosð2pOC=pÞ, (3) governed by the following equation:

where a is the background intensity, b the intensity Iðx; yÞ ¼ aðx; yÞ þ bðx; yÞ cos½fðx; yÞ þ D, (7)
modulation, OC is distance from the point O to point C where aðx; yÞ is the average intensity, bðx; yÞ is the
on the reference plane, point O is the intersection of the intensity modulation, and fðx; yÞ is the phase to be
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determined. If the pitch of the grating is p and one of image is formed at one of the Talbot plane. The
gratings is moved by a distance jt2  t1 j ¼ p=n (n ¼ 1, illumination angle used for projecting the grating on the
2y), this would represent a phase shift of D ¼ 2p=n for object is 25 . An object is placed at one of the self-image
each fringe. To retrieve the phase fðx; yÞ, additional planes of the projection grating. The image of the
phase shift D in the steps of p=2 are required. In this grating falls on the object surface; the information about
study, three phase shifted sinusoidal fringe patterns are the shape of the object is encoded on the grating lines.
projected onto an object surface with a phase shift of 0, This image is captured by a CCD camera, which is
p=2; p: The following equations represent three corre- placed at a normal view. The distorted fringe images on
sponding intensity distributions [26]: CCD camera are captured at different distances. It is
I 1 ðx; yÞ ¼ aðx; yÞ þ bðx; yÞ cos fðx; yÞ, (8) noted that when the distance between the grating [20]
and the object is approximately equal to Z ¼ np2 =l
I 2 ðx; yÞ ¼ aðx; yÞ þ bðx; yÞ cos f½ðx; yÞ þ p=2, (9) (where n is an integer) the phase map of the object which
is processed by using the phase shifting algorithm is
I 3 ðx; yÞ ¼ aðx; yÞ þ bðx; yÞ cos f½ðx; yÞ þ p. (10) accurate. The self-image plane is optimized by repeating
By solving the above equations simultaneously, the the experiment a number of times with various pitches
phase fðx; yÞ at each point (x, y) on the object can be of the grating depending on the object size. The
obtained by measurement of the object size depends upon the pitch
  of the gratings. The self-image plane is optimized in such
I 1 ðx; yÞ  2I 2 ðx; yÞ þ I 3 ðx; yÞ a way that diffraction does not affect the result. It
fðx; yÞ ¼ arctan . (11)
I 1 ðx; yÞ  I 3 ðx; yÞ should be noted that if the object is placed at higher self-
The phase fðx; yÞ obtained from Eq. (11) resulted image plane diffraction will affect the result. Hence, the
with the principal value of phase fðx; yÞ in region object is kept at the first image plane to avoid
between p and þp regardless of the actual value of the diffraction.
phase. Phase unwrapping is carried out in order to For specimens under study, three images are recorded
remove phase ambiguities by adding or subtracting successively. Each subsequent image is recorded with a
2p from individual pixel until the phase difference phase difference of p=2. The phase difference is
between the adjacent pixel is less then p. Once the value introduced by a prescribed in-plane displacement of
of fðx; yÞ is known the surface profile can be calculated grating which is mounted on a linear translation stage.
using Eq. (6). A linear displacement of 125 mm on the translation stage
would translate into a phase step of p=2 for a spherical
cap. In the case of coin specimen we use a grating of
pitch 0.25 mm. A linear displacement of 63.5 mm on the
3. Experimental work translation stage would translate into a phase step of
p=2.
Fig. 2 shows the experimental setup. A 50 mW He–Ne
laser beam (of wavelength 632 nm) is expanded using a
40  microscope objective, 5 mm pinhole and collimat-
ing lens ðLc Þ of focal length 100 mm. The collimated
4. Results and discussion
laser beam falls on the grating of pitch 0.5 mm and self-
Fig. 3(a) shows the first test specimen without
projection of a grating on it. The radius rs , height h
and the base radius rb of the spherical cap are,
respectively, 14.5, 4 and 10 mm, as shown in Fig. 3(b).
The pitch of the grating is 0.5 mm. Fig. 4(a) shows the
fringe patterns recorded by the CCD camera for a phase
shift of p/2. Figs. 4(b) and (c) show, respectively, a
wrapped and the corresponding unwrapped phase maps.
The phase value can be converted into a 3-D surface
profile as shown in Fig. 4(d).
To verify the accuracy of surface profile measurement
by the proposed method, a comparison is made with
mechanical stylus and GPS based on the Lau effect. In
the case of GPS based on Lau effect, we use two gratings
which are illuminated by an incoherent light source. A
Fig. 2. Experimental arrangement: f, focal length of the self-image of grating is produced at one of the Lau
collimating lens. planes. The advantage of using incoherent light is that it
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5
Mechanical Stylus Data Data with coherent light Data with Incohrent light

(mm)
2

A A
1

0
0 5 10 15 20 25
(mm)
-1

Fig. 5. A comparison of surface profile along section A-A


0 5 10 between present and mechanical stylus method.
(a) (mm)

rs

rb

(b)

Fig. 3. (a) Specimen 1: spherical cap; (b) dimensions of the


spherical cap: rs , radius; h, height; rb , base radius of the
spherical cap.

Fig. 6. Specimen 2: a 50-cent coin and area of interest.

cross section A-A (indicated in Fig. 3(a)). The average


discrepancy is 1.5% where as the maximum discrepancy
is 4%. The discrepancy is partially due to the non-
linearity of the optical system such as CCD camera and
collimating lens. It is shown that the results obtained by
using incoherent light source are better than that of
using the coherent light source. The discrepancy is large
at the corner of the spherical cap; this is due to the
shadow effect.
The proposed method is also applied on a coin of
24.5 mm diameter and having a diffuse surface (shown
Fig. 4. (a) Fringe pattern on spherical cap; (b) wrapped phase in Fig. 6). A small area of interest containing 256  256
map; (c) unwrapped phase map; (d) 3-D plot of the spherical pixels (also indicated in the Fig. 6) is cropped. A grating
cap. with a density of 100 lines/mm is used. Fig. 7(a) shows
the fringe patterns recorded by the CCD camera for a
phase shift of p/2. Filtering is applied to remove the
reduces coherent noise in the interferogram and leads to noise in this case. Figs. 7(b) and (c) show, respectively, a
high signal-to-noise ratio, where as in the case of wrapped and the corresponding unwrapped phase maps.
coherent light source filtering is required to remove the Subsequently the 3-D profile of the interested area is
noise. Fig. 5 shows the comparison of the profile on obtained as shown in Fig. 7(d). Fig. 8 shows a
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Fig. 7. (a) Fringe pattern on an area of interest; (b) wrapped phase map; (c) unwrapped phase map; (d) 3-D plot of the surface
profile.

180 Phase shifting method Mechanical stylus method specific distance the setup can be applied only for a
160 small object.
140
It is noteworthy that the grating displacement
120
hight (micron)

100 required to producing the phase steps are of the same


80 order as the grating pitch. Since the proposed method
60
employs a course grating, it is relatively easy to achieve
40
20
sufficiently accurate grating translations. The results
0 obtained by this method is also comparable with the one
0 2 4 6 8
-20
(mm) obtained by using the LCD [27] projection method. The
LCD projection equipment is very costly whereas the
Fig. 8. A comparison of surface profile of 50-cent coin on
proposed setup is very simple and cost effective.
cross-section B-B between present and mechanical stylus
The sensitivity of the system depends upon the
method.
illumination angle. The system is less sensitive for
smaller illumination angle. As the illumination angle is
comparison of the profile along section B-B (indicated in increased, the system sensitivity is also increased.
Fig. 6) with the mechanical stylus method. The average However, the larger illumination angle can cause a
discrepancy is 3% where as the maximum discrepancy is shadow effect. Therefore, the illumination angle is
4% and as mentioned above the discrepancy is due to optimized to 25 in order to achieve higher sensitivity.
the non-linearity of the optical system such as CCD
camera and collimating lens.
As shown in the results we used gratings of different
pitch for the different size of objects. If the height of 5. Concluding remarks
object is in a range of few hundred microns, we need to
use a fine grating to achieve an accuracy of 10 mm. The A phase shifted fringe projection method based on
experimental setup is optimized according to the Talbot effect has been presented for measurement of
measurement range of the specimens. The limitation of surface profile. The phase variation is achieved by an in-
this setup is that as the self-image plane appears at plane translation of a projection grating. In the
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