SPECIFICATION FOR COATING, SILCOLLOY 1000 (SILCOSTEEL-CR)

Document #: Rev. Issue Date: Rev. Date: Page 1 of 3

1.0 SCOPE This specification defines the requirements for Silcolloy 1000 (Silcosteel-CR) coating of customer supplied products, fittings, valves, sample cylinders, tubing and other custom fabrications.

2.0 REFERENCES

2.1. Customer specification; general Requirements for Manufacturing

3.0 SPECIFICATION

3.1. SilcolloyTM 1000 3.1.1.An inert, chemically protective, anti-corrosive, multi-layered barrier of amorphous silicon material inter-diffused with the host substrate resulting in a 1000-2000 nm coating (as described in US Patent #7,070,833). Reproducibility is verified by an average surface contact angle value greater than 15 but less than 35 using deionized water on a process control coupon or GC inlet liner. 3.2. Coating specifications will be continuously updated as the coating process is refined and can be found in SilcoTeks ISO 9001 quality documents or the web site: http://www.silcotek.com/sites/default/files/SpecSheet1_20_09.pdf

4.0 APPROVED SUPPLIER: SilcoTek Corp. 112 Benner Circle Bellefonte, PA. 16823 (814) 353-1778
5.0 MATERIALS:

5.1. Coating material shall be SilcoTek Corp Silcolloy 1000. 5.2. Applicable materials for surface treatment include: 5.2.1.Austenitic Stainless Steels (300 series, Nitronic) 5.2.2.Martensitic Stainless Steel (400 series) 5.2.3.Precipitation-Hardening Stainless Steel (17-4 pH, 15-5 pH) 5.2.4.Nickel-Chromium Alloy (Inconel X-750, Hastelloy series) 5.2.5.Nickel-Chromium-Molybdenum Alloy (Inconel 718, Inconel 725) 5.2.6.Nickel-Iron-Chromium-Molybdenum Alloy (Incoloy 925) 5.2.7.Cobalt-Nickel-Chromium-Molybdenum Alloy (MP35N) 5.2.8.Titanium alloys 5.2.9.Silica glass 5.2.10.Quartz 5.2.11.Carbon
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SPECIFICATION FOR COATING, SILCOLLOY 1000 (SILCOSTEEL-CR)

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Document #: Rev. Issue Date: Rev. Date: Page 2 of 3

6.0 COATING APPLICATION:

6.1. Areas to be coated: 6.1.1. Valves, fittings and custom components: All surfaces, internal and external shall be coated. 6.1.2.Sample cylinders, tubing: Internal surfaces shall be coated. If coating equipment capacity permits, external surfaces shall also be coated. 6.2. Process restrictions: 6.2.1.Parts to be coated shall not be heated in excess of 800F (427C). 6.2.2. Items to be coated shall not be internally pressurized in excess of 500psi. 6.2.3.Sample cylinders to be coated shall not be internally pressurized in excess of the marked service pressure. 6.3. Coating thickness shall be as recommended by the supplier for the part configuration and surface finish. 7.0 ACCEPTANCE CRITERIA 7.1. Coating shall completely cover the specified surface. Coating thickness shall range from 1000 to 2000nm. 7.2. Surfaces of uncoated areas may have a uniform gold to light brown color resulting from surface oxidation at processing temperatures. 7.3. The coating shall have a slight luminescent multi color (rainbow) to grey appearance when inspected under a stereo microscope with ~3x magnification. 7.4. Minimum color shall range from silver to pink with a minimum of 3 color striations and/or grey hue per coated part. 7.5. Wetted surface or critical path surfaces shall be free of surface occlusions, stains, marks, or spots. 7.6. Non-critical surfaces shall be free of surface occlusions with no more than 3 stains, marks, spots, or shadows per part. Total stain, mark, spot or shadow area shall not exceed 2 cm2 per part. 7.7. Post-deposition processing will be used to remove free dust from part surfaces. Color references (via the material specification) can be found through SilcoTeks ISO 9001 quality documents or the web site: http://www.silcotek.com/sites/default/files/SpecSheet1_20_09.pdf 7.8. The part surface may contain trace gray / black or orange / brown silicon particles that can be removed by forced air and/or carbon dioxide. 8.0 Contact Angle Measurements: Limited availability, volume and part dependant 8.1. Using a standard platinum Wilhelmy plate, a fresh sample of deionized (DI) water is measured for surface tension. This value must meet minimum specifications for purity. 8.2. The surface tension value of the DI water is entered in to the processing data to ensure an accurate contact angle measurement for the process control coupon/liner. 8.3. The coupon/liner to be tested is loaded in to a Kruss K100 Tensiometer along with the calibrated water sample. 8.4. The post-measurement quality of the DI water will be verified by repeating step 1, further ensuring the accuracy of coupon/liner measurements. 8.5. Using the specifications previously determined with known surfaces on the same type of coupon/liner, the test coupon/liner tensiometer data will confirm the presence of a proper Silcolloy 1000 surface.
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SPECIFICATION FOR COATING, SILCOLLOY 1000 (SILCOSTEEL-CR)

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Document #: Rev. Issue Date: Rev. Date: Page 3 of 3

8.6. The contact angle data and DI water surface tension data will be stored electronically. Contact angle data will also be written on a process certification sheet to be provided to the customer.

9.0 Process Verification

9.1. Process conditions such as temperatures, gas pressures, and processing time are monitored for each batch of materials. 9.2. Critical process variables are recorded electronically and stored for each process run. This allows for historical verification of proper process specifications. 9.3. Should critical process variables go outside of the known controlled ranges for a proper deposition procedure, the automated program will inform the technician via messages, alarming, and/or process termination (depending on the infraction), and corrective action will be taken.
10.0CERTIFICATION

10.1.A Certificate of Compliance shall be provided in accordance with Reference 2.1. Certificate shall indicate compliance with this specification.

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