High Performance Encoders

MicroE Systems
HIGHER PERFORMANCE SMALLER FASTER EASIER SMARTER MORE VERSATILE CUSTOMIZATION FLEXIBLE DELIVERY RESPONSIVE TECH SUPPORT
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Innovative Encoder Systems that Deliver Perf ormance and Value

Superior performance. World-class reliability. Responsive support and delivery. Focusing on what customers want most is why MicroE Systems is growing so quickly and introducing new products faster than any other encoder company. With a growing product line of over 30 models to match your specific application requirements, and direct sales and distributor offices in 13 countries, we give you a world of encoder solutions.

Product Range
Incremental Encoders for All Applications Mercury II
Tape scales or glass scales for a wide range of applications. Linear or rotary. Resolutions from 5m to 1.2nm.

MicroE Systems Technology: Creating the Best Encoders

It takes a powerful combination of an advanced optical system, signal processing technology, and state of the art optoelectronic integration to make industry-leading encoders. And thats just what MicroE Systems has done, achieving many industry firsts: First 1.2nm resolution encoder with all electronics in the sensor First 20m encoder with cyclical error of only 20nm First PC Board-mount encoder with 78nm resolution First sub-micron encoder with 2 setup tolerance First encoder with one sensor for tape or glass, linear or rotary First encoder with user-programmable settings and software First stick-on index and limits PurePrecision Optics Gives Mercury the Sensor Size Advantage MicroE Systems patented sensor creates a high-fidelity signal with very compact optics. The result is a miniature, high-performance sensor thats just 8.4mm tall, weighing only 5 grams. PurePrecision Optics Faster Setup, Better Accuracy

Pages 4-14

Incremental Encoders for Compact Motion Systems

Mercury and ChipEncoder Screw mount or PC board mount. Linear or rotary. Resolutions from 10m to 5nm. Atmospheric or vacuum.

Pages 12-14

Data Storage
Ultra-high performance encoders, positioners, and servo control for Data Storage applications.
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Packaged Encoders
DRC Housed rotary encoders with bearings. Rugged and reliable. Resolutions from 400 to 360,000 CPR.

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Our PurePrecision optical layout gives our sensors the widest alignment tolerances in the industry: 150m in the Z axis and 2 for theta Z. Thats 300% better than competing encoders, and that means faster setup and better long-term motion system reliability. High signal quality means better accuracy cyclical error as low as 20nm and interpolation that provides up to 1.2nm of resolution.
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About MicroE Systems

Encoder Innovation Starts Here
MicroE Systems, a division of GSI Group, was founded in 1994 to advance encoder technology. Seizing the trend toward smaller motion systems, our patented optical designs have led to over 30 different encoder models today. These innovations make encoders that achieve higher accuracy and speed while also being smaller, easier to install, and use less power. Thats why so many OEMs are putting our encoders in their designs. Due to robust sales growth, we have made extensive investments in our manufacturing operations: a new, larger facility in 2008; use of lean manufacturing and six-sigma principles to achieve rapid response to customer orders while achieving superior quality; tight controls on cleanliness and ESD on the shop floor; and the training and quality systems to be ISO9001:2008 certified. Focus on Technology and New Products MicroE Systems builds encoders and servotrack writing subsystems for one of the worlds most leading edge industries: Data Storage. In fact, most hard disk drives manufactured throughout the world today are made using MicroE Systems technology. Plus, we build the most widely used encoders for sub-micron compact motion systems Mercury encoders. Add to that our growing range of Mercury II encoders and tape scale solutions. These successes stem from our ongoing R&D commitment to create more accurate, faster, smaller encoders. Best Performance and Value MicroE Systems encoders are renowned for their small size, ease of setup and features. But more customers are also discovering their worldclass performance lower cyclical error for better velocity control, accuracy to 1m, and resolution thats stable up to 1.2nm. All of this performance comes from a 20m-pitch encoder system thats a fraction of the cost of 4m and 2m pitch encoders now thats value. Customization and Technical Support At MicroE Systems, we recognize the importance of customization. Many applications require a specific cable length, connector or pinout. Our manufacturing processes make your customized part just like a standard assembly. You get encoders that exactly match your application, and the reliability, quality and responsive lead times you would expect with standard products. Motion system customers require fast, effective support and thats where our Odyssey program comes in. Engineered to support

Our new, larger facility in Massachusetts is ISO 9001:2008 certified.

customers during each of four critical product development phases, we support you from over 30 direct sales and sales partner locations.

Headquarters Direct Sales Offices Sales Channel Partners Technology Center

Global locations provide technical support in your language and time zone.

Flexible Delivery Modern OEM customers must have their orders filled in 1-2 weeks with little forecast visibility. MicroE Systems has professional supply chain management, world-class quality systems and a linear manufacturing process specifically designed to fill new OEM orders rapidly. Product designs that are modular and configurable complete the story, making MicroE Systems one of the most responsive suppliers you can specify. Quality and Reliability Engineered in from the Start Encoder applications require the highest levels of reliability. Thats why we perform so many tests during product development design validation testing, environmental robustness, EMI immunity, mechanical shock, and a host of further tests. We manufacture in the USA to the highest quality standards in compliance with ISO9001:2008, and our encoders are CE and RoHS compliant.
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Mercur y II Family of Encoders: The Nex t Generation

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Superior Performance. World-Class Reliability.

M e r c u r y II

MicroE Systems revolutionized encoder technology with the original Mercury encoder family. Smaller, faster, and smarter than anything before, it set the standard for innovation. Now, the growing Mercury II line of encoders takes another giant step forward by giving you all this, plus more performance, tape scales, dual limits and more. Comprehensive testing and manufacturing to ISO9001:2008 quality standards makes for worldclass robustness and reliability.
PERFORMANCE WITHOUT COMPROMISE UNSURPASSED EASE OF USE

Mercury IIs encoder technology achieves the highest resolution and accuracy in its class, with low cyclical error, low jitter and low power consumption.
Model MII 6000 MII 5000 MII 1900 MII 1600 Resolution 5m - 1.2nm 5m - 1.2nm 5m - 1.2nm 5m - 0.5m Output Digital Digital Analog Digital Cyclical Error* 30nm typical 20nm typical Maximum Speed 10m/s 10m/s 7.2m/s 20m/s Scales Tape or Glass; Linear & Rotary Tape or Glass; Linear & Rotary Tape or Glass; Linear Tape; Linear Long Travel 5m** High accuracy grade: up to 1m Standard accuracy grade: 1.5m

Broadest Alignment Tolerances Setup LEDs Built-in or Stick-on Optical Index and Limits* Cut-to-Length Tape Scale Broadest Alignment Tolerances for Easy Installation and Setup Mercury II has the broadest alignment tolerances in the industry, a full 2 degrees. That makes it the easiest and the fastest sensor to align and setup; you can align the Mercury II sensor in under 30 seconds.

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Accuracy With Tape Scale (Linear) With Glass Scales (Linear)

Built-in or Stick-on Optical Index and Limits* Order tape or linear glass scales with built-in markers for fastest installation, or install stick-on index and limit markers anywhere on cutto-length tape scales. Mercury IIs optical index is bi-directional and repeatable at full speed.
*Limits available on MII 6000 & MII 5000 models

See data sheets for full specifications * MII 6000/5000 accuracy within a 20m signal period **Over any one meter of travel after slope correction in the customers controller

Mercury IIs low cyclical error surpasses every other 20m encoder. The result: smoother velocity control for linear motors and wire bonders, better linear positioning, and more. Mercury II Cyclical Error with Glass Scales
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PurePrecision Tape Scale in Continuous Lengths up to 30 Meters The Tape Scales cut-to-length capability reduces inventory costs and lead times. The unique dispenser makes handling and storage easy. You can also order pre-cut lengths. 4

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Innovative Mercur y II Technology

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LOWEST POWER CONSUMPTION IN THE INDUSTRY

Mercury IIs patented optical system and integrated sensor design dramatically cuts power consumption - and sensor size
MII 6000 Power Consumption Sensor Height 0.90W*
*0.25 for sensor

Mercury II Encoder Models

MERCURY II 6000

MII 5000 0.90W 11.0mm

MII 1900 0.24W 8.7mm

MII 1600 0.24W 8.7mm

8.2mm

ROBUSTNESS WITHOUT COMPROMISE

Smallest Sensor, Ultra-High Resolution and Accuracy, Tape or Glass Scales Programmable Resolution: 5m 1.22nm Linear, to 268M CPR Rotary Output: Digital A-quad-B or High Speed Serial Scales: 20m Tape or Glass, Linear or Rotary Vacuum models for up to 10 -8 torr
MERCURY II 5000

Advanced Optical Design Contamination Resistant Automatic Gain Control Separate Left and Right Limits (M II 6000 & M II 5000 Models)

High Noise Immunity Double-Shielded Cable Differential Outputs RoHS Compliant CE Compliant

VERSATILITY WITHOUT COMPROMISE

Low Z-Height Sensor: as low as 8.2mm Low Mass Sensor: as low as 3g Cut-to-Length Tape Scale up to 30 Meters Long SmartPrecision II Software Small Sensor for Faster, More Compact Motion Systems With Mercury II, you get the smallest 1.2nm capable sensor for compact system designs; plus, you can select the best scale for your application: tape or glass, linear or rotary.

Ultra-High Performance, Digital Output from the Sensor, Tape or Glass Scales Programmable Resolution: 5m 1.2nm Linear, to 268M CPR Rotary Output: Digital A-quad-B or High Speed Serial Scales: 20m Tape or Glass, Linear or Rotary
MERCURY II 1900

High Performance, Analog Output from the Sensor, Tape or Glass Scales Resolution: 5m 1.2nm Linear Output: Analog Sin/Cos 1Vpp Scales: 20m Tape or Glass
MERCURY II 1600

SmartPrecision II Software for Unmatched Monitoring and Diagnostics Our encoder software enables setup, real time monitoring, and a variety of data plots; programmable resolution, output frequency and output filtering can be set with MII 6000 and MII 5000 models.

Up to 0.5m Resolution, Digital Output from the Sensor, Tape Scales Resolution: 5m - 0.5m Linear Output: Digital A-quad-B Scales: 20m Tape
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M e r c u r y II

Integrated Sensor Design for Less Power Consumption, Smaller Sensors

Mercu r y II 6000
Smallest Sensor, Ultra-High Resolution and Accuracy Digital Output Encoder
Uses Metal Tape, Linear Glass, or Rotary Glass Scales Mercury II 6000s programmable resolutions range from 5m to 1.2nm, with accuracy up to 1m; the same sensor works with tape or glass scales, either linear or rotary. Excellent cyclical error (short-range accuracy) means smooth velocity control. Performance, small sensor size, robustness, versatility and ease of use make MII 6000 the high performance choice.

I H F

F E D G

M e r c u r y II

C B

F A

System Performance
Resolution Linear 5m to 1.2nm Accuracy With Tape Scale (Linear) With Glass Scales (Linear) Cyclical Error* 30nm typical 20nm typical Rotary 20k CPR to 268M CPR Long travel 5m** High accuracy grade: up to 1m Std. accuracy grade: up to 1.5m
See data sheet for full specifications

C Next-Generation Sensor

for Resistance to Contamination Mercury IIs sensor has an improved optical design and Automatic Gain Control for contamination resistance: fingerprints, oil, dust, etc.
D One Sensor: Tape or Glass, Linear or Rotary Scales

With MII 6000, the same sensor works with tape and glass scales, saving design time and reducing the number of unique parts.
E

*Accuracy within a 20m signal period

PurePrecision Tape or High Accuracy Linear Glass Scales

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**Over any one meter of travel after slope correction in the customers controller

MII 6000 IS THE ONLY DIGITAL-OUTPUT ENCODER WITH ALL THESE FEATURES:

PurePrecision tape scale is the easiest tape to install and use. Cut it to any length you need; adhesive backing and our unique application tool make installation fast and accurate. Use linear glass scales for the highest accuracy and precise thermal management.
F

8.2mm sensor Z-height Stick-on index and limits Programmable resolution and settings
MII 6000 APPLICATIONS

Integral dual limits Up to 1.2nm resolution A-quad-B or high speed serial word outputs

Built-In or Stick-On Optical Index and Limits Choose from built-in index and limit markers for fastest installation, or stick-on markers for placeanywhere flexibility with cut-to-length tape scale applications. Mercury IIs space-saving index and limit markers fit within the 6mm width of the tape scale. The bi-directional optical index provides 1 LSB repeatability at all speeds, while left and right optical limits enhance safety and reduce cabling.
F

Nanometer-Scale Motion Piezo-Motor Stages Wafer Inspection & Processing Automated Optical Inspection
A

Metrology XY Stages Tunable Optic Systems Microscope Stages

Programmable Features for System Flexibility MII 6000 provides user programmable or factory-set resolution, output bandwidth, and low-pass filtering. No other encoder offers this capability to accelerate motion system prototyping or greater flexibility for complex motion systems.

Compact Z Height Design MII 6000s sensor is only 8.2mm high, enabling more compact motion systems.

Status LEDs Show System Status at a Glance Status LEDs show signal strength and index/limits conditions at all times.

Broadest Alignment Tolerances in the Industry Mercury encoders have the widest Z and theta-Z tolerances for fast setup.

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SmartPrecision II Software Adds Unique Functionality

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MII 6000s optional software allows setup, monitoring, diagnostics and data plots. Ethernet connectivity enables secure, remote viewing of parameters.

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Mercu r y II 5000
Miniature, Ultra-High Resolution and Accuracy Digital Output Encoder

I G

Ideal for High Performance 0.1m Digital From-the-Sensor Applications Uses Metal Tape, Linear Glass, or Rotary Glass Scales Mercury II 5000s programmable resolutions range from 5m to 1.2nm, with accuracy up to 1m; the same sensor works with tape or glass scales, either linear or rotary. Excellent cyclical error (short-range accuracy) means smooth velocity control. Performance, robustness, versatility and ease of use make MII 5000 the high performance choice.
C
F D H C B A G E

System Performance
Resolution Linear 5m to 1.2nm Accuracy With Tape Scale (Linear) With Glass Scales (Linear) Cyclical Error* 30nm typical 20nm typical Rotary 20k CPR to 268M CPR Long travel 5m** High accuracy grade: up to 1m Std. accuracy grade: up to 1.5m
See data sheet for full specifications

Digital Output Right From the Sensor All electronics are in the sensor, including programmable features and interpolation up to x16384. You get the highest system reliability, the smallest footprint, and a variety of connector options - even your own connector. Next-Generation Sensor for Resistance to Contamination Mercury IIs sensor has an improved optical design and Automatic Gain Control for contamination resistance: fingerprints, oil, dust, etc. One Sensor: Tape or Glass, Linear or Rotary Scales With MII 5000, the same sensor works with tape and glass scales, saving design time and reducing the number of unique parts. PurePrecision Tape or High Accuracy Linear Glass Scales PurePrecision tape scale is the easiest tape to install and use. Cut it to any length you need; adhesive backing and our unique application tool make installation fast and accurate. Use linear glass scales for the highest accuracy and precise thermal management.
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*Accuracy within a 20m signal period

**Over any one meter of travel after slope correction in the customers controller

MII 5000 IS THE ONLY DIGITAL-OUTPUT ENCODER WITH ALL THESE FEATURES:

11mm sensor Z-height Stick-on index and limits Programmable resolution and settings

Integral dual limits Up to 1.2nm resolution A-quad-B or high speed serial word outputs

MII 5000 APPLICATIONS

Linear Motors FPD Manufacturing Wafer Inspection & Processing Automated Optical Inspection

Metrology XY Stages and Gantries Tunable Optic Systems Microscope Stages

H

Built-In or Stick-On Optical Index and Limits Choose from built-in index and limit markers for fastest installation, or stick-on markers for placeanywhere flexibility with cut-to-length tape scale applications. Mercury IIs space-saving index and limit markers fit within the 6mm width of the tape scale. The bi-directional optical index provides 1 LSB repeatability at all speeds, while left and right optical limits enhance safety and reduce cabling.

Compact Z Height Design MII 5000s sensor is only 11mm high, enabling more compact motion systems.

Programmable Features for System Flexibility MII 5000 provides user programmable or factory-set resolution, output bandwidth, and low-pass filtering. No other encoder offers this capability to accelerate motion system prototyping or greater flexibility for complex motion systems. SmartPrecision II Software Adds Unique Functionality MII 5000s optional software allows setup, monitoring, diagnostics and data plots. Ethernet connectivity enables secure, remote viewing of parameters.
TM

Broadest Alignment Tolerances in the Industry Mercury encoders have the widest Z and theta-Z tolerances for fast setup.

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M e r c u r y II

Mercu r y II 1900
G

Miniature, High Performance Analog Output Encoder

All Electronics in the Sensor Uses 20m Metal Tape or Linear Glass Scales to Achieve the Highest Resolution with Your Interpolation Electronics For high performance with linear tape or glass scales, the Mercury II 1900 analog encoder delivers. It fits compact designs and provides high accuracy, speed, and high-fidelity signals for resolutions from 5m to 1.2nm, depending on your controller. Cut-to-length tape scale applies quickly; linear glass scales provide high accuracy up to 1m. The stick-on index and broad sensor alignment tolerances mean setup in seconds.
M e r c u r y II
F H B A E C D

Analog Output Right from the Sensor All electronics are in the sensor. You get the highest system reliability, the smallest footprint, and a variety of connector options - even your own connector.

System Performance
Resolution Linear 5m to 1.2nm, depending on customer interpolation Accuracy With Tape Scale (Linear) With Glass Scales (Linear) Long travel 5m* High accuracy grade: up to 1m Standard accuracy grade: up to 1.5m
See data sheet for full specifications

Next-Generation Sensor for Resistance to Contamination Mercury IIs sensor has an improved optical design and Automatic Gain Control for contamination resistance: fingerprints, oil, dust, etc.

*Over any one meter of travel after slope correction in the customers controller

PurePrecision Tape or High Accuracy Linear Glass Scales

TM

1Vpp sin/cos output Speeds up to 7.2m/s Bi-directional optical index with repeatability at full system speed High EMI noise immunity and tolerance to contamination

PurePrecision tape scale is the easiest tape to install and use. Cut it to any length you need; adhesive backing and our unique application tool make installation fast and accurate. Use linear glass scales for the highest accuracy and precise thermal management. With MII 1900, the same sensor works with both types of scales, saving design time and reducing the number of unique parts in your system design.
F

MII 1900 APPLICATIONS

XY Stages and Gantries FPD Manufacturing Wire & Die Bonders Pick and Place Systems

Linear Motors Wafer Processing Metrology Wafer Inspection

Built-In or Stick-On Optical Index Choose from a built-in index mark for fastest installation, or a stick-on marker for place-anywhere flexibility with cut-to-length tape scale applications. Mercury IIs space-saving index marker fits within the 6mm width of the tape scale. The bi-directional optical index provides 1 LSB repeatability at all speeds.

Compact Z Height Design MII 1900s sensor is only 8.7mm high, enabling more compact motion system designs.
F

Choice of Connector Styles Choose from a fully-shielded 15-pin D-sub connector or customer-specified connector.

Broadest Alignment Tolerances in the Industry Our next-generation sensor design has the widest Z and theta-Z tolerances for fast setup.

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SmartPrecision II Software Optional software adds capability to perform setup, monitoring, diagnostics and data plots.
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Mercu r y II 1600
Up to 0.5m Resolution Digital Output Encoder
H All Electronics in the Sensor Uses Metal Tape Scales for Economical Motion Control Designs The Mercury II 1600 digital output sensor, combined with the cut-to-length tape scale, provides repeatability and resolution of 5m to 0.5m. The stick-on index and broad sensor alignment tolerances mean that setup takes seconds, high EMI immunity and tolerance to contamination translate to reliable operation, and high bandwidth provides speeds up to 20m/s. MII 1600 is the best choice for applications requiring 5m to 0.5m of resolution.

F E

B A C D

System Performance Resolution and repeatability: 5m to 0.5m Accuracy: 5m (over any one meter of travel after slope correction in the customers controller) Speeds up to 20m/s Bi-directional optical index with repeatability at full speed High EMI noise immunity and tolerance to contamination

Digital Output Right from the Sensor All electronics are in the sensor, including up to x40 interpolation. You get the highest system reliability, the smallest footprint, and a variety of connector options - even your own connector.

Next-Generation Sensor for Resistance to Contamination Mercury IIs sensor has an improved optical design and Automatic Gain Control for contamination resistance: fingerprints, oil, dust, etc.

MII 1600 APPLICATIONS

Linear Motors and Stages Lab Automation Metrology and Inspection Medical Equipment

XY Positioning Tables Assembly Automation Pick and Place Systems Printing Equipment

PurePrecision Tape, the Next Generation Tape Scale

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PurePrecision tape scale is the easiest tape to install and use. Cut it to any length you need; adhesive backing and our unique application tool make installation fast and accurate.
F

Compact Z Height Design MII 1600s sensor is only 8.7mm high, enabling more compact system designs. Built-In or Stick-On Optical Index Choose from a built-in index mark for fastest installation, or a stick-on marker for place-anywhere flexibility with cut-to-length tape scale applications. Mercury IIs space-saving index marker fits within the 6mm width of the tape scale. The bi-directional optical index provides 1 LSB repeatability at all speeds.

Broadest Alignment Tolerances in the Industry Mercury encoders have the widest Z and theta-Z tolerances for fast setup.

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Choice of Connector Styles Choose from a fully-shielded 15-pin D-sub connector or customer-specified connector.

SmartPrecision II Software Optional software adds capability to perform setup, monitoring, diagnostics and data plots.
TM

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M e r c u r y II

PurePrecision Tape and Glass Scales For Mercu r y II Encoders

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TM

For Easy Installation and Superior Performance

M e r c u r y II

Tape Scales PurePrecision tape is the easiest tape scale to install and use. Cut it to any length you need from a coil, or order pre-cut lengths with built-in index and limits to make installation even faster. Its adhesive backing makes application easy and accurate.

Cut to any length at the time of installation, or order pre-cut Measuring length up to 30m Only 6mm wide, including index and limits; low profile Choose from built-in or stick-on optical index and limit markers Resists effects of scale contamination dust, dirt, fingerprints, oil spots, etc.
Glass Scales Use linear glass scales for the highest accuracy and precise thermal management. Rotary glass scales are available with or without hubs, and in arc segments. Highest accuracy up to 1m Only 6mm wide, including index and limits (applications 130mm) Custom options special widths, thicknesses, near-zero CTE materials, diameters, or rotary arc segments
SPECIFICATIONS FOR MERCURY II SCALES
Linear Tape Scales Length Cut to any length from a dispenser Order pre-cut to a a specified length Accuracy CTE Built-in index and limits Stick-on index and limits 50mm - 30m 5m* 13ppm/C** up to 1m 8ppm/C up to 2.1 arc-sec. 8ppm/C Linear Glass Scales 18mm - 1m Rotary Glass Scales 44mm - 121mm dia.

* Over any one meter of travel after slope correction in the customers controller ** Thermal expansion of the tape scale is matched to the substrate by fixing the ends of the scale with epoxy

Mercury II Accuracy: 1m with High-Accuracy Grade Scales

SCALES & INDEX / LIMIT MARKERS FOR MERCURY II MODELS

Model MII 6000 MII 5000 MII 1900 MII 1600 Tape Scale Linear Glass Scales Rotary Scales Stick-On Index
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Stick-On Limits

Note: Contact MicroE Systems for tape-on-a-radius rotary and MII 1900/1600 rotary applications

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10

PurePrecision Tape Scales

CUT TO LENGTH OR PRE-CUT TAPE SCALES

tape scale and then stick on the markers. The stick-on markers even work on linear glass scales.

The Best Tape Scale Solution Available PurePrecision Marker Tape and Laser Tape scales set the standard for flexibility and ease of use. Order tape with built-in index and limit* markers, or cut any length needed from a coil and apply stick-on markers. There are no index magnets to install and adjust. Adhesive-mount PurePrecision tape scale has a 20m pitch and is available in lengths up to 30 meters.
* Limits available on MII 6000 and MII 5000 models

Mercury IIs stick-on optical index

Index magnet used by other encoders

SMALLEST TAPE SCALE SYSTEM AVAILABLE

Easy Tape Installation Simply feed the tape scale into the installation tool and roll it out along a benching edge to perform adhesive mounting. The tape can then be epoxied at its ends, matching it to the thermal response of the substrate. Mounting is that simple. PurePrecision tape scale is made of nickel alloy for corrosion resistance, immunity to cleaning solvents and long-term reliable performance.
CHOOSE FROM BUILT-IN OR STICK-ON INDEX AND LIMITS

Unlike other encoders, Mercury IIs optical index and limits require no additional space. They mount directly on the 6mm wide tape scale - no unwanted magnets or mounting hardware taking up space.

Brand X
22mm

Brand Y
13.5mm

Mercury II
6.0mm

Built-In Markers PurePrecision Marker Tape has built-in index and limit marks to speed installation. Manufactured into the tape scale to your specifications using a laser etch process, installation of the tape scale is reduced to one simple step: just apply the adhesive-mount tape scale to your systems mounting surface and you are done. There is no need to mount index or limit markers Enlargement showing built-in index or magnets. The laser-written marks are placed in the exact locations you specify index location, number of index marks and limit mark lengths can all be specified at the time of ordering. PurePrecision Marker Tape may be ordered in pre-cut lengths for the fastest installation, or in continuous form for cutting at your site. Stick-On Markers PurePrecision Laser Tape works with Mercury IIs stick-on index and limit markers when the flexibility and inventory savings of cut-tolength capability is required. Stick-on index and limit markers can be placed anywhere in seconds: there is no need to mix epoxy or drill holes to mount bulky magnets or limit switches. Just apply the

PurePrecision Glass Scales

USE GLASS SCALES WHEN YOU NEED:

Highest accuracy to 1m Uniform thermal behavior Ultra-smooth velocity control

Short travel lengths Custom configurations Rotary scales

Mercury IIs 20m pitch glass scales are available in lengths from 10mm to 1m and rotary diameters up to 121mm. Custom scales are also available for OEM orders special thicknesses, widths, rotary arc segments, and specialized materials such as near-zero CTE glass. Linear glass scales can have built-in or stick-on index and limit markers. ELECTROMATE Toll Free Phone (877) SERVO98 11 Toll Free Fax (877) SERV099
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M e r c u r y II

Mercur y : The Original Miniature Encoders

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Incredible Performance from Such a Small Package

MicroE Systems introduced Mercury encoders to help equipment designers achieve smaller and faster systems. Originally three models, the Mercury series of encoders has grown to 11 models due to an expanding range of applications requiring more resolution, speed and even smaller sensors. Motion system engineers around the world specify Mercury encoders when their linear or rotary applications demand high performance from the smallest possible sensor. Comprehensive testing and manufacturing to ISO9001:2008 quality standards ensure long-term reliability.
Mercury

SMALLER SENSORS FOR SMALLER, LIGHTER MOTION SYSTEMS

HIGH PERFORMANCE FROM ULTRA-SMALL SENSORS

Mercurys encoder technology achieves high resolution and low power consumption with the smallest possible sensors.
Model M 3500 M 1500 M 1000 M 1200 M 1500P ChipEncoder

Resolution 5m - 5nm 5m - 0.5m 5m - 78nm 5m - 78nm 5m - 0.5m 10m - 1m

Output Digital Digital Analog Analog Digital Digital

Features Programmable Digital from the Sensor 1Vpp Output PCB Mount PCB Mount PCB Mount

Scales Glass; Linear & Rotary Glass; Linear & Rotary Glass; Linear & Rotary Glass; Linear & Rotary Glass; Linear & Rotary Glass; Linear & Rotary

Mercurys patented optical system results in the most compact sensors in their class. Achieve low mass motion systems with more rapid accelerations and higher system throughputs using Mercurys 6mm wide linear scales, rotary scales as small as 12mm in diameter, lowmass rotary arc segments, and sensors as small as 5.6mm high weighing only 2.6 grams. Plus, the same sensor models work in both linear and rotary applications. Low power consumption as low as 0.17 Watts provides further advantages in thermal stability and for portable equipment.

Model M 1200 M 1500P ChipEncoder

Height 5.6mm 5.6mm 3.1mm

Weight 2.6g 2.6g 0.6g

Power Consumption 0.17W 0.17W 0.18W

Accuracy With Glass Scales (Linear)

Long Travel High accuracy grade: up to 1m Standard accuracy grade: 3m

See data sheets for full specifications

DUAL-AXIS MODELS

UNSURPASSED EASE OF USE

Broadest Alignment Tolerances for Easy Installation and Setup Mercury has the broadest alignment tolerances in the industry, a full 2 degrees. That makes it the easiest and the fastest sensor to align and setup. No instrumentation is needed; you can align the Mercury sensor in under 30 seconds. 12

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Mercury 3000 Dual Axis Averager models combine feedback from two sensors and average them in real time. The result is higher accuracy in rotary applications than can be achieved with one sensor scale eccentricity errors are virtually eliminated. Outputs can be A-quad-B or high speed serial.

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Innovative Mercur y Technology

TM

Mercury & ChipEncoder Models

MERCURY 3500, 3000, 2000

Less Power Consumption, Smaller Sensors

PC BOARD MOUNT

Mercury 1200, Mercury 1500P and ChipEncoder models mount directly on your PC board providing significant space and cost savings through design integration. Mercury 1200s analog outputs can be interpolated by your electronics or a chipset available from MicroE Systems for use on your PC board for resolution up to 78nm (linear). Mercury 1500P and ChipEncoder have built-in interpolation that produces digital outputs with up to 0.5m resolution (linear). All models work with rotary scales as small as 12mm diameter. And all this comes in the smallest packages.
WIDE RANGE OF SCALES

Small Sensor, High Resolution and Accuracy Programmable Resolution: 5m 5nm Linear Up to 67M CPR Rotary Output: Digital A-quad-B or High Speed Serial Scales: 20m Glass, Linear or Rotary Multi Axis Models
MERCURY 1500

Digital Output from the Sensor Resolution: 5m 0.5m Linear Up to 665k CPR Rotary Output: Digital A-quad-B Scales: 20m Glass, Linear or Rotary
MERCURY 1000

Linear and rotary 20m pitch glass scales are available in lengths from 13mm to 2m, and diameters up to 121mm. Accuracy of 1m is available using high accuracy grade linear scales. Widths as low as 6mm compliment Mercurys space-efficient sensors for the smallest possible motion systems. Built in index marks complete your application. Custom widths, thicknesses, diameters, arc segments, index configurations, and near-zero CTE materials are available for OEM orders.
Linear Standard Lengths 13mm 25mm 50mm 75mm 100mm 125mm 150mm Rotary Standard Outer Dia. 12.00mm 19.05mm 31.75mm 57.15mm 107.95mm 139.7mm Rotary Hub Available Yes Yes Yes Yes Yes Yes

1Vpp Analog Output Resolution: 5m 78nm Linear Up to 4.2M CPR Rotary Output: Analog Sin/Cos 1Vpp Scales: 20m Glass, Linear or Rotary
MERCURY 1200 & 1500P

PCB Mount, Analog or Digital Output from the Sensor Resolution: 5m-78nm Linear (M 1200) 5m 0.5m Linear (M 1500P) Up to 4.2M CPR Rotary Scales: 20m Glass, Linear or Rotary
CHIPENCODER

. . .

Rotary Segments Arc Segment Radius: 6mm or greater

PCB Mount, Digital Output from the Sensor Resolution: 10m 1m Linear Up to 300k CPR Rotary Scales: 40m Glass, Linear or Rotary

2020mm

Sold & Serviced By:

ELECTROMATE
Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com

13

Mercury

The Smallest Vacuum Encoders

High Performance at High Vacuum with the Smallest Encoders
Mercury and Mercury II vacuum encoders are specified in a wide range of applications due to their combination of performance, small size, and high vacuum rating. Choose from models with programmable digital output, analog output, or digital output right from the sensor, all constructed using vacuum-compatible materials rated up to 10-8 torr. All sensors can be used with linear, rotary and arc segment scales.
HIGH PERFORMANCE IN THE SMALLEST PACKAGE

Mercury Vacuum Models

MERCURY II 6800V

With sensors only 8.2mm tall, capable of resolutions up to 1.2nm and cyclical error of 20nm, unsurpassed motion system performance is achieved in the most compact vacuum applications. Plus, thermal effects are minimized due to the low power consumption of Mercury encoder sensors only 0.25W for most models. All models perform at 10-8 torr with negligible outgassing. Bake out is rated at 150C for 48 hours. And Mercury and Mercury II vacuum encoders perform in high magnetic field environments.
Vacuum Encoders WIDE RANGE OF SCALES

Small Sensor, Ultra-High Resolution and Accuracy, Glass Scales Programmable Resolution: 5m 1.2nm Linear Up to 268M CPR Rotary Output: Digital A-quad-B or High Speed Serial; dual limits Vacuum up to 10 -8 torr; 150C bakeout at 48 hours
MERCURY 3500V, 2000V

Vacuum-compatible linear and rotary 20m pitch glass scales are available in lengths from 13mm to 2m, and diameters up to 121mm. Accuracy of 1m is available using high accuracy grade linear scales. Widths as low as 6mm compliment Mercurys space-efficient sensors for the smallest possible motion systems. Built in index and limit marks* complete your application. Custom widths, thicknesses, diameters, arc segments, index / limit configurations, and near-zero CTE materials are available for OEM orders.
* Limits available on MII6800V models

Small Sensor, High Resolution and Accuracy, Glass Scales Programmable Resolution: 5m 5nm Linear Up to 67M CPR Rotary Output: Digital A-quad-B or High Speed Serial Vacuum up to 10 -8 torr; 150C bakeout at 48 hours
MERCURY 1000V

Linear Standard Lengths 13mm 25mm 50mm 75mm 100mm 125mm 150mm

Rotary Standard Outer Dia. 12.00mm 19.05mm 31.75mm 57.15mm 107.95mm 139.7mm

Rotary Hub Available Yes Yes Yes Yes Yes Yes

High Performance Analog Output, Glass Scales Resolution: 5m 78nm Linear Up to 4.2M CPR Rotary Output: Analog Sin/Cos 1Vpp Vacuum up to 10 -8 torr; 150C bakeout at 48 hours
MERCURY 1500V

. . .

Rotary Segments Arc Segment Radius: 6mm or greater

Up to 0.5m Resolution, Digital Output from the Sensor, Glass Scales Resolution: 5m - 0.5m Linear Up to 665k CPR Rotary Output: Digital A-quad-B Vacuum up to 10 -8 torr; 150C bakeout at 48 hours

2020mm

Sold & Serviced By:

ELECTROMATE
Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com

14

Da t a Storage Products
MicroE Systems has more than a decade of experience designing and manufacturing critical components and ultra-precision positioning systems for the data storage industry. Today we supply these components to the majority of hard disk drive (HDD) manufacturers around the world, enabling cost-effective manufacturing of HDDs with capacities exceeding 1TB.

PRODUCTS

G1400 and G1600 High Accuracy Rotary Encoders PE100 High Speed Rotary Encoders PA200G and PA2046G Rotary Positioners MP7000 Positioner for Media Writers MCB2 and SA200a Motion Control Subsystems

DRC Encoders
TM

Based on decades of field-proven reliability and performance, DRC incremental encoders are well known for fast and easy installation using industry-standard mechanical and electrical interfaces. Choose from sealed or kit-style rotary encoders, kit-style linear encoders, or sealed linear length gages featuring: Optical encoder technology with LED light source for long life and highest performance Differential digital outputs with available zero reference Custom versions available for OEM applications Sealed Rotary Shaft and Hollow Shaft Encoders Rugged, reliable incremental rotary motor encoders Resolutions from 400 to 360,000 Counts per Rev., with a wide range of shaft / coupling sizes, mounting options, connector styles and cable lengths High accuracy, high temperature, high shaft load and extra high vibration-resistant models

PRODUCTS

25D, 25B, S15, H15 and F15 Shaft and Hollow-Shaft Sealed Rotary Encoders; Resolutions up to 200,000 CPR HT30, T23B, and TK91 Kit-style Rotary Encoders for Motors; Resolutions up to 100,000 CPR LDK Kit-style Linear Encoders; Resolutions up to 0.5m SST Sealed Linear Length Gages; Resolutions up to 1m
Sold & Serviced By:

ELECTROMATE
Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com

15

Data Storage and DRC

Encoder Selector Chart

Model
MERCURY II ENCODERS Digital or analog output from the sensor Tape or glass scales with index & limits Mercury II 6000 Series Encoders
page 6

Features
Smallest sensor, programmable resolution and filtering, stick-on index and limits, easy alignment, setup software, vacuum models for up to 10-8 torr Programmable resolution and filtering, small sensor, stick-on index and limits, easy alignment, setup software Analog output encoder, resolution set by customer controller; small sensor; stick-on index; easy alignment; setup software Digital output with up to 0.5m resolution, small sensor, stick-on index, easy alignment, setup software Programmable resolution, output frequency & alarms; small sensor; easy alignment; setup software

Specifications
Linear Resolution: 5m 0.0012m* Rotary Resolution: 20k CPR 268M CPR* Output: A-quad-B, Index, Dual Limits and Alarm; High Speed Serial Interface Tape, Linear Glass or Rotary Glass Scales Linear Resolution: 5m 0.0012m* Rotary Resolution: 20k CPR 268M CPR* Output: A-quad-B, Index, Dual Limits and Alarm; High Speed Serial Interface Tape, Linear Glass or Rotary Glass Scales Linear Resolution: 5m 0.0012m Output: Analog Sin/Cos with Index Linear Tape or Glass Scales

Mercury II 5000 Series Encoders

page 7

Mercury II 1900 Encoders

page 8

Mercury II 1600 Encoders

page 9

Linear Resolution: 5m 0.5m Output: A-quad-B with Index Tape Scales Linear Resolution: 5m 0.005m* Rotary Resolution: 6.6k CPR 67.1M CPR* Output: A-quad-B with Index; Serial Interface Linear or Rotary Glass Scales Linear Resolution : 5m 0.5m Rotary Resolution: 6.6k CPR - 655k CPR Output: A-quad-B with Index Linear or Rotary Glass Scales Linear Resolution: 5m 0.078m Rotary Resolution: 6.6k CPR - 4.2M CPR Output: Sin/Cos with Index Linear or Rotary Glass Scales Linear Resolution: 5m 0.0012m* Rotary Resolution: 6.6k CPR 268M CPR* Output: A-quad-B with Index; Serial Interface; Analog Sin/Cos with Index Linear or Rotary Glass Scales

MERCUR Y ENCODERS Smallest sensors Glass scales Screw mount or PC board mount

Mercury Programmable Encoders

page 12

Mercury Digital Output Encoders

page 12

Digital output with fixed resolution, small sensor, easy alignment, setup software Analog output encoder, resolution set by customer controller; small sensor; easy alignment; setup software Small sensor; programmable resolution, output frequency & alarms; easy alignment; setup software; rated to 10-8 torr

Mercury Analog Output Encoders

page 12

MERCURY VACUUM ENCODERS Smallest vacuum sensors Glass scales

Mercury Vacuum Encoders

page 14

CHIPENCODER Smallest PC board mount sensor

ChipEncoder
page 12

Digital output with up to 1m resolution, small PC board mount sensor

Linear Resolution : 10m 1m Rotary Resolution: 3k CPR - 327k CPR Output: A-quad-B with Index ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 Linear or Rotary Glass Scales www.electromate.com
Sold & Serviced By:

sales@electromate.com

See data sheets and interface drawings on web site for detailed specifications.

*Resolution, output and scale options vary by model.