1.3.

General Vacuum Chamber Features

Several different types of pumps (different operating pressures) Pressure measurement (multiple gauges) Sample movement, heating, cooling, cleaning, viewing Gas/vapor admission system (controlled "leak") Multiple analytical techniques (neutral or charged particles or radiation)

CEM 924

2.1

Spring 2001

1.4. Construction and Design

Stainless steel construction

1. Modular (metal-to-metal seals) Elastomer o-ring seals

CEM 924

2.2

Spring 2001

Flange Buna N or Viton O Ring Centering

Weld

Clamp

Reuseable, inexpensive atm to ~10-7 (permeation) torr Elastomer (Viton, Buna) limited to <150 C, certain solvents Metal knife-edge seals
ConFlat (CF) Fitting 304 Stainless Steel Tube

Vertical Wall

Flange

OFHC Cu Gasket Knife Edge

Weld

Nut and Bolt

1/8"

Durable, atm to 10-13 torr Expensive, one-use annealed high purity Cu (Ag, Au) gasket Knife-edges easily damaged
CEM 924 2.3 Spring 2001

1.5. Vacuum Pumps

1.5.1. Pressure Regimes A. Viscous Flow Pressures >10-4 torr Mean free path short Molecule-molecule collisions more frequent than molecule-wall Gaseous momentum transfer Net pressure gradient Flow laminar, Poiseuille, turbulent B. Molecular Flow Pressure <10-4 torr Mean free path long Molecule-wall collisions more frequent than molecule-molecule No gaseous momentum transfer Almost no net pressure gradient Molecules removed by chance collision with pumping surface Kn = a Knudsen Number

= mean free path a = diameter of tube Kn < 0.01 viscous flow 0.01 < Kn < 1 transitional (Knudsen) flow Kn > 1 molecular flow
CEM 924 2.4 Spring 2001

1.5.2. Rotary Vane (Mechanical) Pump

CEM 924

2.5

Spring 2001

Atmosphere to >10-3 torr Robust, inexpensive Single- or two-stage Belt-drive or direct-drive electric motor Oil lubricated

CEM 924

2.6

Spring 2001

1.5.3. Sorption Pump

LN2 cooled molecular sieve with large surface area (2500 m2g-1) condenses (sorbs) many gases Quickly becomes saturated with gas Must be baked at >200 C to remove adsorbed gases Atm to 10-3 torr (two units working alternately) Simple, inexpensive, oil-free Poor pumping of non-condensable gases (noble gases, H2, O2)

CEM 924

2.7

Spring 2001

1.5.4. Turbomolecular Pump

CEM 924

2.8

Spring 2001

No physical barrier between high and low pressure side Directed molecular momentum through collision with high speed angled turbine blade (rotor) Fixed stator blade produces additional momentum exchange Net molecular flow small but several rotor/stator pairs arranged in series Oil/grease/electromagnetic bearings Atmosphere to 10-10 torr when backed with rotary vane pump Moderate pumping speed Fragile, expensive, poor pumping of light gases

CEM 924

2.9

Spring 2001

1.5.5. Diffusion Pumps

Momentum transfer to gas molecules through collision with directed jet of oil molecules Require cooling water, backing pump

CEM 924

2.10

Spring 2001

10-3 to 10-7 torr* without LN2 baffles (to 10-9 torr* with LN2 baffles) *depends on fluid Robust, high pumping speed, inexpensive, reliable Oil decomposition, "dirty"

CEM 924

2.11

Spring 2001

1.5.6. Sublimation/Getter pump Heated Ti filament evaporates Ti film onto cooled surface Ti getters reactive gases by reaction 10-8-10-11 torr Inexpensive, reliable Molecule specific pumping speed Periodic operation - not primary pumping mechanism 1.5.7. Sputter-Ion Pumps

CEM 924

2.12

Spring 2001

High voltage between anode and cathode (<10 kV) Gas molecules ionized near anode are accelerated to cathode Ions embedded in cathode material (titanium) and sputter titanium atoms from surface Sputtered Ti atoms act as "getter" for reactive gases Magnetic field applied to create spiral ion trajectories (longer pathlength) 10-4 torr to 10-11 torr Reliable, oil-free, no moving parts Pumping speed varies with molecule, rapid pumping of H2, O2, poor pumping of noble gases

CEM 924

2.13

Spring 2001

1.6. Attaining Ultrahigh Vacuum

Rapid initial followed by slower pressure drop A. Evacuation (e-t) - removal of gas volume B. Surface desorption (1/t) - adsorbed water on onner surfaces C. Wall diffusion (1/t1/2) - gases dissolved in walls D. Permation limit (ultimate pressure) - gas diffusion through walls

CEM 924

2.14

Spring 2001

Baking entire chamber at 100-200 C for 24 hours increases rate B and C.

RGA of turbomolecular-pumped system

CEM 924

2.15

Spring 2001

CEM 924

2.16

Spring 2001