NanoFocus - The Company

Optical 3D surface measurement tools for Research, Quality and Production Control Founded 1994 Focus: Automotive, Semiconductor, Solar, Medical, LEDs, Steel, Forensic, etc. Installed base: > 700

NanoFocus, Ettlingen

NanoFocus HQ, Oberhausen

NanoFocus Inc., Richmond, VA, USA

NanoFocus, Singapore

NanoFocus, Munich
Optical 3D Surface Metrology and Analysis

Product lines
scan 2D - 3D Profilometry

point line area

surf 3D Microscopy

area (single) area stitching

Optical 3D Surface Metrology and Analysis

scan - Point sensor profilometer

2011/9/21

Optical 3D Surface Metrology and Analysis

scan Sensors
Line sensor

Chromatic CRT

Confocal CF

Autofocus AF

Optical 3D Surface Metrology and Analysis

 3D-Microscope NF surf - Area surfConfocal Sensor NanoFocus 3D Microscope

2011/9/21

Optical 3D Surface Metrology and Analysis

surf Technology
Light Source CCD camera

Multi Pinhole Filter

Objective

Sample

Optical 3D Surface Metrology and Analysis

Product categories
Standard products (surf explorer, surf mobile, scan explorer) Customized systems (surf custom, scan custom, sprint custom) Business solution (surf solar, surf cylinder, surf blade etc.) Integration (surf OEM, scan OEM, sprint OEM)
Optical 3D Surface Metrology and Analysis

Applications: Semiconductor

Wafer back grinding

Glue dispensing

Micro vias
Optical 3D Surface Metrology and Analysis

Applications: Semiconductor

Wafer bumps
1.00 [m] 0.60 Nanofocus Asia
Profile

0.20 w0=53.2 -0.20 w1=58.4

-0.60

h2=-0.534

h3=-0.519 0.20 m

-1.00 0.0

99.8

199.5

299.3

399.1 [m]

498.9

Laser marking
Optical 3D Surface Metrology and Analysis

Applications: LEDs

Optical 3D Surface Metrology and Analysis

Applications: Lens
Aspherical Micro Lenses Fresnel Micro Lenses

Optical 3D Surface Metrology and Analysis

Applications: Lens

Optical 3D Surface Metrology and Analysis

Applications: Solar

Laser ablation on etched multi Si

Finger on multi Si with AR coating

Etched mono Si

Laser scribe on thin film substrate

Optical 3D Surface Metrology and Analysis

Applications: Solar
Height measurement

Automated height and width analysis on anti-reflecting coating

25 20 15 10 5 0 -5 -10 0 0.5 1 1 1.5 2 2 17.3 13.8 0.418 m m 2.5 3 3 13.6 12.1 0.559 m m 3.5 4 17.4 14.2 0.384 m m 4 4.5 5 21.5 19.3 0.0876 m m 5 5.5 m m 1 2 3 4 5

Extracted profile

M axim um height M ean height Width

18.3 17 0.0809 m m

15 / 57

Optical 3D Surface Metrology and Analysis

Applications: Solar
Laser scribes

nm-scale repeatability within seconds

Extracted profil e
L 0.5 0 -0.5 -1 -1.5 -2 0 25 50 75 1 M axim um hei ght M ean height Wi dth 1.31 1.21 43.2 100 125 150 175 200 225 250 275 300 R

Optical 3D Surface Metrology and Analysis

Applications: Solar
Analysis of pyramid structures
Clear surface analysis

Mean pyramid angle: 42.3 Mean pyramid height: 1.57m

Optical 3D Surface Metrology and Analysis

Applications: Automotive
Functional surfaces in automotive industry panel catalyser, (a-reflex-coat...) particulate filter engine
(cylinder, piston rod ..)

car body lighting brake, tires

Optical 3D Surface Metrology and Analysis

Applications: Automotive

Honed surface

AluSil surface

Intention of surface treatment less wear lifetime more efficient oil / fuel consumption
Optical 3D Surface Metrology and Analysis

Applications: Automotive
1.00 [m] 0.00
Y = -0,005

NanoFocus AG
Profile

-1.00

Y = -1,021 Y = -1,423

619.7 [m]

642.2 [m]

-2.00

56,8

-3.00

Y = -2,949

0.50 m -4.00 0.0

0.000

128.2

256.4

384.7

512.9 [m]

641.1

500m

2m

500m
Optical 3D Surface Metrology and Analysis

Applications: Metal
Quality control of roll surfaces and sheet metal formability varnish ability appearance

Roll
320 X 320 X 30m

Sheet metal
320 X 320 X 30m

Optical 3D Surface Metrology and Analysis

Applications: Metal

Steel Roll Production

Optical 3D Surface Metrology and Analysis

Applications: Metal

Optical 3D Surface Metrology and Analysis

Applications: Medical
Stents
Roughness Coating thickness
ting Coa kness c Thi

y a ph o gr Top
Optical 3D Surface Metrology and Analysis

Applications: Medical
Artificial joints Dental implants

Optical 3D Surface Metrology and Analysis

Applications: Printing

Optical 3D Surface Metrology and Analysis

Applications: Printing

Optical 3D Surface Metrology and Analysis

Applications: Printing

Optical 3D Surface Metrology and Analysis

Applications: Forensic

Scratches & Marks

Fingerprint of tool and specimen

Optical 3D Surface Metrology and Analysis

surf in comparison with SEM

NanoFocus surf 3D
Y

Scanning Electron Microscope

profile in Z

measurement
Optical 3D Surface Metrology and Analysis

surf in comparison with stylus

Absolute Correlation non-contact surf: 99%

b tactile pro e

e urf prob s n-contact no

Compared by

NIST: National Institute of Standards & Technology, USA, 2005

Optical 3D Surface Metrology and Analysis

NanoFocus - References

Optical 3D Surface Metrology and Analysis 32

NanoFocus Partners

Optical 3D Surface Metrology and Analysis

NanoFocus AG

If you like to

in micro and nano structures

Optical 3D Surface Metrology and Analysis

NanoFocus AG

then join

Thank you for your attention

Optical 3D Surface Metrology and Analysis

NanoFocus AG

Optical 3D Surface Metrology and Analysis

NanoFocus AG

Optical 3D Surface Metrology and Analysis