Press Release

November 8, 2010

New Product Line for the Semiconductor Industry: Leica DM8000 M and DM12000 M See More, Understand Faster High-Throughput Inspection Systems

Wetzlar, Germany. Inspection, process control and defect analysis of wafers in the semiconductor industry have to be fast, accurate and ergonomical. Leica Microsystems has launched a new line of products that ideally meet these requirements: the Leica DM8000 M and the Leica DM12000 M for 8- or 12-inch wafers, respectively. A better overview with the macro mode The integrated macro mode of the Leica DM8000 M and DM12000 M optical inspection microscopes provides up to four times the field of view of conventional scanning objectives. The entire scan area can therefore be accurately checked for possible defects. LED illumination for a cleaner working environment The LED illumination is integrated in the stand of the Leica DM8000 M and DM12000 M. Without a lamp housing to get in the way, there is an optimal airflow around the microscope. Another advantage of the modern power LEDs in the Leica DM8000 M and DM12000 M is their extremely long lifetime and low power consumption, making them both economical and more environmentfriendly. Besides the visible light, also the optional i-line UV illumination is based on LED. Ultrahigh resolution from every angle The new oblique UV mode combines oblique illumination with i-line UV light, enabling fast and easy viewing of the sample from all sides, in 3D and in ultrahigh resolution.
Dr. Kirstin Henze Tel.: +49(0)6441/29-2550 Fax: +49(0)6441/29-2527 corporate.communications@leica-microsystems.com Leica Microsystems GmbH Ernst-Leitz-Strae 17-37 D 35578 Wetzlar www.leica-microsystems.com
More information in less time: New optical features of the Leica DM8000 M / DM12000 M ensure higher resolution and throughput for wafer inspection. A printable version of this image can be ordered from: corporate.communications@leica-microsystems.com

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Comfortable working conditions for higher quality Because comfortable working conditions lead to more efficiency and therefore better quality, the controls were designed to meet the highest ergonomical standards. They are all integrated into the stand and easily reached so that users dont have to take their eyes and hands away from the microscope to switch to a different contrasting technique or illumination. With its individually adjustable ergo tubes and focus knobs, the inspection system is adaptable to any user. A focus finder, a memory function and the integrated illumination and contrast managers facilitate operation and help to avoid errors. System integration: Perfectly matching components Leica Microsystems offers the Leica DM8000 M and DM12000 M as a complete, perfectly matched system of microscope, camera and software. The system can also be upgraded with special inspection and review software options and can be attached to wafer loaders of several brands. _______________ Leica Microsystems is a leading global designer and producer of innovative, high-tech, precision optical systems for the analysis of microstructures. It is one of the market leaders in each of its business areas: Microscopy, Confocal Laser Scanning Microscopy with corresponding Imaging Systems, Specimen Preparation, and Medical Equipment. The company manufactures a broad range of products for numerous applications requiring microscopic imaging, measurement, and analysis. It also offers system solutions for life science including biotechnology and medicine, research and development of raw materials, and industrial quality assurance. The company is represented in over 100 countries with 13 manufacturing facilities in 8 countries, sales and service organizations in 19 countries and an international network of dealers. The global management is headquartered in Wetzlar, Germany.

Dr. Kirstin Henze Tel. +49 (0)6441/29-2550 Fax +49 (0)6441/29-2527 kirstin.henze@leica-microsystems.com

Leica Microsystems GmbH Ernst-Leitz-Strae 17-37 DE-35578 Wetzlar www.leica-microsystems.com