Chapter 1

Pressure units Technical atmospher Atmospher e e (at) (atm) 1.019710

5 6

Pascal (Pa) 1 N/m2 100,000

Bar (bar) 105 106 dyn/cm

2

Torr (Torr)

(Pa) Bar (bar) Technical atmospher e (at) Atmospher e (atm)

9.869210 7.500610
3

Poundforce per square inch (psi) 145.0410

6

1.0197 1 kgf/cm2

0.98692

750.06

14.503774 4 14.223

98,066.5

0.980665

0.96784

735.56

101,325 133.322
3

1.01325 1.0332 1.333210 1.359510

3 3 3 3

1 atm 1.315810
3

6.89410 68.94810 70.30710

68.04610
3

760 1 Torr; 1 mmHg 51.715

14.696 19.33710
3

1 lbf/in2

Chapter 2
Adsorption gas taken away from the material. Sorption is due to physical forces, in which no definite chemical bonding occurs. Diffusion is a process in which particles moves through a solid liquid or gas. Permeation is a function of the temperature, type of gas and structure of the material. Ionisation A space that has ionised ions gases will conduct electricity by means of the transport of ions between electrodes. When the ion reaches the electrode, it takes an electron from it. The ion and the electron combine to form a neutral atom. The current of the ions through the gas is accompanied by a flow of electricity in the circuit. Ion An ion is an atom or group of atoms that have become charged by losing or gaining an electron. Mean free path. Is the average distance travelled by a molecules between collisions is termed the mean free path.

Volume flow rate, Is the rate at which gas flow The through put is calculated as follows

Chapter 3
Types of mechanical gauges that are used to measure pressure in vacuum chambers.

U tube manometer:
Range= atmospheric pressure of 1mbar

Figure 1: U tube manometer

When different pressure occurs, then the height difference in between and is induced, the height difference (h) is read and adjacent scale and this can be converted into mbar unit and substituted in the below formula to calculate the system pressure.

The reading of the gauge is dependent on atmospheric pressure which varies from day to day. During the manufacturing process, the tube is primarily evacuated to less than which is then filled with mercury, because the end is sealed and the system pressure is compared with a constant pressure rather than the variable atmospheric pressure so this gives greater accuracy. Greater accuracy can be achieved by inclining the U-tube, thereby increasing the scale length.

Capsule dial gauges

Range=1000 to 1mbar