MAGNETRON SPUTTERING SYSTEM

SYSTEM MODEL(S/N) SUPPLIER CUSTOMER

Magnetron Sputter PSP 5004(09SN70) SNTEK UTHM

SNTEK Co.,Ltd

Contents
1. INSTALLATION
1.1 Preparations before installation 1 1.2 Basic check before operation 2 1.3 Checking period for each part 3 1.3 Explanation of warning and caution marks 4

2. SYSTEM CONFIGURATION
2.1 Block Diagram 5 2.2 Hardware configuration 6 2.3 Program configuration 11

3. SYSTEM OPERATION
3.1 Quick Start 12 3.2 Operation.(Manual mode) 17 1) PCW, CDA, GAS Supply 17 2) System power on 18 3) Chamber Pumping 19 4) Gas injection 20 5) Working Pressure Control 21 6) Sputter Gun Power Supply 24

4. MAINTENANCE
4.1 Replacement of sputter target 25 4.2 Rotary pump oil check & Refill 27

5. Explanation of part set up & use

5.1 Baratron gauge 29 5.2 ATM sensor 34 5.3 CDA, Air regulator 37 5.4 CDA, Air Pressure switch 39 5.5 PCW Pressure switch 40

6. TROUBLESHOOTING 41

Appendix A.
Roles of various sensors and failure occurring situation 43

Appendix B.
Interlock list 44

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1. INSTALLATION
1.1 Preparations before installation
Item System S/N Model Power source Earthing - 09SN70 - PSP 5004 - AC 415V, 3phase, 30A - 1 class earthing equivalent device - Be sure to connect with Chamber Ass'y Body PCW - DI water : recommended of 15~20 . - Optimum hydraulic pressure : 2~4 Kgf/Cm3 - Optimum flux : 15 L/min - Connected with 12 urethane tube CDA - Use compressed air without water - Optimum air pressure : 4~6 Kgf/Cm3 - Connected with 6 urethane tube Process Gas - 99.999% class high purity Gas recommended for Ar, N2, O2 Gas . - Optimum pressure: 2~3 Kgf/Cm3 (25 ~ 40 psi) - Connected with Lock, VCR Type Purge Gas - Use of N2 gas recommended for venting. - Optimum pressure: 2~3 Kgf/Cm (25 ~ 40 psi)
3

Details

1.2 Basic check before operation

Vacuum Chamber The inside of process chamber should be kept clean consistently, and vacuum state should always be maintained in no operation of the equipment. O-ring part should be no contamination to avoid leakage. Vacuum Pump This plays an important role to generate and maintain vacuum. increase. - Dry pump type : a vacuum pump requiring not so frequent maintenance and repair, to be checked occasionally if the supply state of purge N2 and PCW are normal. -Oil pump type : Oil gauge at the back of pump should be checked. If oil color has changed or oil volume is below optimum level, it should be replaced or supplemented for use. MFC & Gas Line As the leakage of process gas used for generating Plasma may cause damage to devices or human body, any damage or leakage of gas line should be checked at all times. In addition, by checking process pressure occasionally, always be careful that problems in the process would not occur due to the gas shortage during the process. To supply gas in the required volume. MFC(Mass Flow Controller) is used. Gas pressure at the inlet be adjusted to around 2~3Kg/Cm2(25~40 psi). the supply of high pressure gas may cause malfunction and trouble of MFC. Air pressure supply part As vacuum valves of this equipment are operated by air pressure with constant pressure, you should always check if the pressure of air pressure supply part is at 5~6 Kg/cm2..
2,

If Chamber inside is not clean, it

takes much time to maintain vacuum state, and trouble occurring frequency of vacuum pump would

If the pressure is

supplied below 5~6 Kg/cm , abnormal function of vacuum valves may occur. And, be careful that water be not contained in the compressed air, since compressed air containing water may cause troubles of air compressed valves. Exhaust line You should check appearance and leakage of the exhaust line for treating exhaust gas discharged from vacuum chamber, and, if any trouble found, use it after remedy. the state of Input power device and accessories Fixing state of input power cable, earthing state, operation state of sensor lamp and each switch should be checked occasionally. .

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1.3 Checking period of each part

Replace/InspectionCorrection/ Repair period

Checking period Item Daily Cleanness of Chamber inside Input power CDA Pressure Supply Line Process gas line pressure PCW Pressure Supply Line PCW flow PCW Temp Vacuum gauge Low vacuum pump (Oil type) High vacuum pump RF Power Supply Gas control device (MFC) O-Ring Viewport Glass RF Power Cable Fitting & Accessaries -

Weekly Monthly Quarterly Weekly Monthly 6 Month Yearly

415V 10V 0.5 ~ 0.6 Mpa (5 ~ 6kgf/cm2) 0.2 ~ 0.4 Mpa (2 ~ 4kgf/cm2) 0.2 ~ 0.4 Mpa (2 ~ 4kgf/cm2) 15L/min < 25 Check Base pressure Working pressure Maintain Oil gauge over 80% RPM = Normal Max output power: 600W Operation check of Gas flow Check surface state Check surface contamination Check damages, short circuit

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1.4 Explanation of warning and caution marks

Warning and caution marks

Relevant contents
Operate according to the procedure

Notice Refer to relevant manuals before use Caution Work requiring for clean tools, as the place is sensitive to dust and other foreign materials. Caution Operation prohibited by non-authorized. Caution Use with care as it is risky Warning: Life Threatening Voltage! Danger of high voltage Warning : High Temperature ! Be careful of burn due to high temperature Warning : Electromagnetic field ! Danger of electromagnetic field Danger : High frequency ! Users especially with cardiac pacemakers should work out of danger range as the area requires cautions for high frequency emission.

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2.SYSTEM CONFIGURATION
2.1 Block Diagram

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2.2 Hardware Configuration

[Fig.1 System front]

[Fig.2 System bottom]

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[Fig.3 System side]

[Fig.4 Sputter gun power connector]

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[Fig.5 Sputter gun & process chamber]

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[Fig.6 System control unit]

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[Fig.7 System control back panel]

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2.3 Program configuration

[Fig.8 Main control window]

[Fig.9 Data view window]

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3. S YSTE M O PE R ATIO N
3.1 Q uick Start
STEP 0 System Main Power ON

1) U nlock the key switch. 2) Turn on the power (the green button). - If the main power (220V) is applied normally, the red button (the 'O FF' button) is remained 'O N '. 3) Turn on the PC power. 4) Execute the control program on the PC screen. As the actual Power O N /O FF buttons may differ from the image above, please use them according to the actual system. STEP 1 PCW, CDA Supply

1) PC W , C ompressed Air (C D A) Supply 2) System Alarm check

C aution In case of alarm or warning signals, please check the corresponding parts and then proceed.

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STEP 2

Sample Loading

1) Chamber vent

2) Sample Loading

1) Chamber Vent - M/V, R/V close - GSD/V open - Vent/V open - ATM signal ON check 2) Sample loading - Main shutter open - Sample Loading - Main shutter close

C aution Please use the clean tool when installing a sample.

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STEP 3

System Pumping

1) TMP normal stand-by - Rotary pump start - Line gauge pressure check - F/V open - TMP start - TMP normal signal check 2) Chamber low vacuum pumping - F/V close - R/V open - Low vacuum T/V 100% open - Chamber pressure check (Chamber pressure < 5.0E-2 Torr) 3) Chamber high vacuum pumping - R/V close - F/V open - M/V open - T/V 100% open C aution O peration of the vacuum valves or pumps should only be conducted by the qualified personnel.

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STEP 4

Sample Deposition

1) Setting of C onditions for Sample Vapor D eposition - Set the R PM . - Set the heater temperature (Power O N ). - C lose the G SD /V. - Set the flow rate (M FC values) of process gas and open the gas valves. - Adjust the process pressure (Throttle/V: set 'pressure mode') - Set the D C or R F Power values. - Set the vapor deposition time. 2) Sample Vapor D eposition - O pen the gun shutter. - Turn on the gun power (D C or R F). - O pen the main shutter. 3) End of Sample Vapor D eposition - Turn off the gun power. - Turn off the heater power. - C lose the gas valve. - O pen the Throttle/V 100% . - The sample stay in the chamber at least the heater temperature go down 200. - C lose the M /V. - O pen the G SD /V. - O pen the Vent/V. C aution Please be careful of burns as temperature around the sample holder and the sputter gun is very high.

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STEP 5

System OFF

1) Turn off the TMP. - Stand-by during the time required for TMP to stop. 2) Close the F/V. 3) Pumping for Low Vacuum Chamber - Open the R/V. - Set the chamber pressure at < 5.0E-2 Torr. - Close the R/V. 4) Stop the rotary pump. 5) Turn off the system power. N otice The process chamber must be switched to the 'vacuum' condition after use to protect from foreign materials and/or moisture.

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3.2 O peration.(M anual mode)

N otice Please get fully familiar with the manuals and the sequence of system operation before use. 1) PC W , C D A, G AS Supply PCW, CDA, Gas port size Port Port spec System PCW 1/2 inch Sputter Gun PCW CDA GAS 1/2 inch 1/4 inch 1/4 inch Note Lock type Lock type Lock type Lock type Pressure spec 2~3kgf/cm2 2~3kgf/cm2, 3 L/min 0.4~0.6Mpa 0.2~0.3Mpa

Please install as shown in the picture below for PCW, CDA, Gas supplies before use.

N otice Please use high purity gas above 4N for the process. C aution Please set the pressure at 0.2 to 0.3M pa by use of a regulator for the initial gas supply to each gas line. U se of excessive pressure that this may cause malfunction or failure of M FC .

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2) System power on Connection of main power cable Voltage 220 Current MAX 60A Pulse 3 Cable spec 10sq.

System power supply 1) Switch to the 'key switch unlock' status. 2) Switch to the 'System Power On' status. (the green button).

3) Turn on the control PC power and execute the sputter operation program. 4) Check the alarm signals as shown at the left bottom. Window Alarm
System Ready Water Pressure Gun Water Flow Gun Water Pressure Air Pressure Rotary Pump Trip TMP Fault

Normal
Lamp ON Lamp ON Lamp ON Lamp ON Lamp ON Lamp OFF Lamp OFF

Note
PC, PLC Status Communication

System PCW Sputter Gun PCW Sputter Gun PCW System compressed Air Rotary pump status TMP status

C aution If an alarm is given, only use the system after correcting the cause of such alarm. Arbitrary changes in the alarm signals or adjustments in the sensitivity of sensors may cause a system failure.

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3) C hamber Pumping Pumping for Low Vacuum Chamber 1) Start the rotary pump.

2) Check the current pressure at the line convection gauge. (The pumping line is 'normal' if the value at the line gauge drops below 5.0E-2 Torr.) 3) Start pimping for the low vacuum chamber by opening the R/V. 4) Leave the manual T/V completely open during pumping for low vacuum chamber. C aution D O N O T disassemble the pumping line or the chamber blank port during pumping as this may affect the vacuum speed and the vacuum status of the chamber as well as breakdown of the rotary pump. TMP start 1) For normalization of the TMP, close the R/V to stop pumping the chamber. 2) Stand-by the line gauge until the pressure at line gauge drops below 5.0E-3Torr. (See the picture above) 3) Open the F/V. 4) Stand-by until the normal speed signal is turned on after starting the TMP.

Open the M/V to start the high vacuum pumping if the chamber pressure drops below 5.0E-2 Torr upon the TMP normal signal. When the chamber pressure is above 5.0E-2 Torr, open the M/V after repeating the 'low vacuum pumping'.

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4) G as injection Either the low vacuum pumping or the high vacuum pumping status should be maintained to inject the process gas into the chamber.

Set the MFC values for gas required for the process. Supply the process gas. 1) G.M/V open 2) Gas valve open

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5) W orking Pressure C ontrol In the Throttle/V Pressure Mode

1) Set the Throttle/V into 'Remote' mode. 2) Enter the process pressure value to the window of Throttle/V by the unit of mTorr after supplying the process gas. 3) Transmit the pressure value to the Throttle/V controller by using the set press button. 4) Start the pressure control by clicking the Throttle/V run button. 5) Wait until the input pressure value equals the current pressure value.

Window

Control
Set Press Set Pos Local Mode Remote Mode Position Mode Pressure Mode Full Open Full Close Run Stop

Normal
Transmit the input process pressure value to the T/V controller. Transmit the input T/V position value to the T/V controller. Switch the T/V controller into the 'Local Mode'. Switch the T/V controller into the 'Remote Mode'. Adjust the T/V by the input T/V position value. Adjust the T/V by the input process pressure value. Open the T/V 100%. Close the T/V 100%. Start the T/V Control. Stop the T/V Control.

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In the Throttle/V Position Mode 1) Switch the Throttle/V Control Mode to the "Remote Mode'. 2) Enter the Throttle/V position value (0~100%) in the Throttle/V window after supplying the process gas. 3) Transmit the Throttle/V value by using the Set Pos button. 4) Click on the Throttle/V Run button to start the position control. 5) Adjust the Throttle/V position value to search the required pressure value.

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In the Throttle/V Controller Local Mode 1) Switch the Throttle/V Control mode to the 'Local' mode. 2) Use the keys on the Throttle/V Controller panel to enter the required pressure and position values in the set point values (A~E). 3) Press the Set Point buttons (A~E) to start adjusting pressure for the chamber. Throttle/V controller panel

No
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Key
MODE UP DOWN SHIFT ENT. OPEN CLOSE STOP A B C D E LEARN ZERO To enter to the 'System Setup' mode.

Description

To move to the System Setup mode and to the Parameter Set mode in turn, also to increase the setup values in the Parameter Set mode To move to the System Setup mode and to the Parameter Set mode in turn, also to decrease the setup values in the Parameter Set mode. To select setup values for the System Setup mode, also to select the setup digit in the Parameter Setup mode. To be used at the beginning and at the end of entering parameters. To open the valve completely. To close the valve completely. To stop the Open/Close/Run valve operations. To select and start to control the Set point A. To select and start to control the Set point B. To select and start to control the Set point C. To select and start to control the Set point D. To select and start to control the Set point E. To reset the current pressure value to '0'.

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6) Sputter G un Power Supply

Enter the DC or RF Power values after the process pressure is stabilized.

The set vapor deposition time will be counted after the main shutter is opened. Switch to the RF or DC Power Local mode. 1) Press the remote/local switch located in front of the generator to switch OFF the LED in order to enter the DC Power Local mode.

2) To switch to the RF Power Local Mode, replace the interface connector (D-sub 25-pin) terminal located at the rear of the generator with the one for local use.

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4. MAINTENANCE 4.1 Replacement of sputter target

Switching to the RF / DC Power Local Mode.

1) Open the Target Shutter and remove the target shield cover. 2) Remove particles at the front and side of the target (by using N2 Blower). 3) Remove the clamp bolts located in front of the target. Take care that the target should not fall. 4) Remove the target after removing the target clamp bolts. Take care that the magnet should not be detached from the gun (for the Gun type where magnet is exposed at the rear of the target). 5) Use the correct clamp and bolt to fit the target thickness during replacement. 6) Install the target tightly close to the gun. 7) Remove particles at the front and side of target after fixing all clamp bolts (by using N2 Blower).. 8) Fit the target shield cover. 9) When fitting the target shield cover, keep a distance of 2~3mm from the target. C aution Poor contact between the target and the gun may cause excessive heat to generate on the target surface during processes resulting in deformation or creak of the target.

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4.2 R otary Pump O il C heck & R efill

For oil check and replacement, please refer to the attached sub-manual. Before check and/or replacement, please check if the TMP is turned off and the rotary pump is stopped. 1) Keep the rotary pump stopped. 2) Refill the oil through the oil inlet when the oil gauge at the rear of the rotary pump is below the appropriate level (80~90% of the full gauge). 3) When the oil is discolored (clear in normal cases), refill with new oil after emptying oil in use completely through the oil outlet.

C aution Pump checkup and oil refill/replacement should be conducted only by the authorized personnel. C aution Before checking and replacing pumps, please turn off the power. C aution If an excessive amount of moisture flows into the pump, it may impair performance and/or cause breakdown of the pump. C aution Always use the correct type of oil in service.

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5. Explanation of part set up & use

Notice Instruction for the part used is a material to describe the parts commonly applicable to the System delivered by our company. The relevant parts should be dissembled, assembled, and calibrated accordingly. Meanwhile, as this is a brief instruction for system users, you need to refer to other relevant manuals for more details.

5.1 Baratron gauge

1) Use and related data

Maker MKS Instrument

Use Process pressure control (Working pressure)

Reange of the use MAX 10 Torr

Baratron gauge performance specification data

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Notice As the model of Baratron 627B type used in this system is a self heating type of gauge, warming up time is required before use. 2 hours 1Torr, 4 hours 1Torr Notice As a controllable range is different from Barantron gauge Full scale Range, you need to refer to the table and relevant manual. ex> When using 10Torr Baratron gauge, minimum range of effective pressure is 5.0E-3 Torr, controllable minimum range 5.0E-2 Torr.

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2) Baratron gauge calibration Execute if sample results are different under the same conditions in process accordance with inspection and correction period, or execute in

Notice Warm up time should be kept before the progress of Baratron gauge CAL. Caution As problems may occur when operated arbitrarily, persons except authorized or responsible ones are prohibited from the operation of Baratron gauge CAL. 1) After stan-by of the process chamber for more than 2 hours at the high vacuum state, check if the degree of chamber vacuum is below 1.0E-4 Torr. (Checking possible by Pirani gauge)

Caution Arbitrary CAL progress prohibited until reaching at the degree of vacuum practicable for CAL. 2) After reaching at the degree of vacuum in the process chamber suggested in the above table, measure the voltage of Baratron gauge. 3) Measure the DC voltage at the required position using voltage testor, (For the position, refer to the picture below)

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4) Progress after adjusting the voltage measuring value of PLC A/D 10 pin to 0V(zero voltage). At this time, be sure to progress with more than 2 persons. 5) Zero voltage adjusting position

Warning As this is Baratron gauge of heating type, be careful of the burn by the surface while working

6) At the time of voltage adjustment, if the measuring value of PLC A/D 10 pin indicates 0V(zero voltage) after turning to the left & right using a precision driver of (-) type, then stop the progress of CAL.

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3) Removal of Baratron gauge At the time of inspection/correction of Baratron gauge, and separating work for A/S treatment, Baratron gauge, progress according to the following procedure. 1) Progress a chamber Vent, and convert into atmospheric state. 2) Remove a Gauge power cable.(For cable removal, remove a fixing bolt first using a driver.

3) Separate from chamber after removing the fixing clamp.

4) To prevent the sensor part from the contamination after removing a vacuum gauge, put on the sensor part the cover in protection caps, foils, or wraps, Separating work should be done by clean tools.

Notice Sensitive area Clean tools. to dust and other foreign materials. Work required with

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5.2 ATM sensor

1) Use and related data

Maker Autonics

Use Check the atmospheric (760Torr) signal (ATM signal)

Range of the use 0 ~ 100kpa (0 ~ 750 Torr)

ATM sensor performance specification data

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2) ATM sensor calibration When the gas pressure of Vent Gas(GN2) is at the normal state, and if vent state at more than average vent time is sustained , Checking method of the atmospheric state at troubles of ATM sensor 1) When venting is done with Gas(GN2), if the chamber inside is at the atmospheric pressure or over-pressure state(760Torr), gas comes out to the outside at the adhering part of Door and other vacuum-applied items.

If the above occasion happens, progress the CAL(zero point) according to the following procedure. 1) Check if the chamber is at atmospheric state or over. 2) Convert the program into Manual mode(If in progress in Auto state, stop the Auto state)

3) Close the Vent valve. 4) Check the contact point of the current situation of ATM sensor. Normal Signal in ATM Status Abnormal Signal in ATM Status

5) If No. 2 contact signal coms out at ATM state, progress Zero point CAL. 6) If pushing the up/down buttons( Contact signal. ) for over 1 second at the same time, On cones on No. 1

6) Check On of ATM lamp on the program screen.

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3) CN range change of No. 1 Contact point of ATM sensor

Execute if there are frequent progresses of ATM zero point CAL. The output operation mode of ATM sensor used in this system is F-6 window mode. Signal output of F-6 window mode

ON(stand-by state) range change method of No. 1 Contact point

Notice Progress after reading sufficiently the relevant manuals when changing inside parameters of ATM sensor.

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5.3 CDA, Air regulator

1) Use and related data

Maker SMC 2) Adjustment of used pressure

Use Operate Diaphragm valve and Cylinder

Range of the use Detting pressure 0.4 ~ 0.6 Mpa (4 ~ 6kgf/cm2)

If Main CDA or Air pressure is changed, adjust the gauge to the using pressure with Pressure control knob, and thereafter convert the knob into the Lock state.

Notice After rotating the knob toward (-) direction at maximum at the initial pressure setting, progress at no pressure supplied to the regulator out. Use after moving the indicating label to the desired place for the using range,

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3) Water removal If contained water is supplied through filter while using CDA or Air, moisture gathers near the filter. If moisture stays while checking, remove it. 1) Rotate the moisture removing nozzle at the lower part of regulator toward the Unlock direction. 2) If a little air venting sound is heard while rotating, sustain at that state.

3) While the inside compressed air comes out, the moisture stayed inside flows outward. 4) When moisture removal is completed, rotate the nozzle again to the Lock direction to prevent the inside compressed air from flowing outward.

Caution If the moisture removal nozzle is open too much, that may bring about temporary low pressure, resulting in of valves and other parts in operation. Progress prohibited for danger in process. system alarm, or stops or malfunctions

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5.4 CDA, Air Pressure switch

1) Use and related data

Maker SMC 2) Adjustment of using pressure

Use CDA, Air Pressure check sensor

Renage of the use Setting pressure 0.4 ~ 0.6 Mpa (4 ~ 6kgf/cm2)

Main CDA or Air pressure is being supplied within the usable range, but adjust if Air pressure alarm occurs. 1) Adjust by rotating the upper lever to (-)(+) directions until the Air pressure lamp is ON

Alert in Lamp Off

2) If the regulator pressure is used at 4Mpa, and if Air pressure sensor is set at 4Mpa, Air pressure alarm may occur frequently, Thus, if the regulator pressure is used at 0.4Mpa, the range of Air pressure sensor needs to be set at below 0.4Mpa (about 0.3~0.35Mpa) for use.

Notice As the operating pressure of Diaphragm valve used in this system is 0.4~0.7Mpa with Main Regulator pressure of 0.6Mpa, Air sensor needs to be set at 0.4Mpa for use.

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5.5 PCW Pressure switch

Adjuster

Maker 2) Adjustment of the using pressure

Use PCW pressure check sensor

Range of the use Setting pressure 0.2 ~ 0.3 Mpa (2 ~ 3kgf/cm2)

PCW pressure is being supplied within the usable range, but adjust if a pressure alarm happens, 1) Adjust by rotating the upper lever to Water pressure (-)(+) directions, until the Water pressure is ON.

Adjuster

Caution Too low setting of a Water pressure sensor may cause normal signal output of a Water pressure sensor under no actual PCW supply. If system operation is progressing without the supply of PCW, system part deformation or troubles may follow. Notice The figures of PCW Flow meter are not in proportion to those of PCW pressure. Even if the Pressure is measured high, actual figure of PCW Flow meter may be measured low.

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6. TROUBLESHOOTING
(1) If there is any trouble in vacuum, that is, if vacuum vent is not done properly or the Leakage rate is relatively high <Cause> - breakage of vacuum O-Ring - if the degree of vacuum is not indicated correctly due to the breakage of vacuum sensor - if there is no vacuum due to the failure of piping and gas line - failures of vacuum valves. <Measure> - If any breakage of O-Ring occurs due to the long use of vacuum O-Ring or mistake of workers - Replace an O-ring, check occasionally the state of Vacuum O-ring, and apply Vacuum grease. - Be careful of the impact as vacuum sensors are sensitive to the impact. Replace the sensor if broken. - Check occasionally the state of gas line and replace if any failure. - Replace immediately if a vacuum valve is in failure.

(2) If no discharge even at the vacuum state. <Cause> - short circuit of electric wire connected between the electrode and the Vacuum Chamber - Connection between the electrode and the Ground(Short state) - when we want to generate the discharge at too high vacuum or too low vacuum - Power supply failure <Measure> - Cut off Main Power, check the state of connected electric wire, and if any failure, replace. - Install the electrode again and check the discharge state. - Check if any failure of vacuum gauge, adjust to the proper degree of vacuum, and start the discharge. - Repair and replace the Power supply(request to the maker)

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(3) If Plasma discharge is not constant <Cause> - If the gas supply is not done or not normal - If it is turned into the vacuum state improper to discharge <Measure> - Check any locking failure of gas line including gas pressure and air pressure valves, and, if any failure, replace. - Check the operation of MFC, and, if any failure, replace - Check the motion of vacuum gauge, and, if any failure, repair or replace.

(4) In case of severe arc, <Cause> - Local discharge phenomena occur due to particles by heavy contamination at the Vacuum Chamber inside <Measure> - Arc generates from the excessive electric current inside Vacuum Chamber. First of all, clean the Vacuum Chamber. - After loading the sample properly, and start the process again.

(5) In case of sustaining the high degree of vacuum <Cause> - Failures of gas supply valves and MFC <Measure> - Check the gas line, operating state of gas pressure or air compressure valves, and the degree of air compressure. Take actions for gas supply.

(6) Others - When an excessive current cut-off switch is down, check the short circuit of supply power and electric wire, secure the power and replace the disconnected wire. If any electric problem happens, down the line breaker and check any failures.

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Appendix A.
- Roles of various sensors and failure occurring situation.
(1) Water Pressure Switch Action Interconnection Detects a water pressure, Interlock happens in case of

insufficient pressure below setting pressure : Interlock, above setting pressure : signal ON 1) below setting pressure & signal ON state - All devices can operate the signal ON, but device damages

Failure

happen due to the heat by cooling failure of Vacuum Flange 2) above setting pressure & signal OFF state - Processing operation does not work in Interlock state

(2) Air Pressure Switch Action Interconnection Detects an air pressure. Interlock happens in case of insufficient pressure below setting pressure : Interlock, above setting pressure : signal ON 1) below setting pressure & signal ON state - All devices can operate with signal ON, but smooth Failure operation is impossible. 2) above setting pressure & signal OFF state - Processing operation does not work in Interlock state.

(3) ATM Sensor (Atmospheric sensor) Action Interconnection Detects an atmospheric pressure. Signal On when reaching at the atmospheric pressure, below atmospheric pressure pressure : signal ON 1) above atmospheric pressure & signal OFF state Failure - Consistent Vent Valve Open state and constant Vent Gas inflow cause damages to devices due to high pressure. : Interlock, above atmospheric

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Appendix B.
- Interlock list
1. Main Valve(M/V) is not set in the TMP and currently not used. - Basic Interlock setting is done. - Openable below 5*10-2 Torr Convection Gauge Sensor Display value - M/V Open possible only for F/V Open 2. TMP S/W is currently not used. - On possible only for BR.P operation. 3. Vent Valve(V/V) can operate only in R/V and M/V Off. - V/V Automatic Off if the value of ATM Sensor Display is 0.00 Torr (S.P 1 On). 4. Gas Valve can operate in On of Gas Main Valve(G.M/V).

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MEMO

987-1, Gosaek-dong, kwonsun-gu Suwon-Shi, Gyonggi-Do, Korea TEL : 82-31-299-3823 FAX : 82-31-299-3829 http: www.sntek.com

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