BASIC VACUUM PRACTICE

Why is a Vacuum Needed?

To move a particle in a (straight) line over a large distance

(Page 5 manual)

Why is a Vacuum Needed?

Atmosphere Contamination (usually water) (High)Vacuum Clean surface

To provide a clean surface

HOW DO WE CREATE A VACUUM?

VACUUM PUMPING METHODS

VACUUM PUMPS (METHODS) Gas Transfer Vacuum Pump Positive Displacement Vacuum Pump Reciprocating Displacement Pump Diaphragm Pump Piston Pump Multiple Vane Rotary Pump Rotary Pump Drag Pump Entrapment Vacuum Pump

Kinetic Vacuum Pump

Fluid Entrainment Pump Ejector Pump Liquid Jet Pump Gas Jet Pump Vapor Jet Pump Diffusion Pump Diffusion Ejector Pump Ion Transfer Pump Bulk Getter Pump Getter Ion Pump Self Purifying Diffusion Pump Fractionating Diffusion Pump

Adsorption Pump
Cold Trap Getter Pump Sublimation Pump Evaporation Ion Pump Sputter Ion Pump

Liquid Ring Pump Rotary Piston Pump Sliding Vane Rotary Pump Rotary Plunger Pump

Gaseous Ring Pump

Turbine Pump Axial Flow Pump Radial Flow Pump Molecular Drag Pump

Dry Pump

Roots Pump

Cryopump

Turbomolecular Pump

Condenser

BAROMETER
Mercury: 13.58 times heavier than water: Column is 13.58 x shorter : 10321 mm/13.58=760 mm (= 760 Torr)

10.321 mm

760 mm

29,9 in

WATER
(Page 12 manual)

MERCURY

PRESSURE OF 1 STANDARD ATMOSPHERE:

760 TORR, 1013 mbar AT SEA LEVEL, 0O C AND 45O LATITUDE

Pressure Equivalents
Atmospheric Pressure (Standard) = 0 14.7 29.9 760 760 760,000 101,325 1.013 1013

gauge pressure (psig) pounds per square inch (psia) inches of mercury millimeter of mercury torr millitorr or microns pascal bar millibar

THE ATMOSPHERE IS A MIXTURE OF GASES

PARTIAL PRESSURES OF GASES CORRESPOND TO THEIR RELATIVE VOLUMES

GAS

SYMBOL

PERCENT BY VOLUME

PARTIAL PRESSURE PASCAL TORR

Nitrogen Oxygen Argon Carbon Dioxide Neon Helium Krypton Hydrogen Xenon Water

N2 O2 A CO2 Ne He Kr H2 X H2 O

78 21 0.93 0.03 0.0018 0.0005 0.0001 0.00005 0.0000087 Variable

(Page 13 manual)

593 158 7.1 0.25 1.4 x 10-2 4.0 x 10-3 8.7 x 10-4 4.0 x 10-4 6.6 x 10-5 5 to 50

79,000 21,000 940 33 1.8 5.3 x 10-1 1.1 x 10-1 5.1 x 10-2 8.7 x 10-3 665 to 6650

VAPOR PRESSURE OF WATER AT VARIOUS TEMPERATURES

T (O C) 100 (BOILING)

P (mbar)
1013 32

25
0 -40 -78.5 -196 (DRY ICE)

(FREEZING)

6.4
0.13 6.6 x 10 -4

(LIQUID NITROGEN)
(Page 14 manual)

10 -24

(Page 15 manual)

Vapor Pressure of some Solids

(Page 15 manual)

PRESSURE RANGES

RANGE

PRESSURE

ROUGH (LOW) VACUUM

759 TO 1 x 10 -3 (mbar)

HIGH VACUUM

1 x 10 -3 TO 1 x 10 -8 (mbar)

ULTRA HIGH VACUUM

LESS THAN 1 x 10 -8 (mbar)

(Page 17 manual)

GAS FLOW CONDUCTANCE

(Page 24 manual)

Viscous and Molecular Flow

Viscous Flow (momentum transfer between molecules)

Molecular Flow (molecules move independently)

FLOW REGIMES
Viscous Flow: Distance between molecules is small; collisions between molecules dominate; flow through momentum transfer; generally P greater than 0.1 mbar Transition Flow: Region between viscous and molecular flow Molecular Flow: Distance between molecules is large; collisions between molecules and wall dominate; flow through random motion; generally P smaller than 10 -3 mbar
(Page 25 manual)

MEAN FREE PATH

MOLECULAR DENSITY AND MEAN FREE PATH

1013 mbar (atm)

# mol/cm3

1 x 10-3 mbar 4 x 10 13 (40 trillion)

2 inches 5.1 cm

1 x 10-9 mbar 4 x 10 7 (40 million)

31 miles 50 km

3 x 10 19 (30 million trillion)

2.5 x 10-6 in 6.4 x 10-5 mm

MFP

FLOW REGIMES
Mean Free Path is less than 0.01 Characteristic Dimension Mean Free Path Characteristic Dimension

Viscous Flow:

Transition Flow:

is between 0.01 and 1

Molecular Flow:

Mean Free Path is greater than 1 Characteristic Dimension

Conductance in Viscous Flow

Under viscous flow conditions doubling the pipe diameter increases the conductance sixteen times. The conductance is INVERSELY related to the pipe length
(Page 28 manual)

Conductance in Molecular Flow

Under molecular flow conditions doubling the pipe diameter increases the conductance eight times. The conductance is INVERSELY related to the pipe length.

Series Conductance
RT = R1 + R2
1 = 1 + 1
CT CT C1 C2 C1 C2
PUMP SYSTEM

1 = C1 + C2
C1 x C2 C T = C 1 x C2 C1 + C2

(Page 29 manual)

GAS LOAD
Outgassing Permeation Real Leaks Diffusion Virtual Backstreaming

GAS LOAD (Q) IS EXPRESSED IN: mbar liters per second

Pumpdown Curve
10+1

10-1
Pressure (mbar) 10-3 10-5 10-7

Volume

Surface Desorption

Diffusion 10-9 10-11 1 10 10 3 10 5

Permeation 10 7 10 9 10 11 10 13 10 15 10 17 Time (sec)

Roughing Pumps

2
(Page 39 manual)

VACUUM PUMPING METHODS

VACUUM PUMPS (METHODS) Gas Transfer Vacuum Pump Positive Displacement Vacuum Pump Reciprocating Displacement Pump Diaphragm Pump Piston Pump Multiple Vane Rotary Pump Rotary Pump Drag Pump Entrapment Vacuum Pump

Kinetic Vacuum Pump

Fluid Entrainment Pump Ejector Pump Liquid Jet Pump Gas Jet Pump Vapor Jet Pump Diffusion Pump Diffusion Ejector Pump Ion Transfer Pump Bulk Getter Pump Getter Ion Pump Self Purifying Diffusion Pump Fractionating Diffusion Pump

Adsorption Pump
Cold Trap Getter Pump Sublimation Pump Evaporation Ion Pump Sputter Ion Pump

Liquid Ring Pump Rotary Piston Pump Sliding Vane Rotary Pump Rotary Plunger Pump

Gaseous Ring Pump

Turbine Pump Axial Flow Pump Radial Flow Pump Molecular Drag Pump

Dry Pump

Roots Pump

Cryopump

Turbomolecular Pump

Condenser

PUMP OPERATING RANGES

Ultra High Vacuum

High Vacuum

Rough Vacuum

Rotary Vane Mechanical Pump Rotary Piston Mechanical Pump Dry Mechanical Pump Sorption Pump Blower/Booster Pump

Venturi Pump
High Vac. Pumps Ultra-High Vac. Pumps 10-12 10-10 10-8 10-6 10-4 P (mbar) 10-2 1 10+2

VACUUM SYSTEM USE

9
1 8 7 5 8 1 2 3 3a 4 5 6 7 8 9 3
(Page 44 manual)

4 7
2 6 3a

Chamber High Vac. Pump Roughing Pump Foreline Pump Hi-Vac. Valve Roughing Valve Foreline Valve Vent Valve Roughing Gauge High Vac. Gauge

Rotary Vane, Oil-Sealed Mechanical Pump

(Page 45 manual)

Pump Mechanism

How the Pump Works

(Page 46 manual)

OIL BACKSTREAMING

PRESSURE LEVELS: LESS THAN 0.2 mbar

The Molecular Sieve/Zeolite Trap

(Page 48 manual)

Dry Vacuum Pumps

Blower/Booster Pump

(Page 61 manual)

One Stage Roots Blower Pump Assembly

VACUUM SYSTEM USE

12 1 9 11 3 2 4
1 2 3 4 5 6 7 8 9 10 11 12 Chamber Foreline Roughing Valve Roughing Gauge Roughing Pump Foreline Foreline Valve Foreline Gauge High Vacuum Valve Booster/Blower Vent Valve High Vacuum Gauge

10
8 7 6 5

(Page 62 manual)

Sorption Pump Components

(Page 54 manual)

Vapor Pressure

(Page 56 manual)

Cryo-condensation

Cryo-sorption

(Page 55 manual)

HIGH VACUUM PUMPS

3
(Page 63 manual)

VACUUM PUMPING METHODS

VACUUM PUMPS (METHODS) Gas Transfer Vacuum Pump Positive Displacement Vacuum Pump Reciprocating Displacement Pump Diaphragm Pump Piston Pump Multiple Vane Rotary Pump Rotary Pump Drag Pump Entrapment Vacuum Pump

Kinetic Vacuum Pump

Fluid Entrainment Pump Ejector Pump Liquid Jet Pump Gas Jet Pump Vapor Jet Pump Diffusion Pump Diffusion Ejector Pump Ion Transfer Pump Bulk Getter Pump Getter Ion Pump Self Purifying Diffusion Pump Fractionating Diffusion Pump

Adsorption Pump
Cold Trap Getter Pump Sublimation Pump Evaporation Ion Pump Sputter Ion Pump

Liquid Ring Pump Rotary Piston Pump Sliding Vane Rotary Pump Rotary Plunger Pump

Gaseous Ring Pump

Turbine Pump Axial Flow Pump Radial Flow Pump Molecular Drag Pump

Dry Pump

Roots Pump

Cryopump

Turbomolecular Pump

Condenser

PUMP OPERATING RANGES

Ultra High Vacuum High Vacuum Rough Vacuum Roughing Pumps

Liquid Nitrogen Trap

Diffusion Pump Turbo Pump Cryo Pump Ion Pump Tit. Subl. Pump

10-12

10-10

10-8

10-6 10-4 P (Torr)

10-2

10+2

VACUUM SYSTEM USE

9 1 8 7 5 8 1 Chamber 2 High Vac. Pump 3 Roughing Pump 3a Fore Pump 4 Hi-Vac. Valve 5 Roughing Valve 6 Foreline Valve 7 Vent Valve 8 Roughing Gauge 9 High Vac. Gauge 3

4 8
2 2 6 3a

Oil Diffusion Pump

Pump Construction

(Page 66 manual)

How the Pump Works

How the Pump Works

First stage vapors are separated from others

Pumping Speed
1 Pumping Speed (Air) 2
Critical Point

1. Compression Ratio Limit 2. Constant Speed 3. Constant Q (Overload) 4. Mechanical Pump Effect

10-10

10--3 Inlet Pressure (Torr)

10--1

Maximum Tolerable Foreline Pressure

(Page 73 manual)

LN2 reservoir with baffles

(Page 78 manual)

How the LN2 Trap Works

Gas Water (H2O) Argon (A) Carbon Dioxide (CO2) Carbon Monoxide (CO) Helium (He) Hydrogen (H2) Oxygen (O2) Neon (Ne) Nitrogen (N2) Solvents
(Page 79 manual)

Approximate Vapor Pressure (mbar) 10-22 500 10 -7 >760 >760 >760 350 >760 760 <10 -10

Turbomolecular Pump
INLET FLANGE ROTOR BODY STATOR BLADES HIGH PUMPING SPEED

HIGH COMPRESSION

BEARING EXHAUST HIGH FREQ. MOTOR BEARING

(Page 81 manual)

Rotor - stator assembly

(Page 82 manual)

Pump Operation
Molecule V

Moving Wall with Speed V Principle of the Turbomolecular Pump

(Page 83 manual)

Roughing through the turbo

6 7 1 2 3 4 5 6 Chamber Turbo Pump Roughing Pump Vent Valve Roughing Gauge High Vac. Gauge

1
5 2 2

3
(Page 91 manual)

Pumping by Cryocondensation

Cryosorption in charcoal

(Page 98 manual)

Charcoal placement

Gauges

5
(Page 123 manual)

Gauge Operating Ranges

Ultra High Vacuum

High Vacuum

Rough Vacuum

Bourdon Gauge Capacitance Manometer Thermocouple Gauge Pirani Gauge Hot Fil. Ion Gauge Cold Cathode Gauge Residual Gas Analyzer McLeod Gauge Spinning Rotor Gauge

10-12

10-10

10-8

10-6 10-4 P (mbar)

10-2

10+2

Bourdon Gauge

How the gauge works

Heat Transfer Gauges

Thermocouple gauge and Pirani Gauge

Thermocouple Gauge

How the gauge works

Ionization gauges

Ionization current is the measure of vacuum

Residual Gas Analyzer

QUADRUPOLE HEAD

CONTROL UNIT

How the RGA works

RGA SPECTRUM
RELATIVE INTENSITY

H2 O

NORMAL (UNBAKED) SYSTEM

(A)

H2

N2,, CO CO2 MASS NUMBER (A.M.U.)

RGA SPECTRUM
RELATIVE INTENSITY

N2
SYSTEM WITH AIR LEAK H2 O O2 H2 MASS NUMBER (A.M.U.) CO2

(B)

LEAK DETECTION

9
(Page 249 manual)

Introduction

Problems that appear to be Leaks

Diffusion Permeation Real Leaks Outgassing Virtual Backstreaming

Trapped Volumes

Vented Screw

Double O ring sealed shafts

Atmosphere (760 torr) Vacuum

Differential Pumping
Atmosphere (1013 mbar) Vacuum

To Pump

1 mbar

PERMEATION LEAKS
Permeation leaks are different than real leaks because the only way to stop them is to change to a less permeable material

One standard cubic centimeter/sec (std. cc/sec)

Leak rate of 1 x 10-1 std cc/sec

Leak rate of 1 x cc/sec

-3 10

std

Leak Rates over Time

LEAK RATES
10 -1 STD CC/SEC --- 1 CC/10 SEC 10 -3 STD CC/SEC --- 3 CC/HOUR 10 -5 STD CC/SEC --- 1 CC/DAY 10 -6 STD CC/SEC --- 1 CC/2 WEEKS 10 -7 STD CC/SEC --- 3 CC/YEAR 10 -9 STD CC/SEC --- 1 CC/30 YEARS

Why Helium is used

HELIUM
Helium is very light and small Low concentration in air (0.0005%) Permits dynamic testing Permits non-destructive testing Helium is safe

CONVENTIONAL LEAK DETECTOR

1 2 3 4 5 6 7 8 9 10 11 12 Test Piece Test Port High Vac. Pump Roughing Pump Fore Pump RoughingValve Test Valve Pump Valve Spectrometer Tube Cold Trap Roughing Gauge Vent Valve

12
9 8 3 5 4 10

2 11

Ion Separation in Magnetic Field

Ion Gauge
Magnetic Field Deflects He Ions 90O, other ions more or less than 90O.

Ion Source
To Pre-Amplifier

Lighter ions: more

Collector Heavier ions: less He ions pass through slit and are collected

Tracer probe leak detection technique