LCR

Component Industry Trends
Driven by New End-User Equipment
VHS
1
Kobe Instrument Division Back to Basics - LCRZ Module
Agenda

Impedance Measurement Basics Measurement Discrepancies Measurement Techniques Error Compensation
2
Impedance Definition
Impedance is the total opposition a device or circuit offers to the flow of a periodic current AC test signal (amplitude and frequency) Includes real and imaginary elements
G
R X B
Z=R+jX Z=R+jB
Impedance Measurement Plane

+j Inductive |Z|
DUT
Imaginary Axis
O -
Resistive
Real Axis
Capacitive
Z = R + jX = |Z| O |Z| = R + X
2 2
-j
H
- = ARCTAN( ) O R
4
Admittance Measurement Plane

Y=1/Z +j Capacitive |Y|
DUT
Imaginary Axis
O -
Conductive
Real Axis
Inductive
Y = G + jB = |Y| O |Y| = G + B
2 2
-j
H
- = ARCTAN( ) O G
5
Agenda

6
Which Value is Correct?

Z Analyzer
Q : 165
Q : 165
Q = 120
Q : 120
LCR meter
L : 5.231 uH
LCR meter
L : 5.310 uH
LCR meter
5.231 uH
5.310 uH
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Measurement Discrepancy Reasons

Component Dependency Factors True, Effective, and Indicated Values
Measurement Errors
Circuit Mode (Translation Equations)
Measurement Discrepancy Reasons

Component Dependency Factors
Test signal frequency Test signal level DC bias, voltage and current Environment (temperature, humidity, etc.)
9
Component Parasitics Complicate the Measurements
10
Real World Capacitor Model Includes Parasitics
11
Quality and Dissipation Factors

Different from the Q associated with resonators and filters Energy stored Q= Energy lost = X
Rs
The better the component, then
OO
D=
Q
, mainly used for capacitors
12
Capacitor Reactance vs. Frequency
|X|
XC =
Capacitor Model
1
wC X L = wL
Frequency
13
Example Capacitor Resonance Impedance vs. Frequency

B: 0 A: |Z| A MAX 50.00 B MAX 100.0 deg MKR 6 320 000.000 Hz MAG 47.2113 PHASE 659.015 mdeg m
m A MIN 20.00 B MIN -100.0 deg
START 1 000 000.000 Hz STOP 15 000 000.000 Hz

14
C Variations with Test Signal Level

C vs AC Test Signal Level
SMD Capacitors, Various dielectric constants K
High K C Mid K Low K C/%
2 0 -2 -4 -6 -8 -10 -20 0 50 100
C vs DC Voltage Bias
Type I and II SMD Capacitors
Type I
NPO (low K)
Type II
X7R (high K)
Vdc
Vac
15
C vs. Temperature
Type I and II SMD Capacitors
C/%
15 10
5
0 -5 -10 -15 -20 -60 -20 20 60 100 140
Type I
NPO (low K)
Type II
X7R (high K)
T/ C
16
L vs. DC Current Bias Level

Power Inductors
L/%
2 0 -2 -4 -6 -8
-10
-20 0 50 100
Idc
17
Component Dependency Factors

Test signal frequency Test signal level DC bias, voltage and current Environment ( temperature, humidity, etc.) Component's current state Aging
18
Which Value Do We Measure?

TRUE
EFFECTIVE
INDICATED
+/-
Instrument Test fixture Real world device

19
Measurement Set-Up
Port Instrument
Test Fixture
Extension
DUT x Rx + jX
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Sources of Measurement Errors

Measurement technique inaccuracies Port Extension complex residuals Fixture residuals RFI and other noise DUT stray and lead parasitics
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Sources of Measurement Errors

Technique Inaccuracies Complex Residuals Residuals
Noise Parasitics
Port Instrument
Test Fixture
Extension
DUT Rx + jXx
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Actions for Limiting Measurement Errors
Guarding
Port Instrument
Calibration
Test Fixture
Compensation
Extension
LOAD Compensation
DUT
x R x+ jX
EShielding
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What Do Instruments...
Measure ? Calculate ? Approximate ?

I-V Method
Measured Direct Calculations Model based Approximations
I, V
V I
Reflection Coefficient Method x,y 1 + 1 -
Z=
Z = Zo
Ls , Lp, Cs, Cp, Rs or ESR, Rp, D, Q

Rs DUT C s
R p
24
Cp
Circuit Mode
Requires Simplified Models
Complete Capacitor Model Rs,Ls,Rp,Cp ?
No L Capacitor Model
25
Circuit Mode
Rs vs Rp , who wins ?
No L Capacitor Model
Rs C
Rp
Series model
Rs Cs
Rp
Parallel model
Cp
Large C Small L
H
Small C Large L SMD

26
Which Model is Correct ?

Both are correct
Cs = Cp (1 + D )
2
Rp Rs Cs
Cp
One is a better approximation For high Q or low D components,
Cs
Cp
27
Agenda

28
Measurement Techniques
Auto Balancing Bridge
Resonant (Q-adapter / Q-Meter)

I-V (Probe) RF I-V Network Analysis (Reflection Coefficient) TDR (Time Domain Reflectometry)
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Measurement Technique Topics

Technique Selection Criteria
Theory of Operation
Advantages and Disadvantages of each technique Expanded connection information and theory for auto balancing bridge (r4 terminal pair) instruments Error Compensation to minimize measurement error
30
Measurement Technique Selection Criteria

Frequency
DUT Impedance Required measurement accuracy Electrical test conditions Measurement parameters
Physical characteristics of the DUT
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Frequency vs. Measurement Techniques

Network Analysis 100KHz RF I-V 1 MHz I-V 10KHz Resonant 22KHz Auto Balancing Bridge 30MHz 70MHz 110MHz 1.8 GHz
5HZ
1 10 100 1K 10K 100K 1M
40MHz 10M 100M 1G 10G
Frequency (Hz)
H
32
Z and C vs. Frequency

10M 1M
Impedance (Ohms)
100K
10K 1K 160 100 10 1 100m 1 10 100 1K 10K 100K 1M 10M 100M 1G
Frequency (Hz)
H
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Reactance Chart
10M 1M
Impedance (Ohms)
100K 10K 1K
100
10 1 100m 1 10 100 1K 10K 100K 1M 10M 100M 1G
Frequency (Hz)
H
34
Solution by Frequency Comparison

100M 10M 1M 100K 10K
Auto Balancing Bridge RF I-V I-V (Probe) Network Analysis
Impedance (Ohms)
1K 100 10 1 100m 10m 1m 10 100 1K 10K 100K
1M
10M
100M
1G
10G
Hz
35
Frequency
H
Which is the Best ?

All are good Each has advantages and disadvantages Multiple techniques may be required
36

Theory of Operation
L DUT V1 I I = I2 + V 2 = I2 R 2 Z= V1 I2 = V2 I2 Virtual ground H R2
V 1R 2
V2
37
Auto Balancing Bridge Advantages and Disadvantages

Most accurate, basic accuracy 0.05%
Widest measurement range C,L,D,Q,R,X,G,B,Z,Y,O,... Widest range of electrical test conditions Simple-to-use Low frequency, f < 40MHz
38
Performing High Q / Low D Measurement is Difficult

Q=
+jX
X1
Xl R
Impedance of very high Q device
R1
R Very small R, difficult to measure

39
-jX
Resonance (Q - Meter) Technique Theory of Operation

Tune C so the circuit resonates At resonance X D = -X C , only R D remains
DUT L (X D ), R D
OSC
~ e
I= e
Z
Tuning C (X c)
R V XC = V = D I e Q=
(at resonance)
|XD | |XC | |V| = = e D R RD
40
Resonant Method Advantages and Disadvantages

Very good for high Q - low D measurements Requires reference coil for capacitors
Limited L,C values accuracy

Vector 75kHz - 30MHz automatic and fast easy to use limited compensation Scalar 22kHz - 70MHz manual and slow requires experienced user No compensation
41
I - V Probe Technique Theory of Operation

R2 V2
V2 = I2R 2 V1 I2 DUT
Z=
V1 I2
V R 1 2 =
V2
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I-V (Probe) Advantages and Disadvantages

Medium frequency, 10kHz < f < 110MHz Moderate accuracy and measurement range Grounded and in-circuit measurements
Simple-to-use
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RF I-V Theory of Operation

High Impedance Test Head
Voltage Detection
Low Impedance Test Head

Current Detection Voltage Detection
Vi Ro
Current Detection
Vi Ro
Vv
Ro
DUT
Vv
Ro
DUT
44
RF I-V Advantages and Disadvantages
High frequency, 1MHz < f < 1.8GHz Most accurate method at > 100 MHz Grounded device measurement
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Network Analysis (Reflection) Technique Theory of Operation

V INC DUT VR
VR V INC
ZL - Z O = ZL + Z O
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Network Analysis Advantages and Disadvantages

High frequency - Suitable, f > 100 kHz - Best, f > 1.8 GHz
Moderate accuracy
Limited impedance measurement range (DUT should be around 50 ohms)
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TDR Theory of Operation

Oscilloscope V INC VR DUT
Series R & L
Step Generator
Parallel R & C
VR
Z L- Z O = Z L+ Z O
t
0
V INC
H H
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TDNA (TDR) Advantages and Disadvantages

Reflection and transmission measurements Single and multiple discontinuities or impedance
mismatches ("Inside" look at devices)

DUT impedance should be around 50 ohms Not accurate for m or M or with multiple reflections
DUTs
Good for test fixture design, transmission lines, high frequency evaluations
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Simple Selection Rules Summary

Auto balancing bridge, low frequency, f < 40MHz I-V, in-circuit and grounded measurements, medium frequency, 10KHz < f < 110MHz RF I-V, high frequency impedance measurement, 1MHz < f < 1.8GHz Network analysis, high frequency, f > 1.8 GHz Resonant, high Q and low D TDNA, discontinuities and distributed characteristics
H
50
Measurement Methods and HP products

Measurement Method HP Products Frequency range 100Hz to 100 kHz spot 100Hz to 10MHz spot 20Hz to 1MHz spot
Auto Balancing Bridge HP 4263A LCR Meter (Four-Terminal Pair) HP 427xA LCR Meters HP 4284A Precision LCR Meter HP 4285A Precision LCR Meter HP 4192A LF Impedance Analyzer HP 4194A Impedance/Gain-Phase Analyzer Resonant (Q-Meter) I-V (Probe) HP 42851A Q Adapter ( with HP 4285A) HP 41941A Impedance Probe (with HP 4194A) HP 4193A Vector Impedance Meter HP 4286A RF LCR Meter HP 4291A Impedance/Material Analyzer
75KHz to 30MHz
5Hz to 13MHz 10Hz to 40MHz 75KHz to 30 MHz 10KHz to 100MHz 400KHz to 110MHz 1 MHz to 1 GHz 1 MHz to 1.8 GHz
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RF I-V
Measurement Methods and HP products (cont.)

Measurement Method Network Analysis (Reflection Coefficient) HP Products
Frequency range
100 kHz to 500MHz 100 kHz to 1.8 GHz 5Hz to 500MHz 300KHz to 1.3GHz/6GHz 45 MHz to 100GHz 130MHz to 13.5GHz/20GHz
HP 4195A Network/Spectrum Analyzer with HP 41951A Impedance Test Set HP 4396A Network/Spectrum Analyzer with HP 43961A Impedance Test Kit
HP 8751A Network Analyzer HP 8752C/8753D RF Network Analyzers HP 8510B Network Analyzer HP 8719C/8720C Network Analyzers
TDNA (TDR)
HP 54121T Digitizing Oscilloscope and TDR HP 8752C/8753D RF Network Analyzers HP 8510B Network Analyzer HP 8719C/8720C Network Analyzers
52
Selecting a Test Frequency

Ideal case is at operating conditions Reality, must make trade-offs Too high a frequency adds measurement, test fixture and instrument errors m
and M
DUTs more diffucult to measure
53
Measurement Tradeoff Example

Want to measure 100 pF ideal capacitor @ 200 MHz
Z( ) 10M 1M 100K 10K 4194A @ 40MHz ( 40 1K 100 10 1 100m 1 10 100 1K 10K100K 1M 10M 100M 1G F (Hz) 4195A 41941 4284A 4194A 41941A @ 100MHz ( 16 4195A @ 200MHz ( 8 ) : 6.2 % ) : 1.9 % 41941A @ 40MHz ( 40 ) : 3.6 % ) : 5.2 %
Accuracy comparison
4284A @ 1MHz (1600
4194A @ 10MHz (160
) : 0.05%
) : 1.3 %
54

B: D A: Cp A MAX 13.00 pF B MAX 350.0 m MKR 1 006 570.375 Hz Cp 10.0742 pF D
A/DIV 500.0 B\DIV 50.00 H
fF m
START 1 000.000 Hz STOP 40 000 000.000 Hz

55
I-V
B: D A: Cp A MAX 13.00 pF B MAX 1.000 MKR 1 011 579.454 Hz Cp 10.4523 pF D
A/DIV 500.0 fF B MIN 0.000 H
START 100 000.000 Hz STOP 100 000 000.000 Hz

56
Network Analysis
IMPEDANCE B: REF A: REF 180.0 13.00p [ F ] [ F ] MKR 1 018 519.448 Hz Cp 10.7531p F D
36.00 RBW: 3 KHZ ST: 6.15 sec RANGE: A= 0, T= 0dBm
DIV 500.0f
DIV
START 100 000.000 Hz STOP 500 000 000.000 Hz

57
Agenda

58
Error Compensation to Minimize Measurement Errors
Compensation and Calibration (Compensation = Calibration) Definition of Compensation and Calibration Cable correction OPEN/SHORT Compensation Basic Theory Problems which can not be eliminated by OPEN/SHORT compensation OPEN/SHORT/LOAD Compensation Basic Theory Load device selection Practical Examples Summary
59
Definition of Calibration
To define the "Calibration Plane" at which measurement accuracy is specified
Z Analyzer LCR Meter Standard Device 100 ! 100
Calibration Plane
(Measurement accuracy is specified.)
H
60
Cable Correction
Definition : Calibration Plane extension using specified HP cables (HP 16048A/B/D/E)
LCR Meter
LCR
HP Measurement Cable
Meter
Calibration Plane
H
Calibration Plane
61
Definition of Compensation
To reduce the effects of error sources existing between the DUT and the instrument's "Calibration Plane".
Fixture Z Analyzer LCR Meter 100 +Z Cables Scanner, etc. DUT 100
2 types of compensation - OPEN/SHORT compensation
- OPEN/SHORT/LOAD compensation
Calibration Plane
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OPEN/SHORT Compensation
- Basic Theory Test Fixture Residuals
Residual Impedance ( Zs ) Hc Rs Ls
Stray Admittance ( Yo )
Zs = Rs + jwLs
Yo = Go + jwCo Zdut = Zm - Zs 1 - (Zm - Zs)Yo
Hp Zm Lp Co Go
Zdut
Lc
63
OPEN/SHORT Compensation Issues

Problem 1 Difficulty to eliminate complicated residuals
Stray capacitance
LCR Meter
Residual inductance Residual resistance

SCANNER
Complicated Residuals
DUT
64
OPEN/SHORT Compensation Issue

Problem 2 Difficulty to eliminate Phase Shift Error
Not a standard length cable* LCR Meter

DUT
Test Fixture
* Or not an HP cable
65
OPEN/SHORT Compensation Issue

Problem 3 Difficulty to have correlation among instruments. Discrepancy in Measurement Value
Ideal Case Instrument #1 Instrument #2 Instrument #3
100 pF 0.01
Real World
101 pF 0.02
100 pF 0.01
99.7pF 0.005
100 pF 0.01
102 pF 0.0003
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OPEN/SHORT/LOAD Compensation
- Basic Theory -
I1 AB CD
I2
Impedance Instrument
V1
V2
Zdut
DUT
Unknown 2-terminal pair circuit
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- Basic Theory Zstd (Zo - Zsm) (Zxm - Zs) * Zdut = Zxm - Zs) (Zo - Zxm) Zo : Zs : OPEN measurement value SHORT measurement vaue
Zsm : Measurement value of LOAD device
Zstd : True value of LOAD device

Zxm : Measurement value of DUT Zdut : Corrected value of DUT * These are complex vectors. Conversions to real and imaginary components are necessary
H
68
Eliminates complicated residuals Eliminates phase shift error
Maximizes correlation between instruments
69
OPEN/SHORT/LOAD Compensation Effects

3
C-measurement error [%]
OPEN/SHORT compensation 1
OPEN/SHORT/LOAD compensation )) (( 200 400 600 800 1000

70
Frequency [kHz]
Procedure of OPEN/SHORT/LOAD Compensation
1. Measure LOAD device as accurately as possible.

Direct-connected test fixture
2. Input LOAD measurement value as a reference value.
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Procedure of OPEN/SHORT/LOAD Compensation

3. Perform OPEN/SHORT/LOAD compensation at the test terminal.
Test Fixture with complicated residuals
Test Terminal
4. Measure DUT at the test terminal.
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LOAD Device Selection

- Consideration 1 When you measure DUTs which have various impedance values, Select a LOAD device whose impedance value is 100 ~ 1k.
When you measure a DUT which has only one impedance value, Select a LOAD device whose impedance value is close to that of the DUT to be measured.
73
LOAD Device Selection

- Consideration 2 -
Select pure and stable capacitance or resistance loads (low D capacitors - i.e. mica)
LOAD value must be accurately known.
74
Practical Examples
(A) (B)
4285A
4284A
16047C (1) (1)
16048D
16047A (2) DUT
DUT H
75
Practical Examples
(C) (D)
4285A 4285A
Non-HP Cable (1) 16047A (2) (2) (1) SCANNER
16048A
DUT
DUT
76
Practical Example
(E)
(2)
4195A
16092A
(1)
41951A
77
Summary
Calibration and Compensation Comparison
Theory
Calibration
Eliminate instrument system errors Define the "Calibration Plane using a CAL standard Eliminate the effects of cable error Extend "Calibration Plane" to the end of the cable Eliminate the effects of error sources existing between "Calibration Plane" and DUT Eliminate the effects of simple fixture residuals
Cable correction
Compensation
OPEN/SHORT Compensation
OPEN/SHORT/LOAD
Eliminate the effects of complex fixture residuals

78
Compensation
H
Summary
Which compensation technique should you select?
- Selection Guideline Instruments Fixture Connection
Primary Fixture
Secondary Fixture
Residual Compensation
OPEN/SHORT only
Direct Test Fixture
Z Analyzer Specified HP Cable LCR Meter (4284A, 4285A etc.) Non-specified HP cable Non-HP cable Self-made Test Fixture
Direct Test Fixture Complicated Fixture Scanner, etc. Direct Test Fixture Other Fixtures
Cable correction + OPEN/SHORT Cable correction + OPEN/SHORT/LOAD OPEN/SHORT/LOAD OPEN/SHORT or OPEN/SHORT/LOAD

79

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Component Industry Trends

Driven by New End-User Equipment

Impedance Measurement Basics Measurement Discrepancies Measurement Techniques Error Compensation

Impedance Measurement Plane

Admittance Measurement Plane

Impedance Measurement Basics Measurement Discrepancies Measurement Techniques Error Compensation

Which Value is Correct?

Measurement Discrepancy Reasons

Measurement Discrepancy Reasons

Component Parasitics Complicate the Measurements

Real World Capacitor Model Includes Parasitics

Quality and Dissipation Factors

The better the component, then

, mainly used for capacitors

Capacitor Reactance vs. Frequency

Example Capacitor Resonance Impedance vs. Frequency

m A MIN 20.00 B MIN -100.0 deg

START 1 000 000.000 Hz STOP 15 000 000.000 Hz

C Variations with Test Signal Level

L vs. DC Current Bias Level

Component Dependency Factors

Which Value Do We Measure?

Instrument Test fixture Real world device

Sources of Measurement Errors

Sources of Measurement Errors

Actions for Limiting Measurement Errors

Measure ? Calculate ? Approximate ?

Measured Direct Calculations Model based Approximations

Reflection Coefficient Method x,y 1 + 1 -

Ls , Lp, Cs, Cp, Rs or ESR, Rp, D, Q

Complete Capacitor Model Rs,Ls,Rp,Cp ?

Small C Large L SMD

Which Model is Correct ?

One is a better approximation For high Q or low D components,

Impedance Measurement Basics Measurement Discrepancies Measurement Techniques Error Compensation

Resonant (Q-adapter / Q-Meter)

Measurement Technique Topics

Measurement Technique Selection Criteria

Physical characteristics of the DUT

Frequency vs. Measurement Techniques

40MHz 10M 100M 1G 10G

Z and C vs. Frequency

Solution by Frequency Comparison

Auto Balancing Bridge RF I-V I-V (Probe) Network Analysis

1K 100 10 1 100m 10m 1m 10 100 1K 10K 100K

Which is the Best ?

Auto Balancing Bridge

Auto Balancing Bridge Advantages and Disadvantages

Performing High Q / Low D Measurement is Difficult

Impedance of very high Q device

R Very small R, difficult to measure

Resonance (Q - Meter) Technique Theory of Operation

|XD | |XC | |V| = = e D R RD

Resonant Method Advantages and Disadvantages

Limited L,C values accuracy

I - V Probe Technique Theory of Operation

I-V (Probe) Advantages and Disadvantages

RF I-V Theory of Operation

Low Impedance Test Head

RF I-V Advantages and Disadvantages

Network Analysis (Reflection) Technique Theory of Operation

Network Analysis Advantages and Disadvantages

TDR Theory of Operation

TDNA (TDR) Advantages and Disadvantages