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Calculations of Conductance
In the molecular flow region, the conductance of a long straight circular tube is C = 12 d3/z liters/sec where d is the diameter(cm) and z is the length(cm). For an orifice C = 12 A liters/sec where A is the area in square centimeters. These equations should be used to estimate the effect of connecting pumps, hoses, etc. to a system to insure the pumps are properly utilized. The effective pumping speed of a system is then given by the equation 1/Seff = 1/S + 1/C where S is the pumping speed of the pump and C is the conductance of the associated flanges and fittings. Ref: Inficon Instrumentation Catalog (2000-2001)
Center for Materials for Information Technology an NSF Materials Science and Engineering Center
Standard Flanges
Conflat flanges use viton or copper gaskets with a knife edge for high to ultrahigh vacuum applications. Care must be taken not to damage the flange knife edge. Standard sizes are mini (" ID), 2 " (1 " ID), 4 " (2 " ID), 6" (4" ID), 8" (6" ID) and 10" (8" ID). Medium vacuum applications use ISO and ASA flanges, low vacuum uses KF quik flanges.
Center for Materials for Information Technology an NSF Materials Science and Engineering Center
Differential Pumping
The amount of gas Q is equated: SP2 = Q = C(P1 P2) This trick can be used to maintain a constant pressure difference between two vessels.
P1
C P2
Center for Materials for Information Technology an NSF Materials Science and Engineering Center
Turbomolecular Pump
Turbine blades rotating at high speed transfer momentum to gas molecules to force them out the exhaust (must be backed). The pump is characterized by a compression ratio and ultimate pressure. Expensive (>$10k). UHV can be readily achieved (better if used in combination with a titanium sublimation pump).
Center for Materials for Information Technology an NSF Materials Science and Engineering Center
Ion Pump
A high voltage combined with a magnetic field causes electrons to travel in a helical path with an energy sufficient to ionize gas atoms. The ions are accelerated so they strike a Ti plate and become buried in the plate. Can be started below 10-6 mbar. Pumping speed is gas dependent and drops off below 10-9 mbar. Buries the gas in the plate, so no backing pump is required. A little less expensive than turbo pumps.
Diode pump: center Ti electrode is biased positively to accelerate ions toward pump wall. Triode Pump: Intermediate Ti electrode is biased negatively to accelerate ions toward pump wall.
Cryopump
A He refrigerator is used to cool a large-area surface where gas is condensed. The gas absorption depends on the bonding mechanism to the cryopanels. After prolonged use, the pump must be regenerated.