RSM

Thin Films and Spin Coating
Presented by
Mallikarjunachari.G (AM12D005)
email: ggmallikarjunachary@yahoo.com
Department of Applied Mechanics
Indian Institute of Technology, Madras

Chennai - 600036
21 June 2012
Thin Films and Spin coating
Outline of Presentation:
Classification of Films
Applications of Thin Films
Spin Coating for Polymer Thin Films
Modeling of spin coating
Objective
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Size
Material
Objective
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Classification
Applications
Modelling
Spin coating
Objective
Classification of Thin Films

Based on material Thickness
film
Thick films
t>300nm
Thin films
100<t<300nm
Ultra thin films
t<100nm
substrate
Thin film: size reduction of
bulk material in one direction
Multi layer N>1
Single layer N=1
Material 1
Material 2
Material 3
Material 4
Aluminium
substrate
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substrate
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Classification
Applications
Modelling
Spin coating
Objective
Based on material type

Material type
Ceramic
Metal
Eg: Al, Cu
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Eg: PMMA, Epoxy resin
Eg: ZnO, ITO
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Polymer
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Objective
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Classification
Applications
Modelling
Spin coating
Objective
Applications
Electronic Components
Magnetic Films For data storage
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Optical Coatings
Electronic Displays
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Optical data storage devices
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Objective
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Classification
Applications
Modelling
Spin coating
Objective
Dispenser
Polymer + Solvent
Substrate
Top view
Isometric view
Spin 150
Single substrate spin processor
Schematic Representation of spin coating
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Objective
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Theory of Spin Coating

Classification
Applications
Modelling
Spin coating
Objective

Key stages:
Deposition
>0
Spin up
= 0
Spin off
Solvent
Evaporation
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Classification
Applications
Modelling
Spin coating
Objective
Film
Thickness
Film
Thickness
Spin Speed
Spin Time
Film
Thickness
Thickness
Uniformity
Exhaust
Volume
Exhaust
Volume
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Classification
Applications
Modelling
Spin coating
Objective
Objective:
Adhesion: A challenge for concrete repair
Cement adhesive
interface
Cement
Substrate
Clay
Polymer
Coating Material
Water
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Objective
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Introduction
Modelling
Advantages &
Disadvantages
Applications
Conclusions
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Introduction
Modelling
Advantages &
Disadvantages
Applications
Dispenser
Polymer
Substrate
Top view
Front view
Spin 150
Single substrate spin processor
Schematic Representation of spin coating
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Introduction to spin coating

Applications & Advantages
Common Defects
Dispenser
Polymer
Substrate
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Common Defects
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Common Defects
Applications
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Thin Films and Spin Coating

Indian Institute of Technology, Madras

Thin Films and Spin coating

Thin Films and Spin coating

Thin Films and Spin coating

Classification of Thin Films

Multi layer N>1

Single layer N=1

Thin Films and Spin coating

Based on material type

Eg: PMMA, Epoxy resin

Eg: ZnO, ITO

Thin Films and Spin coating

Thin Films and Spin coating

Magnetic Films For data storage

Optical data storage devices

Thin Films and Spin coating

Thin Films and Spin coating

Schematic Representation of spin coating

Thin Films and Spin coating

Theory of Spin Coating

Modeling of spin coating

Theory of Spin Coating

Modeling of spin coating

Thin Films and Spin coating

Thin Films and Spin coating

Thin Films and Spin coating

Thin Films and Spin coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Modeling of spin coating

Theory of Spin Coating

Schematic Representation of spin coating

Theory of Spin Coating

Introduction to spin coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating

Theory of Spin Coating