Beruflich Dokumente
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00
Prof. Yosi Shacham-Diamand Department of Physical Electronics Tel-Aviv University, Ramat-Aviv, 69978
yosish@eng.tau.ac.il Talk to be found at www.eng.tau.ac.il\~yosish Delivered by Yoram Shapira
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Nano technologies 1/1,000,000,000 of a meter 1000 Billion devices on a chip Atomic scale devices Not in production... yet.
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Materials Characterization
109 1012 107 1010 10
5
2n 20n 200n
Design Rule [m]
108 106
550 20M 0.18mm 4nm
103 101
-1
2 20
4 10 10
10 10
T/Die mips
-3
Year Year
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Micro-System-Technology (MST) - System on a chip - Integrated electronics, MEMS, mBio, mChemistry & mElectro-optics
Sales ($B)
Korea
Scandinavia 6
4 2 0 1993 1994 1995 1996 1997 1998 1999 2000 SPC Study UK France USA Germany Japan 0 100 200 300 SPC and ATIP Studies
Year
Number of Organizations
Not
dominated by traditional defense contractors In FY97 there were 95 U.S. companies active in MEMS In FY97 15 U.S. companies represented 90% of the market In FY98 U.S. MEMS program supported 50 small businesses
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Bottom -up
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Bottom -up
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MACRO mm
miniaturization
MICRO um
NANO
macromolecules; biology
nm
1940 2020 1960 1980 2000
15
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Structure of microchips
Interconnect network - 6-7 layers of metallization
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2000
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Multi-level metallization
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,, , , ,
()
)Micro Systems Technologies (MST
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, , .
? ( )System on a chip-SOC - . , , ( ,)ACTUATION , . ,
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, ( .1 - ?
)
.2 , - , . .3 - . .4 - , .5 - - .6 - ,. .7
()IC , , . :
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(, )..
-
MICROMACHINING - -
Single crystal Bulk Micro-machining
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Wafer Surface
Cavity Cantilevers
Membrane
MICROMACHINING - -
Non-crystalline Bulk Micromachining
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surface
Cavity Cantilevers Bridge Nozzle
Trench
Membrane
Surface Micromachining
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LIGA*,
Irradiation
Absorber structure Resist Mask membrane
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Deep UV
Mold Insert
Synchrotron
Substrate
Mold cavity
Development
Mold Filling
Resist structure
Electroforming
Mold Separation
Plastic structure Metal
Substrate
Source: IMM (Mainz Institute for Microtechnology)
*Lithographie,
Galvanoformung, Abformung
Wafer-to-Wafer Bonding
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Mass wafer
Device wafer
Mass wafer
Fuse silicon
Pyrex
Etch beam and bond Pyrex
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MEMS - Micro-Electro-Mechanical-Systems
BUILDING THE MACHINE TOOL FOR THE MICROWORLD
-
Thicker films deeper etches fewer steps Multiple Processing Cycles
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DEPOSITION OF MATERIAL
PATTERN TRANSFER
REMOVAL OF MATERIAL
PROBE TESTING
SECTIONING
INDIVIDUAL DIE
PACKAGE SEAL
FINAL TEST
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Wrist Communicator
Antenna LNA Mixer LNA Mixer Baseband Electronics VCO VCO
Transmission [dB]
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Transistor Electronics
RF Filter (ceramic)
Xstal Osc.
IF Filter (SAW)
IF Filter (Xstal)
Coupling Spring
362
Resonators Anc
Frequency [kHz]
MEMS
Single-Chip Version Board-Level Implementation
Off-chip high-Q mechanical components present bottlenecks to miniaturization replace them with mmechanical versions Univ. of Michigan
MEMS for Signal Processing
Wrist Communicator
:
, ,
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, ,
:
,
)DEMODULATORS( ,
Highlights of the Rockwell MEMS Tunable Capacitor
Single Crystal Silicon Superior Mechanical Properties High Aspect Ratio (20 to 1) Higher Linearity Large Tuning Ratio
(> 6.5 to 1)
SEM micrograph showing the high aspect ratio feature of the MEM tunable cap.
Wrist Communicator
(200 x 700 mm)
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Balanced Electrodes
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Whip Antenna
-
40 mm
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- ...
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-
- ( )INTERFACE , , , . - .
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Can be used not only to image a surface with atomic resolution, but also to manipulate individual atoms and molecules.
What is Nanotechnology ?
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The classic talk, There's Plenty of Room at the Bottom was given by Richard Feynman on December 29th 1959 at the annual meeting of the American Physical Society at the California Institute of Technology (Caltech) Why cannot we write the entire 24 volumes of the Encyclopedia Britannica on the head of a pin? Biology is not simply writing information; it is doing something about it. A biological system can be exceedingly small.
I want to build a billion tiny factories, models of each other, which are manufacturing simultaneously,drilling holes, stamping parts, and so on.
What is Nanotechnology ?
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With the tools of the nanotechnology trade becoming better defined, the ability to create new materials and devices by placing every atom and molecule in the right place is moving closer to reality. Ralph C. Merckle, Xerox Nanotechnology: An art and science that has evolved to arrange conditions so that atoms spontaneously assemble into particular molecular structures. New terms such as self assembly, molecular machines, represent a new bottom up approach: building structures from atoms and molecules.
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Molecular engineering: An approach to the development of general capabilities for molecular manipulation K. Eric Drexler,
Proc. Natl. Acad. Sci. USA Vol. 78, No. 9 pp. 5275-5278, September 1981 Chemistry section
Biochemical systems exhibit a "microtechnology" quite different from ours: they are not built down from the macroscopic level but up from the atomic. Biochemical microtechnology provides a beachhead at the molecular level from which to develop new molecular systems by providing a variety of "tools and "devices" to use and to copy.
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Table 1. Comparison of macroscopic and microscopic components Technology Function Molecular example(s) Struts, beams, Transmit force, hold Microtubules, cellulose, mineral casings positions structures Cables Transmit tension Collagen Fasteners, glue Connect parts Intermolecular forces Solenoids, Conformation-changing proteins, Move things actuators actin/myosin Motors Turn shafts Flagellar motor Drive shafts Transmit torque Bacterial flagella Bearings Support moving parts Sigma bonds Containers Hold fluids Vesicles Pipes Carry fluids Various tubular structures Pumps Move fluids Flagella, membrane proteins RNA moved by fixed ribosome (partial Conveyor belts Move components analog) Clamps Hold workpieces Enzymatic binding sites Tools Modify workpieces Metallic complexes, functional groups Production lines Construct devices Enzyme systems, ribosomes Numerical control Store and read programs Genetic system systems
What is Nanotechnology ?
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Molecular technology has obvious application to the storage and processing of information Molecular devices can interact directly with the ultimate molecular components of the cell and thus serve as probes in studying processes within the cell
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I am not afraid to consider the final question as to whether, ultimately---in the great future---we can arrange the atoms the way we want; the very atoms, all the way down! The principles of physics do not speak against the possibility of maneuvering things atom by atom.
Development of the ability to design protein molecules will make possible the construction of molecular machines. These machines can build secondgeneration machines able to perform extremely general synthesis of threedimensional molecular structures, thus permitting construction of devices and materials to complex atomic specifications. This capability has implications for technology in general and in particular for computation and characterization, manipulation, and repair of biological materials
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What is Nanotechnology ?
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Wet nanotechnology: Similar to living cell technology: assembly of carbon based molecules in a liquid environment
Dry nanotechnology: Technology of organic and inorganic molecules in air or vacuum environment
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Nanomachines
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Develop new techniques to produce food, medicine, etc. Build machines, materials, and devices with the ultimate finesse that life has always used: atom by atom, on the same nanometer scale as the machinery in living cells Energy production. Replace / complement microelectronics as leading enabling technology
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