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JEOL-7000F

Basic Operational
Instructions
Goals
Quick Tour of JEOL-7000
Basic Operation
Startup
Sample Exchange
Column Control
Stage Control
Basic Imaging
Shut Down
JEOL 7000F
Field Emission Gun
Schottky Type
High Resolution
1 nm at 15 kV
3 nm at 1 kV
0 30 kV
Fully Motorized Stage
(X,Y,Z,R,T)
Diffusion Pumped
System
JEOL 7000F
SED, BED, TED
EBSD Camera
EDS
WDS
Fast Beam Blanker
Right Hand View
Apertures
Gun & Objective Lens
Ion Pumps
SED & EBSD
Motors
Sample Exchange
EDS & WDS
Left Hand View
Beam blanker
WDS
BED
Rear View
Ion pumps
WDS
WDS valve
TED
BF DF Aperture
EBSD
Vacuum Gauge
Computer Control
Other Controls Operator Interface
Start Up - Check
Exchange Rod Should be in UP position
Gun Valve Closed Button should be illuminated
Load Lock Lights
VENT & EXCH POSN illuminated
JEOL Program Start
Make sure the JEOL
Monitor is ON
Move the mouse back
and right to left across the
mouse pad several times.
If the monitor does not
come on, press
Ctrl + Alt + 2
on the key pad.
If there is no response, get
assistance.
JEOL Program Start - 2
You should now be at
the WINDOWS
Log In Screen.
You will be assigned
a User Name and
Password.
Log In
Also Sign In on the
Sign In / Sign Out
Sheets (folder)
JEOL Program Start - 3
You should now be at
YOUR Desktop.
Double-click the
ir-camera short-cut to
view the sample chamber
Double-click the
JEOL PC-SEM 7000
icon to start the program
The JEOL Program should
now boot.
JEOL Program Start - 4
When you click the ir-
camera icon. The
Camera Window
opens. Here it is on
the desktop.
The Camera Window
is always on top, so
clicking the JEOL-PC
icon opens the JEOL
program but the ir-
camera view remains.
JEOL Program Start - 5
If the JEOL computer was
shut down or restarted
then you will first be
asked to let the program
recalibrate the stage
positions. ANSWER
YES.
You will then be asked to
check whether there is
any holder attachment.
Click YES.
JEOL Program Start - 6
Click the holder you
will be using
Sample Exchange - 1
First make sure your sample is ready.
Always use gloves when handling the sample holders.
Mount the sample on the proper sample mount. There
are a number of these.
Many of the sample mounts can be interchanged on a
single base.
Sample Exchange - 2
Check again to see that the load-lock is vented.
VENT light illuminated.
Unhook the latch to the load-lock.
Open the load lock
Sample Exchange - 3
There are dove-tail
groves on the base of
the sample holder.
These dove-tails
slide onto their
complement on the
stage.
Sample Exchange - 4
The holder is placed on the specimen holder
chuck devise. The groves must be positioned
properly so as to slide onto the stage.
Sample Exchange - 5
Close the load-lock
door and latch
Then press EVAC
and hold until light
blinks. When the
EVAC button light
quits blinking and
remains illuminated
the sample is ready to
be inserted into the
chamber.
Sample Exchange - 6
Lift the exchange rod slightly. The rod is spring
loaded onto the clamp
Bring it to the horizontal position;
Let the air pressure take the rod into the stop.
Sample Exchange - 7
Gently push the rod into the chamber. You must move
the rod past the O-rings. When the rod is in the correct
position it will insert fairly easily.
Make sure you are NOT putting downward pressure on
the rod.
When fully inserted the sample is on the stage.
Then fully retract and place the rod in vertical position.
Sample Exchange - 8
Press the VENT button to close the sample
chamber valve and vent the load lock.
Open the Penning gauge readout on the JEOL
screen. Pressure should be less than 2 x 10
-5

before beginning session.
Desktop Controls
Wireless Keyboard & Mouse
Ctrl + Alt + 1 Keyboard/Mouse to Oxford
Ctrl + Alt + 2 Keyboard/Mouse to JEOL
Should switch smoothly between screens when
LOGGED INTO BOTH systems
JEOL OPERATION PANEL - 1
Knobs
Magnification
Focus (objective lens)
Can be converted to
actual Z-stage control
X Y for adjustments,
but mainly stigmators.
Work in conjunction
with alignment
operations
Manual Contrast and
Brightness
Live image
JEOL OPERATION PANEL 2
Buttons
Scan Modes
Quick View & Fine View
Two speeds on both buttons
per mode (full or reduced
image)
RDC Image (reduced)
Adjustments
Wobbles the objective lens current
ALIGN brings up column
alignment
STIG stigmators use X-Y knobs
Imaging
Freeze Freeze frame
ACB Auto Contrast / Brightness
PHOTO Very slow scan
Other
Auto
LOW MAG
JEOL Joystick
Stage movement
Speed proportional to
extent of joystick
movement in X,Y, Z
Twist can be changed
to Tilt or Rotate in
software
Patience easy
movements
Buttons
Jog and Input
HV Wob
For adjusting beam in
Adjustment mode.
Make sure button is
not illuminated when
working on your
sample.
Knob adjusts strength
of HV variation.
JEOL TED SED Switch
Switches between normal
secondary electron
detection and transmitted
electron detection.
Button in TE
Button out SE
Button illumination does
not work
If you are not getting an
image when you think you
should, check this button.
(GS) Getting Started - User Login
File Menu
User Login
You will setup a user
name. (see Setup
Menu)
Login with your user
name. This should
bring up your
personal settings.
GS Instrument Control
Set Accelerating Voltage
OL should be at 4
SEI should be ON (green) and Mode should be 3
Column Mode to SEM (green)
Probe Size 7 is a good start
Focus 40 (green)
Scan Rotation and DFC OFF
GS Electron to the Sample
Make sure FREEZE
button on Instrument
Control Pad is NOT
illuminated
Click the HT button
Listen for valve to open
HT button turns light green
Press ACB on Instrument
Control Pad
Image should be on
screen
GS Move to intermediate height
Bring up the IR camera
image
A good Z distance to get
things initially adjusted is
25 mm.
Click WD 25 in the
Instrument Control
In the Z box (lower right)
type in the 25, and press
enter. The stage should
move.
Adjust the focus first
using the stage Z control
(joystick) then the
Objective lens.
Adjust stigmators
Move around on your sample
Use the joystick X Y
controls
Use the mouse
Position the mouse pointer
on the spot you want to be
in the center of the screen.
Right click the mouse
This works best at lower
magnifications
At higher mags (2000x or
more), the image can be
electronically shifted by
holding the left mouse
button and moving the
mouse.
GS Move to Working Distance
(WD) - 1
In the Instrument Control
click the desired working
distance, e.g. 10.
In the Z box (lower right)
type in the Z to match the
WD (or slightly larger for
safety, e.g., 11.)
Watch sample move in IR
camera window.
ESC on the keypad
STOPS all stage
movement
GS Move to Working Distance
(WD) - 2
Continue to adjust the Z
distance until the image is
in focus (at a low
magnification). Make the
focus knob on the
Instrument Control Pad
the Z motor adjustment.
Go slow, have patience,
this is not instantaneous.
Click Z-control icon again
to make the Focus knob
the objective lens
adjustment.
GS Reduced Image Mode
Focusing and most
other adjustments are
easier using the
reduced image mode.
Press the RDC IMAGE
button on the Control
Pad.

Adjust focus and stigamtism
Capture image
Photo and/or Freeze button
Saving your image
Click Image File Handler Icon to
open the window.
Move to your directory (folder).
Then click OK Then click SAVE
SAVE opens a new window.
Fill in the appropriate information,
e.g., file name, etc.
Then click SAVE
Shut Down - 1
Click the HT button
(turns dark green)
Stage to exchange
position
Use STAGE MENU
Click the appropriate
sample holder.
Then Exchange
Shut Down - 2
Evacuate the Load-lock.
Remove the sample from the sample chamber.
Vent the Load-lock and remove your sample.
Close the load-lock.
EXIT the JEOL control program.
Log-off
SIGN OUT
CLEAN UP
Make sure all materials are put away.
Any small instrument you have been using
is put back in its proper place.
Any trash is taken with you or put in the
trash bin.

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