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Ni-Cu Based Front Side

Metallization for Crystallize Silicon
Solar Cells
Name: Vo Ngoc Phuong Anh
Student ID number: 14110206
Contents
Process of c-Si Solar Cell Fabrication
Methods for Pre-metallization
Ni and Cu Plating techniques
References
Process of c-Si Solar Cell Fabrication
Solar Cell Manufacturing Process Flow Chart [1] Solar Cell Manufacturing Process [5]
Process of c-Si Solar Cell Fabrication
Solar cell structures composed of metallization
scheme based on Ni/Cu/Ag plating [2], [4]
Methods for Pre-metallization
There are a number of method for
Patterning the ARC [3]:

Etch Resist and Wet Etching Based
Methods.

Direct Etching Based Methods.

Laser-Assisted Methods.

Mechanical Method for Patterning.
Schematic mask and etch sequence. Mask
patterning is done initially to open ARC followed by
a process of photoresist removal [2]
Ni and Cu Plating techniques
The metallization technique involves two main steps [2]:

1. Ni Seed layer Formation.

2. Cu Electroplating technique.

Steps involved in
formation of the
metallization scheme
based on Ni/Cu/Sn or
Ag metallization
scheme [2]
Ni Seed layer formation
Electroless plating [2]:
The chemical reaction:
Step 1: (anodic reactrion)


Step 2: (cathodic reaction)


Sum:
Schematic of electroless plating
setup [3]
Ni Seed layer formation
Light Induced Plating (LIP):

Schematic image of LIP system [6]
Ni Seed layer formation
Laser Assisted Ni Deposition:

Schematic image of LIP system [6]
Cu Electroplating technique
Cu electroplating is usually done by the LIP
technique.

Reactions taking place at anode (Cu), electrolyte solution
(H
2
SO
4
/CuSO
4
) and cathode (substrate)
Cu Electroplating technique
Schematic diagram of the light induced plating (LIP) based Cu
electroplating process
References
[1]. Annual Report on Form 10-K of Amtech Systems, Inc. (2007)
[2]. Atteq ur Rehman and Soo Hong Lee, Review of the Potential of the Ni/Cu
Plating Technique for Crystalline Silicon Solar Cells, Materials (2014), 7,
1318-1341.
[3]. Mehul C. Raval and Chetan S. Solanki, Review of Ni-Cu Based Front
Side Metallization for c-Si Solar Cells, Journal of Solar Energy (2013), Article
ID 183812, 20 pages.
[4]. Hariklia (Lili) Deligianni, Shafaat Ahmed, and Lubomyr T. Romankiw, The
Next Frontier: Electrodeposition for Solar Cell Fabrication, The
Electrochemical Society Interface (2011), 47-53.
[5]. http://www.think-solar-power.com/Photovoltaic-Solar-Power.html
[6]. J. Bartsch, A. Mondon, B.-J. Godejohann, M. Horteis, S.W. Glunz,
Advanced Front Side Metallization for Crystalline Silicon Solar Cells Based
on a Fully Planted Contact, Presentated at the 25th European PV Solar
Energy Conference and Exhibition (2010).

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