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Contents
Introduction
What Is a-Si?
Working of sensor and Block Diagram
Fabrication
X-Ray Detector System
TFT/Photodiode array
Imaging Examples.
Advantages.
Applications
Conclusion
References
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Introduction
New high-resolution amorphous Silicon (a-Si)
image sensors specifically configured for
demonstrating film-quality medical x-ray imaging
capabilities.
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What Is a-Si??
Amorphous silicon (a-Si) is the non-crystalline
allotropic form of silicon. a-Si can be deposited at
75 degree Celsius temperature.
a-Si has become the material of choice for the
active layer in thin-film transistors (TFTs),
which are most widely used in large-area
electronics applications.
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Fabrication Process
a-Si array is patterned on a large glass substrate.
Deposition and patterning of various metal layers,
thin film dielectrics of Silicon nitride and a-Si to
form the TFT.
Depositions of a-Si in the sequence nip to form the
photodiode.
Dielectrics for interlayer isolation and passivation.
Gate driver and charge amplifier ICs are connected
to each line on the glass using TAB.
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Photo micrograph of a 127 micron pixel
sensor.
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X-Ray Detector System
A 30 x 40 cm active area 127 micron pixel
image sensor module with gate and data boards TAB
(Tape-Automated Bonded) to the glass, which is
mounted on an aluminum backing plate.
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Anatomy of a Pixel
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Inside the dpiX a-Si Active Matrix Layer
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What are Scintillators ???
Scintillators exhibits the property of emitting
optical photons in response to ionizing radiation.
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TFT/Photodiode array
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Advantage over conventional X-ray
technology
Images can be displayed almost immediately on a
computer screen.
Can be improved through software.
Enabling quick and effective diagnosis.
Images can be shared electronically with radiologists
who are not on site.
Images can be stored electronically.
Patients are benefited by a reduction of the x-ray
dose required to capture an image.
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A digital x-ray image of A digital x-ray image of
a human hand phantom. a human chest phantom.
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A digital x-ray of a bullet fired into
a light bulb, taken with a fast x-ray pulse.
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Applications
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Applications
Security
Radiography
Dental
Imaging
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Future Developments
Array Size
Sensitivity improvements are expected with
higher sensitivity phosphors. (scintillating
material)
Fill-factor the fraction of light sensitive area in
each pixel.
Applications
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Conclusion
New a-Si x-ray image sensor is well suited to
medical imaging and other applications.
a-Si technology provides fast, convenient and
mobile ways to take real-time images. The ability
to get immediate x-ray images for detection,
review, analysis, remote evaluation and decision
makes this is an invaluable tool for hundreds of
industrial applications.
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References
[1] IEEE transactions on measurements, volume
41,issue 7, august 2008.
[3]www.dpixbrochure.com
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THANK YOU
QUERIES …….
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