Modeling Feedback Control of

Thermal Systems in COMSOL

Lexi Carver

Jon Ebert, PhD

Technical Marketing
Engineer
COMSOL

Director
SC SOLUTIONS

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Agenda
Introduction to COMSOL
Multiphysics software
Simulating Feedback Control
of Thermal Systems
Demo: Rapid Thermal
Processing (RTP) System
Q&A
How To
Try COMSOL Multiphysics
Contact Us

Prestressed plated metal

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Feedback Control of Thermal

Systems
in COMSOL
Jon Ebert
SC Solutions, Inc.
Email: jle@scsolutions.com

August 2015

Copyright 2015, SC Solutions, Inc. All Rights Reserved

Overview
Feedback control of temperature is important
in many manufacturing processes.
At SC we have developed methods for the
model-based control of systems where we
use physics-based models to develop highperformance temperature control.
This presentation will give an example of one
method for designing a simple PID feedback
controller (Q-Design).
We will present a simple example of feedback
control within a COMSOL model.
A demo with 5-zone temperature control of a
Rapid Thermal Processing (RTP) system will
August 2015

Copyright 2015, SC Solutions, Inc. All Rights Reserved

10

The Closed-Loop System

C

For a scalar system

Closed-Loop Response:

August 2015

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Closed-Loop
Transfer
Function

11

Proportional + Integral + Derivative

Control (PID)

This is the most common type of feedback

controller
The gains, Kp, Ki, and Kd (and d) must be
selected by the engineer To limit high-frequency
There are systematic

noise amplification, we
methods
usually low-pass filter the
error driving the derivative
control:

Here well outline Q-design

August 2015

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12

Model-Based Control (Q-Design)

Incorporate a mathematical model of the
system directly into the controller.
Often referred to as Q-parameterization or
Youla parameterization.
For stable P, ALL
stable controllers
can be expressed
in this form!

ences for Q-parameterization Control Design

Control design
becomes choice
of transfer
function Q
August 2015

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13

A Model-Based Design (Q-Design)

Closed-Loop Response:

If we select T and we know P, we can calculate C

For scalar (single input, single output)

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14

Selecting T (Closed-Loop Transfer

Function)

Or, in time domain

Or, in time domain

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Solving for Model-Based Controller

Gains
Assume the system (P) is a second
order system
wher
and select
e

Resulting
controller:
Our PID
form:

It turns out that if you

pick T as we have done
for the second order P,
the controller is in the
form of a PID controller.

Tuning PID

August 2015

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16

PID Example (=1, =1)

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PID Example (=2, =1)

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18

Implementing PID in COMSOL (An

Example)
One dimensional heat transfer in a plate

Measure y on this
surface

Governing Equations:
Heat surface at x=0
and measure
temperature at
surface x=L (y=T2)

August 2015

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19

Build the Model in COMSOL

August 2015

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20

Model Parameters

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21

Apply Boundary Conditions

Control input

August 2015

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Create Mesh and Run the Simulation

This is not a second order system, but a
much higher order PDE.
When we discretize the PDE using finite
elements, we create a system of ODEs.
For the mesh used here, there are 101
differential equations, or degrees of
freedom (DOF).
Still, we will look for a PID controller
based on a second order system.

August 2015

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23

Open-Loop Response

We step the input flux from 0 to qmax*uctrl

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Measure Model Response Properties

from OL Step

Time where
y crosses
63% of final
value

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25

Finding Approximate Time Constants

Measure the rate of change in y.

Maximum is approximately 18[K/s]

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26

Approximate 2nd Order Model

Parameters

Approximate 2nd order model parameters for plate model:

We can use these to compute controller

parameters.
We also need to pick the closed-loop
speed, , and damping, .

August 2015

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27

Implementing PID in COMSOL

Proportional control:

Integral control:

Derivative control:

We solve these differential equations in COMSOL.

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28

Implementing PID in COMSOL

Add Global ODEs and DAEs to Model

Enter the Equations

State variable
August 2015

Equation

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29

Implementing PID in COMSOL

Define T2 as the plate temperature at x=L

Define control variables

The control:
limit to 0<= uctrl
<=1
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30

Define the Reference

Define the
reference using
an interpolation
table.

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31

Controller Parameters
Tuning PID

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32

Closed-Loop Response
Actuator face

Works pretty well.

ref
Sensor

August 2015

The open-loop response took

almost 100s to reach the
setpoint, the closed loop gets
there in 12s.

Copyright 2015, SC Solutions, Inc. All Rights Reserved

33

More Advanced Model-based Control

C

(MIMO) Multi-input (u)/Multi-output (y) require

more complicated methods.
Each operation is a matrix operation

The design principle is the same, but the difficulty

of control design is balancing the tradeoffs
between bandwidth, noise, and actuator saturation.
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34

Summary
A methodology for tuning a PID controller
has been presented.
A model for the system is built and an
approximate second order model is assumed
for choosing the PID parameters.
A desired closed-loop transfer function (T) is
selected. Here we selected it so the resulting
controller has the same form as the PID.
The PID gains were derived that give the
desired closed-loop response.
An example of implementing PID in COMSOL
was presented.
August 2015

Copyright 2015, SC Solutions, Inc. All Rights Reserved

35

Poll Question
How do you model your feedback
control law in your application?
In the same software that I use for studying
thermal systems.
In a different software that I interface.
In COMSOL using the Global ODEs and DAEs
interface.
In COMSOL with LiveLink for MATLAB.
I haven't done it yet and want to learn how.

Demo
Closed-Loop Temperature Control of a Rapid
Thermal Processing (RTP) System
Rapid Thermal Processor (RTP)

1000C

Lamps (5)

600C

Temperat
ure
reference

Feedback
Controlle
r

Lamp
power
comman
ds

Wafer (200mm dia.)

Cold walls

Wafer
temperatu
re sensors

Conclusion
A model-based method of tuning a PID
controller has been presented (Q-Design).
For many thermal systems an open-loop step
response can be used to characterize
parameters (time-constants and gain) needed
to tune the PID controller.
COMSOL provides a simple ODE interface that
allows quick implementation of PID control.

Q&A Session

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