Technology

CAD
(including Lecture-Tutorial-Laboratory
Modules)

Dept. of Electronics & ECE

Indian Institute of TechnologyKharagpur

First R & D Centre in

Information and Communication
Technology (ICT) Development among IITs
and Universities in India
PI: Prof. C. K Maiti, Co-PI: Prof A. S Dhar, and Prof

Research & Development

focus

1. To develop e-learning materials for Technology

CAD (TCAD) Course (including tutorial and
laboratory modules) for final year undergraduates
and
postgraduate
students
and
implement
Technology
CAD
(TCAD)
online
simulation
laboratory real time simulation laboratory
accessed through the Internet which can expand
the range of simulation experiments in Technology
CAD, transmit online instructions and study
materials for anyone, anywhere and anytime.
2. Development of e-content for an integrated
teaching environment which allows for the
provision of online live lectures (a 40-lecture
module with tutorials) and a laboratory (10-12
simulation experiments) session for geographically
dispersed students.

Steps for
Development of RealTIME
Measurement-based Internet Laboratory

Design of Experiment
Remote Operation of the
Instruments
(via LabVIEW, IC/CV lite, Easy Expert, VEE etc)

Conversion to Web Application

Launching on the

Total Budget Outlay

Years
(Rs. in lakhs)

Head

Capital Equipment
FE Comp.

1st

Rs.

2nd

80.00 -

Consumable stores
Rs.
Software/License Fee

3rd

Total

80.00

10.00 10.00 10.00 30.00

Duty on import (if any)

nil

Rs.

nil

nil

nil

Manpower (JPA/RS/Eqv.)
24.00

Rs.

7.00

8.00

9.00

Travel & Training

12.00

Rs.

3.00

4.00

5.00

Contingencies/Accessories
39.00

Rs.

10.00 13.00 16.00

Grand Total (FE Comp.)

40.00
185.00

110.00

35.00

Course Description
Text Book: G. A. Armstrong and C. K. Maiti, "TCAD for Si,
SiGe and GaAs Integrated Circuits, The Institution of
Engineering and Technology (IET), UK, 2008.

40-50 lectures including tutorial

based on the following contents:
Introduction
and
overview;
History
and
structures; The role of TCAD for Semiconductor
technology development; TCAD principles;
Physics of VLSI fabrication technology; Tool
Integration; Structure editing and mesh
generation;
CMOS
and
Bipolar
Process
technology Si, SiGe, III-V Semiconductors;
Process modeling and simulation general;

Device
level
simulation
challenges;
Introducing
new
device
models;
Heterojunction
device
modeling;
Simulation of silicon germanium (SiGe)
HBTs; Simulation of heterostructure FETs
(HFETs); Simulation of AlGaAs/GaAs
devices; Virtual Wafer Fabrication (VWF)
automation tools; Example of VWF
methodology; Extraction of DC and SPICE
model parameters; Small signal AC
analysis for CMOS
and bipolar transistors; Application of
mixed-mode simulation; TCAD calibration
procedure;
Process
compact
model,

VLSI Engineering Laboratory

Module will consist of the
following
experiments
1. Doping Profile Determination
Bipolar Device Characterization
MOS Capacitor Characterization
MOSFET Characterization
High Frequency Characteristics of BJT
MOSFET SPICE Parameter Extraction
Bipolar Transistor SPICE Parameter
Extraction
8. 1/f Noise Characterization in Transistors
9. Low Temperature Characterization of
Transistors
10.LNA Characterization
11.Noise Modeling in MOSFETs
12.Cutoff Frequency Determination
2.
3.
4.
5.
6.
7.

(TCAD)
Rising Technological
Gate insulator
Gate
Complexity
SiO2/HiK
Channel
Raised S/D
Work function
Leakage
Trapping

Depletion

Mobility

Material
Activation
Diffusion

S/D extension
Activation
Junction (USJ)

Device Scaling = More Simulation Need

Application: Design, analyze and optimize
semiconductor

Full TCAD Flow

TCAD Optimization and

Manufacturability

TCAD Simulations

Manufacturing

PCM

Generate
new data
Visual querying &
Visual optimization

Sensitivity, uncertainty & yield

analysis
Determine the
most stable process
condition

Marked process conditions indicate low sensitivity of the

device characteristics to the variations in corresponding Set
of process (RED marked)

Yield analysis
Devicespec limits

Some Strained-Engineered
Devices

Some available facilities

Hardware facilities

NetLAB ServerSoftware Serv

Network Analyzer
Noise Figure Analyzer

Spectrum Analyzer DC Probe station

AFM Setup
Agilent Semiconductor Test

Software facilities
Instrument Control software
LabVIEW, VEE, VSA, IC-CAP, IC/C-V
light, EasyExpert, Microsoft Inst.,
etc.
TCAD software
SILVACO, Sentaurus, MEDICI,
TSupreme, Taurus, Monte Carlo,
HSPICE, Nanosim, PCM studio,
PARAMOS, etc.

Requirements: List of
Equipment
1. Four Probe Resistivity Meter (25 lakhs)
2. Mask Aligner (75 lakhs)
3. Clean Air station (20 lakhs)
4. Rapid Thermal Annealing System (45 lakhs)
5. Semiconductor Test System (35 lakhs)
6. Microwave/ECR Plasma System (55 lakhs)
7. DC/RF Sputtering System (45 lakhs)
8. Probe station (50 lakhs)
9. Programmable power supply (20 Lakhs)
10. Thickness Measurement system (30 lakhs)
11. AFM/STM (30 lakhs)
12. Spectrum analyzer (10 Lakhs)
13. LCR Meter (10 lakhs)
14. Semiconductor Parameter Analyzer (50 lakhs)
15. Noise Figure Analyzer (55 lakhs)
16. Network Analyzer up to 26 GHz with calibration kits (200
lakhs)
17. Parameter extraction and device/process modeling software
tools (45 lakhs)

Achievement in ICT Area

1. NetLAB based Measurement and Analysis
2. First On Line Laboratory Demonstration at
Andhra University (AU)
3. First short term course on Information
Communication Technology (ICT) on Hardware
Laboratory at IIT-Kharagpur
4. Arranged several short term courses on
Technology CAD (TCAD) at IIT-Kharagpur
5. Arranged several short term courses on
Technology CAD (TCAD) outside IIT-Kharagpur

Book Published
1. Applications of Silicon-Germanium
Heterostructure Devices, Institute of Physics
Publishing (IOP), UK, 2001.
2. Silicon Heterostructures: Materials and Devices,
Institute of Electrical Engineers (IEE), UK, 2001.
3. Selected Works of Professor Herbert Kroemer,
Edited, World Scientific, Singapore 2008.
4. Strained-Si Heterostructure Field-Effect Devices,
CRC Press, London, 2007.

TCAD for Si, SiGe and GaAs

Integrated Circuits, IET, UK, 2008.

5.

OUR Publications on INTERNET

LABORATORY on
MICROELECTRONICS

A. Maiti and S. S. Mahato, Online Semiconductor Device

Characterization and Parameter Extraction Using World
Wide Web, Proc. NCNTE, Feb. 29 Mar. 01, pp.160-163,
2008.
A. Maiti and S. S. Mahato, Web-based Semiconductor
Technology CAD (TCAD) Laboratory, 50th Intl. Symp.
ELMAR-2008, Zadar, CROATIA, 10-12 September 2008.
A. Maiti and S. S. Mahato, Web-based Semiconductor
Process and Device Simulation Laboratory, Proc. of
ICEE2008, Intl. Conf. on Engineering Education, "New
Challenges in Engineering Education and Research in the
21st Century", PCS-BUDAPEST, HUNGARY, JULY 27-31,
2008.
S. C. Pandey, A. Maiti, T. K. Maiti and C. K. Maiti, Online
MOS Capacitor Characterization in LabVIEW Environment,
International Journal of Online Engineering (iJOE), vol.5,
pp.57-60, 2009.
A. Maiti, M. K. Hota, T. K. Maiti and C. K. Maiti, Online

Currently Available
Experiments via INTERNET
from IIT-KHARAGPUR
(RealTIME Online Measurement-based)

1.
2.
3.
4.
5.
6.
7.
8.
9.

Gummel Plot of a BJT

Output Characteristics of a BJT
Threshold Voltage of a MOSFET
Output Characteristics of a MOSFET
MOSFET Parameter Extraction
BJT SPICE Parameter Extraction
Low Noise Amplifier Characterization
Surface Analysis using AFM/STM
Circuit Analysis Using NI-Elvis

NetLAB Webpage

Partner/USER
Institutions
Our Current Partners are
VIT, Vellore
NIST, Berhampur

OUR ONLINE LABORATORY

HAS BEEN USED and TESTED BY
More Than
50 ENGINEERING COLLEGES
and
10 UNIVERSITIES

Short Term
Course/Workshop
AICTE/MHRD sponsored SUMMER SCHOOL at IIT
KHARAGPUR

May 17-23, 2009

Applications of
ICT for
Hardware

List of Participating
Institutions
VIT University, Vellore
NIST, Berhampur
West Bengal University of Technology, Kolkata
University of Calcutta
Inst. of Radiophysics and Electronics
North Bengal University, Siliguri
NIT, Durgapur
Bengal Engg. and Science University, Shibpur
Tezpur (Central) University, Tezpur

IMPS College of Engg. and Technology,

Malda
Gurgaon College of Engg., Haryana
Hi-Tech Institute of Technology, Khurda
National Institute of Technology, Warangal
SSN College of Engg., Tamilnadu
Synergy Institute of Engg. and Technology,
Dhenkanal
Medi-caps Institute of Technology
Management, Indore
Dr. BR Ambedkar National Institute of
Technology, Punjab
Jaypee Univ. Of Information Tech., Solan,
H.P.
Dronacharya College of Engg., Gurgaon,

Purushottam Institute of Engg. Tech.,

Rourkela, Orissa
National Institute of Science &
Technology, Orissa
Hi-Tech Institute of Tech., Orissa
GLAITM, Mathura, U.P.
Dr. B. C. Roy Engg. College, Durgapur
Tradient Academy of Tech., Orissa
Modern Engg. & Management Studies,
Orissa
GLA Institute of Tech. & Management,
Mathura
Synergy Institute of Engg. & Tech., Orissa
ITER, Bhubaneswar
Synergy Institute of Engg. & Tech., Orissa
DRIEMS, Cuttack

PSN Group of Institutions, Tamilnadu

Orissa Engg. College, Bhubaneswar
JIET, Cuttack
Raajdhani Eng. College, Bhubaneswar
World Institute of Technology, Gurgaon
Dept. of Bio-Medical Engg., Andhra
University
Andhra University College of Engg.,
Visakhapatnam
GITAM University, Visakhapatnam
Chaitanya college of Engg., Visakhapatnam
SRKR Engg. College, Visakhapatnam
Govt. Polytechnic, Bheemili
Sanketika Vidya Parishad Engg. College,
Visakhapatnam
JNTU College of Engg., Hyderabad

h
T

n
a

u
o
Y
k