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What is Four Point Probing

How the system works


Pro 4 Set Up
Simple Calculations behind Four Point
Probing
Procedure for using Pro4

Four Point Probing is a method for


measuring the resistivity of a
substance.

Impurity concentrations can be


estimated from the resistivity

Bulk or volume
resistivity is
measured in ohmscm
Independent of
sample size or
shape

Sheet resistance is
measured in ohmsper-square

Used for measuring


resistivity of thin
films

The 4 point probing setup consists of 3 key


components

Pro-4 probing station from LUCAS

Source
Meter

LABS with 4 point probe head

KEITHLEY 2400 power/source


meter

Computer with Pro4 software and


interface

The 4 point probing setup can measure resistivity or the


thickness of a film. But, either one has to be known.

Pro-4
Software
Probing
Station

Contact Lever
Probe head electrical
connection

Probe Head
Mounting Chuck
(Aluminum base
with Teflon surface

Current is passed through


the two outer probes

Voltage is measured
between the two inner
probes

Resistance is measured
using ohms law

The thickness of the film


must be known

If the spacing between the probe


points is constant, and the conducting
film thickness is less than 40%, and
the edges of the film are more than 4
times the spacing distance from the
measurement point, the average
resistance of the substance is given
by

Rs= k x V/I

For bulk resistivity, the sample is


much larger than the spacing of the
probes, the sheet resistance is defined
as the resistance equal to the bulk
resistivity divided by the sample
thickness. The equation is given by

Rs= P/t

Rs = Resistivity of
the substance
K = constant for the
average resistivity
that is equal to 4.53
P = Resistance
t = thickness of the
substance

The Pro-4 can be used to measure resistivity or the


thickness. But, either one has to be known.

The # of points to be tested and the shape of the


sample can be selected.

A single point or multiple points on the sample can


be tested to obtain the average resistivity

1.

Click on the Auto Test tab for multiple


measurements or Single Test tab for
a single reading.

2.

Select size and shape of the sample


using the tabs at the bottom of the
page. Type in the required information.

3.

Place the sample on the mounting


table and then move the sample to
position it at the required location

4.

Turn down the lever so that all the


needles on the probe head are in
contact with the wafer.

After the measurement is


completed, the resistivity at
each location will be
displayed on the left hand
side of the screen.

When all the points are


tested, the data can be
saved and read using excel

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