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14644-3
Cleanrooms & associated controlled
environments-
Part 3:
Metrology and test methods
DIS
BS EN ISO 14644-3
Metrology & Test Methods
Current Status
1. DIS was issued by ISO in September 02
2.UK comments to BSI to be made by end
December 02
3. LBI/30 will consider all UK comments by
end January 03
4.BSI vote to CEN/ISO by end February 03
5. DIS is valid and can be referred to and
used until it is superseded.
6. Likely time when revised DIS will be
available - mid 2004
BS EN ISO 14644-3
Metrology & Test Methods
14644-1:1999 Classification of air cleanliness
14644-2:2000 Specifications for testing and
monitoring to prove continued compliance
with -1
14644-3:DIS Metrology and test methods
14644-4:2001 Design, construction & start-up
14644-5:FDIS Operations
14644-6:CD Vocabulary/terminology
14644-7:FDIS Separative devices
14644-8:CD Classification of Airborne
Molecular Contamination
BS EN ISO 14644-3
Metrology & Test Methods
Current Status of BS 5295
BS 5295 Part 0: General Introduction -
Current
BS 5295 Part 1: Classification - Withdrawn
BS 5295 Part 2: Design - Withdrawn
BS 5295 Part 3: Operation - Current
BS 5295 Part 4: Compliance - Withdrawn
BS EN ISO 14644-3
Metrology & Test Methods
Current Status of BS 5295
BS 5295 Part 0: General Introduction - Current
BS 5295 Part 1: Classification - 14644-1/3
BS 5295 Part 2: Design - 14644-4
BS 5295 Part 3: Operation - Current
BS 5295 Part 4: Compliance - 14644-2
The checklists are useful in that they can be taken from the standard
and used as a tool.
BS EN ISO 14644-3
Metrology & Test Methods
Annex A
Test Selection & Sequence
Checklist
Choose which tests are
required
Put them in a logical order for
your application
Where not applicable put N/A
Review the schedule of tests
BS EN ISO 14644-3
Metrology & Test Methods
Annex
ANNEX B (Informative) B
- Test Methods
B1 Airborne Particle Count (for classification)
B2 Ultrafine Particle Count (for characterisation)
B3 Macro Particle Count (for characterisation)
B4 Airflow Test
B5 Pressure Difference Test
B6 Installed Filter Leakage Test
B7 Flow Visualisation
B8 Airflow Direction Test
B9 Temperature Test
B10 Humidity Test
B11 Electrostatic & Ion Generator Test
B12 Particle Deposition Test
B13 Recovery Test
B14 Containment Leak Test
BS EN ISO 14644-3
Metrology & Test Methods
Annex
ANNEX B (Informative) B
- Test Methods