Beruflich Dokumente
Kultur Dokumente
Chang Liu
Micro Actuators, Sensors, Systems Group
University of Illinois at Urbana-Champaign
MASS
Chang Liu
UIUC
Single crystal silicon and wafers
MASS
Chang Liu
UIUC
Miller indices
A popular method of designating crystal planes (hkm) and orientations
<hkm>
Identify the axial intercepts
Take reciprocal
Clear fractions (not taking lowest integers)
Enclose the number with ( ) : no comma
<hkm> designate the direction normal to the plane (hkm)
(100), (110), (111)
MASS
Chang Liu
UIUC
Stress and Strain
The strain
L L0 L
L0 L0
Poissons ratio
y z
x x
MASS
Chang Liu
UIUC
Hookes Law
E
The relationship
E
G
21
MASS
Chang Liu
UIUC
General Relation Between Tensile Stress and Strain
MASS
Chang Liu
UIUC
The behavior of brittle materials
(Si) and soft rubber used
extensively in MEMS
A material is strong if it has high
yield strength or ultimate strength.
Si is even stronger than stainless
steel
Ductility is a measure of the degree
of plastic deformation that has been
sustained at the point of fracture
Toughness is a mechanical measure
of the materials ability to absorb
energy up to fracture (strength +
ductility)
Resilience is the capacity of a
material to absorb energy when it is
deformed elastically, then to have
this energy recovered upon
unloading
MASS
Chang Liu
UIUC
Mechanical Properties of Si and Related Thin Films
(,
Growth ), ,
The fracture strength is size dependent; it is 23-28 times larger
than that of a millimeter-scale sample
Hall Petch equation;
y 0 Kd 1/ 2
For single crystal silicon, Youngs modulus is a function of the
crystal orientaiton
For plysilicon thin films, it depends on the process condition
(differ from Lab. to Lab.)
MASS
Chang Liu
UIUC
General Stress-Strain Relations
xx , yy , zz T1 , T2 , T3
yz , xz , xy T4 , T5 , T6
T C C: stiffness matrix
ST S: compliance matrix 1.66 0.64 0.64 0 0 0
0.64 1.66 0.64 0 0 0
For many materials of interest to 0.64 0.64 1.66 0 0 0 11
CSi,100 10 Pa
MEMS, the stiffness can be 0 0 0 0.8 0 0
simplified 0 0 0 0 0.8 0
0 0 0 0 0 0.8
MASS
Chang Liu
UIUC
Flexural Beam Bending
MASS
Chang Liu
UIUC
Longitudinal Strain Under Pure Bending
My
EI
Mt
max
2 EI
MASS
Chang Liu
UIUC
Deflection of Beams
d2y
EI 2 M ( x) Appendix B
dx
Fl 2 Fl 3
max , d max
2 EI 3EI
Fl 3
d max
12 EI
Fl 3
d max
192EI
Ml Ml 2
max , d max
EI 2 EI
MASS
Chang Liu
UIUC
Finding the Spring Constant
MASS
Chang Liu
UIUC
Calculate spring constant
MASS
Chang Liu
UIUC
Vertical Translational Plates
12 EI Ewt 3
k 3 3
l l 12 EI Ewt 3
k 3
l3 l
Ewt 3
(a)k 2 3
l
Ewt 3
(b)k 4 3
l
MASS
Chang Liu
UIUC
Torsional Deflections
Tr0
max
J
1
J r04
2
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Chang Liu
UIUC
Intrinsic Stress
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Chang Liu
UIUC
Intrinsic Stress
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Chang Liu
UIUC
Intrinsic Stress
MASS
Chang Liu
UIUC
Mechanical Variables of Concern
Force constant Importance of resonant freq.
flexibility of a given device Limits the actuation speed
Mechanical resonant frequency lower energy consumption at Fr
response speed of device
Hookes law applied to DC
driving
Fmechanical
Felectric
Km
Fmechanical K m x
MASS
Chang Liu
UIUC
Types of Electrical-Mechanical Analysis
MASS
Chang Liu
UIUC
Analysis of Mechanical Force Constants
Concentrate on cantilever
beam (micro spring boards) Fixed-free
Three types of most relevant
boundary conditions
free: max. degrees of
freedom
fixed: rotation and
translation both restricted Two fixed-
guided: rotation restricted. guided beams
Beams with various
combination of boundary
conditions
fixed-free, one-end-fixed
beam
fixed-fixed beam
fixed-guided beam
Four fixed-guided beams
MASS
Chang Liu
UIUC
Examples
MASS
Chang Liu
UIUC
Boundary Conditions
Fixed B.C.
no translation, no rotation
Free B.C.
capable of translation AND rotation
Guided B.C.
capable of translation BUT NOT rotation
MASS
Chang Liu
UIUC
A Clamped-Clamped Beam
Fixed-guided
Fixed-guided
MASS
Chang Liu
UIUC
A Clamped-Free Beam
MASS
Chang Liu
UIUC
One-end Supported, Clamped-Free Beams
MASS
Chang Liu
UIUC
Fixed-Free Beam by Sacrificial Etching
MASS
Chang Liu
UIUC
Force Constants for Fixed-Free Beams
Dimensions
length, width, thickness
unit in mm.
Materials
Youngs modulus, E
Unit in Pa, or N/m2.
MASS
Chang Liu
UIUC
Modulus of Elasticity
Names
Youngs modulus F
Elastic modulus x
Definition E A
x L
L
Values of E for various materials can be found in notes, text
books, MEMS clearing house, etc.
MASS
Chang Liu
UIUC
Large Displacement vs. Small Displacement
Small displacement Large deformation
end displacement less than 10- needs finite element computer-
20 times the thickness. aided simulation to solve
Used somewhat loosely precisely.
because of the difficulty to In limited cases exact
invoke large-deformation analytical solutions can be
analysis. found.
MASS
Chang Liu
UIUC
Force Constants for Fixed-Free Beams
MASS
Chang Liu
UIUC
Zig-Zag Beams
Used to pack more L into a given footprint area on chip to
reduce the spring constant without sacrificing large chip space.
Saves chip
real-estate
MASS
Chang Liu
UIUC
An Example
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Chang Liu
UIUC
Order of Resonance
MASS
Chang Liu
UIUC
Resonant frequency of typical spring-mass system
1 k
2 m
MASS
Chang Liu
UIUC
Electrostatic Sensors and Actuators
Chang Liu
MASS
Chang Liu
UIUC
Outline
Basic Principles
capacitance formula
capacitance configuration
Applications examples
sensors
actuators
Analysis of electrostatic actuator
second order effect - pull in effect
Application examples and detailed analysis
MASS
Chang Liu
UIUC
Basic Principles
Sensing
capacitance between moving and fixed plates change as
distance and position is changed
media is replaced
Actuation
electrostatic force (attraction) between moving and fixed plates as
a voltage is applied between them.
A d
MASS
Chang Liu
UIUC
Parallel Plate Capacitor
A d
Flip and
bond
Movable
vertical plate
MASS
Chang Liu
UIUC
Forces of Capacitor Actuators
1 1Q 2
Stored energy U CV 2
2 2 C
MASS
Chang Liu
UIUC
Relative Merits of Capacitor Actuators
Pros Cons
Nearly universal sensing and Force and distance inversely
actuation; no need for special scaled - to obtain larger force,
materials. the distance must be small.
Low power. Actuation driven In some applications,
by voltage, not current. vulnerable to particles as the
High speed. Use charging and spacing is small - needs
discharging, therefore realizing packaging.
full mechanical response speed. Vulnerable to sticking
phenomenon due to molecular
forces.
Occasionally, sacrificial release.
Efficient and clean removal of
sacrificial materials.
MASS
Chang Liu
UIUC
Capacitive
Accelerometer
MASS
Chang Liu
UIUC
Analysis of Electrostatic Actuator
MASS
Chang Liu
UIUC
An Equivalent Electromechanical Model
Fmechanical
x
If top plate
moves down- Felectric Note: direction
ward, x<0. Km definition of
variables
Equilibrium:
If a constant voltage, V1, is applied
|electric force|=|mechanical force|
in between two plates, the electric force
changes as a function of distance. The
closer the two plates, the large the
force.
X0
x Equilibrium
position
Km
fixed
MASS
Chang Liu
UIUC
Electrical And Mechanical Forces
V3
V2 V3>V2>V1
Equilibrium:
|electric force|=|mechanical force| V1
X0
Km
X0+x1
fixed
X0+x2
X0+x3
MASS
Chang Liu
UIUC
Force Balance Equation at Given Applied Voltage V
MASS
Chang Liu
UIUC
Determining Equilibrium Position Graphically
Note that one curve intersects the linear line only at one point.
As voltage increases, the curve would have no equilibrium
position.
MASS
Chang Liu
UIUC
Pull-In Effect
MASS
Chang Liu
UIUC
A threshold point VPI
Equilibrium: X=-x0/3
|electric force|=|mechanical force|
X0
Km
Positive
fixed feedback
-snap, pull in
MASS
Chang Liu
UIUC
Mathematical Determination of Pull-in Voltage
Step 1 - Defining Electrical Force Constant
MASS
Chang Liu
UIUC
Review of Equations Related To Parallel Plate
1 A 2 A V 2 V2
K e (2) 3 V 2
C 2
2 d d d d
MASS
Chang Liu
UIUC
Mathematical Determination of Pull-in Voltage
Step 2 - Pull-in Condition
At the pull-in voltage, there is only one intersection between |Fe|
and |Fm| curves.
At the intersection, the gradient are the same, i.e. the two curves
intersect with same tangent.
ke k m
This is on top of the condition that the magnitude of Fm and Fe
are equal.
Force balance yields V 2 k x ( x x ) 2
2km x( x x0 ) Eq.(*)
2 m 0
A C
2
CV
Plug in expression of V2 into the expression for Ke, ke 2
we get d
CV 2 2k m x
ke
( x x0 ) 2 ( x xo )
This yield the position for the pull-in condition, x=-x0/3.
Irrespective of the magnitude of km.
MASS
Chang Liu
UIUC
Mathematical Determination of Pull-in Voltage
Step 3 - Pull-in Voltage Calculation
2 x0 km
Vp .
3 1.5C0
MASS
Chang Liu
UIUC
Implications of Pull-in Effect
MASS
Chang Liu
UIUC
Counteracting Pull-In Effect
Leveraged Bending for Full Gap Positioning
MASS
Chang Liu
UIUC
Counteracting Pull-in Effect: Variable Gap Capacitor
Existing Tunable Capacitor
Tuning range: 88%
Counter
Suspension
capacitor plate
(with parasitic capacitance)
spring
d0
MASS
Chang Liu
UIUC
Example
A parallel plate capacitor
suspended by two fixed-fixed
cantilever beams, each with
length, width and thickness
denoted l, w and t, respectively.
The material is made of
polysilicon, with a Youngs
modulus of 120GPa.
L=400 mm, w=10 mm, and t=1
mm.
The gap x0 between two plates
is 2 mm.
The area is 400 mm by 400 mm.
Calculate the amount of vertical
displacement when a voltage of
0.4 volts is applied.
MASS
Chang Liu
UIUC
Step 1: Find mechanical force constants
MASS
Chang Liu
UIUC
Step 2: Find out the Pull-in Voltage
Find out pull-in voltage and compare with the applied voltage.
First, find the static capacitance value Co
8.85 1012 ( F / m) (400 106 ) 2
C0 6
7.083 1013 F
2 10
2 x0 km 2 2 106 0.0375
Vp 13
0.25(volts)
3 1.5C0 3 1.5 7.083 10
When the applied voltage is 0.4 volt, the beam has been pulled-
in. The displacement is therefore 2 mm.
MASS
Chang Liu
UIUC
What if the applied voltage is 0.2 V?
Not sufficient to pull-in
Deformation can be solved by solving the following equation
2k m x( x x0 ) 2 2km x( x x0 )
V
2
A C
v 2A
or x 2 x0 x x x
3 2 2
0 0
2k m
x 3 4 10 6 x 2 4 10 12 x 7.552 10 19 0
MASS
Chang Liu
UIUC
Solving Third Order Equation ...
To solve x 3 ax 2 bx c 0
a2 a ab
Apply y x a / 3 p b, q 2( ) 3 c
3 3 3
Use the following definition 3 2
p q
Q
3 2
q q
A3 Q,B 3 Q
2 2
The only real solution is
y A B
a
x A B
3
MASS
Chang Liu
UIUC
Calculator A Simple Way Out.
Use HP calculator,
x1=-2.45x10-7 mm
x2=-1.2x10-6 mm
x3=-2.5x10-6 mm
Accept the first answer because the other two are out side of
pull-in range.
MASS
Chang Liu
UIUC
Deformable Mirrors for Adaptive Optics
2 mm surface normal stroke
for a 300 mm square mirror, the displacement is 1.5 micron at
approximately 120 V applied voltage
T. Bifano, R. Mali, Boston University
(http://www.bu.edu/mfg/faculty/homepages/bifano.html)
MASS
Chang Liu
UIUC
MASS
Chang Liu
UIUC
MASS
Chang Liu
UIUC
BU Adaptive Micro Mirrors
MASS
Chang Liu
UIUC
Optical Micro Switches
MASS
Chang Liu
UIUC
Digital Light Mirror Pixels
Mirrors are on 17 mm
center-to-center spacing
MASS
Chang Liu
UIUC
Digital Micromirror Device (DMD)
Mirror Mirror
-10 deg +10 deg
Hinge
CMOS
Yoke Substrate
MASS
Chang Liu
UIUC
Perspective View of Lateral Comb Drive
MASS
Chang Liu
UIUC
Lateral Comb Drive Actuators
Total capacitance is
proportional to the overlap
length and depth of the
fingers, and inversely
proportional to the distance.
Pros:
Frequently used in
actuators for its relatively
long achievable driving
2 0t ( x x0 ) distance.
Ctot N [ cp ] Cons
d
force output is a function
N 0 t 2 of finger thickness. The
F x0
V
d thicker the fingers, the
large force it will be.
N=4 in above diagram. Relatively large footprint.
MASS
Chang Liu
UIUC
Transverse Comb Drive Devices
Direction of finger movement is orthogonal to the direction of
fingers.
Pros: Frequently used for sensing for the sensitivity and ease of
fabrication
Cons: not used as actuator because of the physical limit of
distance.
0lt
Csl N ( Cf )
x0 x
0lt
Csr N ( Cf )
x0 x
MASS
Chang Liu
UIUC
Devices Based on Transverse Comb Drive
MASS
Chang Liu
UIUC
Sandia Electrostatically driven gears
- translating linear motion into continuous rotary motion
Mechanical
springs
Gear train
Optical shutter
http://www.mdl.sandia.gov/mic MASS
Chang Liu
romachine/images11.html UIUC
Sandia Gears Use five layer
polysilicon to increase
the thickness t in lateral
comb drive actuators.
Mechanical springs
Position
limiter
MASS
Chang Liu
UIUC
More Sophisticated Micro Gears
MASS
Chang Liu
UIUC
Actuators that Use Fringe Electric Field - Rotary
Motor
MASS
Chang Liu
UIUC
Three Phase Motor Operation Principle
MASS
Chang Liu
UIUC
Starting Position -> Apply voltage to group A
electrodes
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Chang Liu
UIUC
Motor tooth aligned to A -> Apply voltage to Group
C electrodes
MASS
Chang Liu
UIUC
Motor tooth aligned to C -> Apply voltage to Group
B electrodes
MASS
Chang Liu
UIUC
Motor tooth aligned to B -> Apply voltage to Group
A electrodes
MASS
Chang Liu
UIUC
Motor tooth aligned to A -> Apply voltage to Group
C electrodes
MASS
Chang Liu
UIUC
Example of High Aspect Ratio Structures
MASS
Chang Liu
UIUC
Some variations
Large angle
Long distance
Low voltage
Linear movement
MASS
Chang Liu
UIUC
1x4 Optical Switch
John Grade and Hal Jerman, A large deflection electrostatic actuator for
optical switching applications, IEEE S&A Workshop, 2000, p. 97.
MASS
Chang Liu
UIUC
Actuators that Use Fringe Field - Micro Mirrors
with Large Displacement Angle
MASS
Chang Liu
UIUC
Other Parallel Plate Capacitor - Scratch Drive
Actuator
Mechanism for realizing
continuous long range
movement.