Semiconductor Processing

and Fabrication
Instructor:
Farseem M. Mohammedy PhD
Assistant Professor, EEE 617,
Dept of EEE, B.U.E.T., Dhaka-1000.

web: http://teacher.buet.ac.bd/farseem (view with IE)

google or facebook me if you are interested
The instructor in a Class 10000 Clean Classes:
Room, 2007.
 Course books
• Recommended text
– Introduction to Microelectronic Fabrication by Richard C. Jaeger,
Distinguished University Professor, ECE Department, Auburn University.

– Microchip Fabrication by Peter van Zant, Professor of Electrical

Engineering, University of Saskatchewan, Canada.

– Science and Engineering of Microelectronic Fabrication, by Stephen A.

Campbell, 2nd ed, Oxford University Press.
• Reference
– Fundamentals of Microfabrication: The Science of Miniaturization by Marc J.
Madou, 2nd Ed.
– Introduction to Microfabrication by Sami Franssilla, Wiley 2004.
– Fabrication Engineering at the Micro and Nanoscale by Stephen A. Campbell,
 Internet sources

• Google, Bing and Wikipedia in general

• UC Berkeley processing class notes

http://inst.eecs.berkeley.edu/~ee143/s2005/lectures.html

• MIT Open Courseware, microelectronics processing class notes

http://ocw.mit.edu/OcwWeb/Electrical-Engineering-and-Computer-
Science/6-152JFall2003/LectureNotes/index.htm

• Others

– http://www.tf.uni-kiel.de/matwis/amat/elmat_en/ (U of Kiel)

– http://jas.eng.buffalo.edu/ (nice animations of dev. Fab)

 Course evaluation

• Attendance – 0%

• Class tests/assignments – 30%

• Final exam – 70%