Plasma and RF Energy RF Systems • A typical RF power system has the following major parts: – RF Generator • Oscillator Circuits • Power Amplifier Circuits • Filter Circuits – Transmission Lines • coaxial cables • RF feedthru – Impedance Matching Network • Includes Phase and Magnitude Detector • Servo motor control circuits • Variable capacitors and/or variable inductors – Electrodes • geometry, spacing, biasing, coupling – Power Measurement Spring 2005 Semitec 215 Jozwiak Plasma and RF Energy RF Subsystems • RF Generator: – Provides the energy source to create the plasma. – Delivers an AC waveform at a specified frequency and power level. – FCC regulations concerning radio emissions must also be met. – (more on this later)
Spring 2005 Semitec 215 Jozwiak
Plasma and RF Energy RF Subsystems • Transmission Lines: – Transport the RF energy from the generator to the impedance matching unit. • Coaxial cable or hardline • Cut to the nearest quarter-wavelength (12, 24, 36 ft., etc.) – Transport the RF energy from the impedance matching unit to the load. • Direct connection to chamber or coaxial cable • Kept as short as possible ( < 3 ft.) – Specially designed to carry RF energy with minimal loss. – (more on this later)
Spring 2005 Semitec 215 Jozwiak
Plasma and RF Energy RF Subsystems • RF Feedthru: – Couples the RF power from the RF matching network (at atmospheric pressure) to the electrode in the chamber (under vacuum). – Consists of a high-conductance electrode encased in a ceramic sleeve to provide insulation from the grounded chamber body. – Must provide a very good vacuum seal that does not break down at high voltages.
Spring 2005 Semitec 215 Jozwiak
Plasma and RF Energy RF Subsystems • Impedance Matching Network: – In an RF Plasma system, the matching network, the chamber, and the plasma itself combine to make up the load. – In order to maximize the power that the RF generator delivers to the plasma, a matching network is used to match the impedance of the load with the output impedance of the generator. – Function #1: Continuously monitor the load impedance as “seen” by the RF generator • measures the phase and magnitude of the current and voltage waveforms to determine the load impedance at any given time
Spring 2005 Semitec 215 Jozwiak
Plasma and RF Energy RF Subsystems • Impedance Matching Network: – Function #2: Adjust the impedance of the combined load so that the RF generator always sees impedance matched to its internal (output) impedance • ensures maximum power transfer to the load • internal impedance of the RF generator is usually 50 W • the control circuitry in the matching network drives servo motors that adjust variable capacitors and inductors • changing values of the capacitor/inductor combination are used to ensure MPT
Spring 2005 Semitec 215 Jozwiak
Plasma and RF Energy RF Subsystems • Electrodes: – The final component of an RF system is the load (includes the electrodes, the vacuum chamber, and the gasses that are in the chamber). – Electrodes create an oscillating electric field inside the vacuum space. • The charged particles are set in motion by this electric field.
Spring 2005 Semitec 215 Jozwiak
Plasma and RF Energy RF Subsystems • Electrodes: – In a DC plasma system, one electrode is always positively charged and is called the anode. • The other electrode is negatively charged and is called the cathode. – In an AC plasma system (with no DC bias), there is no polarity. • However, the commonly used naming convention labels the grounded electrode the anode, and the "hot" or energized electrode the cathode. • For optimum distribution of RF energy throughout the interior of the chamber, the ground electrode is directly connected to the chamber body.
Spring 2005 Semitec 215 Jozwiak
Plasma and RF Energy RF Subsystems • Electrodes: • The electrodes also serve other functions: – The anode (grounded) delivers heat energy into the chamber, and usually holds the wafer. – The cathode (hot) is the means by which gasses are uniformly introduced into the chamber, frequently called the showerhead.
• The electrodes in a plasma system must be carefully designed.
– The material(s) from which they are made, their shape, their relative size, and their spacing, all significantly effect the process results on the wafer.
Spring 2005 Semitec 215 Jozwiak
Plasma and RF Energy RF Subsystems • Power Measurement: – There must be at least one power meter somewhere in an RF system. – A power coupler is used to direct a small fraction of the forward power to the meter. – The power measured at various points in the RF system should be approximately equal. – Power meters should be able to measure both forward (delivered) and reflected power (returned power due to a mismatched impedance).