Writing Problem and Hypothesis

Statements for Engineering Research(47)

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Setting of work proposal :
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Work problem :
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Quantitative specification of problem :

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Importance of problem :
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Project need : ,
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Work objective : ?
Methodology to achieve objective
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Anticipated results :
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Contribution to field :
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Increasingly larger substrate requirements have spurred
advances in semiconductor manufacturing, explaining the increasing
importance of the pumping performance of vacuum pumps in etching,
chemical vapor deposition (CVD), and physical vapor deposition (PVD)
to satisfy ultraclean environment requirements. However, using oil-free
backing pumps in combination with the TMP to satisfy ultraclean
environment requirements is problematic. The TMP compound includes
the addition of a turbodrag section to the conventional TMP stage in the
same rotation shaft in order to ensure that the discharge pressure
ranges between 7.5 and 15 Torr. Levi (1992) also pioneered the use of
hybrid pumps, which uses a variety of impellers without increasing the
number of stages on the same axis. Notably, the conventionally
adopted TMP uses momentum transfers from high-speed rotating
blades to the gas molecules for pumping gas. According to the direction
of the pumped fluid to the movement of the moving wall, the TMP is
perpendicular to the movement of the moving wall; otherwise, the
molecular drag pump (MDP) is parallel. The MDP can operate in the
7.5x-3 Torr-7.5 x-2 Torr at a full pumping speed owing to a high
compression ration in the viscous flow regime, which is infeasible for a
molecular flow regime.
()
The CVD and etching equipment in the IC industry
require superior discharge pressures from the atmosphere to a high-
vacuum region. Among the many subsequent design types include
those of Becker, Siegbahn, Holwek, and Gaede. Although these
designs normally increase either the pumping speed or compression
ratio, increasing the pumping speed and compression simultaneously
(especially in higher discharge pressures) is problematic owing to the
complex transition flow phenomena. Additionally, the processing
pressure can not remain constant with a declining pumping
performance. A typical TMP typically has many
stages for optimizing the pumping speed and compression ratio,
resulting in different compression ratios, especially the lower value for
light gases. Moreover, the compression ratios are high at discharge
pressures lower than 7.5x-3 Torr. However, the pumping speed
obviously declines at higher discharge pressures.
Ultimately, the pumping performances of TMP lower its efficiency
as the distance of blades becomes comparable to the mean free path
of gas molecules. Therefore, a vacuum performance
system must be developed based on ISO standards with automatic
testing and human-machine interface functions.
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A vacuum performance system can be developed based on ISO
standards with automatic testing and human-machine interface functions.
To do so, pumping performances can be evaluated based on the
flow meter method. The flow rate can then be adjusted to obtain a balanced
inlet pressure. Next, the pumping speed based on the difference of inlet
pressure and ultimate pressure can be divided by the throughput. Additionally,
results of the experimental pumping speed can be compared with those of the
simulations. As anticipated, the proposed vacuum performance
system can evaluate the throughput, pumping speed, ultimate pressure, and
residue gas analysis via its automatic testing and human-machine interface
functions in an inlet pressure exceeding 1.3x10-6 Torr. Importantly,
the proposed system can provide desired characteristics such as ultimate
pressure, compression ratio, and pumping speed, ultimately eliminating the
evaluated time and providing human-machine interface functions. (NOTE :
Add 2-3 more sentences that describe more thoroughly how the proposed
method contributes to a particular field or sector)
()
Industrial development has led to the extensive use of
plastic products in daily life, with polymers like PVA, polyethylene (PE),
or polypropylene (PP), as an increasingly common source of related
industrial applications. For instance, PVA is commonly adopted in the
textile and paper-making industries. However, similar to
other polymers, the difficulty of PVA degradation reflects the complexity
of handling it during industrial wastewater treatment.
Despite the numerous chemical and biological treatment methods
developed for PVA degradation and their promising results, such
methods have certain limitations, including too long of a reaction time
and pollution caused by biological or chemical reactants. While
investigating mixed cultures acclimatized to PVA solution, Solaro et al.
indicated only 40% mineralization of PVA after 48 days of incubation.
Additionally, use of Fenton reaction to reduce PVA was revealed that
after 2 hours of reaction time, the PVA removal rate reached only 40%.
The inability to degrade PVA adequately through
wastewater treatment will result in PVA entering the public water supply
and flowing into the sea, ultimately threatening humans and the
surrounding ecology. Therefore, an efficient and
environmentally friendly PVA-based wastewater treatment method
must be developed that does not produce other by-products or harmful
waste.
()
An efficient and environmentally friendly PVA-based
wastewater treatment method can be developed that does not produce
other by-products or harmful waste. To do so, PVA
can be degraded efficiently by photocatalysis. The removal efficiency of
PVA can then be examined based on the reaction temperature, PVA
concentration, and photocatalytic quantity. Next, analysis results of the
proposed wastewater treatment method can be compared with those of
previous methods. As anticipated, the photocatalysis of the
proposed wastewater treatment method can degrade PVA contents
completely in two hours. In addition to its photocatalysis
capability to degrade PVA efficiently, the proposed method provides a
valuable reference for research in other industrial applications such as
decomposing polymers in a sewage treatment plant. (NOTE : Add 2-3
more sentences that describe more thoroughly how the proposed
method contributes to a particular field or sector)
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