Writing Engineering Abstracts(51)

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(+) Increasingly larger substrate
requi rements have spurred advances i n semiconductor
manufacturi ng. Thus, to satisfy ul tracleam envi ronment
requirements, the pumping performance of vacuum pumps is
increasingly important in the etching process, chemical vapor
deposition (CVD), and physical vapor deposition (PVD).
However, the processing pressure fails to remain constant with a
declining pumping performance. The inability to evaluate the
pumping performance efficiently and precisely makes it
impossible to comply with the demand of actual processing
pressure. Therefore, this work describe a novel vacuum
performance system according to ISO standards, with automatic
testing and human-machine interface functions. Pumping
performance is evaluated based on the flow meter method. The
flow rate is then adjusted to obtain a balanced inlet pressure.
Next, the pumpi ng speed i s determi ned based on thi s
relationship. Additionally, results of the experimental pumping
speed are compared with those of simulations.
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Analysis results indicate that the proposed
vacuum performance system evaluates the throughput, pumping
speed, ultimate pressure, and residue gas analysis via its
automatic testing and human-machine interface functions in an
inlet pressure range exceeding 1.3x10-6 Torr.
Importantly, the proposed system eliminates the evaluated
time and provide human-machine interface functions.
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(+) Advances in telecommunications
and information technology have led to the transformation of
optical storage media from CD, VCD, DVD to BD format.
Consumer demand for an optical pick-up head in higher capacity
portable optical storage media, e.g., near-field optical disc,
focuses on a more compact and lightweight size with a larger
storage capability, as well as fast read and write action
capabilities. In particular, a glass material refractive index
exceeding 2.0, a weight less than 80 gram and a size smaller
than 1.0 millimeter in diameter are of priority concern. For
current specifications of a refractive index exceeding 2.0 for
glass material and a diameter smaller than 1 millimeter for glass
beads, conventional grinding and polishing glass processing
methods fail to satisfy stability requirements and consumer
demand regarding the shape of the optical storage media device
in terms of precision and efficiency.
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Therefore, this work designs a novel method that can
manufacture 100 optical lenses in a single run using a glass
molding process. Two 10 * 10 ceramic mold array plates,
with each mold having a diameter of 1 mllimeter, are produced
based on the temperature distribution of a heating device. Glass
with a refractive index of 2.003 is then selected and pre-
manufactured to the appropriate volume. Next, the required
shape for an optical lens is pressed by controlling the heating
and cooling times through use of a high-temperature glass
molding machine. Simulation results indicate
that the proposed method ensures the manufacturing of 100
precision optical lenses in 3 hours, along with homogeneity of
the shape reaching 95%. Importantly, in
addition to its desired features of optimized batch production,
precise speed control and shorter processing time, the proposed
method ensures that the components cost less when a greater
volume is produced.
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(+) The image data of a spatial
dimension in cross-track and the spectral dimension are
sampled simultaneously for hyperspectral imagers by using
a 2D detector array. Based on use of the pushbroom
mechanism, these spectrographs, with an entrance slit and
a PGP dispersing element, is extensively adopted in
remote sensing. A hyperspectral image of a large ground
surface can be easi l y obtai ned by mul ti pl e i mage
acquisition using these imagers. However, the detector
array gradually malfunctions after long-term imaging
operations. Additionally, a few CCDs in the detector array
decline in performance with different levels.
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Therefore, this work describes a novel restoration algorithm
for a hyperspectral image to maintain a high image quality
without replacing the detector array of an imager. To achieve
restoration, the proposed algorithm includes defective CCDs
detection based on acquired images and image restoration
based on inter-band radiance interpolation. Defective CCDs
are detected (based on OR according to) radiance deviation of
each image line for all hyperspectral bands. Image restoration is
then performed using inter-band radiance interpolation of
Lagrange polynomial on the image lines with defective CCDs.
Next, CCDs defects for an imager are identified periodically to
update the CCDs health status. Additionally, hyperspectral
observer of plants and environment (HOPE) images, as
developed by ITRC, with simulated defective CCDs of various
performance decay levels are applied for validation.
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Analysis results indicate that the proposed
restoration algorithm has an accuracy for images with a
homogeneous ground feature that exceeds those with non-
homogeneous features. Additionally, defective CCDs with a
performance decay of 10% can still be designated precisely.
Moreover, restoration accuracy of pixel radiance is achieved as
well for various spectral bands using the proposed algorithm.
Furthermore, i mage reconstructi on i s performed usi ng
interpolation of spatial neighboring pixels. Both methods are
compared in terms of radiance deviation. In contrast with the
method using interpolation of neighboring pixcels, the proposed
algorithm handles the images taken by hyperspectral imager
with adjoining defective CCDs both in spatial and spectral
di mensi ons. Hi ghl y pr omi si ng f or
hyperspectral images, the proposed algorithm ensures that an
imager operates continuously despite the presence of a few
defects in the detector array.
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