San Jose State University Department of Mechanical Engineering

Large Optics Diamond Turning Machine

Presented by Vu Dao Gilbert Wong
March 20, 2003 ME 250 Precision Machine Design

Agenda

Introduction Advantages Precision Design Summary Q&A

March 20, 2003

ME 250 Precision Machine Design

Introduction

LODTM

Large Optics Diamond Turning Machine High precision two axis vertical lathe Diamond cutting tool 64 in diameter, 20 in height, 3000lb Most precise vertical axis lathe currently available.

March 20, 2003

ME 250 Precision Machine Design

March 20, 2003

ME 250 Precision Machine Design

Advantages of LODTM

Produce complex geometries Achieve high accuracy and repeatability Produce mirror finish surface

March 20, 2003

ME 250 Precision Machine Design

Precision

Radial

28 nm (280) 4.3 nm (42) 280 is ~ 3500 times smaller than diameter of human hair

Surface finish

Analogy

March 20, 2003

ME 250 Precision Machine Design

Metrology System

Metrology frame

Kinematically mounted to LODTM frame by three blade flexures Super Invar

Very low CTE, 0.63*10-6/C

Liquid Cooling

Double-walled panels surrounding the metrology frame Uniform temperature of 0.001F

ME 250 Precision Machine Design

March 20, 2003

Motion Control

Interferometer

Resolution . 618nm Closed loop Relative measurement

Baird, 1999

March 20, 2003

ME 250 Precision Machine Design

Motion Control

Baird, 1999
March 20, 2003 ME 250 Precision Machine Design

Motion Control

Bearings

Fluid-film for smooth friction free motion Radial, Thrust Water cooled to prevent heat generation One for X and Z axis 25.4 m/sec machining speed

Analog Servos

Fast Tool Servo

ME 250 Precision Machine Design

March 20, 2003

Cutting Motion

Donaldson, 1983
March 20, 2003 ME 250 Precision Machine Design

Environmental Control

Four pneumatic isolators Acoustic vibration isolation Air Flow (External)

Uniform temperature of 0.01F

Patterson, 1987

March 20, 2003

ME 250 Precision Machine Design

Summary

Highest accuracy turning machine Strict temperature control Primarily used to design precision lens

March 20, 2003

ME 250 Precision Machine Design

References

Baird, E.D., Patterson, S.R, Donaldson, R.R., The Laser Interferometer System for the Large Optics Diamond Turning Machine, UCRL-ID-134693, Lawrence Livermore National Laboratory, 1999. Donaldson, R.R., Patterson, S., Design and Construction of A Large Vertical Axis Diamond Turning Machine, UCRL-89738, Lawrence Livermore National Laboratory, 1983. McCue, H., The Motion Control System for the Large Optics Diamond Turning Machine, UCRL-86438, Lawrence Livermore National Laboratory, 1981. Patterson, S., Inspection of the Large Optics Diamond Turning Machine, UCRL-97696, Lawrence Livermore National Laboratory, 1987. Hamilton, Jim., Large Optics Diamond Turning Machine, UCRLTB-147593, Lawrence Livermore National Laboratory, 2002.
ME 250 Precision Machine Design

March 20, 2003