Beruflich Dokumente
Kultur Dokumente
vion
Iil4oqrn4y
I2-08-09
hoLollLhography
S. Copalan, Amrita vishwa vidyapeetham, Amritapuri Campus
3
Phofo Lifhogrophy
% 1wo step process
1ransfer pattern from Mask on
to k cover|ng the wafer
1ransfer of pattern from k to
wafer by etch|ng
% Dev|ce |ayout |s broken |nto severa|
|ayers of |nformat|on
% Lach |ayer |s a map for the |ocat|on
of one f||m on IC
% rocess of transferr|ng patterns of geometr|c shapes on a mask to a
th|n |ayer of rad|at|on sens|t|ve mater|a| (ca||ed photo res|st)
cover|ng the surface of wafer