Beruflich Dokumente
Kultur Dokumente
To
Dr. Harpreet Singh
Assistant Professor (SMMEE)
Prepared By
Patel A. R.
Research Scholar
SCHOOL OF MATERIALS, MECHANICAL AND ENERGY ENGINEERING
INDIAN INSTITUTE OF TECHNOLOGY ROPAR
Nangal Road, RUPNAGAR-140001
PUNJAB
1echnlque baslcally conslsL of aLomlzaLlon of a salLconLalnlng
llquld Lhe LransporL of spray dropleLs and pyrolysls of Lhe
salL on Lhe subsLraLe Lo form Lhe Cxlde coaLlng ceramlc
coaLlng and powder producLlon
vA8lCuS 1LCPnlCuLS
CLASSlllCA1lCn
atom|c |ayer ep|taxy
2
W 1echnlque Lo prepare dense and porous oxlde fllms ceramlc coaLlngs and nm
slzed powders
W Spray pyrolysls represenLs a very slmple and relaLlvely cosLeffecLlve meLhod
especlally regardlng equlpmenL cosL
W Spray pyrolysls does noL requlre hlgh quallLy subsLraLes or chemlcals
W 1he meLhod has been employed for Lhe deposlLlon of dense fllms porous fllms
and for powder producLlon
W Lven mulLllayered fllms can be easlly prepared uslng Lhls versaLlle Lechnlque
W Spray pyrolysls has been used for several decades ln Lhe glass lndusLry 1 and
ln solar cell producLlon Lo deposlL elecLrlcally conducLlng elecLrodes 2
SALlLn1 lLA1u8LS
LCulMLn1 8LCul8Lu
W An aLomlzer
W recursor soluLlon
W SubsLraLe heaLer and
W 1emperaLure conLroller
3
W recursor soluLlon prepared
W Slurry of soluLlon and powder made
W ALomlzaLlon of slurry
W PeaLlng of subsLraLes
W Spraylng of aLomlzed parLlcles over Lhe surface
W yrolysls of salL ln Lhe soluLlon
W lormaLlon of Lhe Lhln oxlde layers
W osL processlng of Lhe surface layer
S1LS
ALlCA1lCnS
W Solar cells (Lhln fllm deposlLlon)
W AnLlreflecLlon coaLlngs
W Solld oxlde fuel cells
W owder producLlon
W Cas sensors
W PumldlLy sensors eLc
4
1Pln llLM uLCSl1lCn
W Spraylng a meLal + salL soluLlon onLo a heaLed subsLraLe
W uropleLs lmpacL on Lhe subsLraLe surface
W Spread lnLo a dlsk shaped sLrucLure and
W undergo Lhermal decomposlLlon
W (1he shape and slze of Lhe dlsk depends on Lhe momenLum and volume of Lhe
dropleL and subsLraLe LemperaLure 1he fllm ls usually composed of overlapplng dlsks
of meLal salL belng converLed Lo oxlde on Lhe heaLed subsLraLe)
roducLlon of LransparenL and conducLlng oxlde fllms as wlndows ln solar cells by spray
pyrolysls
3
W MgC Lhln fllms are commonly used as buffer layers 1hln unlform and homogeneous
layers of MgC were deposlLed on Sl (100) fused slllca and sapphlre 3 1hese Lhln fllms
(01 Lo 03 urn Lhlck) are used as buffer /oyers for depositinq fi/ms of ?8a
2
Cu
3
0
7
17
lnfluence of Lhe deposlLlon Llme for Lhe
fllm deposlLlon uslng Lhe Su seLup
lllm morphology afLer 60 mln (a) and
300 mln (b) 1he lnfluence of Lhe
deposlLlon Llme on Lhe fllm morphology
deposlLed aL 230C 8oLh fllms belong Lo
Lhe Lype l morphology lndlcaLlng LhaL Lhe
deposlLlon Llme does noL have a
remarkable effecL on Lhe fllm
morphology
lnfluence of Lhe deposlLlon Llme for Lhe
1aylorcone mode spraylng uslng Lhe LSu
seLup lllm morphology afLer 43 mln (a)
and 300 mln (b) Layer wlLh LSu looks
dense wlLh many parLlcles on Lhe surface
Lype ll morphology lncreaslng Lhe
deposlLlon Llme Lo 300 mlnuLes shlfLs Lhe
morphology Lo Lype lv (porous wlLh
agglomeraLes of small parLlcles)
1hls ls due Lo effecL of dropleL spreadlng MosL of Lhe dropleLs arrlvlng aL Lhe subsLraLe are
nearly dry and spread slowly hence dlscreLe parLlcles are formed on Lhe surface Lhls glves
more rough surface 1hls enhances preferenLlal landlng and agglomeraLlon 24 17
9 9
uLCSl1lCn 1lML
18
SLM lmage of crosssecLlon of an ?SZ fllm
deposlLed on Sl wafer ln Lwo hours aL 280C
by Su Lechnlque recursor soluLlon 0083
mol/l Zr(C
3
P
7
0
2
)
4
+ 0013 mol/l ?Cl
3
xP
2
0
eLhanol (30 vol) + buLyl carblLol (30 vol)
soluLlon nozzle Lo subsLraLe dlsLance 44 cm
Alr pressure 073 bar SoluLlon flow raLe 30
ml/h
ueposlLlon Llme versus Lhlckness for ?SZ fllm
deposlLed aL 280C by Lhe Su Lechnlque
recursor soluLlon 0083 mol/l Zr(C
3
P
7
0
2
)
4
+
0013 mol/l ?Cl
3
xP
2
0 eLhanol (30 vol) +
buLyl carblLol (30 vol) soluLlon nozzle Lo
subsLraLe dlsLance 44 cm Alr pressure 073
bar SoluLlon flow raLe 30 ml/h
uLCSl1lCn 8A1L
9
9
19
lnfluence of Lhe alr pressure on Lhe dropleL
slze dlsLrlbuLlon recursor soluLlon flow raLe
30 ml/h
Mean dropleL dlameLer and dropleL
number fracLlon of Lhe pressurlzed spray
wlLh respecL Lo Lhe radlal dlsLance llow
raLe 30 ml/h dlsLance Lo subsLraLe 210
mm
9
9
S8A? ulS18l8u1lCn
20
WAceLaLe nlLraLe and oxalaLe precursors for ?8CC have been
spray pyrolyzed under dlfferenL condlLlons
WShelled and nonhollow mlcroparLlcles were obLalned from
aceLaLe and nlLraLe precursors and
WnonhollowagglomeraLes were obLalned from Lhe oxalaLe
Wsuspenslon
?8CC owder roducLlon
AALomlzer ACAlr
Compressor AlAlr
lllLers lnlurnace
lPlllLer PeaLer
PreheaLer
llnsulaLlon
lowder lllLers
erlsLalLlc ump
1he model shows Lhe absorbed
radlaLlon heaL by Lhe parLlcles
from Lhe furnace walls ls
slgnlflcanL ln heaLlng Lhe gas
1he gas and Lhe parLlcle
LemperaLures are falrly close due
Lo Lhe effecLlve heaL Lransfer Lo
Lhe parLlcles 32
AL furnace LemperaLures of 700
C Lhe maxlmum predlcLed
parLlcle LemperaLure ls abouL
300HC
1hls explalns Lhe lncompleLe
reacLlons obLalned under Lhese
condlLlons Above 900C Lhe
reacLlons are predlcLed Lo be
compleLe wlLhln Lhe flrsL half of
Lhe furnace leavlng sufflclenL
resldence Llme for parLlal
converslon lnLo ?8CC
CCuarLz 1ube 8eacLor
88oLameLers 8C8egulaLor S
SoluLlon 11hermocouples
vvalves
21
CL8AMlC CCA1lnC
Advance ceramlc coaLlng Lo replace an exlsLlng ceramlc plpe sub[ecLed Lo Lhe severe
chemlcal condlLlons le operaLed ln hlLemperaLure and corroslve envlronmenL
A recLangular plece ls coaLed wlLh speclal aLLachmenL over an lron base sLrucLure uslng
yLLrlum alumlnum garneL (?AC) whlch ls havlng hlgh sLrengLh low creep raLes aL hlgh
LemperaLure anLlcorroslve hlsLablllLy agalnsL alkallvapor
@echnico/ 5pecificotions
W Ceramlc coaLlng was formed uslng
1800 plasma Lechnlque wlLh
spraylng condlLlons of Ar gas flow
raLe 301 l/mln P
2
gas flow raLe 14
l/mln currenL 600 A powder feed
raLe 16 g/mln nl20Cr and Al
2
C
3
feed sLock
W ?AC coaLlng was made from nl
20Cr and 33?
2
C
3
+ 63 Al
2
C
3
mlxed powder
W Speed of Cun scannlng 230 mm/s
33
22
uL18ASCnlC S8A? ?8CL?SlS
ulLrasonlc spray pyrolysls of precursor drops recursor concenLraLlon plays a predomlnanL
role ln deLermlnaLlon of producL parLlcle slze
1he ?SZ parLlcle dlameLers were much smaller Lhan Lhose predlcLed by Lhe oneparLlcle
perdrop mechanlsm
unlform dense spherlcal nanoparLlcles of 73nm dlameLer were produced by spray
pyrolysls Lhrough Lhe use of unlform precursor drops (3 8m dlameLer) and a low
precursor concenLraLlon (001 wL)
@echnico/ 5pecificotion
recursor zlrconlum hydroxyl
aceLaLe concenLraLlon 001
wL spray pyrolysls aL 730C
uslng precursor drops 38 m
ln dlameLer by an ulLrasonlc
nebullzer aL 266 MPz
?leld oolfotm JeoseJ spbetlcol
?SZ parLlcles 73 nm ln dlameLer
measured by SLM 34
23
S18Cn1luM 1l1AnA1L llLMS
1valve 2flowmeLer 3aerosol generaLor 4
soluLlon 3aerosol 6subsLraLe 7heaLlngplaLe
8valve and 9valve
ueposlLlon parameLers such as soluLlon concenLraLlon Llme and LemperaLure of deposlLlon
and flow raLe of carrler gas were opLlmlzed Lo obLaln dense fllms wlLhouL cracks repared Lhln
fllms were homogeneous well crysLalllzed wlLh unlform graln slze 333 nm and 441 nm and
Lhlckness 129 nm and 212 nm for 60 and 120 mln deposlLlon Llme resp
AdvanLage onesLep slmple cheap equlpmenL unlversal precursors (lnorganlc organlc or
meLalorganlc compounds) easy and preclse composlLlon conLrol (d) varlous fllm morphologles
posslble and (e) accuraLe conLrol of Lhe deposlLlon klneLlcs 33
60 mln
m|n
24
1LCPnlCAL SLClllCA1lCnS
23
1LCPnlCAL SLClllCA1lCnS
26
8LlL8LnCLS
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30