04lpc Horn

Laser Applications R&D at Fraunhofer
Institute for Laser Technology

Jens Gottmann, Claudia Hartmann, Alexander Horn,
Leonid Moiseev, Lena Trippe
Fraunhofer Institut fr Lasertechnik &

Lehrstuhl fr Lasertechnik
der RWTH-Aachen
Steinbachstrasse 15
52074 Aachen
Germany
alexander.horn@ilt.fraunhofer.de
U:\PC_WNDWS\VORLAGEN\LLT_1.pot
RHE INISCHWESTFLISCHE
TECHNISCHE
HOCHSCHULE
AACHEN
Outline
The Fraunhofer Institute for Laser Technology

Related Results & Planned Experiments at JLAB FEL
Micro-ablation with tailored pulse trains
Drilling with s-laser radiation
PLD
Conclusion
RHEINISCHWESTFLISCHE
TECHNISCHE
HOCHSCHULE
AACHEN
P:/A33/Geraete/Anschaffung/Umzug_fs_Anwendung.ppt
LEHRSTUHL FR LASERTECHNIK
Tailored Optical Energy
Lasers
Application
z Manufacturing
- Processes
- System technology
z Power/ Energy
z Quality
- space (focusability)
- time (pulse duration
and formation)
- spectral (wavelength,
Laser types)
z Microelectronics (EUV)
1m
z Life science
- Biophotonics
- Biocompatible
Materials
z Atomic and molecular
150 nm
20 cm
TECHNISCHE
HOCHSCHULE
AACHEN
Vertical Structure: Car body welding with a high power DPSSL
High-power
diode-laser chips and
packaging Lifetime
Welding
process and
materials
science
Systems design:
high efficiency and
beam quality
Dr.Ing. H.c. F.Porsche AG
TECHNISCHE
HOCHSCHULE
AACHEN
Organisation of Fraunhofer-ILT and of LLT RWTH Aachen University

LLT
Dr. E. W. Kreutz
Dr. J. Gottmann
IT-Management
Dr. B. Weikl
Prof. Dr. R. Poprawe

Vice Director
Administration
Marketing and
Communication
A. Bauer
Beam Sources
ILT
Dr. P. Loosen
B. Grossmann
Quality Management
Dr. A. Drenker
M. Talkenberg
Laser Applications
Integrated Optics
Laser Components
Dr. K. Boucke
Joining and Cutting

Dr. D. Petring
Beam Sources
Solid State/Diode Lasers

D. Hoffmann
Surface Technology
Dr. K. Wissenbach
Surface Technology
Metrology and
Surface Analysis
Metrology
Dr. R. Noll
CLT Plymouth
Dr. S. Heinemann
Micro Technology
Dr. A. Gillner
Micro Structuring
Thin Film Technology
Plasma and X-Ray
Plasma Technology
Dr. W. Neff
CLFA Paris
Dr. W. Knapp
System Integration
Dr. S. Kaierle
System Integration
Modelling and Simulation
Dr. W. Schulz
TECHNISCHE
HOCHSCHULE
AACHEN
Planned Experiments at
JLAB FEL
TECHNISCHE
HOCHSCHULE
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Motivation
Industry needs e.g. drillings and microstructures

more reproducible
faster production
Solution
higher quality (e.g. melt-free)
new laser system
high-power
high repetition rate
ultra-short pulse duration
Development
of an
applicationadapted laser
system
Use a FEL
Variation of
Challenge
plasma formation
interaction of laser radiation with plasma
9 repetition rate
9 wave length
9 pulse duration
TECHNISCHE
HOCHSCHULE
AACHEN
Related Results & planned Experiments

PLD
TECHNISCHE
HOCHSCHULE
AACHEN

Claudia Hartmann
TECHNISCHE
HOCHSCHULE
AACHEN
Micro-ablation with laser radiation
10
state of the art

micro-ablation with femtosecond microsecond pulses
aim
expansion of process limits during microablation of metal (1064 nm)
y materials: metals and ceramics

y 2.5 dimensional structures
y 355 nm - 1064 nm (depending on
material)
y less melt on the surface

y high ablation rates
use of tailored pulse trains
interdepartmental cooperation of core
competence teams of ILT/LLT
Used Laser for Project at ILT/LLT

y
y
y
y
y process know-how
y laser techniques
y system technology
y modelling and simulation
pulse duration 15 ns to 50 ns
burst energy 2 mJ
pulses per burst 4
pulse distance 0,1 s to 3 s
a)
b)
c)
Ablated structures in:

a) Al2O3
b) sapphire
c) steel
TECHNISCHE
HOCHSCHULE
AACHEN
Process know-how / laser techniques
11
variation of parameters
y burst and pulse energy
y number of pulses per burst
y pulse duration
y pulse distance
y repetition rate
purpose
y high ablation rate
y high ablation quality
(melt reduction,
small Ra, ...)
ideal ablation parameters
Parameter:
l = 10 Hz
EB = 2 mJ
l = 14 ns to 50 ns
t = 0,1 s to 2s
TECHNISCHE
HOCHSCHULE
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Process analysis by high speed photography

t del =250ns
t del =5s
12
t del =15s
single pulse
E = 2 mJ
Pulse bursts:
1 mm
double pulse
EB = 2 x 1 mJ
t = 2 s
triple pulse
EB = 3 x 0,66 mJ
t 1 = t 2 = 2 s
Results
y Plasma of pulse bursts strips of the surface
y Magnification factor of the plasma volume:
10 for double pulse, 15 for triple pulse
y Plasma emission of pulse bursts have larger
emission times
TECHNISCHE
HOCHSCHULE
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High-speed Microstructuring of Copper, Aluminum and Steel

Average Power at the Sample Surface, Pt
Maximum Average Pulse Peak Intensity, IP
M2 - Value (focused beam)
Repetition Rate, f
Wavelength at Workpiece
Pulse Duration, p
Oscillator
13
26 W
2
92 MW/cm
1.6
4.1 MHz
532 nm
13 ps
Amplifier
Frequency
Conversion
Beam
Dump
Focusing Optics
and Scanners
Sample
TECHNISCHE
HOCHSCHULE
AACHEN
Results
14
Top view
Top view
Cross-section view
Copper
Steel
Aluminium
TECHNISCHE
HOCHSCHULE
AACHEN
Ablation Experiments at FEL

A:
15
ablation experiments in steel 1.4301 (=304) and C70
A1: single pulse ablation

y different pulse delays (=rep. Rate.)
y variation of:
- pulse energy
- pulse overlap
- wavelength
A2: ablation with pulse bursts
y different delays:
y variation of:
pulse delay during one burst

burst delay
- number of pulses per burst (1,2,5, )
- burst energy
- pulse overlap
- wavelength
High-speed-photography of plasma dynamics

metallography, SEM and optical microscopy
TECHNISCHE
HOCHSCHULE
AACHEN

Lena Trippe
TECHNISCHE
HOCHSCHULE
AACHEN
Drilling at LLT / ILT with laser radiation
17
state of the art: single pulse and

trepan drilling with s-laser-radiation
aim: expansion of process limits during

percussion drilling (high speed drilling)
y stainless steel, nickel-based

superalloy
y cylindrical hole geometry
y resolidified melt layers 15m
y aspect ratio 20 : 1
y time / hole < 20s (trepan drilling)
y metals and ceramics

y material thickness 5mm
y aspect ratio > 100 : 1
y time / hole h 1s
Nd:YAG Slab Laser

pulse duration: 100-500s
max. pulse power: 2kW
focal diameter: 40m
M < 2
y process know-how
ylaser techniques
y system technology
y modelling and
simulation
=60, 200m
4mm
process
monitoring
process
control
60m
understanding
of processes
modelling,
analysis
1mm
interdepartmental
cooperation of core
competence teams:
process limits
simulation,
numerical
approximation
process diagnostic
single pulse drilling

(X5CrNi18-10)
trepan drilling
(CMSX-4)
TECHNISCHE
HOCHSCHULE
AACHEN
Adaptation of processing parameters
< 500nm
< 3mJ
< 1.5mm
quality
y complete
removal
of material
y geometry
18
ablation depth/pulse < 1-5mm

pulse energy
< 0.1-50J
material thickness < 10mm
vapourisation
helical
drilling
melting
percussion
drilling
y ...
100ns
10s
productivity
y ablation rate
y ...
pulse
duration
TECHNISCHE
HOCHSCHULE
AACHEN
Process know-how / laser techniques

variation of parameters:
y pulse energy
y pulse duration
y temporal pulse shape
y focal position
y repetition rate
y ...
purposes:
y reduction of recast layers and
closures
y cylindrical geometry of hole
=> parameters for percussion
drilling
19
development of hole geometry

during one pulse
single pulse drilling

Nd:YAG-Slablaser
pulse energy: 180mJ
pulse duration: 200s
material: X5CrNi18-10
cross-section of single pulse drillings
TECHNISCHE
HOCHSCHULE
AACHEN
Process analysis by high speed photography

plasma
(spikes) hole diameter
20
single pulse 500s, 500mJ, dt=20s

0,6
intensity [a.u.]
0,5
0,4
0,3
0,2
0,1
0,0
-200
200
400
600
800
time [s]
200m
pulse shape
melt / closure at
the hole entrance
decreasing intensity of
laser radiation
TECHNISCHE
HOCHSCHULE
AACHEN
Modeling and simulation
21
9
8
7
intensity [a.u.]
time scales of physical processes:

y beginning of melting
and vapourisation
y time until meltflow
becomes stationary
6
5
4
3
2
1
0
-1
-30
30
60
90
120
150
180
210
240
150
180
210
240
time [s]
900
experiment
simulation
800
700
hole depth [m]
geometrical scales:
y hole depth
y depth where
resolidification occurs
y hole diameter
600
500
400
300
200
100
0
-30
30
60
90
120
time [s]
TECHNISCHE
HOCHSCHULE
AACHEN
Drilling experiments at FEL
Analysis of physical processes

y absorption of laser radiation (vapour,
plasma) at different wavelengths
y plasma formation and absorption of laser
radiation at different pulse numbers and
delays
y development of hole geometry
depending on pulse numbers
22
laser
radiation
vapour
plasma
absorption
melt
find timescales and geometrical scales in

comparison to drilling with s-pulses
material
TECHNISCHE
HOCHSCHULE
AACHEN
Drilling experiments at FEL
23
B: drilling experiments (metals (X5CrNi18 10, CMSX-4, Al, Cu),

ceramics (Si3N4, AlN))
B1: single burst drilling
y variation of:
B2: multi-burst drilling

y variation of:
- number of pulses (1,2,5,10,20,50,100)

- different pulse delays
- pulse energy
- wavelength
- number of burst (1,2,5,10,20,50,100)
- number of pulses/burst (1,2,5,10)
- different pulse and/or burst delays
- pulse energy
- wavelength
High-speed-photography of plasma dynamics

metallography, SEM and optical microscopy
TECHNISCHE
HOCHSCHULE
AACHEN
Pulsed Laser Deposition

Leonid Moiseev
TECHNISCHE
HOCHSCHULE
AACHEN
25
Anti reflective coating (ZrO2, Al2O3) on

arrays of cylindrical lenses of PMMA
Ferroelectric thin films (BaTiO3, PZT)
BaTiO3
Pt
Si
Q-switch waveguide laser by PLD

and microstructuring
electro-optic
Q-switch
Er:BaTiO3
cladding
laser medium
Er:BaTiO3
BaTiO3 thin films on Si/Pt
substrate
TECHNISCHE
HOCHSCHULE
AACHEN
26
Laser radiation
plasma/
vapour
substrate
target
processing gas
Plasma expansion during PLD

TECHNISCHE
HOCHSCHULE
AACHEN
Spectroscopy on laser-induced plasmas
27
TECHNISCHE
HOCHSCHULE
AACHEN
Time-resolved plasma emission spectroscopy

High speed photography with imaging spectrometer
Al lines at 395 nm during ablation of Al2O3 in O2
28
High speed photography after Abel inversion

material: Al2O3, gas: O2
0.5
1
2
5
td/s=
p=
100 Pa
20 Pa
10 Pa
Relative intensity IA, /Im [a.u.]

:
1 nm
2 Pa
d=5 mm
Distance
TECHNISCHE
HOCHSCHULE
AACHEN
Heat conduction in the target and absorption by the plasma
29
Partitioning of optical energy P [%]
100
BaTiO3
80
60
Heat conduction in target
absorption by plasma
40
20
0
2
2
Fluence L [J/cm ]
4
TECHNISCHE
HOCHSCHULE
AACHEN
Kinetic energy of the particles

Comparison with plume dynamics by iCCD:
elastic collisions
mi
Ekin i = c1
pr 3 , [1]
1 + c2
LT
inelastic collisions (macroscopic)
mi
Ekin i = c1
2
pr 3
1 + c2
LT
material
Al2O3
ZrO2
BaTiO3
elastic
c1 [eV/u]
2,3 0,4
1,2 0,2
0,9 0,2
inelastic c2 /MPg
c1 [eV/u]
4,1 0,8 6,0 0,5
1,7 0,3 5,0 0,5
1,5 0,3 2,5 0,3
[1] Gottmann et. al.: (E-MRS 1997)

Surf. Coat. Technol. 100-101, (1998) p. 415
10
Collision kinetic models c2=16 x 10 K/m

elastic, v0=15 km/s
inelastic, v0=18 km/s
20
Mean velocity <v> [km/s]
Model:
30
2 Pa
7 Pa
10 Pa
20 Pa
100 Pa
15
10
ZrO2
O2, m=32
L=3 J/cm
T=20 C
2
3
Distance from target R [cm]
TECHNISCHE
HOCHSCHULE
AACHEN
Ellipsometry: Refractive index of ZrO2 films
31
0.10
2.2
0.08
Zone 1
2.0
Zone 2
Zone 3
0.06
k
1.8
d S =3,5cm; L=3,5J/cm
d S =2,7cm; L=3,5J/cm
1.6
d S =2,7cm; L=5,0J/cm
0.04
0.02
1.4
1.2
5
TS=20 C
L=3.5 J/cm2
10
30
Calculated kinetic energy <E kin> Zr [eV]
Absorption index k (=633 nm)
Refractive index n (=633 nm)
2.4
0.00
100
The bulk values n=2.2 and k=0
are achieved at <Ekin>=20 - 50 eV
TECHNISCHE
HOCHSCHULE
AACHEN
Deposition Experiments at FEL

C:
32
deposition experiments of oxides and fluorides
C1: ablation for plasma diagnostics

y optical emission and absorption spectroscopy
y variation of:
- different pulse delays

- pulse energy
- wavelength
C2: pulsed laser deposition with pulse bursts

y measurement of deposition rate, optical and structural film
properties and correlation with plasma parameters
y variation of:
- number of pulses per burst

- burst energy
- wavelength
TECHNISCHE
HOCHSCHULE
AACHEN
Aim of all planned Experiments & Conclusion
33
Analysis of physical processes ablation

y process efficiency: absorption of laser radiation in vapour/ plasma
at different wavelengths and pulse energies,
y kinetic energy of particles: plasma expansion and absorption of
laser radiation using different pulse numbers, delays and energy
y correlation of the physical processes with the resulting
deposition/ablation rate and film properties
y modelling of the processes using the FEL-parameters
Find out parameters for

the deposition of high quality films at high deposition rates (>1 m/s/cm2)
the ablation/drilling with tailored pulse trains to precondition the surrounding
getting melt-free structures
TECHNISCHE
HOCHSCHULE
AACHEN
Aachen and ILT
34
Carl der Grosse
Rathaus
Dom
ILT&LLT
Marktplatz
TECHNISCHE
HOCHSCHULE
AACHEN
Adaptation of processing parameters
35
ms-pulses:
fs-pulses:

y lower quality
y lower ablation rate

y high quality
tpt-project:
y high quality
TECHNISCHE
HOCHSCHULE
AACHEN
Modeling and simulation
36
Model for ablation process:

y Following pulses again
interact with the surface
y VPB >> VSP, mPB >> mSP
y drSP/dt < 0, drPB/dt > 0
y single pulse: spheric
discoid
y pulse burst: discoid
spheric
consequence of the
precondition due to the previous
pulses
TECHNISCHE
HOCHSCHULE
AACHEN

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Laser Applications R&D at Fraunhofer

Institute for Laser Technology

Fraunhofer Institut fr Lasertechnik &

The Fraunhofer Institute for Laser Technology

Tailored Optical Energy

Vertical Structure: Car body welding with a high power DPSSL

Organisation of Fraunhofer-ILT and of LLT RWTH Aachen University

Prof. Dr. R. Poprawe

Joining and Cutting

Solid State/Diode Lasers

Plasma and X-Ray

Modelling and Simulation

Industry needs e.g. drillings and microstructures

higher quality (e.g. melt-free)

new laser system

Related Results & planned Experiments

Micro-ablation with tailored pulse trains

Micro-ablation with tailored pulse trains

Micro-ablation with laser radiation

state of the art

y materials: metals and ceramics

y less melt on the surface

Used Laser for Project at ILT/LLT

Ablated structures in:

Process know-how / laser techniques

Process analysis by high speed photography

High-speed Microstructuring of Copper, Aluminum and Steel

Ablation Experiments at FEL

ablation experiments in steel 1.4301 (=304) and C70

A1: single pulse ablation

pulse delay during one burst

High-speed-photography of plasma dynamics

Drilling with s-laser radiation

Drilling at LLT / ILT with laser radiation

state of the art: single pulse and

aim: expansion of process limits during

y stainless steel, nickel-based

y metals and ceramics

Nd:YAG Slab Laser

single pulse drilling

Adaptation of processing parameters

ablation depth/pulse < 1-5mm

Process know-how / laser techniques

development of hole geometry

single pulse drilling

Process analysis by high speed photography

single pulse 500s, 500mJ, dt=20s

Modeling and simulation

time scales of physical processes:

hole depth [m]

Drilling experiments at FEL

Analysis of physical processes

find timescales and geometrical scales in

Drilling experiments at FEL

B: drilling experiments (metals (X5CrNi18 10, CMSX-4, Al, Cu),

B2: multi-burst drilling

- number of pulses (1,2,5,10,20,50,100)

High-speed-photography of plasma dynamics

Pulsed Laser Deposition

Pulsed Laser Deposition

Anti reflective coating (ZrO2, Al2O3) on

Ferroelectric thin films (BaTiO3, PZT)

Q-switch waveguide laser by PLD

BaTiO3 thin films on Si/Pt